JPH0691430A - Electric discharge machine and electric discharge machining method - Google Patents

Abstract

PURPOSE:To relax the one sided distribution of monocrystal powder of Si in working fluid, and thereby lessen dimensional errors during machining a work by disposing an exciter in working fluid to vibrate the working fluid so as to stir it. CONSTITUTION:A work 4 is rested on working fluid 2, and concurrently machining the work 4 is started with electric discharge machining carried out between the work 4 and an electrode 8 within the working fluid 2 in a state that monocrystal powder 3 of Si is floated. In this case, an exciter 5 is provided in the working fluid 2 to stir the working fluid 2 with vibration applied. This constitution thereby allows monocrystal powder 3 of Si to be stirred within the working fluid 2 with the vibration of the exciter 5 transmitted to the working fluid 2, the one sided concentration is thereby relaxed between the work 4 and the electrode 8 and the like so as to be uniformed and machining speed on the work 4 is then uniformed so that dimensional errors in machining sections can thereby be downsized.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric discharge machine and an electric discharge machining method for machining a workpiece by causing an electric discharge phenomenon between a workpiece and an electrode in a machining fluid.

[0002]

2. Description of the Related Art Conventionally, in this type of electric discharge machine, a work is immersed in a machining liquid filled in a machining tank, and an electrode, for example, an upper and lower electrode is provided in a head portion of the electric discharge machine located above the work. The electrode is supported so as to be movable in the left-right direction and rotatable, and the electrode can be moved toward and away from the work. Then, in a state where the electrode is brought close to the work in the working liquid, an electric discharge phenomenon is caused between the work and the electrode to process the work into an appropriate shape. Such an electric discharge machining method requires a long time for machining a workpiece, and as a means for improving this, a state in which a single crystal powder of Si (silicon) (particle size: about 10 μ) is suspended in a machining liquid. There is known a method of performing electric discharge machining in. According to this method, there is an advantage that the machining speed of the work is improved and the efficiency is improved, and the surface roughness is improved.

[0003]

However, when such a method is used, the density of the Si single crystal powder in the working liquid may vary depending on the region. In this case, if there is a difference in the density of the Si single crystal powder in the machining fluid in the area of the machining gap between the workpiece and the electrode during electric discharge machining, the machining speed in the dense area will be Since the machining speed is higher than the machining speed in the rough area, there is a problem that a dimensional error occurs in the machined work. In the case of the above-mentioned electric discharge machining that does not use Si single crystal powder, the machining clearance between the work and the electrode during machining is usually about 0.06 mm to 0.3 mm.
When the single crystal powder of is suspended in the processing liquid,
It will be expanded to about 0.5 mm or more. At this time, S
If there is variation in the density of i, the above dimensional error causes
The variation in the processing clearance also becomes large, and this clearance cannot be controlled.

In view of such circumstances, the present invention provides an electric discharge machine capable of performing uniform machining with a small dimensional error of a workpiece even if the machining liquid contains a single crystal powder of Si. An object of the present invention is to provide an electric discharge machining method.

[0005]

According to the electric discharge machine of the present invention, a workpiece is placed in a machining fluid and a single crystal powder of Si is suspended between the workpiece and the electrode in the machining fluid. In an electric discharge machine in which electric discharge machining is performed on a workpiece to machine a workpiece, a vibrating machine for agitating the machining fluid by vibration is arranged in the machining fluid. Is.

In the electric discharge machining method according to the present invention, the electric discharge machining is performed between the work and the electrode in the machining liquid while the work is arranged in the machining liquid and the Si single crystal powder is suspended. In the electric discharge machining method in which a workpiece is machined by using the electric discharge machine, the electric discharge machining is performed while stirring the machining fluid by vibration.

Further, the present invention is characterized in that the workpiece is installed on the upper surface of the vibration oscillating machine, and the vibration oscillating machine vibrates the workpiece to stir the machining liquid.

[0008]

[Function] During electric discharge machining, when electric discharge machining is caused between the workpiece and the electrode while vibrating the vibration exciter, the vibration of the vibration exciter is transmitted to the machining fluid and the Si single crystal powder is submerged in the fluid. As it is agitated, the unevenness of the powder concentration between the work and the electrode is alleviated and made uniform, the work speed of the work is made uniform, and the dimensional error of the processed part can be reduced. .

