JPH0688203A - Plasma thermal spraying torch - Google Patents
Plasma thermal spraying torchInfo
- Publication number
- JPH0688203A JPH0688203A JP4266536A JP26653692A JPH0688203A JP H0688203 A JPH0688203 A JP H0688203A JP 4266536 A JP4266536 A JP 4266536A JP 26653692 A JP26653692 A JP 26653692A JP H0688203 A JPH0688203 A JP H0688203A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- plasma
- thermal spraying
- powder material
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はプラズマ溶射トーチに関
する。FIELD OF THE INVENTION This invention relates to plasma spray torches.
【０００２】[0002]
【従来の技術】従来のプラズマ溶射トーチは、図２縦断
面図に示すように、水冷された銅製の陽極１に陽極ノズ
ル２が形成されるとともに、同陽極ノズル２内に挿入さ
れたタングステン又はタングステン合金製の陰極３が絶
縁部材４により陽極１と絶縁されて固定され、更に陽極
ノズル２の出口に直角に粉末材料供給ポート７が配設さ
れており、陽極１と陰極３の間隙に図示せざるプラズマ
ガス供給口よりＡｒガスを供給するとともに、陽極１と
陰極３との間で直流アーク放電を発生させ、これによっ
て生ずるプラズマを陽極ノズル２から噴出させ、更にこ
の噴出するプラズマジェットに粉末材料供給ポート７か
ら粉末材料を供給し、被溶射物に溶射している。2. Description of the Related Art In a conventional plasma spray torch, as shown in a vertical sectional view of FIG. 2, an anode nozzle 2 is formed on a water-cooled copper anode 1 and a tungsten or tungsten inserted in the anode nozzle 2 is used. A cathode 3 made of a tungsten alloy is insulated and fixed to the anode 1 by an insulating member 4, and a powder material supply port 7 is disposed at a right angle to the outlet of the anode nozzle 2 so that a gap between the anode 1 and the cathode 3 is provided. Ar gas is supplied from a plasma gas supply port (not shown), a direct current arc discharge is generated between the anode 1 and the cathode 3, the plasma generated by this is ejected from the anode nozzle 2, and the ejected plasma jet is powdered. The powder material is supplied from the material supply port 7 and is sprayed onto the material to be sprayed.
【０００３】しかしながら、このようなプラズマ溶射ト
ーチでは、粉末材料をプラズマジェットに対してほぼ直
角に供給しているため、溶射粒子のエネルギーの不均一
性が生じ、これが溶射皮膜の品質の劣化の原因の一つと
なっている。そこで粉末材料をプラズマジェット軸と同
一方向へ供給する必要があり、中空陰極を用いてその孔
から粉末材料をプラズマジェットに供給する試みがなさ
れている。しかし、中空陰極はタングステン又はタング
ステン合金で作られており高融点でかつ仕事関数が比較
的低いため、その孔に供給される粒子が中空陰極を出た
瞬間プラズマによって高温となり、溶融又は蒸発して陰
極と接し合金化して融点が低下して陰極が溶損する現象
が生じ、これによって中空陰極は短時間で機能を失い実
用にはならなくなる。従って、溶損のない長時間安定し
て使用できる中空陰極をもつプラズマ溶射トーチが望ま
れている。However, in such a plasma spray torch, since the powder material is supplied almost at right angles to the plasma jet, the energy nonuniformity of the spray particles occurs, which causes deterioration of the quality of the spray coating. Has become one of. Therefore, it is necessary to supply the powder material in the same direction as the plasma jet axis, and an attempt has been made to supply the powder material to the plasma jet through the hole using a hollow cathode. However, since the hollow cathode is made of tungsten or a tungsten alloy and has a high melting point and a relatively low work function, the particles supplied to the pores are heated to a high temperature by the momentary plasma exiting the hollow cathode and are melted or evaporated. A phenomenon occurs in which the cathode contacts with the cathode and is alloyed to lower its melting point to melt the cathode, which causes the hollow cathode to lose its function in a short time and becomes unusable. Therefore, there is a demand for a plasma spray torch having a hollow cathode which can be used stably for a long time without being damaged.
