JPH0686070U - Ultrasonic inspection device - Google Patents

Abstract

(57) [Summary] [Purpose] A simple procedure for the surface of the sample inspection part
It enables optical observation without any restrictions on the material and structure on the probe side. In an ultrasonic inspection apparatus capable of ultrasonically inspecting a sample 10 with an ultrasonic probe 3 and observing the surface of the inspected portion 10a of the sample 10 with an optical microscope 20, the surface of the inspected portion 10a is obliquely from above. The optical microscope 20 was arranged so that it could be observed.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an ultrasonic inspection apparatus equipped with an optical observation means capable of observing the surface of an inspection portion of a sample.

[0002]

[Prior art]

 Examples of this type of ultrasonic inspection apparatus include those disclosed in Japanese Utility Model Publication No. 62-22838 and Japanese Patent Publication No. 62-55099. The one disclosed in Japanese Utility Model Publication No. 62-22838 is arranged such that the ultrasonic axis of the ultrasonic microscope and the optical axis of the optical microscope are parallel to each other, and the sample mounting table is configured to It is configured so that it can move across the optical axis, and the ultrasonic examination and optical observation are alternately performed by reciprocating the sample mounting table.

On the other hand, in the one disclosed in Japanese Patent Publication No. 62-22838, the optical microscope is arranged above the probe of the ultrasonic microscope, and the ultrasonic axis of the ultrasonic microscope and the optical microscope are It is similar to observing the inspection part of the sample through the probe by making the probe of the ultrasonic microscope partly or wholly made of a transparent material so that the optical axes are substantially aligned with each other.

[0004]

[Problems to be solved by the device]

 However, the techniques described in the above-mentioned conventional publications have the following problems. First, the technique disclosed in Japanese Utility Model Publication No. 62-22838 discloses ultrasonic waves each time the inspection work by an ultrasonic microscope is changed to the observation work of the surface of the inspection portion by an optical microscope or the observation work is changed to the inspection work. There is a problem in that it is necessary to move the sample mounting table back and forth between the microscope and the optical microscope, which takes time and effort to transfer the work.

In the technique disclosed in Japanese Patent Publication No. 62-55099, since the ultrasonic axis of the ultrasonic microscope and the optical axis of the optical microscope coincide with each other, it is possible to save the labor of moving the sample mounting table. Since the inspection portion of the sample is observed through the probe, it is preferable that all of the electrodes, the piezoelectric element, and the acoustic lens that make up the ultrasonic probe have optical transparency. However, due to such material restrictions, there is a problem that it is not always possible to obtain a probe that can be inspected for the sample under optimum conditions. Alternatively, even if the electrode is made of a material that does not transmit light, the sample can be observed from the acoustic lens around the electrode if the acoustic lens is transparent, but the diameter of the electrode is smaller than that of the acoustic lens. There is a problem in that it is not always possible to obtain a probe that can be inspected under the optimum conditions for the sample in the same way, because of structural restrictions such as the need to use the probe.

An object of the present invention is to provide an ultrasonic inspection apparatus capable of optically observing the surface of an inspection portion of a sample with a simple procedure and without giving restrictions on the probe side in terms of material and structure. To provide.

[0007]

[Means for Solving the Problems]

 The present invention will be described with reference to FIG. 1 showing an embodiment. According to the present invention, an ultrasonic inspection of a sample 10 is performed by an ultrasonic probe 3, and an inspection section of the sample 10 is inspected by an optical observation means 20. 10a is applied to an ultrasonic inspection apparatus capable of observing the surface, and the above-mentioned object is achieved by arranging the optical observation means 20 so that the surface of the inspection portion 10a can be observed obliquely from above. .

[0008]

[Action]

 Since the optical observation means 20 is arranged so that the surface of the inspection portion 10a can be observed obliquely from above, ultrasonic inspection by the ultrasonic probe 3 and optical observation by the optical observation means 20 are performed. Can be done at the same time. Further, it is not necessary to see the inspection unit 10a of the sample 10 through the probe 3.

In the section of means and action for solving the above problems for explaining the configuration of the present invention, the drawings of the embodiments are used for the sake of easy understanding of the present invention. It is not limited to the example.

