JPH0688235A - Continuous vacuum sealing device - Google Patents

Abstract

PURPOSE:To provide the device for continuously transporting a band-shaped material between the atm. and a vacuum chamber which is simple in construction and is easily adjustable in the spacing between a sealing roll and sealing bars according to the thickness of the band-shaped material to be handled. CONSTITUTION:The sealing roll 4 is eccentrically housed downward in a casing 2 having an upper aperture 2a opened to the atm. and a lower aperture 2b communicating with a vacuum chamber. The inlet side spacing on the right side and outlet side spacing on the left side which are wider upward are formed between the outer peripheral surface of the sealing roll 4 and the inner peripheral surface of the casing 2. The sealing bars 11 to 16 of the diameters larger upward are disposed within both spacings and the sealing bars 11 to 16 in the respective spacings are connected by means of wires 9. The casing 2 is provided with a discharge hole 2c to evacuate reduced pressure chambers 21 to 25 partitioned by the respective sealing bars to successively higher vacuums. The band-shaped material 51 to be introduced from the inside of the atm. to the vacuum chambers is wound around the outer peripheral surface of the sealing roll 4 by an upper press roll 5 and a lower press roll 6 and is carried into and out of the chambers.

Description

Detailed Description of the Invention

[0001]

The present invention relates to a plastic film,
Vacuum deposition of flexible strip materials such as paper and steel plates, sputtering, CV
D, a continuous vacuum sealing device applied to a vacuum processing device for surface modification, etc.

[0002]

2. Description of the Related Art Instead of a conventional batch type apparatus for paper, plastic film, cloth, steel plate, etc., there has been proposed an apparatus for continuously carrying into a vacuum chamber from the atmosphere and performing a vacuum treatment such as a surface treatment. . For example, FIG. 5 is a vertical conceptual diagram showing an example of a continuous vacuum vapor deposition apparatus for performing vacuum vapor deposition on a plastic film.

In FIG. 5, reference numeral 51 denotes a strip-shaped traveling substrate, 5
1a is its coil, 71 is a vapor deposition chamber, 66 is a guide roll, 72 is a cooling roll, 68 is a take-up reel, 67 is a delivery reel, 73 is a vapor deposition device, 55 is a vacuum sealing device, 53
Is a seal roll, 54 is a seal bar, 60 is a decompression chamber, 7
Reference numeral 0 is a vacuum exhaust device, 69 is a vacuum pipe, and 52 is a casing.

After the traveling substrate 51 is delivered from the delivery reel 67, it passes through a guide roll 66 and a vacuum sealing device 55, and is vapor-deposited by a vapor deposition device 73 while being wound around a cooling roll 72 installed in a vapor deposition chamber 71. After that,
The film is again conveyed to the atmosphere through the vacuum sealing device 55 and wound by the winding reel 68.

The vacuum seal device 55 includes the seal roll 5
3, the seal bar 54, and the casing 52. Then, the seal roll 53 and the seal bar 5
The plurality of stages of the decompression chamber 60 divided by 4 are vacuum pipes 69.
Is connected to the vacuum exhaust device 70, and the pressure is gradually reduced.

[0006]

In the conventional device, the traveling substrate 51 can be passed through at a high speed, which is very effective for improving productivity, but the following problems to be solved are as follows. There was a point. (1). Since each depressurization chamber 60 is formed by a large number of seal rolls 53, the structure of the device and the rotation driving means of the seal rolls 53 are complicated.

Therefore, the vacuum sealing device 55 becomes large and requires a large space. (2). When the thickness of the traveling substrate 51 is changed, the gap between the seal rolls 53 can be easily adjusted, but it is difficult to adjust the gap between the seal roll 53 and the seal bar 54 due to this gap adjustment.

Therefore, it is necessary to make this gap large, and the capacity of the vacuum exhaust device 70 becomes large. (3). In the vapor deposition chamber 71, when a high-purity gas atmosphere is required or when oxygen is not allowed to intervene, it is impossible to make the vapor deposition chamber 71 into a complete vacuum, and the residual air from each decompression chamber 60 ( Oxygen) may interfere with the deposition process.

It is an object of the present invention to provide a continuous vacuum sealing device which does not have these problems found in the conventional device.

[0010]

In order to solve the above-mentioned problems, the present invention has openings at both ends closed by end plates and open to the atmosphere on the peripheral surface, and an opening communicating with a vacuum chamber. A cylindrical casing, which is axially attached to the end plate and is housed in the casing, and has an inlet-side gap and an outlet-side gap, which are opposed to a line connecting the two openings, between the outer peripheral surface and the inner surface of the casing. A seal roll formed in the two gaps, and a plurality of seal bars interposed in the two gaps to divide the gaps to form a plurality of stages of inlet-side decompression chambers and outlet-side decompression chambers,
A structure is provided which has a belt-like material pressing unit that winds a belt-like material that enters and leaves the gap in the two openings around the outer peripheral surface of the seal roll, and a vacuum exhaust unit that decompresses each of the decompression chambers.