【０００４】[0004]
【発明が解決しようとする課題】本発明は、このような
事情に鑑みて提案されたもので、溶射粒子エネルギーが
均質化し溶射皮膜の品質が向上化するとともに、陰極の
溶融又は蒸発した粒子との反応，合金化による溶損もな
く長時間安定して使用でき、更に陰極機能も従来のもの
と同等でプラズマの発生条件は従来のものと同様によい
プラズマ溶射トーチを提供することを目的とする。SUMMARY OF THE INVENTION The present invention has been proposed in view of the above circumstances, and the energy of the sprayed particles is homogenized to improve the quality of the sprayed coating, and the molten or evaporated particles of the cathode are used. The purpose of the invention is to provide a plasma spray torch that can be used stably for a long time without any reaction or melting due to alloying, has the same cathode function as the conventional one, and has the same plasma generation conditions as the conventional one. To do.
【０００５】[0005]
【課題を解決するための手段】そのために本発明は、陽
極と陰極の間でアーク放電を発生させて生ずるプラズマ
を陽極ノズルからプラズマジェットとして噴出させると
ともに同プラズマジェット中に粉末材料を供給して溶射
するプラズマ溶射トーチにおいて、上記陰極に軸方向の
粉末材料供給孔を設けるとともに、上記陰極の外表面に
Ｔｉ，Ｎｂ又はＨｆの炭化物，窒化物又は炭窒化物から
なる１〜１０μｍ厚コーティング層を形成したことを特
徴とする。To this end, according to the present invention, a plasma generated by generating an arc discharge between an anode and a cathode is ejected from an anode nozzle as a plasma jet and a powder material is supplied into the plasma jet. In a plasma spraying torch for thermal spraying, the cathode is provided with a powder material supply hole in the axial direction, and a 1 to 10 μm thick coating layer made of a carbide, nitride or carbonitride of Ti, Nb or Hf is formed on the outer surface of the cathode. It is characterized by being formed.
【０００６】[0006]
【作用】本発明プラズマ溶射トーチにおいては、中空陰
極の外表面にコーティングされたＴｉ，Ｎｂ又はＨｆの
炭化物，窒化物又は炭窒化物はその融点が３０００℃を
超え、また生成自由エネルギーも大きく負の値をとって
おり化学的にも非常に安定であり、従って中空陰極は、
そこに供給されプラズマ中で溶融，蒸発した粒子と反
応，合金化することがなく、長時間安定である。またこ
れらの炭化物，窒化物又は炭窒化物の仕事関数はタング
ステンと同等であり、熱電子放出能も優れており、陰極
としての機能も果たす。In the plasma spraying torch of the present invention, the melting point of the carbide, nitride or carbonitride of Ti, Nb or Hf coated on the outer surface of the hollow cathode exceeds 3000 ° C. and the free energy of formation is greatly negative. Is very stable chemically and therefore the hollow cathode is
It is stable for a long period of time without reacting or alloying with particles melted and vaporized in the plasma supplied thereto. The work function of these carbides, nitrides, or carbonitrides is similar to that of tungsten, the thermoelectron emission capability is excellent, and the function as a cathode is also fulfilled.
【０００７】[0007]
【実施例】本発明プラズマ溶射トーチの一実施例を図１
縦断面図について説明すると、水冷された銅製の陽極１
に陽極ノズル２が形成されるとともに、同陽極ノズル２
内に挿入されたトリウム入りタングステン製の陰極３が
絶縁部材４により陽極１と絶縁されて固定されている。
この陰極３の軸線上には粉末材料供給孔５が穿設されて
おり、更に陰極３の外表面には、ＴｉＣを５μｍ厚さに
熱化学蒸着方法で被覆したコーティング層６が形成され
ている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the plasma spray torch of the present invention is shown in FIG.
Explaining the longitudinal section, the water-cooled copper anode 1
The anode nozzle 2 is formed on the
The thorium-containing tungsten cathode 3 inserted therein is insulated and fixed to the anode 1 by the insulating member 4.
A powder material supply hole 5 is formed on the axis of the cathode 3, and a coating layer 6 is formed on the outer surface of the cathode 3 by coating TiC to a thickness of 5 μm by a thermochemical vapor deposition method. .
