JPH0636890A - Plasma spraying torch - Google Patents
Plasma spraying torchInfo
- Publication number
- JPH0636890A JPH0636890A JP4210906A JP21090692A JPH0636890A JP H0636890 A JPH0636890 A JP H0636890A JP 4210906 A JP4210906 A JP 4210906A JP 21090692 A JP21090692 A JP 21090692A JP H0636890 A JPH0636890 A JP H0636890A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- cathode
- tip
- generation chamber
- plasma generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- Plasma Technology (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はプラズマ溶射トーチに関
する。FIELD OF THE INVENTION This invention relates to plasma spray torches.
【０００２】[0002]
【従来の技術】陽極と陰極との間に電流を流して発生さ
せたプラズマをジェットとして噴出させるとともに同ジ
ェットの軸線に溶射粉体を供給して被加工物表面に溶射
皮膜を形成するプラズマ溶射トーチの縦断面図を図３に
示す。図３において、銅製の陽極１の軸線上にはプラズ
マ発生チャンバー２が設けられ、その先端にプラズマジ
ェット噴口３が開口されており、この陽極１の基部側に
は絶縁体４が固着されている。また陽極１には先端がプ
ラズマ発生チャンバー２内に通ずるように作動ガス供給
路５が設けられ、なお陽極１には冷却水通路６が設けら
れて、その冷却水入口部が陽極電流導入部７に形成され
ている。更に絶縁体４の中心部に、作動ガス及び溶射粉
体供給路８を備えたタングステン製の陰極９が貫設され
て、その先端がプラズマ発生チャンバー２内に挿入され
ており、なお陰極９には冷却水通路１０が設けられ、そ
の冷却水入口部が陰極電流導入部１１に形成されてい
る。2. Description of the Related Art Plasma spraying in which a plasma generated by passing an electric current between an anode and a cathode is ejected as a jet and a sprayed powder is supplied to the axis of the jet to form a sprayed coating on the surface of a workpiece. A longitudinal sectional view of the torch is shown in FIG. In FIG. 3, a plasma generation chamber 2 is provided on the axis of a copper anode 1, a plasma jet nozzle 3 is opened at the tip thereof, and an insulator 4 is fixed to the base side of the anode 1. . Further, the anode 1 is provided with a working gas supply passage 5 so that its tip is communicated with the inside of the plasma generation chamber 2, and the anode 1 is provided with a cooling water passage 6, whose cooling water inlet portion is the anode current introducing portion 7. Is formed in. Further, a tungsten cathode 9 having a working gas and thermal spray powder supply passage 8 is penetrated through the center of the insulator 4, and the tip of the cathode 9 is inserted into the plasma generation chamber 2. Is provided with a cooling water passage 10, and the cooling water inlet portion is formed in the cathode current introducing portion 11.
【０００３】このようなプラズマ溶射トーチによりプラ
ズマ溶射を行うにあたっては、まず陽極１及び陰極９を
冷却するために冷却水通路６，１０に冷却水を流すとと
もに、作動ガス供給路５からプラズマ発生チャンバー２
へＡｒ，Ｈｅ，Ｎ2 ，Ｈ2 ガス又はこれらの混合ガス等
の作動ガスを流す。次に直流電源より陽極１に正、陰極
９に負の印加電圧を加え、続いて高周波電源より陽極１
と陰極９との間に高周波電圧を印加して両電極１，９間
に火花放電を発生させる。この火花放電により、先に印
加されている直流電源からの印加電圧によって陽極１と
陰極９との間にアーク１４が点孤して作動ガスをプラズ
マ化し、プラズマ発生チャンバー２には高温のプラズマ
が充満し、プラズマジェット噴口３から高温高速のプラ
ズマジェットとして噴出する。このプラズマジェットに
作動ガス及び溶射粉体供給路８を経てプラズマジェット
軸心に溶射粉体を供給するので、供給された溶射粉体の
粒子が効率良く加熱，加速されて溶射皮膜を形成する。In performing plasma spraying with such a plasma spraying torch, cooling water is first passed through the cooling water passages 6 and 10 to cool the anode 1 and the cathode 9, and the plasma generation chamber is supplied from the working gas supply passage 5. Two
A working gas such as Ar, He, N 2 , H 2 gas or a mixed gas thereof is flowed. Next, a positive voltage is applied to the anode 1 from the DC power supply and a negative applied voltage is applied to the cathode 9, and then the anode 1 is applied from the high frequency power supply.
