JP2004235366A - Apparatus, method, and system for ultrasonic washing - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently and securely perform ultrasonic washing of various objects to be washed even with a relatively small-sized vibrator. <P>SOLUTION: A washing tank 100 and a vibrator 101 are provided. The vibrator is installed on the side of the bottom surface of the washing tank 100 and vibrates washing liquid 150, and the vibrator 101 is moved on the bottom surface 110 of the washing tank 100. Further, a vibrator is provided above an object to be washed which is dipped in the washing liquid 150 and vibrates the washing liquid 150. Consequently, uneven washing is prevented from being generated between the upper part and lower part of the object to be washed. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an ultrasonic cleaning apparatus and an ultrasonic cleaning method for cleaning an object immersed in a cleaning liquid by vibrating a cleaning liquid injected into a cleaning tank.
[0002]
[Prior art]
In a conventional ultrasonic cleaning apparatus, a vibrator is fixed to the bottom of a cleaning tank, and the object to be cleaned is cleaned by vibration from the fixed vibrator. In addition, there is also a throw-in type vibrator, in which the vibrator is immersed in advance in the bottom surface of the cleaning tank, and then the object to be cleaned is immersed in cleaning.
[0003]
The details of the ultrasonic cleaning device are described in Patent Document 1, for example.
[Patent Document 1]
JP-A-11-221534
[0004]
[Problems to be solved by the invention]
However, in the above-mentioned conventional method, one of the major problems is that cleaning unevenness occurs. In particular, in the case of an object to be cleaned having a three-dimensionally complicated shape, the problem that cleaning unevenness occurs becomes more remarkable because it is not possible to completely clean even the details. Since the vibrator is usually smaller than the bottom surface of the cleaning tank, the vibrator is generally arranged at the center of the bottom surface. By doing so, the vibration may not be sufficiently transmitted to the end portion of the bottom surface, which is one of the causes of uneven cleaning.
[0005]
In order to avoid such unevenness in cleaning, if cleaning is performed by increasing the frequency of the vibrator in consideration of cleaning of the portion where vibration is not sufficiently transmitted, it may result in excessive cleaning, thereby causing damage and scratches on the cleaning target. Will occur. Therefore, there has been a fatal problem that the quality of the object to be cleaned is deteriorated due to breakage or damage, and the yield of products is reduced.
[0006]
In addition, a method of solving the above-described problem by arranging a large number of these small vibrators on the bottom surface of the cleaning tank has been performed. However, in this case, since the number of transducers increases, the manufacturing cost of the device itself increases.
[0007]
In addition, for example, when cleaning a silicon wafer or a large quartz glass substrate whose diameter is increasing to about 300 mmφ or more, until now, it is necessary to simply increase the number of installed oscillators or to reduce the size of the oscillator itself. It has been responding by increasing the size. However, in this case, too, it is easy to waste the apparatus cost and the power consumption energy cost, and the problem has not been solved in terms of not only the maintenance of the apparatus but also the production cost.
[0008]
The present invention has been made to solve the above problems (problems), and it is possible to efficiently and reliably perform ultrasonic cleaning of an object to be cleaned of various materials, types of shapes, and sizes. It is an object of the present invention to provide an ultrasonic cleaning device and an ultrasonic cleaning method.
[0009]
[Means for Solving the Problems]
In order to solve the above problem, an ultrasonic cleaning apparatus according to the first aspect of the present invention is provided with a cleaning tank and a first tank provided on a bottom side of the cleaning tank and configured to vibrate a cleaning liquid injected into the cleaning tank. And a second vibrator provided to be disposed above an object to be cleaned immersed in the cleaning liquid and vibrating the cleaning liquid.
[0010]
According to the first aspect of the present invention, it is possible to prevent uneven cleaning of the upper and lower parts of the object to be cleaned.
[0011]
An ultrasonic cleaning apparatus according to a second aspect of the present invention is the ultrasonic cleaning apparatus according to the first aspect, further comprising a lid member that covers an upper surface of the cleaning tank, wherein the second vibrator is provided with the lid member. It is characterized by being provided on the lower surface side integrally with the lid member.
[0012]
According to the second aspect of the present invention, the second vibrator can be easily arranged above the object to be cleaned.
