CN106821320A - A kind of opto-acoustic microscopic imaging system - Google Patents
A kind of opto-acoustic microscopic imaging system Download PDFInfo
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- CN106821320A CN106821320A CN201710078203.6A CN201710078203A CN106821320A CN 106821320 A CN106821320 A CN 106821320A CN 201710078203 A CN201710078203 A CN 201710078203A CN 106821320 A CN106821320 A CN 106821320A
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0093—Detecting, measuring or recording by applying one single type of energy and measuring its conversion into another type of energy
- A61B5/0095—Detecting, measuring or recording by applying one single type of energy and measuring its conversion into another type of energy by applying light and detecting acoustic waves, i.e. photoacoustic measurements
Abstract
The embodiment of the invention discloses a kind of opto-acoustic microscopic imaging system, including laser generator, light path system, ultrasonic transducer and scanning means, wherein, the laser generator is used to export the laser beam of high-frequency laser beam and high-energy；The light path system is used to export the laser beam of the high-frequency laser beam and the high-energy to the scanning means, and the scanning means is used to receive the laser beam of the light path system output and for laser beam to be irradiated into sample；The ultrasonic transducer is used to receive the ultrasonic signal that sample sends；Wherein, the beam transmission in the light path system is to be transmitted in air space.Using the present invention, with the preferable advantage of imaging effect.
Description
Technical field
The present invention relates to imaging field, more particularly to a kind of opto-acoustic microscopic imaging system.
Background technology
Optical image technology is one of branch with the fastest developing speed in current different kind organism Medical Imaging Technology.Compared to it
His medical imaging modalities for example x-ray imaging, computer tomography, positron emission tomography, ultrasonic imaging, magnetic resonance into
Picture, fluorescence co-focusing and two-photon fluorescence imaging etc., optical image technology is in resolution ratio, chemical specificity, sensitivity, security
There is advantage respectively Deng certain or many aspects.But optical image technology it is maximum be limited in that its tissue penetration depths.Light
The appearance of acoustic imaging technology overcomes this problem well.Photoacoustic imaging technology is to irradiate biological specimen with the laser of pulse
Afterwards, energy can rapidly be absorbed by the tissue of sample interior, tissue can expanded by heating form instantaneous pressure, produce the super of broadband
Acoustic signals, the ultrasonic signal is referred to as photoacoustic signal.Photoacoustic signal will can be placed on sample through tissue outwards transmission
The ultrasonic transducer in outside is detected, and the power according to photoacoustic signal calculates corresponding sample biological tissue composition, according to light
The time counterplot that acoustical signal reaches ultrasonic transducer calculates corresponding depth information.Thus obtain organization internal axial direction
The structural constituent and depth information in (along laser beam direction), with the x-y plane point by point scanning to biological specimen, it is possible to obtain
Obtain 3D (solid) image in the region.The 3D rendering resolution ratio for receiving point axial resolution and lateral resolution, axial resolution
Depending on the working frequency and bandwidth of ultrasonic transducer, lateral resolution depends on optical focus or sound in photoacoustic imaging technology
Learn the size of focus.
In sample biological tissue, if imaging depth is less than optics mean free path (about 1mm), can be by laser beam
Focus on several micro-meter scales even nanometer scale small focal spot on, this focal spot size already close to or reach optical
Diffraction limit；If reaching same small focal spot size, the centre frequency of acoustic signal at least needs hundreds of more than MHZ,
Under such high frequency, ultrasonic signal can only in biological tissues propagate hundreds of microns.Therefore in tissue table of the depth less than 1mm
Layer, optical focus performance is better than Acoustic focusing, and optical focus are less than acoustic focus, and the lateral resolution of light microscope is depended on
The size of optical focus, such opto-acoustic microscopic imaging system is referred to as the opto-acoustic microscopic imaging system with optical resolution
(OR-PAM), resolution ratio can reach nanoscale.If but imaging depth reaches tens more than 1mm in sample biological tissue
During individual mm, due to optical scattering strong in sample biological tissue, laser beam can not be focused on effectively under this depth, but
It is that ultrasonic signal but can effectively be focused under this depth.In this case, acoustic focus are less than optical focus, optoacoustic
Microscopical lateral resolution depends primarily on the size of acoustics focal spot, and such opto-acoustic microscopic imaging system is referred to as with sound
The opto-acoustic microscopic imaging system (AR-PAM) of credit resolution, can obtain on several millimeters to tens imaging depths of millimeter
Tens microns to hundreds of microns of lateral resolution.