A high-frequency voltage is applied between the cathode and the cathode 9 to generate spark discharge between the electrodes 1 and 9. Due to this spark discharge, the arc 14 is ignited between the anode 1 and the cathode 9 by the voltage applied from the DC power source previously applied to turn the working gas into plasma, and high temperature plasma is generated in the plasma generation chamber 2. It fills up and ejects from the plasma jet nozzle 3 as a high-temperature and high-speed plasma jet. Since the sprayed powder is supplied to this plasma jet through the working gas and the sprayed powder supply passage 8 to the axis of the plasma jet, the particles of the supplied sprayed powder are efficiently heated and accelerated to form a sprayed coating.
【０００４】しかしながら、このようなプラズマ溶射ト
ーチにおいては、アーク１４が陽極１と陰極９との間隙
の小さく両電極１，９の形状が鋭い箇所、つまり陰極９
では作動ガス及び溶射粉体供給路８の先端で形成され、
その周辺を動き廻る。アーク形成点はプラズマ中で最も
温度が高く、周辺のプラズマジェットの流れを乱すの
で、陰極９の先端が時間とともに溶損したり、作動ガス
及び溶射粉体供給路８を経てプラズマジェット中に送り
込まれた溶射粉体が陰極９先端に付着又は陰極９と固溶
反応を起こしたりすることになり、プラズマが不安定と
なる。また陰極９と溶射粉体との固溶反応は陰極９の融
点を低下させてその溶損を促進し陰極寿命が低下する。However, in such a plasma spray torch, the arc 14 has a small gap between the anode 1 and the cathode 9, and the electrodes 1 and 9 have sharp shapes, that is, the cathode 9
Then, it is formed at the tip of the working gas and thermal spray powder supply passage 8,
Move around it. Since the arc forming point has the highest temperature in the plasma and disturbs the flow of the surrounding plasma jet, the tip of the cathode 9 is melted with time or is fed into the plasma jet through the working gas and the spray powder supply passage 8. The sprayed powder adheres to the tip of the cathode 9 or causes a solid solution reaction with the cathode 9, and the plasma becomes unstable. Further, the solid solution reaction between the cathode 9 and the sprayed powder lowers the melting point of the cathode 9 and promotes its melting loss, which shortens the life of the cathode.
【０００５】[0005]
【発明が解決しようとする課題】本発明は、このような
事情に鑑みて提案されたもので、溶射粉体のプラズマジ
ェットへの軸心供給及びプラズマの安定性を損なうこと
なく、陰極への溶射粉体の付着や陰極の溶損が防止でき
るプラズマ溶射トーチを提供することを目的とする。SUMMARY OF THE INVENTION The present invention has been proposed in view of the above-mentioned circumstances, and it is possible to apply the thermal spray powder to the cathode without sacrificing the axial center supply to the plasma jet and the stability of the plasma. An object of the present invention is to provide a plasma spraying torch capable of preventing the deposition of sprayed powder and the damage of cathode.