【０００８】このようなプラズマ溶射トーチにおいて、
陽極１と陰極３の間隙に図示せざるプラズマガス供給口
からＡｒガスを供給するとともに、陽極１と陰極３との
間で直流アーク放電を発生させると、陽極ノズル２から
プラズマジェットが噴出する。次に陰極３の粉末材料供
給孔５より粉末材料をＡｒのキャリアガスによってプラ
ズマジェット中へ供給すると、供給された粉末材料粒子
はプラズマジェットによって加熱，加速され被溶射物に
衝突して溶射皮膜を形成する。In such a plasma spray torch,
When Ar gas is supplied from a plasma gas supply port (not shown) to the gap between the anode 1 and the cathode 3 and a DC arc discharge is generated between the anode 1 and the cathode 3, a plasma jet is ejected from the anode nozzle 2. Next, when the powder material is supplied into the plasma jet from the powder material supply hole 5 of the cathode 3 by the carrier gas of Ar, the supplied powder material particles are heated and accelerated by the plasma jet and collide with the sprayed object to form a sprayed coating. Form.
【０００９】この溶射作業の具体例を示すと、プラズマ
発生条件は、アーク電流９５０Ａ，アーク電圧３５Ｖ，
プラズマガスＡｒ３５ l/min，キャリアガスＡｒ１０ l
/minとし、粉末材料として、８０Ｎｉ−２０Ｃｒ（wt
％）とＡｌ2 Ｏ3 をそれぞれ２０g/min の供給速度でそ
れぞれ約３０min 連続的に溶射するときは、陰極３を含
めプラズマ溶射トーチは安定した運転ができる。To show a concrete example of this thermal spraying work, the plasma generation conditions are as follows: arc current 950A, arc voltage 35V,
Plasma gas Ar 35 l / min, carrier gas Ar 10 l
/ min, and 80Ni-20Cr (wt
%) And Al 2 O 3 are continuously sprayed at a feed rate of 20 g / min for about 30 min each, the plasma spray torch including the cathode 3 can operate stably.
【００１０】なお陰極３の外表面のコーティング物質を
ＮｂＣ，ＨｆＣ，ＴｉＮ，ＮｂＮ，ＨｆＮ，ＴｉＣＮ，
ＮｂＣＮ又はＨｆＣＮとし、熱化学蒸着方法でコーティ
ングした場合も同様の結果が得られる。またコーティン
グ層６の厚さを１μｍより薄くすると陰極３の溶損防止
の効果が消失し、１０μｍを超えるとプラズマジェット
の発生によってコーティング層６が剥離するので、コー
ティング層６の厚さは１〜１０μｍに限定する。The coating material on the outer surface of the cathode 3 is NbC, HfC, TiN, NbN, HfN, TiCN,
Similar results are obtained when coating with NbCN or HfCN by a thermal chemical vapor deposition method. When the thickness of the coating layer 6 is less than 1 μm, the effect of preventing the melting damage of the cathode 3 disappears, and when it exceeds 10 μm, the coating layer 6 is peeled off due to the generation of the plasma jet. Limited to 10 μm.
【００１１】かくしてこのようなプラズマ溶射トーチ
は、粉末材料粒子を陰極３の粉末材料供給孔５からプラ
ズマ中へ供給できるため、溶射粒子エネルギーが均質化
し溶射皮膜の品質が向上する。また陰極３外表面には粉
末材料粒子との反応性が低い物質のコーティング層６が
形成されているため、溶融又は蒸発した粒子との反応，
合金化による陰極３の溶損もなく長時間安定して使用で
きる。更にこのコーティング層６の物質は熱電子放出能
も優れ陰極としての機能も従来のものと同等であり、プ
ラズマの発生条件は従来と同様に良好である。Thus, in such a plasma spray torch, powder material particles can be supplied into the plasma through the powder material supply hole 5 of the cathode 3, so that the energy of the spray particles is homogenized and the quality of the spray coating is improved. Further, since the coating layer 6 of a substance having a low reactivity with the powder material particles is formed on the outer surface of the cathode 3, the reaction with the melted or evaporated particles,
The cathode 3 can be stably used for a long time without melting damage of the cathode 3 due to alloying. Further, the substance of the coating layer 6 has excellent thermionic emission ability and has the same function as the cathode as the conventional one, and the plasma generation condition is as good as the conventional one.