When the exciter vibrates the workpiece, the machining fluid vibrates through the workpiece, and the unevenness of the concentration of Si single crystal powder is relaxed in the region of the machining gap between the workpiece and the electrode. And stirred so that it is evenly distributed.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a configuration diagram of essential parts of an electric discharge machine according to the present embodiment, and FIG. 2 is a partially cutaway perspective view showing an arrangement configuration of members in a machining tank. In FIG. 1, a machining bath 1 of an electric discharge machine is filled with a machining liquid 2, and a single crystal powder 3 of Si is introduced into the machining liquid 2 and floats therein. Also, this processing liquid 2
A work 4 is arranged therein, and the work 4 is placed on a vibrator 5 which is also arranged in the processing tank 1.
The vibrator 5 has, for example, an amplitude of ± 0.01 mm and a frequency of:
In 10KH _Z, during discharge machining is adapted to small vibration in the horizontal direction, the vibration and vibration is transmitted directly to the workpiece 4 a work 4, and is transmitted in the working fluid 2.

An electrode 8 is held above the work 4 by a head portion (not shown) of the electric discharge machine via a shank 7, and the electrode 8 can be moved vertically and horizontally by the head portion. It is rotatably supported.

The electric discharge machine according to this embodiment is constructed as described above. Next, the electric discharge machining method according to this embodiment will be described. While the Si single crystal powder 3 is floating in the working liquid of the working tank 1, the electrode 8 of the head part is lowered into the working liquid to keep a predetermined distance between the electrode 8 and the work 4. Perform electrical discharge machining. At this time, the exciter 5 is driven to be in a state of causing a slight vibration. Then, this vibration is transmitted to the work 4 located on the upper surface of the work 4, and the work 4 also vibrates minutely.
In particular, it is transmitted to the working fluid between the work 4 and the electrode 8 and the working fluid is agitated. As a result, the Si single crystal powder 3 in the vicinity of this region is agitated, the uneven distribution of the powder 3 is alleviated, and the concentration thereof is averaged.

Therefore, the speed of the electric discharge machining between the electrode 8 and the work 4 is averaged over the entire machining area, and the dimensional error of the machined surface of the workpiece can be suppressed to be small. As a result, it was difficult to control the machining gap between the work 4 and the electrode 8 in the electric discharge machining in the machining liquid in which the Si single crystal powder was simply suspended according to the above-described conventional method. Then, the variation of processing clearance is 0.5m
It can be suppressed within m ± 0.02 mm.

As described above, in this embodiment, the uneven distribution of the Si single crystal powder in the working liquid can be alleviated and averaged, and the dimensional error of the workpiece can be suppressed to improve the working accuracy. it can.

Although not shown in the above embodiment,
A moving table that can move the work 4 in the left-right direction may be disposed below or above the vibrator 5. The installation position of the vibration exciter 5 is not necessarily limited to the embodiment.
For example, it may be connected to the side of the work 4. at least,
It suffices if the working liquid in the region between the electrode 8 and the work 4 can be stirred.

[0016]

As described above, in the electric discharge machine and the electric discharge method according to the present invention, the machining liquid is vibrated by the vibration generator, so that the uneven distribution of the Si single crystal powder in the machining liquid is caused. Has a practically important advantage in that the dimensional error during machining of the workpiece can be reduced.

[Brief description of drawings]

FIG. 1 is a configuration diagram of essential parts of an electric discharge machine according to an embodiment of the present invention.

FIG. 2 is a partially cutaway perspective view showing an arrangement of members inside a machining tank of the electric discharge machine shown in FIG.

[Explanation of symbols]

 2 Processing liquid 3 Si single crystal powder 4 Work piece 5 Exciter 8 Electrode

Claims (3)

[Claims] 1. A workpiece is arranged in a machining liquid, a single crystal powder of Si is suspended, and electric discharge machining is performed between the workpiece and an electrode in the machining liquid to machine the workpiece. In the electric discharge machine, an electric discharge machine for arranging a vibration in the machining liquid to stir the machining liquid is provided. 2. A workpiece is placed in a machining liquid, a single crystal powder of Si is suspended, and electric discharge machining is caused between the workpiece and an electrode in the machining liquid to machine the workpiece. The electric discharge machining method is characterized in that the electric discharge machining is performed while stirring the machining liquid by vibration. 3. The work according to claim 1 or 2, wherein the work is installed on an upper surface of a vibrating machine, and the vibrating machine vibrates the work to stir the working fluid. Electric discharge machine or electric discharge method.