[0013]
An ultrasonic cleaning apparatus according to a third aspect of the present invention is the ultrasonic cleaning apparatus according to the second aspect, wherein the lid member is opened and closed so as to open and close the lid member in response to taking in and out of the object to be cleaned. A control means is provided.
[0014]
According to the third aspect of the present invention, the object to be cleaned can be easily taken in and out.
[0015]
According to a fourth aspect of the present invention, in the ultrasonic cleaning apparatus according to any one of the first to third aspects, at least one of the first vibrator and the second vibrator is provided. It is characterized by comprising a movement control means for moving one.
[0016]
According to the fourth aspect of the present invention, it is possible to vibrate the cleaning liquid around each portion of the cleaning object without moving or rotating the cleaning object immersed in the cleaning liquid.
[0017]
According to a fifth aspect of the present invention, in the ultrasonic cleaning apparatus according to the fourth aspect, the movement control unit moves the first vibrator along a bottom surface of the cleaning tank or It is characterized by being moved along a plane substantially parallel to the bottom surface.
[0018]
According to the fifth aspect of the present invention, the first vibrator can move efficiently without contacting the object to be cleaned.
[0019]
According to a sixth aspect of the present invention, in the ultrasonic cleaning apparatus according to the fourth or fifth aspect, the movement control means may be configured to clean the second vibrator by injecting the second vibrator into the cleaning tank. Characterized by being moved along a liquid surface or along a plane substantially parallel to the liquid surface.
[0020]
According to this configuration, the second vibrator can move efficiently without contacting the object to be cleaned.
[0021]
According to a seventh aspect of the present invention, in the ultrasonic cleaning apparatus according to any one of the fourth to sixth aspects, the movement control means may include the first vibrator and the second vibrator. When the frequencies of the vibrators are the same or approximate, the first position is set so that the coordinate position on the plane on which the first vibrator moves and the coordinate position on the plane on which the second vibrator moves do not approximate. And at least one of the vibrator and the second vibrator is moved.
[0022]
According to the invention described in claim 7, it is possible to prevent the vibrations generated by the first and second vibrators from canceling each other.
[0023]
An ultrasonic cleaning apparatus according to an eighth aspect of the present invention includes a cleaning tank, a first vibrator provided on a bottom side of the cleaning tank, and vibrating a cleaning liquid injected into the cleaning tank. And a second vibrator provided on at least one side surface of the cleaning tank and vibrating the cleaning liquid.
[0024]
According to the eighth aspect of the invention, it is possible to prevent uneven cleaning on the side of the object to be cleaned.
[0025]
According to a ninth aspect of the present invention, in the ultrasonic cleaning apparatus according to the eighth aspect, a movement control unit that moves at least one of the first vibrator and the second vibrator. It is characterized by having.
[0026]
According to the ninth aspect of the present invention, the cleaning liquid around each part of the cleaning object can be vibrated without moving or rotating the cleaning object immersed in the cleaning liquid.
[0027]
Further, in the ultrasonic cleaning apparatus according to a tenth aspect of the present invention, in the invention according to the ninth aspect, the movement control unit moves the first vibrator along a bottom surface of the cleaning tank or It is characterized by being moved along a plane substantially parallel to the bottom surface.
[0028]
According to the tenth aspect, the first vibrator can move efficiently without contacting the object to be cleaned.
[0029]
In the ultrasonic cleaning apparatus according to the eleventh aspect, in the invention according to the ninth or tenth aspect, the movement control means may move the second vibrator along a side surface of the cleaning tank. Alternatively, it is moved along a plane substantially parallel to the side surface.
[0030]
According to the eleventh aspect, the second vibrator can move efficiently without contacting the object to be cleaned.
[0031]
Also, in the ultrasonic cleaning apparatus according to the twelfth aspect of the present invention, in the invention according to any one of the ninth to eleventh aspects, the movement control means may include the first vibrator and the second vibrator. When the frequencies of the vibrators are the same or similar, at least one of the second vibrators is moved so that the coordinate position on the surface on which the opposing second vibrator moves does not approximate. Features.
[0032]
According to the twelfth aspect, it is possible to prevent the vibrations generated by the opposing second vibrators from canceling each other.
[0033]
An ultrasonic cleaning apparatus according to a thirteenth aspect of the present invention includes a cleaning tank, a vibrator provided on a bottom side of the cleaning tank, and vibrating a cleaning liquid injected into the cleaning tank; And movement control means for moving.
