JPH0697240B2 - Surface resistance distribution measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to a surface resistance distribution measuring device. For more information,
The present invention relates to a surface resistance distribution measuring device for a conductive base material having a conductive coating on the surface of a substrate.

(Prior Art) A conductive substrate having a conductive film on the surface thereof, for example, a polymer substrate such as a polyethylene terephthalate film, is provided on one or both sides thereof with a metal and / or a metal oxide by a vapor deposition method or a sputtering method. The conductive film obtained by laminating objects has been widely used in various fields such as transparent electrodes for various displays, touch panels, heat ray reflection films, and electromagnetic wave shielding plates.

Above all, the touch panel is used as a new input device that can be instructed by simply touching the surface of the display with a finger or a pen in a bank ATM or office automation device.

For the conductive film used for the touch panel, the surface properties of the film such as transparency (transmittance) and surface resistance (conductivity) are important.

Particularly in the analog touch panel, the surface resistance is uniform over the entire surface of the conductive film, that is, the uniformity of the surface resistance distribution is one of the important evaluation items.

The measurement of the surface resistance distribution has been performed manually by using a device as shown in FIG. 4, for example.

A constant voltage is applied to both ends of the conductive base material 6 having a conductive film by using a DC constant voltage power source 8 so that the paste 7 ′ serves as an anode and the paste 7 serves as a cathode. Next, between the points A and B of the conductive base material 6, the energizing terminals 4 are brought into contact with each other at regular intervals, for example, at intervals of 10 mm, and the voltage at each point is measured. Further, the same operation as above is performed from point C, which is, for example, 20 mm below point A, to point D. By repeating this operation, the voltage at the point of contact over the entire surface of the conductive substrate 6 is measured.

From point A to point B, or from point C to point D,
If the surface resistance is uniform, the measured voltage value increases linearly. However, if it is not uniform, the voltage deviates from the straight line calculated from the theoretical value.

Conventionally, the measured voltage at each point was graphed, and the uniformity of the surface resistance distribution was evaluated by the deviation from the straight line calculated from the above theoretical value.

(Problems to be Solved by the Invention) When performing the above-mentioned measurement, in order to obtain an accurate and highly accurate result, the measurer touches the energizing terminal to a predetermined point accurately and at a constant pressure. It was necessary to have a high level of skill. Furthermore, the measurement points differ depending on the area of the conductive base material, but in the case of the commonly used size A4 size: 210 mm × 297 mm, it is necessary to measure a large number of about 300 points. There was a problem that it took a long time.

[Structure of Invention]

(Means for Solving Problems) The present inventors have earnestly studied a surface resistance distribution measuring device for a conductive film which overcomes the above problems and can perform highly accurate and efficient measurement, and as a result, a constant voltage or a constant voltage. A current source, an XY-axis driving device, a current-carrying terminal fixed to a pen fixing jig of the XY-axis driving device, and means for measuring the surface resistance of the conductive film based on the output from the current-carrying terminal. It was found that the above-mentioned problems can be solved by a surface resistance distribution measuring device having
The present invention has been completed based on this finding.

Next, an embodiment of the present invention will be specifically illustrated and described in detail with reference to the drawings.

FIG. 1 is an example of the device of the present invention, and FIG. 2 is an enlarged view of the energizing terminal 4 of FIG. Further, FIG. 3 is an example of the measurement result measured by the apparatus of FIG.

In FIG. 1, 1 is a recording panel provided on the upper surface of the XY plotter, 2 is a pen drive frame, 3 is a pen carriage, 4 is a power supply terminal, and 5 is an operation control device of the XY plotter. Further, 8 is a constant voltage power source, 9 is an A / D converter, 10 is an arithmetic processing unit, and 10 'is a display unit.

The conductive base material 6 having a conductive coating on the surface of the substrate is fixed on the recording panel 1 so that the conductive coating faces upward.
At this time, one side of the conductive substrate is fixed so as to be parallel to the X-axis direction of the recording panel 1.