In order to solve the above-mentioned problems, the present invention disposes the seal roll in an eccentric manner so that the two gaps have different sizes on the atmosphere side and the vacuum chamber side. The seal bars are movably interposed along the inner peripheral surface of the casing from the atmosphere side to the vacuum chamber side in different sizes, and the seal bars and the exit sides of the inlet side gaps are disposed. A structure in which each seal bar in the gap is connected by a connecting member is also adopted.

Further, in order to solve the above-mentioned problems, the present invention, in addition to the above-mentioned structure, provides any one of the inlet side decompression chambers other than the first stage and each of the outlet side decompression chambers other than the first stage. A structure provided with gas supply means is also adopted.

[0013]

Since the present invention employs the above-mentioned structure, the pressure of the plurality of stages of the inlet side decompression chamber and the outlet side decompression chamber is reduced by the vacuum evacuation means, and both decompression chambers are directed from the atmosphere side to the vacuum chamber side. And gradually approach the vacuum. Then, the inlet side and the outlet side of the strip at the opening of the casing are pressed by the strip pressing means to the opposite surfaces of the outer periphery of the seal roll, respectively, and the seal roll is rotated while being wound, and the seal bar at the inlet side and By forming a minimum gap with the seal bar on the outlet side, it is possible to pass the inlet side of the strip to the vacuum chamber and the outlet side from the vacuum chamber to the atmosphere.

According to the present invention, in addition to the above, a structure is adopted in which the inlet side gap and the outlet side gap and the seal bar are different between the atmosphere side and the vacuum chamber side, and each seal bar is connected by a connecting member. When the thickness of the strip is changed, by moving the connecting member, the seal bars with different sizes on the inlet side and the outlet side are moved to the atmosphere side or the vacuum chamber side to seal the strip. The gap with the bar can be adjusted to a minimum.

Furthermore, according to the present invention, in addition to the above-mentioned structure, a structure in which a gas supply means is provided in any one of the stages other than the first stage of the decompression chamber is adopted. If it is impossible, or if a high-purity atmosphere gas is required, the atmosphere supply gas or oxygen required in the vacuum chamber is supplied to the inlet or outlet side of the decompression chamber other than the first stage by the gas supply means. Is supplied to the vacuum chamber, the residual air in the decompression chamber is expelled to the decompression chamber in the previous stage where the pressure is reduced, and the residual air is prevented from entering the vacuum chamber. It can be supplied to the vacuum chamber via a decompression chamber or directly.

[0016]

EXAMPLES The present invention will be specifically described below based on illustrated examples. First, the first embodiment shown in FIGS. 1 to 3 will be described. In these drawings, reference numeral 2 denotes a casing. The casing 2 is provided with an upper opening 2a, a lower opening 2b and an exhaust hole 2c, and an upper wire reel 7 and a lower wire reel 8 are pivotally attached. The upper opening 2a is an opening open to the atmosphere, and the lower opening 2b is an opening communicating with the lower vacuum chamber 71.

Reference numeral 3 denotes a pair of end plates, in which a groove 3a and a connecting groove 3b along the inner circumference of the casing 2 are engraved, and an exhaust hole 3c is formed in each connecting groove 3b. There is. Both of these end plates 3 are fixed to both ends of the casing 2,
It forms a cylindrical container.

A seal roll 4 is eccentric to the end plate 3 such that the gap between the outer peripheral surface of the seal roll and the inner peripheral surface of the casing 2 is larger on the atmosphere side in the upper part of the figure and smaller on the vapor deposition chamber 71 side in the lower part of the figure. It is pivotally mounted, and one end thereof is connected to a drive device (not shown).

On the inlet side (right side in FIG. 2) and outlet side (left side in FIG. 2) of the gap, the first seal bar 11, the second seal bar 12, and the third seal bar are gradually reduced in size. 1
A third seal bar 14, a fourth seal bar 15, a fifth seal bar 15, and a sixth seal bar 16 are interposed.
The inlet-side and outlet-side gaps are divided into a first-stage decompression chamber 21, a second-stage decompression chamber 22, a third-stage decompression chamber 23, a fourth-stage decompression chamber 24, and a fifth-stage decompression chamber 25 by 1 to 16. ing.

The inlet side and the outlet side of each of the decompression chambers 21 to 25 are connected to each other by respective connecting grooves 3b, and connected to a vacuum exhaust device (not shown) by exhaust holes 2c and 3c and a vacuum pipe 29. There is. Further, the semicircular end portions 11a to 16a of the respective seal bars 11 to 16 are movably fitted in the grooves 3a of the end plate 3, and the upper end is wound around the upper wire reel 7 and the lower end is wound around the lower wire reel 8. It is connected by a wire 9 as a connecting member that is fixed once.