【０００６】[0006]
【課題を解決するための手段】そのために本発明は、先
端にプラズマジェット噴口を有するプラズマ発生チャン
バーが設けられるとともに基部に絶縁体が接合されかつ
上記プラズマ発生チャンバーに通ずる作動ガス供給路が
設けられた陽極と、上記絶縁体の中心部に貫設され先端
が上記プラズマ発生チャンバー内にありかつ中心部に作
動ガス及び溶射粉体供給路が設けられた陰極とを具えた
プラズマ溶射トーチにおいて、上記陰極が冷却水通路を
設けた銅製陰極とその先端のＨｆＣ又はＺｒＣとから構
成され、かつプラズマ発生チャンバー内の陰極内面にＴ
ｉＣコーティング膜が形成されたことと、先端にプラズ
マジェット噴口を有するプラズマ発生チャンバーが設け
られるとともに基部に絶縁体が接合されかつ上記プラズ
マ発生チャンバーに通ずる作動ガス供給路が設けられた
陽極と、上記絶縁体の中心部に貫設され先端が上記プラ
ズマ発生チャンバー内にありかつ中心部に作動ガス及び
溶射粉体供給路が設けられた陰極とを具えたプラズマ溶
射トーチにおいて、上記陰極の先端より後方外周に陽極
との間隙がプラズマ発生チャンバー内で最も小さくなる
ように環状にＨｆＣ又はＺｒＣを接合したこととを、そ
れぞれ特徴とする。To this end, according to the present invention, a plasma generating chamber having a plasma jet nozzle is provided at the tip, an insulator is bonded to the base, and a working gas supply path communicating with the plasma generating chamber is provided. A plasma spray torch comprising an anode and a cathode having a tip provided in the plasma generation chamber and penetrating through the center of the insulator and having a working gas and spray powder supply path provided in the center, The cathode is composed of a copper cathode provided with a cooling water passage and HfC or ZrC at its tip, and a T-shaped inner surface of the cathode in the plasma generation chamber.
an anode having an iC coating film formed thereon, a plasma generation chamber having a plasma jet nozzle at its tip, an insulator bonded to the base, and a working gas supply path leading to the plasma generation chamber; In a plasma spray torch having a cathode penetrating through the center of the insulator and having the tip inside the plasma generation chamber and having a working gas and spray powder supply path provided in the center, a plasma spray torch rearward from the tip of the cathode. It is characterized in that HfC or ZrC is joined in an annular shape so that the gap with the anode is minimized in the plasma generation chamber on the outer periphery.
【０００７】[0007]
【作用】本発明プラズマ溶射トーチにおいては、陰極の
先端がＨｆＣ又はＺｒＣで構成され、又は陰極先端の後
方外周に陽極との間隙がプラズマ発生チャンバー内で最
も小さくなるように環状にＨｆＣ又はＺｒＣが接合され
ているので、アークは陽極と陰極先端に取付けられ又は
外側に接合されたＨｆＣ又はＺｒＣ間で安定して形成さ
れ、陰極の溶射粉体供給路先端の温度が低下する。これ
によって、陰極の溶射粉体供給路近傍の溶損及び溶射粉
体の付着が防止でき、ひいては陰極の寿命が向上する。
更に溶射粉体と接する陰極内面にＴｉＣコーティング膜
が設けられることによって、溶射粉体との固溶反応が防
止され、陰極の寿命が一層向上する。In the plasma spraying torch of the present invention, the tip of the cathode is made of HfC or ZrC, or HfC or ZrC is annularly formed on the rear outer periphery of the cathode tip so that the gap between the cathode and the anode is the smallest in the plasma generation chamber. Since they are joined, the arc is stably formed between HfC or ZrC attached to the anode and the tip of the cathode or joined to the outside, and the temperature of the tip of the sprayed powder supply path of the cathode decreases. As a result, it is possible to prevent melting damage and adhesion of the sprayed powder in the vicinity of the sprayed powder supply path of the cathode, and thus improve the life of the cathode.
Further, by providing a TiC coating film on the inner surface of the cathode that is in contact with the sprayed powder, solid solution reaction with the sprayed powder is prevented, and the life of the cathode is further improved.