Currently the opto-acoustic microscopic imaging system (OR-PAM) of optical resolution can be realized on one system, and can realize
The conceptual design of the opto-acoustic microscopic imaging system (AR-PAM) of acoustics resolution ratio mainly has following one kind.
This kind of design principle is as shown in Figure 1, it is illustrated that in, Pump laser and Dye laser integrally represent laser,
Iris represents diaphragm, and L1 represents lens, and PH represents pin hole, and M1 represents level crossing, and EL represents electronic pancratic lens, and Obj1 is represented
Object lens, FB represents fibre bundle, and Obj2 represents object lens, and BS represents spectroscope, and Obj3 represents object lens；M2 represents level crossing；GS is represented
Sheet glass, S representative samples, W represents tank, and P represents prism, and UT represents transducer, and L2 represents lens, and PD represents the pole of photoelectricity two
Pipe, Amplifier represents amplifier, and DAQ represents data collecting card, and WS represents computer.Changed by an electronic pancratic lens
Become the size of hot spot when laser beam is coupled to fibre bundle section.When system realizes the opto-acoustic microscopic imaging (OR- of optical resolution
When PAM), the focal length for adjusting pancratic lens makes laser facula size (please join on that root optical fiber in fibre bundle bosom just
See Fig. 2 a)；When system realizes the opto-acoustic microscopic imaging (AR-PAM) of acoustics resolution ratio, the focal length for adjusting pancratic lens makes laser
Spot size covers the section (referring to Fig. 2 b) of whole fibre bundle just, can so be transmitted in the case where fibre bundle is not damaged
More energy, the schematic diagram of Principles of Regulation is as shown in Figure 2 a and 2 b.Although this scheme optics in individual system realization
Resolution ratio harmony credit resolution across scale imaging, but have the following disadvantages：Sample biological specimen is had to first complete light
The imaging of credit resolution, namely the focal length of adjustment pancratic lens makes laser facula size cover the disconnected of whole fibre bundle just
Face, whole scannings are carried out to whole sample, then by adjusting the focal length of lens, be switched to another acoustics resolution ratio into
Picture, namely the focal length of adjustment pancratic lens makes laser facula size just on that root optical fiber in fibre bundle bosom.It is this kind of
One of shortcoming of design is that synchronous optical resolution imaging and acoustics resolution imaging can not be realized to sample, and
Coupling efficiency of the laser beam in fibre bundle be not high, and the energy of transmission is also smaller.
The content of the invention
Embodiment of the present invention technical problem to be solved is, there is provided a kind of opto-acoustic microscopic imaging system, imaging effect
Preferably.
In order to solve the above-mentioned technical problem, a kind of opto-acoustic microscopic imaging system, including laser be the embodiment of the invention provides
Generator, light path system, ultrasonic transducer and scanning means, wherein,
The laser generator is used to export the laser beam of high-frequency laser beam and high-energy；
The light path system is used to export the laser beam of the high-frequency laser beam and the high-energy to be swept to described
Imaging apparatus,
The scanning means is used to receive the laser beam of the light path system output and for laser beam to be irradiated into sample
On；
The ultrasonic transducer is used to receive the ultrasonic signal that sample sends；Wherein,
Beam transmission in the light path system is to be transmitted in air space.
In an embodiment of the present invention, the laser generator includes：High frequency lasers generator, it is used to produce the height
The laser beam of frequency；High energy laser generator, its laser beam for being used to produce the high-energy.
In an embodiment of the present invention, the laser beam of the high-frequency laser beam and the high-energy is mutual in intersection
Vertically.
In an embodiment of the present invention, the light path system include the first lens, pin hole, the second lens, the 3rd lens and
Spectroscope, the described high-frequency laser beam that the high frequency lasers generator is produced is via first lens, the pin hole, institute
State the second lens and reach the spectroscope, the laser beam of the high-energy that the high energy laser generator is produced is via described
3rd lens reach the spectroscope, and the spectroscope is by the high-frequency laser beam and the laser beam direction of the high-energy
The scanning means output.