Even if the seal bars 11 to 16 are moved by the wire 9 at the same time, the gaps between the seal bars 11 to 16 and the seal roll 4 having different sizes are always the same. It has become. Reference numeral 5 is an upper pressing roll, and 6 is a lower pressing roll, which is a belt-like object pressing means rotatably attached to both end plates 3.

A vacuum seal device 27 is constituted by the above members and parts. The vacuum sealing device 27 is fixed to the inlet of the vapor deposition chamber 71 below. 66 is a guide roll for the strip | belt-shaped object 51 which goes in / out.

Next, the operation of this apparatus will be described.

Each upper wire reel 7 is rotated to pull up the wire 9, and a first seal bar 11, a second seal bar 12, a third seal bar 13, and a fourth seal bar 1 on the inlet side and the outlet side are provided.
The fourth, fifth, and sixth seal bars 15 and 16 are moved upward, respectively, so as to form a minimum gap when the traveling substrate 51 is inserted between the seal board 4 and the seal roller 4. Adjust the gap.

Next, while guiding the front end of the traveling substrate 51 of, for example, a plastic film by the guide roll 66, a plate is passed between the respective seal bars 11 to 16 on the inlet side and the seal roll 4, and the upper pressing roll 5 and The lower presser roll 6 presses the seal roll 4 to wind the seal roll 4, and the vapor deposition chamber 71 on the lower side (not shown) is passed through the seal roll 4. Then, the space between the seal bars 11 to 16 on the delivery side and the seal roll 4 is further reduced. The lower roll 6 and the upper roll 5 press the seal roll 4 to wind it,
It is fed to a take-up reel (not shown) via 6.

Next, the first-stage decompression chamber 21 on the atmosphere side to the fifth-stage decompression chamber 25 on the vapor deposition chamber 71 side are successively decompressed and brought closer to a vacuum, and the seal roll 4 is rotated to cause the traveling substrate 51 to travel. A vapor deposition material such as aluminum is vapor-deposited on the traveling substrate 51 in the vapor deposition chamber 71, and the vapor-deposited traveling substrate 51 is deposited.
Is passed through each of the decompression chambers 21 to 25 on the delivery side, and is wound by a winding reel (not shown).

When the thickness of the traveling board 51 is changed, the upper wire reel 7 or the lower wire reel 8 is rotated by a slight angle and the wire 9 and the respective seal bars 11 to 11 are rotated.
16 are moved upward or downward, and each seal bar 1
The gap between 1 to 16 and the seal roll 4 is adjusted.

Next, a second embodiment shown in FIG. 4 will be described.

FIG. 4 shows the concept of a vacuum sealing device and a vacuum vapor deposition device according to the second embodiment of the present invention.
An on-off valve 31 is provided in the vacuum pipe 29 that connects the fifth-stage decompression chamber 25 and the vacuum exhaust device 30, and a gas cylinder 40, an on-off valve 41, and a decompression valve are provided between the on-off valve 31 and the fifth-stage decompression chamber 25. The gas supply pipe 43 having 42 is connected. The above is the gas supply means.

This means is used when the entry of residual air (oxygen) into the vapor deposition chamber 71 is not permitted or when a high-purity atmosphere gas is required. The on-off valve 31 is closed, the first-stage decompression chamber 21 to the fourth-stage decompression chamber 24, and the vapor deposition chamber 71 are decompressed by the vacuum exhaust device 30, and the fifth-stage decompression chamber 25.
Then, when the inert gas whose pressure is reduced by the pressure reducing valve 42 is fed, the inert gas flows into the fourth-stage pressure reducing chamber 24 and the vapor deposition chamber 71, which have a pressure lower than the atmospheric pressure, and completely expels the residual air. . Other configurations and operations are the same as those of the device of the first embodiment, and the description thereof will be omitted.

The vacuum sealing device of the present invention can also be used when a non-strip substrate is vapor-deposited in the vapor deposition chamber 71 without passing the traveling substrate 51.

In this case, if the wire 9 and each of the seal bars 11 to 16 are moved downward and brought into close contact with the inner peripheral surface of the casing 2 and the outer peripheral surface of the seal roll 4, the sealing property thereof is improved.

The present invention has been specifically described above based on the illustrated embodiments, but this is only one embodiment, and the specific shape, structure, arrangement, etc. are variously modified within the scope of the present invention. It goes without saying that it is okay.

[0034]

In the device according to the present invention, one seal roll is axially mounted in the casing, and a plurality of seal bars are provided in the inlet gap and the outlet gap between the seal roll and the casing. By forming the multi-stage depressurization chambers in both the inlet and outlet gaps, the structure of the device and the rotation driving means of the seal roll can be simplified.