【０００８】[0008]
【実施例】本発明のプラズマ溶射トーチの実施例を図面
について説明すると、図１は第１番目の発明の実施例の
縦断面図、図２は第２番目の発明の実施例の縦断面図で
ある。まず図１において、銅製の陽極１の軸線上にはプ
ラズマ発生チャンバー２が設けられ、その先端にプラズ
マジェット噴口３が開口されており、この陽極１の基部
側には絶縁体４が固着されている。また陽極１には先端
がプラズマ発生チャンバー２内に通ずるように作動ガス
供給路５が設けられ、なお陽極１には冷却水通路６が設
けられて、その冷却水入口部が陽極電流導入部７に形成
されている。更に絶縁体４の中心部に、先端にＨｆＣ，
ＺｒＣ１２を接合し、かつ冷却水通路１０を設けた銅製
の陰極９が貫設されて、その先端がプラズマ発生チャン
バー２内にあるとともに、この陰極９の中心部に作動ガ
ス及び溶射粉体供給路８が設けられている。また陰極９
の内面にはＴｉＣコーティング膜１３が設けられてい
る。1 is a longitudinal sectional view of a first embodiment of the invention, and FIG. 2 is a longitudinal sectional view of a second embodiment of the invention. Is. First, in FIG. 1, a plasma generating chamber 2 is provided on the axis of an anode 1 made of copper, a plasma jet nozzle 3 is opened at the tip thereof, and an insulator 4 is fixed to the base side of the anode 1. There is. Further, the anode 1 is provided with a working gas supply passage 5 so that its tip is communicated with the inside of the plasma generation chamber 2, and the anode 1 is provided with a cooling water passage 6, whose cooling water inlet portion is the anode current introducing portion 7. Is formed in. Further, at the center of the insulator 4, HfC at the tip,
A cathode 9 made of copper, which is joined to ZrC12 and provided with a cooling water passage 10, is provided so as to penetrate therethrough, and its tip is inside the plasma generation chamber 2, and a working gas and spray powder supply passage is provided at the center of the cathode 9. 8 are provided. Also the cathode 9
A TiC coating film 13 is provided on the inner surface of the.
【０００９】このようなプラズマ溶射トーチにおいて、
プラズマ溶射を行うにあたり、まず陽極１及び陰極９を
冷却するために冷却水通路６，１０に冷却水を流すとと
もに、作動ガス供給路５からプラズマ発生チャンバー２
へ例えば作動ガスとして２５l/min流量のＡｒガスを流
す。次に直流電源より陽極１に正、陰極９に負の印加電
圧を加え、続いて高周波電源より陽極１と陰極９との間
に高周波電圧を印加して両電極１，９間に火花放電を発
生させる。この火花放電により、先に印加されている直
流電源からの印加電圧によって陽極１と陰極９との間に
アーク１４を点弧して作動ガスがプラズマ化し、プラズ
マ発生チャンバー２には高温のプラズマが充満し、プラ
ズマジェット噴口３から高温高速のプラズマジェットと
して噴出する。このとき電流を徐々に増して７００Ａと
し、次に作動ガス供給路５からＡｒガスと同じようにＨ
2 ガス1.5 l/min を流すと、電流，電圧は７００Ａ，３
８Ｖとなりプラズマジェットが安定する。In such a plasma spray torch,
In performing plasma spraying, cooling water is first passed through cooling water passages 6 and 10 to cool anode 1 and cathode 9, and plasma generation chamber 2 is supplied from working gas supply passage 5.
For example, Ar gas at a flow rate of 25 l / min is supplied as a working gas. Next, a positive voltage is applied to the anode 1 from the DC power source and a negative voltage is applied to the cathode 9, and then a high frequency voltage is applied between the anode 1 and the cathode 9 from the high frequency power source to generate a spark discharge between the electrodes 1 and 9. generate. This spark discharge ignites the arc 14 between the anode 1 and the cathode 9 by the applied voltage from the DC power source applied previously, and the working gas is turned into plasma, and high temperature plasma is generated in the plasma generation chamber 2. It fills up and ejects from the plasma jet nozzle 3 as a high-temperature and high-speed plasma jet. At this time, the current is gradually increased to 700 A, and then H gas is supplied from the working gas supply path 5 in the same manner as Ar gas.
When flowing 2 gas 1.5 l / min, the current and voltage are 700A, 3
It becomes 8V and the plasma jet becomes stable.