Pastes 7 and 7'having good conductivity for connecting lead wires for applying a constant voltage to the two opposite sides of the conductive substrate 6.
Is applied over the entire length of the two opposite sides with a width of 3-5 mm. As the paste 7,7 ′, for example, gold paste,
Silver paste or the like is used. To the pastes 7 and 7 ', a DC voltage normally output from a DC constant voltage power source 8 is connected and applied so that, for example, 7 serves as a cathode and 7 serves as an anode.
An AC constant voltage power supply or an AC or DC constant current power supply may be used instead of the DC constant voltage power supply.

The XY axis drive device is a device in which a pen fixing jig provided on a panel moves in an arbitrary direction of the X axis and the Y axis, and the pen fixing jig has an up-down function. Usually controlled by information from the computer.

Examples of the XY axis drive device include the known XY plotter used in FIG. In the present invention, X-
When using a Y plotter, a flatbed type plotter in which the conductive substrate is fixed on the panel and the pen moves in the XY direction is preferable. Further, the pen fixing jig of the XY axis drive device of the present invention corresponds to a pen carriage of an XY propeller.

The greatest feature of the present invention is that the pen fixing jig is provided with a conductive terminal having conductivity. The energizing terminal 4 is
As shown in FIG. 2, a contactor is attached to the tip of the main body 41 of the energizing terminal.
42 is provided. As the material of the main body 41 of the current-carrying terminal, an insulating material such as an insulating synthetic resin is used, and the contact 42
As the material of, a conductive rubber, a conductive resin, and a metal such as gold, silver, copper, or aluminum having good conductivity are used. The contact 42 is, as shown in FIGS. 2 (a) to (c),
It is fixed to the main body 41 as a plate (a), a column, a hemisphere (b), or a rotatable shape (c) such as a roller or a ball. The conductive rubber is preferable because it has appropriate hardness and flexibility. As the conductive rubber, for example, silicon rubber, carbon black, graphite, silver,
A mixture of particles such as nickel is used. When the contact 42 is in the form of a roller or a ball, it may be conductive rubber or metal.

If the contactor 42 is too large, the contact area with the conductive base material becomes large and the number of measurement points decreases, so that the obtained distribution becomes macroscopic. That is, the accuracy of the surface resistance distribution decreases. Normal,
The area in which the contact 42 contacts the conductive film is 0.01 to ¹ mm ² ,
The size is preferably 0.05 to 0.5 mm ² .

The contact 42 makes contact with the conductive base material 6 from the cathode to the anode intermittently when the contact is fixed and intermittently or continuously when the contact is rotatable. Moving. Then, if it reaches the anode,
It is controlled to change the 30 mm line and perform the same operation again from the cathode side. It is preferable that the interval at which the contactor 42 and the conductive film are repeatedly brought into contact with each other is small because the accuracy is improved. That is, the method of continuously contacting the rotatably provided contacts 42 is most preferable. The minimum interval for intermittent contact is limited by the size of the contactor 42 and the performance of the XY axis drive device, and the interval of normal contact is selected from the range of 1 to 10 mm. These operations are performed by the operation controller 5 of the XY plotter in FIG.

The surface resistance of the conductive film can be determined by the magnitude of the voltage signal applied between the cathode of the paste 7, that is, the constant voltage power source 8 and the energizing terminal 4. The voltage signal is input to and processed by a processing device such as display, recording and / or calculation. For example
The output can be obtained in a desired form by displaying or recording on a CRT display, a recorder or the like, or by arithmetic processing using a personal computer.

In the case of arithmetic processing, the analog signal voltage in FIG. 1 is converted into a digital signal by the A / D converter 9.

The digital signal is arithmetically processed by the groove calculation processing device 10 together with the operation data of the energizing terminal 4 which is separately input from the control device 5 of the XY plotter. The calculation result is displayed on the display device.
Displayed and / or recorded at 10 '. If the operation control device 5 of the XY plotter has a large capacity (capacity), the device can be used to process the output signal of the A / D converter 9. That is, both the operation control device 5 of the XY plotter and the arithmetic processing device 10 can be carried out by using one personal computer.