Therefore, since the vacuum sealing device can be downsized, the manufacturing cost can be reduced and the installation space can be reduced.

Further, according to the present invention, the seal roll is eccentrically mounted on the casing and axially mounted, and seal bars of different sizes are movably interposed, and the inlet seal bar and the outlet seal bar are connected. In the case of adopting the structure in which the members are connected to each other, when the thickness of the band changes, the connected seal bars of different sizes on the inlet side and the outlet side are moved along the inner peripheral surface of the casing. Thus, the gap between the seal bar and the seal roll can be easily adjusted to the minimum.

Therefore, the capacity of the vacuum evacuation means can be reduced.

Still further, according to the present invention, a configuration is adopted in which a gas supply means is provided in any one of the inlet side decompression chambers other than the first stage and in the outlet side decompression chambers other than the first stage. If you need a high-purity gas atmosphere in the vacuum chamber,
Alternatively, when the presence of oxygen is not allowed, by supplying an atmosphere gas or a gas other than air (oxygen) to the decompression chamber, the residual air in the decompression chamber is expelled to the decompression chamber at the preceding stage where the pressure is reduced. Thus, it is possible to prevent the residual air from entering the vacuum chamber, and to supply the necessary atmospheric gas to the vacuum chamber through the decompression chamber of the subsequent stage or directly.

Therefore, a high quality deposit can be obtained.

[Brief description of drawings]

FIG. 1 is a one-sided sectional view showing a front surface of a continuous vacuum sealing device according to a first embodiment of the present invention,

FIG. 2 is a sectional view taken along line II-II of FIG.

FIG. 3 is a sectional view taken along line III-III in FIG.

FIG. 4 is a vertical cross-sectional conceptual view showing the front of a vacuum sealing device and a vacuum vapor deposition device according to a second embodiment of the present invention.

FIG. 5 is a conceptual vertical cross-sectional view showing the front of a vacuum sealing device and a vacuum vapor deposition device which are examples of conventional devices.

[Explanation of symbols]

 2 Casing 2a Upper opening 2b Lower opening 3 End plate 4 Seal roll 5 Upper pressing roll 6 Lower pressing roll 9 Wire 11 1st seal bar 12 2nd seal bar 13 3rd seal bar 14 4th seal bar 15 5th seal Bar 16 6th seal bar 21 1st stage decompression chamber 22 2nd stage decompression chamber 23 3rd stage decompression chamber 24 4th stage decompression chamber 25 5th stage decompression chamber 27 vacuum sealing device 30 vacuum exhaust device 40 gas cylinder 42 decompression valve 43 Gas supply pipe 51 Travel board

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Ritsuo Hashimoto 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City Mitsubishi Heavy Industries, Ltd. Hiroshima Research Laboratory (72) Inventor Toshio Taguchi 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima Mitsubishi Heavy Industries Ltd. Hiroshima Research Laboratory (72) Inventor Kenji Ariya 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City Mitsubishi Heavy Industries Ltd. Hiroshima Research Laboratory (72) Inventor Hajime Okita 4-22 Kannon Shinmachi, Nishi-ku, Hiroshima City Mitsubishi Heavy Industries, Ltd. Hiroshima Research Institute (72) Inventor Masanori Masmoto 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City Mitsubishi Heavy Industries Ltd. Hiroshima Research Institute

Claims (3)

[Claims] 1. A continuous vacuum seal device for continuously transporting a band-shaped material from the atmosphere to a vacuum chamber and from the vacuum chamber to the atmosphere, and an opening portion having both ends closed by end plates and open to the atmosphere. A cylindrical casing having an opening communicating with the vacuum chamber, an inlet side gap and an outlet side axially attached to the end plate and housed in the casing and facing the line connecting the two openings. One seal roll that forms a gap between its outer peripheral surface and the inner surface of the casing, and a plurality of stages of inlet-side decompression chambers and outlet-side decompression chambers that are interposed in the two gaps and divide the respective gaps. A plurality of seal bars forming a strip-shaped member, a strip-shaped member pressing unit that winds a strip-shaped member that enters and leaves the gap at the two openings around the outer peripheral surface of the seal roll,
And a continuous vacuum sealing device comprising vacuum evacuation means for decompressing each of the decompression chambers. 2. The seal roll is eccentrically disposed in the casing such that the two gaps have different sizes on the atmosphere side and the vacuum chamber side, and the seal bar is arranged from the atmosphere side to the seal bar. The seal bars of the inlet side gap and the seal bars of the outlet side gap are respectively movably interposed along the inner peripheral surface of the casing of different sizes toward the vacuum chamber side by a connecting member. The continuous vacuum sealing device according to claim 1, which is connected. 3. The gas supply means is provided in any of the inlet side decompression chambers other than the first stage and in each of the outlet side decompression chambers other than the first stage. Continuous vacuum sealing device.