【００１０】プラズマジェットが安定した後、作動ガス
及び溶射粉体供給路８からプラズマ発生チャンバー２
へ、例えば溶射粉体の粒度１０〜４０μｍのＮｉＣｒ粉
体をＡｒガス５ l/minをキャリアガスとして１０g/min
で供給する。プラズマに供給された溶射粉体の粒子は急
速に昇温，加速されて高温高速のプラズマジェットと一
緒に噴出する。このときプラズマに供給される溶射粉体
はプラズマジェットの噴出方向と同一方向に供給される
ため、粒子の加熱，加速が均一となり、十分な緻密度，
強度を有する高品質の溶射皮膜が形成される。更に溶射
粉体はプラズマの中心部に供給されるので溶射粉体の加
熱効率があがり、溶射粉体の密着効率が向上する。また
このとき、アーク１４は陽極１と陰極９の先端に接合さ
れたＨｆＣ，ＺｒＣ１２との間に安定して形成され、陰
極９の先端のＨｆＣ，ＺｒＣ１２が陰極９に設けられた
冷却水通路１０を介して冷却されることにより、陰極９
の作動ガス及び溶射粉体供給路８先端の温度が低下す
る。更に陰極９の内面がＴｉＣコーティング膜１３で保
護されているため、陰極９と溶射粉体との固溶反応が防
止できる。つまり陰極９の溶損が防止できるために陰極
９の寿命が向上する。After the plasma jet is stabilized, the plasma generation chamber 2 is supplied from the working gas and spray powder supply passage 8.
For example, NiCr powder having a particle size of 10 to 40 μm of sprayed powder is used at 10 g / min with Ar gas of 5 l / min as carrier gas
Supplied by. The particles of the thermal spray powder supplied to the plasma are rapidly heated and accelerated, and are ejected together with a high-temperature and high-speed plasma jet. At this time, since the sprayed powder supplied to the plasma is supplied in the same direction as the jet direction of the plasma jet, the particles are uniformly heated and accelerated, and sufficient compactness,
A high quality sprayed coating having strength is formed. Further, since the sprayed powder is supplied to the center of the plasma, the heating efficiency of the sprayed powder is improved and the adhesion efficiency of the sprayed powder is improved. At this time, the arc 14 is stably formed between the anode 1 and the HfC, ZrC 12 joined to the tip of the cathode 9, and the HfC, ZrC 12 at the tip of the cathode 9 is provided in the cooling water passage 10 provided in the cathode 9. By being cooled through the cathode 9
The working gas and the temperature at the tip of the sprayed powder supply passage 8 decrease. Furthermore, since the inner surface of the cathode 9 is protected by the TiC coating film 13, the solid solution reaction between the cathode 9 and the sprayed powder can be prevented. In other words, melting damage of the cathode 9 can be prevented, so that the life of the cathode 9 is improved.
【００１１】次に図２において、符号１〜１１は図１と
それぞれ同一部材を示している。但し陰極９はタングス
テン製である。しかして陰極９には、その先端より後方
外周に、陽極１との間隙がプラズマ発生チャンバー２内
で最も小さくなるように環状にＨｆＣ又はＺｒＣ１２′
が接合されている。このようなプラズマ溶射トーチにお
けるプラズマ溶射作業は、図１と同様にして行われ、十
分な緻密度，強度及び密着性を有する高品質の溶射皮膜
が形成される。更にこのときアーク１４は陰極９の先端
より後方外周に環状に取付けられたＨｆＣ又はＺｒＣ１
２′との間に安定して形成され、陰極９の作動ガス及び
溶射粉体供給路８先端の温度が低下するとともに、同供
給路８の先端周辺のプラズマジェットの流れが安定し、
これによって同供給路８先端の溶損及び陰極９への溶射
粉体の付着が防止できる。Next, in FIG. 2, reference numerals 1 to 11 denote the same members as in FIG. 1, respectively. However, the cathode 9 is made of tungsten. Then, the cathode 9 is annularly formed on the outer periphery rearward from the tip thereof so that the gap between the cathode 9 and the anode 1 is the smallest in the plasma generation chamber 2 and HfC or ZrC 12 '.