[0034]
According to the thirteenth aspect, it is possible to vibrate the cleaning liquid around each portion of the cleaning target without moving or rotating the cleaning target immersed in the cleaning liquid.
[0035]
Further, in the ultrasonic cleaning apparatus according to the fourteenth aspect of the present invention, in the invention according to the thirteenth aspect, the movement control unit moves the vibrator along the bottom surface of the cleaning tank or with the bottom surface. It is characterized by being moved along a substantially parallel plane.
[0036]
According to this configuration, the vibrator can move efficiently without contacting the object to be cleaned.
[0037]
An ultrasonic cleaning apparatus according to a fifteenth aspect of the present invention is the ultrasonic cleaning apparatus according to any one of the first to fourteenth aspects, wherein the material of the cleaning tank is made of quartz glass.
[0038]
According to the fifteenth aspect of the present invention, it is possible to obtain a semiconductor cleaning bath suitable for strong acid resistance.
[0039]
An ultrasonic cleaning system according to a sixteenth aspect is characterized in that two or more ultrasonic cleaning apparatuses according to any one of the first to fifteenth aspects are arranged in series.
[0040]
According to the invention of claim 16, when a large number of objects to be cleaned have to be cleaned in a product production process, a single ultrasonic cleaning device is continuously arranged and The cleaning process can be performed efficiently.
[0041]
The ultrasonic cleaning method according to the invention according to claim 17, wherein the cleaning object is immersed in the cleaning liquid by vibrating the cleaning liquid injected into the cleaning tank. A vibrator for vibrating the cleaning liquid is moved during the cleaning of the object.
[0042]
According to the seventeenth aspect, the cleaning liquid around each part of the cleaning target can be vibrated without moving or rotating the cleaning target immersed in the cleaning liquid.
[0043]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of an ultrasonic cleaning apparatus and an ultrasonic cleaning method according to the present invention will be described in detail with reference to the accompanying drawings.
[0044]
(Configuration of ultrasonic cleaning device)
First, the configuration of the ultrasonic cleaning device will be described. FIG. 1 is an explanatory diagram showing a configuration of an ultrasonic cleaning apparatus according to the embodiment of the present invention. In FIG. 1, reference numeral 100 denotes a cleaning tank, 101 denotes a vibrator on the bottom side, 102 denotes an X-direction moving motor, 103 denotes an X-direction moving shaft, 104 denotes a Y-direction moving motor, Reference numeral 105 denotes a Y-direction movement axis, 106 denotes an X-direction support axis, 107 denotes a Y-direction support axis, 108 denotes a support member, and 109 denotes an X-direction movement assist axis.
[0045]
Although not shown, a control unit that controls the driving of the X-direction movement motor 102 and the Y-direction movement motor 104 and a drive that supplies drive power to the X-direction movement motor 102 and the Y-direction movement motor 104 And a power supply for the vibrator for supplying power to each vibrator.
[0046]
The cleaning tank 100 is made of a material such as stainless steel or quartz glass. In particular, quartz glass is suitable for strong acid resistance for semiconductor cleaning. Then, a chemical-resistant fluororesin coat is applied. The shape of the cleaning tank 100 is a rectangular parallelepiped as shown in FIG. Other shapes may be cylindrical and the like. The material, shape, and size of the cleaning tank 100 are designed according to the type of the object to be cleaned. Then, a predetermined amount of a cleaning liquid 150 is injected into the cleaning tank 100. Although not shown, the cleaning tank 100 may be covered with a soundproofing material.
[0047]
The vibrator 101 generates ultrasonic vibration, for example, by applying an alternating current to a piezoelectric element. The X-direction movement motor 102 drives the X-direction movement shaft 103 to rotate. A spiral groove is formed on the X-direction moving shaft 103, and penetrates the groove and a member including the Y-direction moving motor 104. Further, a spiral groove similar to the groove is formed in the through hole. By rotating the X-direction movement motor 102, the X-direction movement shaft 103 rotates, and with the rotation, the member including the Y-direction movement motor 104 moves along the X-direction movement shaft 103. In addition, two X-direction support shafts 106 provided in parallel with the X-direction movement shaft 103 are provided in the vicinity of the X-direction movement shaft 103 in order to perform the movement more smoothly. The number of X-direction support shafts 106 is not limited to two, but may be one, or three or more.