[0010]

【Example】

 First Embodiment FIG. 1 is a block diagram showing an ultrasonic microscope to which the first embodiment of the ultrasonic inspection apparatus according to the present invention is applied. In this figure, the excitation pulse sent from the transmitter 1 is sent to the ultrasonic probe 3 via the circulator 2. The ultrasonic probe 3 includes an acoustic lens 4 and an ultrasonic transducer 5 provided on the upper surface of the acoustic lens 4. Although not clearly shown in FIG. 1, the ultrasonic oscillator 5 includes a lower electrode 6, a piezoelectric element 7 and an upper electrode 8 (see FIG. 2), and the excitation pulse from the transmitter 1 is transmitted through the upper electrode 8 Is applied between the lower electrode 6 and the lower electrode 6. The piezoelectric element 7 of the vibrator 5 is excited by the application of the excitation pulse, and ultrasonic waves are generated. The generated ultrasonic waves propagate in the acoustic lens 4, and although not clearly shown in FIG. 1, they are focused by the recess 4 a (see FIG. 2) formed at the lower end of the acoustic lens 4 and the medium 9 such as water 9 The sample 10 is irradiated via the.

The reflected wave from the sample 10 is received by the transducer 5 of the ultrasonic probe 3 following the path opposite to the above, and a voltage proportional to the intensity of the reflected wave is output from the transducer 5. The receiving unit 11 performs predetermined signal processing such as amplification on the received signal from the vibrator 5, and the computer 12 takes in the peak value of the electric signal proportional to the amplitude of the reflected wave. This computer 12 controls the entire ultrasonic microscope of this embodiment. The peak value of the received signal is stored in the external storage device 13. Commands to the computer 12, such as a measurement start command, a sample movement command, and a measurement range, are input via the operation unit 14. Reference numeral 15 is an XYZ stage that supports the sample 10 so as to be movable in the XYZ directions in the figure, and the computer 12 controls the drive of the XYZ stage 15.

Based on a command from the computer 12, the XYZ stage 15 is drive-controlled so that the probe 3 relatively moves on the XY plane with respect to the sample 10, and the above-mentioned ultrasonic transmission / reception is performed in this state. Meanwhile, the probe 3 is scanned on the XY plane. On the monitor 16, ultrasonic signals obtained by ultrasonic wave transmission / reception and scanning by the probe 3 are displayed as an image.

The ultrasonic microscope of this embodiment is provided with an optical microscope 20 for observing the inspection portion 10 a of the sample 10, that is, the surface in the vicinity of the ultrasonic wave. The optical microscope 20 includes a light source 21 that emits visible light, an objective lens 22, a beam splitter 23, an eyepiece lens 24, and a CCD camera 25 that can capture a two-dimensional image. The optical axis A of the light source 21 extends from obliquely above the acoustic lens 4 of the ultrasonic probe 3 toward the inspection portion 10a of the sample 10, and the objective lens 22 and the beam splitter 23 have the optical axis A. It is located on A. On the other hand, the eyepiece lens 24 and the CCD camera 25 are arranged on an axis orthogonal to the optical axis A of the light source 21. The beam splitter 23 transmits light on the outward path (direction from the light source 21 toward the inspection unit 10a) and reflects the light on the return path (direction from the inspection unit 10a toward the light source 21) to the eyepiece lens 24. The image captured by the CCD camera 25 is displayed on the monitor 26. The light source 21, the objective lens 22, the beam splitter 23, the eyepiece lens 24, and the CCD camera 25, which form the optical microscope 20, are fixed to the XYZ stage 15 and move integrally with the stage 15.

It is preferable that the observation range of the optical microscope 20 covers at least the surface of the inspection unit 10 a of the sample 10 and the image of the acoustic lens 4 is included in a part of the observation range. The image of the acoustic lens 4 serves as a guide for the position of the inspection unit 10a within the observation range. Due to the depth of focus, it is not always necessary to focus on the image of the acoustic lens 4.

Therefore, according to the present embodiment, while the ultrasonic probe 3 is inspecting the surface of the inspection portion 10 a of the sample 10, the surface of the inspection portion 10 a is obliquely above the acoustic lens 4 by the optical microscope 20. Since the sample can be optically observed, it is not necessary to move the sample each time the ultrasonic inspection work is switched to the optical observation work or vice versa as in the above-mentioned conventional example, and the sample 10 can be simply processed. The surface of the inspection unit 10a can be observed. Further, unlike the above-mentioned conventional example, it is not necessary to observe the sample through the probe, so that there is no restriction on the material and structure on the probe 3 side, and the sample 10 can be inspected under optimum conditions. Possible probes can be used. During the measurement of the V (z) curve, temperature fluctuations of the medium 9 and the sample 10 greatly affect the measurement accuracy. Therefore, it was necessary to install the entire device in a temperature-controlled room or the like. In the present invention, since it is not necessary to move the sample 10 and the surface of the probe 3 and the sample 10 can be observed on the monitor 16 via the optical microscope 20 and the CCD camera 25, the XYZ stage 15 (search There is also an advantage that the temperature control becomes easy only by providing a shield to the scanning part of the tentacle 3 and the sample 10.