Are joined. The plasma spraying operation in such a plasma spraying torch is performed in the same manner as in FIG. 1, and a high quality sprayed coating having sufficient compactness, strength and adhesion is formed. Further, at this time, the arc 14 is HfC or ZrC1 annularly attached to the rear outer periphery from the tip of the cathode 9.
2'is formed stably, the temperature of the working gas of the cathode 9 and the tip of the sprayed powder supply passage 8 decreases, and the flow of the plasma jet around the supply passage 8 stabilizes.
As a result, it is possible to prevent melting damage at the tip of the supply passage 8 and adhesion of the sprayed powder to the cathode 9.
【００１２】かくして本発明プラズマ溶射トーチにおい
ては、陰極９の先端にＨｆＣ，ＺｒＣ１２を取付け又は
陰極９の先端より後方外周にＨｆＣ，ＺｒＣ１２′を接
合したことにより、アーク１４が陽極１と高融点で熱電
子放出しやすいＨｆＣ，ＺｒＣ１２，１２′との間に安
定して形成され、また陰極９先端又は後方外周のＨｆ
Ｃ，ＺｒＣ１２，１２′が陰極９に設けられた冷却水通
路１０を介して冷却されて、陰極９先端の作動ガス及び
溶射粉体供給路８の先端の温度が低下する。更に陰極９
内面がＴｉＣコーティング膜１３で保護されているた
め、陰極９と溶射粉体との固溶反応が防止できる。従っ
て本発明プラズマ溶射トーチにおいては、陰極９の作動
ガス及び溶射粉体供給路８近傍の溶損及び溶射粉体の付
着が防止でき、ひいては高品質の溶射皮膜を得るととも
に、陰極９の寿命を向上させることができる。Thus, in the plasma spray torch of the present invention, the HfC, ZrC12 is attached to the tip of the cathode 9 or the HfC, ZrC12 'is joined to the outer periphery rearward from the tip of the cathode 9 so that the arc 14 has a high melting point with the anode 1. It is stably formed between HfC, ZrC12, 12 'which easily emits thermoelectrons, and Hf at the tip of the cathode 9 or at the rear outer periphery.
C, ZrC 12, 12 'are cooled through the cooling water passage 10 provided in the cathode 9, and the working gas at the tip of the cathode 9 and the temperature at the tip of the sprayed powder supply passage 8 are lowered. Further cathode 9
Since the inner surface is protected by the TiC coating film 13, the solid solution reaction between the cathode 9 and the sprayed powder can be prevented. Therefore, in the plasma spraying torch of the present invention, it is possible to prevent the working gas of the cathode 9 and the thermal spraying powder in the vicinity of the thermal spraying powder supply passage 8 from adhering to the thermal spraying powder, and thus to obtain a high quality thermal spray coating and improve the life of the cathode 9. Can be improved.
【００１３】[0013]
【発明の効果】要するに本発明によれば、先端にプラズ
マジェット噴口を有するプラズマ発生チャンバーが設け
られるとともに基部に絶縁体が接合されかつ上記プラズ
マ発生チャンバーに通ずる作動ガス供給路が設けられた
陽極と、上記絶縁体の中心部に貫設され先端が上記プラ
ズマ発生チャンバー内にありかつ中心部に作動ガス及び
溶射粉体供給路が設けられた陰極とを具えたプラズマ溶
射トーチにおいて、上記陰極が冷却水通路を設けた銅製
陰極とその先端のＨｆＣ又はＺｒＣとから構成され、か
つプラズマ発生チャンバー内の陰極内面にＴｉＣコーテ
ィング膜が形成されたことと、先端にプラズマジェット
噴口を有するプラズマ発生チャンバーが設けられるとと
もに基部に絶縁体が接合されかつ上記プラズマ発生チャ
ンバーに通ずる作動ガス供給路が設けられた陽極と、上
記絶縁体の中心部に貫設され先端が上記プラズマ発生チ
ャンバー内にありかつ中心部に作動ガス及び溶射粉体供
給路が設けられた陰極とを具えたプラズマ溶射トーチに
おいて、上記陰極の先端より後方外周に陽極との間隙が
プラズマ発生チャンバー内で最も小さくなるように環状
にＨｆＣ又はＺｒＣを接合したこととにより、溶射粉体
のプラズマジェットへの軸心供給及びプラズマの安定性
を損なうことなく、陰極への溶射粉体の付着や陰極の溶
損が防止できるプラズマ溶射トーチを得るから、本発明