In an embodiment of the present invention, the laser generator includes high frequency lasers generator and lowering freqyency device, the height
Frequency laser generator sends the first laser beam and second laser beam of same frequency, and the first laser beam is described high-frequency
Laser beam, the second laser beam is via the lowering freqyency device exporting the laser beam of the high-energy.
In an embodiment of the present invention, the light path system includes the catoptric lens with dark space, the ultrasonic transduction
Device is arranged on dark space position and against the scanning means, and laser beam is reflected towards the scanning means by the catoptric lens,
The ultrasonic transducer receives the ultrasonic signal reflected back via the scanning means.
In an embodiment of the present invention, the scanning means is MEMS galvanometers, and the opto-acoustic microscopic imaging system also includes
Tank, the MEMS galvanometers are located in tank.
In an embodiment of the present invention, the MEMS galvanometers are single shaft MEMS scanning galvanometers, and the MEMS galvanometers are used to drive
Dynamic laser beam is moved on sample towards first direction, and the opto-acoustic microscopic imaging system also includes electricity driving displacement device, the light
Road system includes reflection unit, and the reflection unit is used for laser beam reflection towards the scanning means, the electricity driving displacement
Device is used to drive the movement of the reflection unit, the scanning means and the ultrasonic transducer so that laser beam court on sample
Second direction is moved, and the first direction and second direction are vertical.
In an embodiment of the present invention, the MEMS galvanometers are biaxial MEMS scanning galvanometer.
In an embodiment of the present invention, also including amplifier, data collecting card and terminal computer, the amplifier with it is described
Ultrasonic transducer is electrically connected, and the data collecting card electrically connects with the amplifier, the terminal computer and the data acquisition
Card electrical connection.
Implement the embodiment of the present invention, have the advantages that：
Because the beam transmission in the light path system is to be transmitted in air space, from without prior art
Coupling efficiency of the middle laser beam in fibre bundle problem not high, and the energy of beam transmission is larger in air space, from
And preferable imaging effect can be realized；And, in same system without switching i.e. be capable of achieving optical resolution imaging and
Acoustics resolution imaging is realized, it is easy to operate；And, optical resolution imaging harmony resolution imaging can also be realized together
Step.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is a kind of principle schematic of the opto-acoustic microscopic imaging system of scheme of prior art；
Fig. 2 a are schematic diagram of the laser facula in that root optical fiber in fibre bundle bosom；
Fig. 2 b are the schematic diagrames that laser facula covers whole fibre bundle；
Fig. 3 is the principle schematic of the opto-acoustic microscopic imaging system of one embodiment of the invention；
Fig. 4 is the schematic diagram of one embodiment of the invention catoptric lens, ultrasonic transducer, scanning means and tank；
Fig. 5 is the principle schematic of the opto-acoustic microscopic imaging system of another embodiment of the present invention；
Shown by reference numeral：
110- high frequency lasers generators；The high-frequency laser beams of 111-；120- high energy laser generators；121- high-energy
Laser beam；200- light path systems；211 first lens；212- pin holes；The lens of 213- second；The lens of 221- the 3rd；231- light splitting
Mirror；232- catoptric lens；310- scanning means；410- ultrasonic transducers；510- tanks；610- reflection units；620- is electronic
Gearshift.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
A kind of opto-acoustic microscopic imaging system is the embodiment of the invention provides, the opto-acoustic microscopic imaging system is used for sample
Imaging, the sample is, for example, biological tissue etc., and the biological tissue is, for example, blood vessel etc..Refer to Fig. 3 and Fig. 4, the light
Sound micro imaging system includes laser generator, light path system 200, ultrasonic transducer 410 and scanning means 310.
The laser generator is used to export the laser beam 121 of high-frequency laser beam 111 and high-energy, the high-frequency
Laser beam 111 refer generally to the frequency of laser beam for more than 10KHz (KHz), for example, 10KHZ, 100KHz, 500KHZ,
1MHz (megahertz) etc., the laser beam 121 of the high-energy refers to individual pulse laser in more than 5mJ (MJ), for example,
5mJ, 10mJ, 20mJ, 30mJ etc..The high-frequency laser beam 111 be used for optical resolution imaging, the high-energy swash
Light beam 121 is used for the imaging of acoustics resolution ratio.The laser beam 121 of the high-frequency laser beam 111 and high-energy preferably divides
When be radiated on sample, be for example radiated on sample in the first moment high-frequency laser beam 111, in high energy described in the second moment
The laser beam 121 of amount is radiated on sample；Or when the laser beam 121 and high-frequency laser beam 111 of high-energy are non-interference
When, the laser beam 121 and high-frequency laser beam 111 of the high-energy can also be radiated on sample simultaneously.