【００１２】[0012]
【発明の効果】要するに本発明によれば、陽極と陰極の
間でアーク放電を発生させて生ずるプラズマを陽極ノズ
ルからプラズマジェットとして噴出させるとともに同プ
ラズマジェット中に粉末材料を供給して溶射するプラズ
マ溶射トーチにおいて、上記陰極に軸方向の粉末材料供
給孔を設けるとともに、上記陰極の外表面にＴｉ，Ｎｂ
又はＨｆの炭化物，窒化物又は炭窒化物からなる１〜１
０μｍ厚コーティング層を形成したことにより、溶射粒
子エネルギーが均質化し溶射皮膜の品質が向上化すると
ともに、陰極の溶融又は蒸発した粒子との反応，合金化
による溶損もなく長時間安定して使用でき、更に陰極機
能も従来のものと同等でプラズマの発生条件は従来のも
のと同様によいプラズマ溶射トーチを得るから、本発明
は産業上極めて有益なものである。In summary, according to the present invention, plasma generated by arc discharge between the anode and the cathode is ejected from the anode nozzle as a plasma jet, and a powder material is supplied and sprayed into the plasma jet. In the thermal spray torch, the cathode is provided with an axial powder material supply hole, and Ti, Nb is formed on the outer surface of the cathode.
Or 1-1 consisting of Hf carbide, nitride or carbonitride
By forming a 0 μm thick coating layer, the energy of the sprayed particles is homogenized and the quality of the sprayed coating is improved, and there is no erosion damage due to reaction or alloying with the melted or evaporated particles of the cathode and stable use for a long time. Further, the present invention is extremely useful industrially because it provides a plasma spray torch having the same cathode function as the conventional one and the same plasma generation condition as the conventional one.
【図１】本発明プラズマ溶射トーチの一実施例の縦断面
図である。FIG. 1 is a vertical sectional view of an embodiment of the plasma spray torch of the present invention.
【図２】従来のプラズマ溶射トーチの縦断面図である。FIG. 2 is a vertical sectional view of a conventional plasma spray torch.
１ 陽極 ２ 陽極ノズル ３ 陰極 ４ 絶縁部材 ５ 粉末材料供給孔 ６ コーティング層 1 Anode 2 Anode nozzle 3 Cathode 4 Insulating member 5 Powder material supply hole 6 Coating layer
Claims (1)
て生ずるプラズマを陽極ノズルからプラズマジェットと
して噴出させるとともに同プラズマジェット中に粉末材
料を供給して溶射するプラズマ溶射トーチにおいて、上
記陰極に軸方向の粉末材料供給孔を設けるとともに、上
記陰極の外表面にＴｉ，Ｎｂ又はＨｆの炭化物，窒化物
又は炭窒化物からなる１〜１０μｍ厚コーティング層を
形成したことを特徴とするプラズマ溶射トーチ。1. A plasma spray torch in which a plasma generated by generating an arc discharge between an anode and a cathode is ejected from an anode nozzle as a plasma jet and a powder material is supplied into the plasma jet for thermal spraying. A plasma spray torch characterized in that a powder material supply hole is provided in the axial direction and a coating layer of 1 to 10 μm thick made of a carbide, nitride or carbonitride of Ti, Nb or Hf is formed on the outer surface of the cathode. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4266536A JPH0688203A (en) | 1992-09-09 | 1992-09-09 | Plasma thermal spraying torch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4266536A JPH0688203A (en) | 1992-09-09 | 1992-09-09 | Plasma thermal spraying torch |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0688203A true JPH0688203A (en) | 1994-03-29 |
Family
ID=17432232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4266536A Withdrawn JPH0688203A (en) | 1992-09-09 | 1992-09-09 | Plasma thermal spraying torch |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0688203A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008521170A (en) * | 2004-11-16 | 2008-06-19 | ハイパーサーム インコーポレイテッド | Plasma arc torch with electrode with internal flow path |
| JP2008242314A (en) * | 2007-03-28 | 2008-10-09 | Fujifilm Corp | Optical film, polarizing plate and image display apparatus |
-
1992
- 1992-09-09 JP JP4266536A patent/JPH0688203A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008521170A (en) * | 2004-11-16 | 2008-06-19 | ハイパーサーム インコーポレイテッド | Plasma arc torch with electrode with internal flow path |
| JP2008242314A (en) * | 2007-03-28 | 2008-10-09 | Fujifilm Corp | Optical film, polarizing plate and image display apparatus |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19991130 |