は産業上極めて有益なものである。In summary, according to the present invention, an anode provided with a plasma generating chamber having a plasma jet nozzle at its tip, an insulator bonded to the base, and a working gas supply path communicating with the plasma generating chamber are provided. A plasma spray torch having a cathode having a tip provided in the plasma generation chamber and having a tip provided in the plasma generation chamber and provided with a working gas and a spray powder supply path in the center, the cathode being cooled. It is composed of a copper cathode provided with a water passage and HfC or ZrC at its tip, and a TiC coating film is formed on the inner surface of the cathode in the plasma generation chamber, and a plasma generation chamber having a plasma jet nozzle is provided at the tip. And the insulator is bonded to the base and communicates with the plasma generation chamber. An anode provided with a gas supply passage and a cathode having a tip penetrating the center of the insulator and having a tip in the plasma generation chamber and a working gas and spray powder supply passage provided in the center were provided. In the plasma spraying torch, HfC or ZrC was joined in an annular shape so that the gap between the cathode and the anode was the smallest in the plasma generation chamber, and the axial center of the sprayed powder to the plasma jet. INDUSTRIAL APPLICABILITY The present invention is extremely useful industrially, since a plasma spraying torch can be obtained which can prevent the sprayed powder from adhering to the cathode or the cathode from being melted without damaging the stability of supply and plasma.
【図１】本発明プラズマ溶射トーチの第１番目の発明の
実施例の縦断面図である。FIG. 1 is a vertical sectional view of a first embodiment of a plasma spray torch according to the present invention.
【図２】第２番目の発明の実施例の縦断面図である。FIG. 2 is a vertical sectional view of an embodiment of the second invention.
【図３】従来のプラズマ溶射トーチの縦断面図である。FIG. 3 is a vertical sectional view of a conventional plasma spray torch.
１ 陽極 ２ プラズマ発生チャンバー ３ プラズマジェット噴口 ４ 絶縁体 ５ 作動ガス供給路 ６ 冷却水通路 ７ 陽極電流導入部 ８ 作動ガス及び溶射粉体供給路 ９ 陰極 10 冷却水通路 11 陰極電流導入部 12 ＨｆＣ, ＺｒＣ 12′ ＨｆＣ, ＺｒＣ 13 ＴｉＣコーティング膜 14 アーク 1 Anode 2 Plasma generation chamber 3 Plasma jet nozzle 4 Insulator 5 Working gas supply path 6 Cooling water passage 7 Anode current introduction part 8 Working gas and spray powder supply passage 9 Cathode 10 Cooling water passage 11 Cathode current introduction part 12 HfC, ZrC 12 'HfC, ZrC 13 TiC coating film 14 arc
Claims (2)
ラズマ発生チャンバーが設けられるとともに基部に絶縁
体が接合されかつ上記プラズマ発生チャンバーに通ずる
作動ガス供給路が設けられた陽極と、上記絶縁体の中心
部に貫設され先端が上記プラズマ発生チャンバー内にあ
りかつ中心部に作動ガス及び溶射粉体供給路が設けられ
た陰極とを具えたプラズマ溶射トーチにおいて、上記陰
極が冷却水通路を設けた銅製陰極とその先端のＨｆＣ又
はＺｒＣとから構成され、かつプラズマ発生チャンバー
内の陰極内面にＴｉＣコーティング膜が形成されたこと
を特徴とするプラズマ溶射トーチ。1. An anode provided with a plasma generation chamber having a plasma jet nozzle at its tip, an insulator joined to the base, and a working gas supply path communicating with the plasma generation chamber; and a central portion of the insulator. A plasma spray torch having a cathode having a tip provided in the plasma generation chamber and having a working gas and spray powder supply passage provided in the center thereof, wherein the cathode is a copper cathode provided with a cooling water passage. And a tip end of HfC or ZrC, and a TiC coating film formed on the inner surface of the cathode in the plasma generation chamber.