[0048]
The X-direction movement assisting shaft 109 is provided in parallel with the X-direction movement shaft 103 on a side surface (rear side in FIG. 1) facing the side surface of the cleaning tank 100 on which the X-direction movement shaft 103 is installed. The X-direction movement assisting shaft 109 penetrates a support member 108 that supports the Y-direction movement shaft 105 and the Y-direction support shaft 107. As the member including the Y-direction movement motor 104 moves, the support member 108 moves along the X-direction movement assist axis 109.
[0049]
The Y-direction moving motor 104 drives the Y-direction moving shaft 105 to rotate. A spiral groove is formed in the Y-direction moving shaft 105, and penetrates the groove and a member including the vibrator 101. Further, a spiral groove similar to the groove is formed in the through hole. By rotating the Y-direction movement motor 104, the Y-direction movement shaft 105 rotates, and with the rotation, the member including the vibrator 101 moves along the Y-direction movement shaft 105. In addition, two Y-direction support shafts 107 provided in parallel with the Y-direction movement shaft 105 are provided in the vicinity of the Y-direction movement shaft 105 for smoother movement. The number of Y-direction support shafts 107 is not limited to two, but may be one, or may be three or more.
[0050]
As described above, the moving mechanism for the vibrator 101 having the same configuration in the X direction and the Y direction is provided. Further, the vibrator 101 may be arranged so as to be in contact with the bottom surface 110 or may be arranged so as to be spaced from the bottom surface 110. When placed in contact with the bottom surface 110, vibration can be transmitted to the cleaning tank 100. Thereby, the entire cleaning tank 100 is vibrated, and the cleaning effect can be enhanced. Conversely, when the cleaning tank 100 is disposed with an interval provided with the bottom surface 110, no vibration is transmitted to the cleaning tank 100, so that the soundproofing effect can be enhanced. Details of the moving mechanism of the vibrator 101 will be described later.
[0051]
FIGS. 2 and 3 are other explanatory views (cross-sectional views) showing the configuration of the ultrasonic cleaning apparatus according to the embodiment of the present invention. 2 and 3, reference numeral 200 denotes an object to be cleaned, 201 denotes a lid member, 202 denotes a vibrator on the upper surface side, 203 denotes a lid member supporting wire, and 204 denotes a cleaning object supporting wire. , 205 and 206 are side vibrators, and 250 is a wire elevating device.
[0052]
In FIG. 2, the object 200 to be cleaned is suspended while being connected to the object supporting wire 204 by a holding member (not shown), and is immersed in the cleaning liquid 150 poured into the cleaning tank 100. In addition, the lid member 201 is also suspended by the lid member support wire 203. The vibrator 202 is arranged below the lid member 201, that is, on the side facing the cleaning surface of the cleaning liquid 150. The vibrator 202 may be arranged so as to be in contact with the lid member 201, or may be arranged so as to be spaced from the lid member 201.
[0053]
Further, vibrators 205 and 206 are similarly provided on both inner side surfaces of the cleaning tank 100. Further, the vibrators 205 and 206 may be arranged so as to be in contact with the respective side surfaces, or may be arranged so as to provide a space between the respective side surfaces. Further, a vibrator 101 shown in FIG. 1 is provided on a bottom surface 110 inside the cleaning tank 100.
[0054]
In FIGS. 2 and 3, moving means for moving the vibrators 101, 202, 205, and 206 are not shown, but the vibrators 202, 205, and 206 are also similar to the vibrator 101. It has a mechanism that can move freely in the vertical and horizontal directions with respect to the contacting surface.
[0055]
FIG. 2 shows a state in which only the cleaning target 200 is immersed in the cleaning liquid 150, and FIG. 3 shows a state in which the cleaning target 200 and the vibrator 202 above the cleaning target 200 are immersed in the cleaning liquid 150. It shows the state where it is. The lifting and lowering of the object to be cleaned 200 and the lid member 201 is controlled by the wire lifting and lowering device 250. This makes it possible to prevent the lid member 201 from being in the way when the object 200 to be cleaned is taken in and out.