FIG. 3 shows an example of the results of measuring the surface resistance distribution with the apparatus of FIGS. 1 and 2 (a) using a flat plate of 1 mm × 1 mm conductive rubber for the contact 42. In FIG. 3, 12 represents a conductive base material to be measured, and a straight line 13 between EF is a standard line obtained from theoretical values. Further, the curve 14 between EF is a measurement line in which the voltage signal obtained by the contact of the contactor is calculated and expressed as a deviation from the standard line. The lines obtained by repeatedly measuring this in the Y-axis direction and performing arithmetic processing represent GH, I-J, KL, MN, and O, respectively.
It is a curve between -P. When the measurement line 14 is above the standard line 13, the resistance is larger than the theoretical value, and below the measurement line 14, it is small. If the measurement line 14 is parallel to the standard line 13, the surface resistance distribution is uniform in the X-axis direction, and the distribution in the Y-axis direction is Y
The uniformity of the distribution can be known by comparing the deviations of the measurement lines on the line parallel to the axis. That is, in the case of an ideal conductive base material, the standard line 13 and the measurement line 14 coincide with each other.

In the case of FIG. 3, each measurement line is located above the standard line and represents that the surface resistance is high over the entire surface. X
The surface resistance in the axial direction fluctuates a little between EF-GH-IJ, especially in the central area. On the other hand, KL, MN, OP
The fluctuation is small in the interval, and in particular, the resistance between OPs is high but almost uniform. That is, it can be seen that the surface resistance is generally high and the distribution tends to be particularly high above the central portion, and the other portions are almost uniform.

〔The invention's effect〕

According to the surface resistance distribution measuring device of the present invention, the measurer can automatically measure by simply fixing the conductive base material to the recording panel, so that even an amateur can obtain a result with little error in a short time and reduce labor. .

Further, by digitally converting the output from the energizing terminal and performing arithmetic processing, it is possible to obtain a large amount of information such as a deviation value, an average value, and a distribution chart in the Y-axis direction.

As described above, according to the present invention, it is possible to perform a measurement that requires a high degree of skill and requires a long time in the past with high accuracy and efficiency in a short time, and the effect is extremely large.

[Brief description of drawings]

FIG. 1 is a plan view of an embodiment of the present invention, and FIGS. 2 (a), (b) and (c) are enlarged views each illustrating a current-carrying terminal. FIG. 3 is an example of a measurement line obtained as a result of measurement using the apparatus of FIG. Further, FIG. 4 shows an example of an apparatus which has been conventionally implemented. 1 ... Recording panel, 2 ... Pen drive frame, 3 ... Pen carrier, 4 ... Energizing terminal, 41 ... Energizing terminal body, 42 ...
... Contactor, 5 ... XY plotter operation control device, 6
…… Conductive substrate, 7,7 ′ …… Paste, 8 …… Constant voltage power supply, 9 …… A / D converter, 10 …… Arithmetic processing unit, 1
0 '... Display device, 11 ... Voltmeter, 12 ... Conductive substrate (outline), 13 ... Standard line, 14 ... Measuring line.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shiro Nakamura 1 2447 Fujita, Hachimansai-ku, Kitakyushu, Fukuoka Prefecture Mitsubishi Kasei Kogyo Co., Ltd. Kurosaki Plant (56) Reference JP-A-52-14464 (JP, A) Japanese Unexamined Patent Publication No. 57-154069 (JP, A) Actually developed 62-44271 (JP, U)

Claims (4)

[Claims] 1. A constant voltage or constant current power source, an XY axis drive unit, an energization terminal fixed to a pen fixing jig of the XY axis drive unit, and an electric conduction based on an output from the energization terminal. And a means for measuring the surface resistance of the conductive film. 2. The surface resistance distribution measuring device according to claim 1, wherein the XY axis driving device is an XY plotter. 3. The surface resistance distribution measuring device according to claim 1, wherein the material of the energizing terminal is a conductive rubber. 4. A means for measuring the surface resistance of a conductive film,
The surface resistance distribution measuring device according to claim 1, which is a combination of an A / D converter, an arithmetic processing device, and a display device.