The light path system 200 is used to export the laser beam 121 of high-frequency laser beam 111 and high-energy gives scanning dress
310 are put, for example, when the laser beam 121 of the high-frequency laser beam 111 and high-energy can not incide scanning means 310
During correct position, can be adjusted by light path system 200.The light path system 200 can be also used for the light to laser beam
Learn characteristic be adjusted, for example adjust high frequency lasers beam focusing, to high frequency lasers Shu Jinhang shapings, adjustment high energy laser beam
Focusing etc..
The scanning means 310 is used to receive the laser beam of the output of the light path system 200 and for laser beam to be irradiated
Onto sample, for example, high-frequency laser beam 111 is irradiated to first of sample in scanning means 310 described in the first moment
Put, the laser beam 121 of high-energy is irradiated to the first position of sample in scanning means 310 described in the second moment, so that by
Treatment below can obtain the image of first position, next, swashing high-frequency in scanning means 310 described in the 3rd moment
Light beam 111 is irradiated to the second place of sample, irradiates the laser beam 121 of high-energy in scanning means 310 described in the 4th moment
To the second place of sample, so as to the image of the second place can be obtained by treatment below, due to first position and second
Position is located at the Different Plane position of sample, such that it is able to obtain sample in first position, the 3D rendering of the second place, now,
The axial resolution and lateral resolution of the 3D rendering of acquisition are all preferable.Herein, the first moment before the second moment, second
Moment, the 3rd moment was before the 4th moment before the 3rd moment.When high-frequency laser beam 111 and the laser beam of high-energy
121 when not interfering with one another, and first moment can be equal to for the second moment, and the 3rd moment can be equal to for the 4th moment.
The ultrasonic transducer 410 is used to receive the ultrasonic signal that sample sends, particularly, when described high-frequency
Laser beam 111 is irradiated on sample, after sample tissue absorbs light, can expanded by heating, the vibration of generation high frequency, outside transmission ultrasound
Ripple signal, ultrasonic transducer 410 can receive the ultrasonic signal and be converted to electric signal, to facilitate the treatment being imaged below, this
When, imaging depth be less than optics mean free path (about 1mm), and lateral resolution preferably, can reach micron dimension or
Person's nanometer scale；When the laser beam 121 of the high-energy is irradiated on sample, energy can rapidly be inhaled by the tissue of sample interior
Receive, tissue meeting expanded by heating forms instantaneous pressure, produce the ultrasonic signal in broadband, the ultrasonic signal to be referred to as optoacoustic
Signal, ultrasonic transducer 410 can receive the photoacoustic signal and be converted to electric signal, to facilitate the treatment being imaged below, now, into
As depth is more than optics mean free path, and lateral resolution is preferably, can reach tens micron dimensions to hundreds of microns
Magnitude.
Wherein, in the present embodiment, the beam transmission in the light path system 200 is to be transmitted in air space,
That is, after the laser beam 121 and high-frequency laser beam 111 for producing high-energy, the transmission of the laser beam is all in sky
In headroom transmit, it is not necessary to be coupled in optical fiber or fibre bundle, such as between lens and lens the transmission of laser beam be
Transmitted in air space, the transmission of laser beam is transmitted in air space between lens and spectroscope 231, the He of spectroscope 231
The transmission of the laser beam between speculum is transmitted in air space, between the spectroscope 231 and object lens or speculum
The transmission of laser beam is transmitted in air space between object lens.In the present embodiment, between object lens and scanning means 310
Laser Transmission is carried out in water.
In the present embodiment, because the beam transmission in the light path system 200 is to be transmitted in air space, so that
Be not in coupling efficiency of the laser beam in fibre bundle problem not high in the prior art, and laser beam is passed in air space
Defeated energy is larger；And, it is imaged and realizes acoustics resolution without the i.e. achievable optical resolution of switching in same system
Rate is imaged, easy to operate；And, optical resolution imaging harmony resolution imaging can also realize synchronization.