[0056]
FIG. 4 is another explanatory diagram showing the configuration of the ultrasonic cleaning apparatus according to the embodiment of the present invention, and is a diagram in which the bottom surface 110 of the cleaning tank 100 is viewed from above. In FIG. 4, the moving means for moving the vibrators 101, 205, 206, 401, and 402 are not shown. Each of the transducers 101, 205, 206401, and 402 has a mechanism that can freely move in the vertical and horizontal directions with respect to a surface that is in contact. As shown in FIG. 4, the vibrators are provided on the four side surfaces, respectively, so that the object 200 to be cleaned has any shape, in any immersion direction, without causing uneven cleaning. It can be washed efficiently.
[0057]
(Contents of the moving mechanism of the transducer)
Next, the moving mechanism of the vibrator will be described. FIG. 5 is an explanatory view showing a moving mechanism of the vibrator of the ultrasonic cleaning apparatus according to the embodiment of the present invention. FIG. 6 is another explanatory view (perspective view) showing a moving mechanism of the vibrator of the ultrasonic cleaning apparatus according to the embodiment of the present invention.
[0058]
5, the member including the Y-direction movement motor 104 can be moved in the A direction along the X-direction movement axis 103 by rotating the X-direction movement motor 102 in a predetermined direction. At this time, the moving amount depends on the rotation speed of the X-direction moving motor 102. With the movement of the member including the Y-direction movement motor 104 in the A direction, the support member 108 supporting the Y-direction movement shaft 105 in the opposite direction to the member including the Y-direction movement motor 104 also moves in the X direction. It moves in the direction A along the movement assist shaft 109. Thus, the vibrator 101 through which the Y-direction moving shaft 105 passes moves in the A direction. When the X-direction movement motor 102 is rotated in a direction opposite to the predetermined direction, the vibrator 101 moves in the B direction as is clear from the above description.
[0059]
Further, by rotating the Y-direction movement motor 104 in a predetermined direction, the member including the vibrator 101 can be moved in the C direction along the Y-direction movement axis 105. At this time, the moving amount depends on the rotation speed of the Y-direction moving motor 104. When the Y-direction moving motor 104 is rotated in a direction opposite to the predetermined direction, the vibrator 101 moves in the D direction, as is clear from the above description. By controlling the rotation drive (rotation direction and rotation speed) of the X-direction movement motor 102 and the Y-direction movement motor 104 in this manner, a two-dimensional position on the bottom surface 110 of the vibrator 101 can be set. Can be.
[0060]
Although the moving mechanism of the vibrator 101 has been described with reference to FIGS. 5 and 6, the other vibrators 202, 205, 206, 401, and 402 have the same moving mechanism.
[0061]
(Procedure for cleaning the ultrasonic cleaning device)
Next, the cleaning procedure will be described. FIG. 7 is a flowchart showing a cleaning procedure of the ultrasonic cleaning apparatus according to the embodiment of the present invention. In the flowchart of FIG. 7, first, the power supply for the vibrator is turned on, and vibration of the vibrator (for example, the vibrator 101) is started (step S701). Next, the vibrator 101 is moved to a predetermined first area among a plurality of areas obtained by subdividing the moving area (step S702), and then stopped.
[0062]
Next, it is determined whether a predetermined time has elapsed in the stopped state (step S703). This predetermined time can be arbitrarily determined. Further, the time may be made variable for each area. For example, in the case of an area corresponding to a portion having a lot of irregularities of the cleaning object 200, a longer time is set than usual, and in the case of an area corresponding to a flat portion of the cleaning object 200, a shorter time is set. To do.
[0063]
Further, the vibration of the vibrator may be continuous or intermittent. Then, it may be continuously vibrated at the time of movement, or may be stopped at the time of movement. These selections may be made appropriately depending on the type of the object to be cleaned.
[0064]
In step S703, after a predetermined time has elapsed (step S703: No), if the predetermined time has elapsed (step S703: Yes), it is determined that the cleaning in the area has been completed. Then, it is determined whether or not the area is the last uncleaned area (step S704). Here, if it is not the last area (step S704: No), the vibrator is moved to the next uncleaned area (step S705). Thereafter, the process returns to step S703, and thereafter, the processes of steps S703 to S705 are repeatedly performed.