Second Embodiment FIG. 2 is a diagram showing an ultrasonic microscope to which the second embodiment of the ultrasonic inspection apparatus according to the present invention is applied, and the vicinity of the ultrasonic probe is shown enlarged. It is a block diagram. In the following description, the same components as those in the above-described first embodiment are designated by the same reference numerals, and differences are mainly described to simplify the entire description.

The optical microscope 30 of this embodiment includes a light source 31 that emits visible light, a bendable optical fiber scope 32, and a CCD camera 33 that can capture a two-dimensional image. The optical fiber scope 32 is a bundle of a plurality of optical fibers and is configured to transmit a two-dimensional image. The light beam emitted from the light source 31 travels on the optical axis A extending toward the inspection unit 10a of the sample 10, and the incident end 32a of the optical fiber scope 32 avoids the acoustic lens 4 from the inspection unit 10a of the sample 10 to generate ultrasonic waves. The probe 3 is fixed on the probe 3 side so that a light ray traveling along the optical axis B extending obliquely upward of the probe 3 can be received. Similarly, the emission end 32b is arranged so that the light beam emitted from the emission end 32b is guided to the CCD camera 33.

In this embodiment, the XYZ stage in the first embodiment includes an X stage 15a that scans the probe 3 in the X direction in the figure, and a YZ stage 15b that moves the sample 10 in the YZ direction. The X stage 15a and the YZ stage 15b are divided into a suspension base 15c that supports the stage.

Therefore, according to this embodiment as well, it is possible to obtain the same effects as those of the above-described first embodiment. In particular, in this embodiment, since the bendable optical fiber scope 32 is used in the optical transmission line, there is no need to fix the CCD camera 33 to the probe 3 side, and the weight of the movable part can be reduced. There is. In this case, if the light source 31 is provided close to the CCD camera 33 using a beam splitter or the like, the weight of the movable part can be further reduced. Further, the optical fiber scope 32 may be fixed to the suspension table 15c side.

In the correspondence between the embodiments described above and the claims, the optical microscopes 20 and 30 constitute an optical observation means. The details of the ultrasonic inspection apparatus of the present invention are not limited to the above-described embodiments, and various modifications can be made.

[0021]

[Effect of device]

 As described in detail above, according to the present invention, since the optical observation means is arranged so that the surface of the inspection portion of the sample can be observed obliquely from above, ultrasonic inspection by the ultrasonic probe and optical inspection are performed. Optical observation by the observation means can be performed simultaneously. Therefore, it is not necessary to move the sample as in the above-described conventional example, and the surface of the test portion of the sample can be observed by a simple procedure. Further, unlike the conventional example described above, there is no need to observe the sample through the probe, so there is no material or structural restriction on the probe side, and it is possible to inspect under optimum conditions for the sample. A probe can be used. Furthermore, because the sample is not observed through the probe and it is not necessary to move the sample, it is necessary to shield only the scanning part when performing an environmental test in a high temperature / low temperature atmosphere. There is also an advantage that temperature control becomes easy.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of an ultrasonic microscope which is a first embodiment of an ultrasonic inspection apparatus according to the present invention.

FIG. 2 is a diagram showing an ultrasonic microscope which is a second embodiment of the ultrasonic microscope according to the present invention, and is a block diagram showing an enlarged view of the vicinity of the ultrasonic probe.

[Explanation of symbols]

 3 Ultrasonic probe 4 Acoustic lens 5 Ultrasonic transducer 10 Sample 10a Inspection part 20, 30 Optical microscope

Claims (1)

[Scope of utility model registration request] 1. An ultrasonic inspection apparatus capable of performing an ultrasonic inspection of a sample with an ultrasonic probe and observing the surface of an inspection portion of the sample with an optical observation means, wherein the optical observation means comprises the inspection. An ultrasonic inspection apparatus characterized in that the surface of the part is arranged so as to be observed obliquely from above.