ラズマ発生チャンバーが設けられるとともに基部に絶縁
体が接合されかつ上記プラズマ発生チャンバーに通ずる
作動ガス供給路が設けられた陽極と、上記絶縁体の中心
部に貫設され先端が上記プラズマ発生チャンバー内にあ
りかつ中心部に作動ガス及び溶射粉体供給路が設けられ
た陰極とを具えたプラズマ溶射トーチにおいて、上記陰
極の先端より後方外周に陽極との間隙がプラズマ発生チ
ャンバー内で最も小さくなるように環状にＨｆＣ又はＺ
ｒＣを接合したことを特徴とするプラズマ溶射トーチ。2. An anode provided with a plasma generation chamber having a plasma jet nozzle at its tip, an insulator bonded to the base, and a working gas supply path communicating with the plasma generation chamber; and a central portion of the insulator. In a plasma spray torch having a cathode which is penetrated in the inside of the plasma generation chamber and has a working gas and a spray powder supply path provided in the center, a cathode is provided on the outer periphery rearward from the tip of the cathode. The HfC or Z is annularly formed so that the gap becomes the smallest in the plasma generation chamber.
A plasma spray torch characterized by bonding rC.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4210906A JPH0636890A (en) | 1992-07-15 | 1992-07-15 | Plasma spraying torch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4210906A JPH0636890A (en) | 1992-07-15 | 1992-07-15 | Plasma spraying torch |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0636890A true JPH0636890A (en) | 1994-02-10 |
Family
ID=16597032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4210906A Withdrawn JPH0636890A (en) | 1992-07-15 | 1992-07-15 | Plasma spraying torch |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636890A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100586466B1 (en) * | 2004-05-13 | 2006-06-07 | 재단법인서울대학교산학협력재단 | Rf inductively coupled plasma torch with modular water-cooled injector and multi-stage nozzle structure for injection of reactants |
| EP2642831A1 (en) | 2012-03-22 | 2013-09-25 | Hollberg, Manfred | Plasma electrode for a plasma arc torch and method for its manufacture |
| CN105376921A (en) * | 2015-12-11 | 2016-03-02 | 武汉科技大学 | Inner cavity powder supply tungsten needle for plasma processing |
| CN106269332A (en) * | 2016-08-19 | 2017-01-04 | 四川中物红宇科技有限公司 | plasma torch |
| KR20200097988A (en) * | 2019-02-11 | 2020-08-20 | (주)지니아텍 | Low temperature plasma device |
| CN114798211A (en) * | 2022-04-15 | 2022-07-29 | 厦门盛骅自动化设备有限公司 | Long-life multifunctional spray gun |
-
1992
- 1992-07-15 JP JP4210906A patent/JPH0636890A/en not_active Withdrawn
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100586466B1 (en) * | 2004-05-13 | 2006-06-07 | 재단법인서울대학교산학협력재단 | Rf inductively coupled plasma torch with modular water-cooled injector and multi-stage nozzle structure for injection of reactants |
| EP2642831A1 (en) | 2012-03-22 | 2013-09-25 | Hollberg, Manfred | Plasma electrode for a plasma arc torch and method for its manufacture |
| CN105376921A (en) * | 2015-12-11 | 2016-03-02 | 武汉科技大学 | Inner cavity powder supply tungsten needle for plasma processing |
| CN106269332A (en) * | 2016-08-19 | 2017-01-04 | 四川中物红宇科技有限公司 | plasma torch |
| CN106269332B (en) * | 2016-08-19 | 2019-01-22 | 四川中物红宇科技有限公司 | plasma torch |
| KR20200097988A (en) * | 2019-02-11 | 2020-08-20 | (주)지니아텍 | Low temperature plasma device |
| CN114798211A (en) * | 2022-04-15 | 2022-07-29 | 厦门盛骅自动化设备有限公司 | Long-life multifunctional spray gun |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19991005 |