[0065]
If it is the last area in step S705 (step S704: Yes), it is determined that cleaning has been completed for all areas, and a series of processing ends. Note that, depending on the object to be cleaned, the cleaning may be completed after each of the processes from step S702 to step S705 is repeated a plurality of times for the same object to be cleaned.
[0066]
Next, the moving area determination processing will be described. FIG. 8 is another flowchart showing a cleaning procedure of the ultrasonic cleaning apparatus according to the embodiment of the present invention. In the flowchart of FIG. 8, first, before moving to the next area (Step S705 in FIG. 7), the next moving area candidate is determined (Step S801). This can be performed, for example, by selecting an uncleaned area having the shortest moving distance from the current area.
[0067]
Next, position information of the vibrator facing the vibrator is obtained (step S802). The opposing vibrator is the vibrator 202 for the upper surface in the vibrator 101 for the bottom surface, the vibrator 206 for the side surface, or the vibrator 401 for the side surface in the vibrator 205 for the side surface. In this case, the vibrator 402 is for a side surface. The position information is information on a position where the vibrator is present at the present time, or information on a position of a next moving destination. The position information is obtained from the control unit that controls the driving of the X-direction movement motor 102 and the Y-direction movement motor 104. Alternatively, although not shown, a monitor camera or the like may be installed and position information may be acquired based on image information from the monitor camera.
[0068]
Here, it is determined whether or not the coordinates on the moving plane of the area candidate determined in step S801 are the same as the coordinates of the area related to the position information acquired in step S802 (step S803).
[0069]
Here, in the case of the same (Step S803: Yes), it is determined by selecting another moving area candidate from the unwashed area (Step S804). Thereafter, the process returns to step S803. If it is determined in step S803 that the areas are not the same area (step S803: No), processing for moving to the area is performed (step S805), and a series of moving area determination processing ends.
[0070]
As described above, in the present embodiment, the cleaning tank 100, the vibrator 101 provided on the bottom surface 110 side of the cleaning tank, and vibrating the cleaning liquid 150 injected into the cleaning tank 100, and the cleaning liquid 150 A vibrator 202 that is provided to be disposed above the immersed cleaning target 200 and vibrates the cleaning liquid 150 is provided, so that it is possible to prevent uneven cleaning of the upper and lower parts of the cleaning target 200, This makes it possible to efficiently and reliably perform ultrasonic cleaning of various types of objects to be cleaned even with a relatively small vibrator.
[0071]
Further, in the present embodiment, the cover 202 is provided to cover the upper surface of the cleaning tank 100, and the vibrator 202 is provided integrally with the cover 201 on the lower surface side of the cover 201. Can be easily arranged above the object 200 to be cleaned.
[0072]
Further, in the present embodiment, since the wire lifting / lowering device 250 that controls the lid member 201 to open and close in response to the loading and unloading of the cleaning target 200 is provided, the cleaning target 200 is easily inserted and removed. be able to.
[0073]
Further, in the present embodiment, since the control unit that moves at least one of the vibrator 101 and the vibrator 202 is provided, the cleaning target 200 immersed in the cleaning liquid 150 is moved or rotated. It is possible to vibrate the cleaning liquid 150 around each part of the cleaning target 200 without any trouble.
[0074]
In the present embodiment, since the vibrator 101 or the vibrator 202 moves along the bottom surface 110 of the cleaning tank 100 or along a plane substantially parallel to the bottom surface 110, the vibrator 101 is cleaned. It is possible to move efficiently without contacting the object 200.
[0075]
In the present embodiment, the vibrator 101 and the vibrator 202 are moved so that the coordinate position on the plane on which the vibrator 101 moves and the coordinate position (area) on the plane on which the vibrator 202 moves do not approximate. In order to move at least one of the above, it is possible to prevent the vibrations generated by the vibrator from canceling each other.
[0076]
In the present embodiment, the cleaning tank 100, a vibrator 101 provided on the bottom surface 110 side of the cleaning tank 100 and vibrating the cleaning liquid 150 injected into the cleaning tank 100, Since the vibrators 205, 206, 401, and 402 are provided on at least one side surface and vibrate the cleaning liquid 150, it is possible to prevent uneven cleaning on the side of the cleaning object 200.
