JPH069503Y2 - 半導体素子製造装置 - Google Patents

半導体素子製造装置

Info

Publication number
JPH069503Y2
JPH069503Y2 JP1987049289U JP4928987U JPH069503Y2 JP H069503 Y2 JPH069503 Y2 JP H069503Y2 JP 1987049289 U JP1987049289 U JP 1987049289U JP 4928987 U JP4928987 U JP 4928987U JP H069503 Y2 JPH069503 Y2 JP H069503Y2
Authority
JP
Japan
Prior art keywords
gas
temperature
furnace core
core tube
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987049289U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63155630U (enExample
Inventor
悟 奥山
Original Assignee
山形日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 山形日本電気株式会社 filed Critical 山形日本電気株式会社
Priority to JP1987049289U priority Critical patent/JPH069503Y2/ja
Publication of JPS63155630U publication Critical patent/JPS63155630U/ja
Application granted granted Critical
Publication of JPH069503Y2 publication Critical patent/JPH069503Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Regulation And Control Of Combustion (AREA)
JP1987049289U 1987-03-31 1987-03-31 半導体素子製造装置 Expired - Lifetime JPH069503Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987049289U JPH069503Y2 (ja) 1987-03-31 1987-03-31 半導体素子製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987049289U JPH069503Y2 (ja) 1987-03-31 1987-03-31 半導体素子製造装置

Publications (2)

Publication Number Publication Date
JPS63155630U JPS63155630U (enExample) 1988-10-12
JPH069503Y2 true JPH069503Y2 (ja) 1994-03-09

Family

ID=30871598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987049289U Expired - Lifetime JPH069503Y2 (ja) 1987-03-31 1987-03-31 半導体素子製造装置

Country Status (1)

Country Link
JP (1) JPH069503Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58116737A (ja) * 1981-12-30 1983-07-12 Oki Electric Ind Co Ltd 半導体ウエハの熱処理装置

Also Published As

Publication number Publication date
JPS63155630U (enExample) 1988-10-12

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