[0077]
Further, in the present embodiment, since at least one of the vibrator 101 and the second vibrator is moved, the cleaning object 200 immersed in the cleaning liquid 150 is moved or rotated. It is possible to vibrate the cleaning liquid 150 around each part of the cleaning target 200 without any trouble.
[0078]
Further, in the present embodiment, the vibrators 205, 206, 401, and 402 are moved along the side surface of the cleaning tank 100 or along a plane substantially parallel to the side surface. , 401, 402 can move efficiently without contacting the object 200 to be cleaned.
[0079]
In the present embodiment, the coordinate positions on the plane on which the vibrators 205 and 206 or 401 and 402 having the same or similar frequency and facing each other and having the same or similar frequency move are moved. Since at least one of the transducers is moved so as not to be approximated, it is possible to prevent the vibrations generated by the opposed transducers from canceling each other.
[0080]
In the present embodiment, the cleaning tank 100, a vibrator 101 provided on the bottom side of the cleaning tank 100 for vibrating the cleaning liquid 150 injected into the cleaning tank 100, and a control for moving the vibrator 101. Since the unit is provided, the cleaning liquid 150 around each part of the cleaning target 200 can be vibrated without being moved or rotated. Further, even with a relatively inexpensive small vibrator, the same effect as the cleaning effect of a relatively expensive large vibrator can be obtained.
[0081]
That is, when the cleaning tank 100 is a substantially rectangular parallelepiped, the vibrators are (1) provided only on the bottom surface 110, (2) provided only on the upper surface, and (3) provided on one side surface. And (4) one provided at two places on the side, (5) one provided at three places on the side, and (6) one provided at four places on the side.
[0082]
Further, in the case of (4) the one provided at two places on the side surface, (4-1) the one provided at the opposite side, and (4-2) the one provided at two places on the adjacent side surface are mentioned. Each vibrator can be set to either “fixed type” or “movable type”. These settings can be selected according to the material and shape of the object 200 to be cleaned and the direction in which the object 200 is immersed in the cleaning liquid 150.
[0083]
In addition, the vibrators are provided on all surfaces, and when the object to be cleaned 200 is changed, the position of the vibrator arranged to be operated according to the object to be cleaned 200 is selected. Is also good. Further, the same cleaning target 200 can be uniformly cleaned without being moved or rotated in the cleaning liquid 150 in a state where the same cleaning target 200 is immersed in the cleaning liquid 150. Can be reliably prevented from being damaged by the water pressure of the cleaning liquid 150 caused by moving the cleaning liquid 150 in the cleaning liquid 150.
[0084]
In this manner, it is possible to easily cope with many types of cleaning targets 200 with a simpler configuration.
[0085]
Further, an ultrasonic cleaning system in which two or more ultrasonic cleaning devices are arranged in series may be configured. This makes it possible to arrange a single ultrasonic cleaning device continuously and efficiently perform the cleaning process when a large number of cleaning objects need to be cleaned in the product production process. it can.
[0086]
【The invention's effect】
As described above, according to the present invention, even with a relatively small vibrator, an ultrasonic cleaning apparatus capable of efficiently and reliably performing ultrasonic cleaning of various types of objects to be cleaned is provided. This produces an effect that an ultrasonic cleaning method can be obtained. In particular, it is optimal as an apparatus for efficiently and inexpensively cleaning a silicon wafer or a large quartz glass substrate having a large diameter.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram showing a configuration of an ultrasonic cleaning apparatus according to an embodiment of the present invention.
FIG. 2 is another explanatory view (cross-sectional view) showing the configuration of the ultrasonic cleaning apparatus according to the embodiment of the present invention.
FIG. 3 is another explanatory view (cross-sectional view) showing the configuration of the ultrasonic cleaning apparatus according to the embodiment of the present invention.
FIG. 4 is another explanatory diagram showing the configuration of the ultrasonic cleaning apparatus according to the embodiment of the present invention.
FIG. 5 is an explanatory view showing a moving mechanism of a vibrator of the ultrasonic cleaning apparatus according to the embodiment of the present invention.
FIG. 6 is another explanatory diagram showing the moving mechanism of the vibrator of the ultrasonic cleaning apparatus according to the embodiment of the present invention.
FIG. 7 is a flowchart showing a cleaning procedure of the ultrasonic cleaning apparatus according to the embodiment of the present invention.
FIG. 8 is another flowchart showing a cleaning procedure of the ultrasonic cleaning apparatus according to the embodiment of the present invention.
[Explanation of symbols]
100 washing tank
101 (Bottom side) vibrator
102 X direction motor
103 X direction movement axis
104 Y direction movement motor
105 Y direction movement axis
106 X direction support shaft
107 Y-direction support shaft
108 Supporting member
109 X direction movement auxiliary axis
150 cleaning liquid
200 Items to be cleaned
201 Lid member
202 (top side) vibrator
203 Lid support wire
204 object support wire
205, 206, 401, 402 (side surface) vibrator
250 wire lifting device

Claims (17)

A washing tank,
A first vibrator provided on a bottom surface side of the cleaning tank and configured to vibrate a cleaning liquid injected into the cleaning tank;
A second vibrator provided to be disposed above the cleaning object immersed in the cleaning liquid, and vibrating the cleaning liquid;
An ultrasonic cleaning device comprising: A lid member that covers an upper surface of the cleaning tank,
The ultrasonic cleaning device according to claim 1, wherein the second vibrator is provided integrally with the lid member on a lower surface side of the lid member. The ultrasonic cleaning apparatus according to claim 2, further comprising a lid member opening / closing control unit that controls the lid member to open and close in response to taking in and out of the object to be cleaned. The ultrasonic cleaning apparatus according to any one of claims 1 to 3, further comprising movement control means for moving at least one of the first vibrator and the second vibrator. The ultrasonic cleaning according to claim 4, wherein the movement control means moves the first vibrator along a bottom surface of the cleaning tank or along a plane substantially parallel to the bottom surface. apparatus. The apparatus according to claim 1, wherein the movement control unit moves the second vibrator along a liquid surface of the cleaning liquid injected into the cleaning tank or along a plane substantially parallel to the liquid surface. The ultrasonic cleaning device according to 4 or 5. When the frequency of the first vibrator and the frequency of the second vibrator are the same or approximate, the movement control means includes: a coordinate position on a plane on which the first vibrator moves; 7. The apparatus according to claim 4, wherein at least one of the first vibrator and the second vibrator is moved so that a coordinate position on a plane on which the moving object does not move is approximated. The ultrasonic cleaning device according to item 1. A washing tank,
A first vibrator provided on a bottom surface side of the cleaning tank and configured to vibrate a cleaning liquid injected into the cleaning tank;
An ultrasonic cleaning apparatus further comprising a second vibrator provided on at least one side surface of the cleaning tank and vibrating the cleaning liquid. The ultrasonic cleaning apparatus according to claim 8, further comprising a movement control unit configured to move at least one of the first vibrator and the second vibrator. 10. The ultrasonic cleaning according to claim 9, wherein the movement control unit moves the first vibrator along a bottom surface of the cleaning tank or along a plane substantially parallel to the bottom surface. apparatus. 11. The super-moving device according to claim 9, wherein the movement control means moves the second vibrator along a side surface of the cleaning tank or along a plane substantially parallel to the side surface. Sonic cleaning equipment. The movement control means is configured such that, when the frequencies of the first vibrator and the second vibrator are the same or approximate, coordinate positions on a plane on which the opposing second vibrator moves are not approximated. The ultrasonic cleaning apparatus according to claim 9, wherein at least one of the second vibrators is moved. A washing tank,
A vibrator that is provided on the bottom side of the cleaning tank and vibrates the cleaning liquid injected into the cleaning tank,
Movement control means for moving the vibrator,
An ultrasonic cleaning device comprising: 14. The ultrasonic cleaning apparatus according to claim 13, wherein the movement control means moves the vibrator along a bottom surface of the cleaning tank or along a plane substantially parallel to the bottom surface. The ultrasonic cleaning apparatus according to any one of claims 1 to 14, wherein a material of the cleaning tank is made of quartz glass. An ultrasonic cleaning system, wherein two or more ultrasonic cleaning apparatuses according to any one of claims 1 to 15 are arranged in series. In the ultrasonic cleaning method for cleaning the cleaning object immersed in the cleaning liquid by vibrating the cleaning liquid injected into the cleaning tank,
An ultrasonic cleaning method, wherein a vibrator for vibrating the cleaning liquid is moved during cleaning of the cleaning object.

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