In the present embodiment, the laser generator includes high frequency lasers generator 110 and high energy laser generator
120, the high frequency lasers generator 110 and high energy laser generator 120 are independently arranged, the high frequency lasers generator 110
For producing high-frequency laser beam 111, the high energy laser generator 120 to be used to produce the laser beam 121 of high-energy.Separately
Outward, in other embodiments of the invention, the laser generator can also include that a high frequency lasers generator and frequency reducing are filled
Put, the high frequency lasers generator can send laser beam in both direction, and the laser beam that both direction sends all is high frequency
Laser beam, namely both frequencies are identical, and the lowering freqyency device is set on the path by the laser beam sent in a direction,
The lowering freqyency device includes acousto-optic modulator to realize frequency reducing, so that the laser beam of satisfactory high-energy is obtained, so as to produce
The laser beam of raw high-energy；So as to high frequency lasers generator 110 sends two laser beams, one of them meets high-frequency laser
The requirement of beam, another laser beam produces the laser beam of satisfactory high-energy by treatment, realizes high frequency lasers generator
With reference to acousto-optic modulator, the laser beam of high-frequency laser beam and high-energy, namely laser generator output high frequency are produced
The laser beam of rate and the laser beam of high-energy, herein, it is preferable that the high frequency lasers generator sends laser beam in both direction
For timesharing is carried out, if the laser beam of the laser beam of high-energy and high frequency is not interfered in intersection, the high frequency lasers generator
Sending laser beam in both direction can also be while carries out.
In the present embodiment, the laser beam 121 of the high-frequency laser beam 111 and the high-energy is mutual in intersection
Vertically, herein, the high-frequency laser beam 111 sent from high frequency lasers generator 110 is by after optical treatment and from high energy
The laser beam 121 of the high-energy that laser generator 120 sends is measured by being intersected after optical treatment, in the present embodiment, institute
Stating light path system 200 includes spectroscope 231, and the laser beam 121 and high-frequency laser beam 111 of the high-energy are in spectroscope
Intersect at 231, particularly, the high-frequency laser beam 111 is transmitted through the spectroscope 231, the laser of the high-energy
Beam 121 is reflected by spectroscope 231, two laser beams by after spectroscope 231 towards same direction.In the present embodiment
In, when two laser beams are that timesharing is produced, two the intersecting of laser beam refer to the intersecting of laser beam irradiation route.In this implementation
In example, the angle between the incident route and reflection route of the laser beam 121 of the high-energy is 90 °.
In the present embodiment, in order that the laser for being irradiated to sample surface meets the requirements, the light path system 200 includes the
One lens 211, pin hole 212, the second lens 213, the 3rd lens 221 and the spectroscope 231, the high frequency lasers generator
The 110 high-frequency laser beams 111 for producing are focused via the first lens 211, pin hole 212, the second lens 213, after shaping
The laser beam 121 of the high-energy produced transmitted through the spectroscope 231, the high energy laser generator 120 is saturating via the 3rd
Mirror 221 reflects after focusing on through the spectroscope 231, and the laser beam 121 of high-frequency laser beam 111 and high-energy is towards sweeping thereafter
Imaging apparatus 310 are exported.In addition, in other embodiments of the invention, it will be understood by those skilled in the art that the light
Road system can also be realized by other optical elements.
In the present embodiment, incorporated by reference to referring to Fig. 3 and Fig. 4, the light path system 200 also includes reflective with dark space
Object lens 232, the catoptric lens 232 is arranged on the side of tank, and such compact conformation is also allowed for fixing, and the ultrasound is changed
Can device 410 be arranged on dark space position and against scanning means 310, the catoptric lens 232 is by the He of high-frequency laser beam 111
The laser beam 121 of high-energy is reflected towards the scanning means 310, and the ultrasonic transducer 410 receives anti-via scanning means 310
Incoming ultrasonic signal.In the present embodiment, ultrasonic transducer 410 is placed on the dark space position of catoptric lens 232, institute
Dark space position is stated positioned at the bottom of catoptric lens 232, one side ultrasonic transducer 410 does not influence the efficiency of transmission of light path, separately
On the one hand help to realize that optoacoustic is coaxial, improve signal to noise ratio.In the present embodiment, the opto-acoustic microscopic imaging system also includes water
Groove 510, the ultrasonic transducer 410 is located in tank 510, and the sample is located at the lower section of tank 510, ultrasound in the present embodiment
Transducer 410 is cleverly placed on the dark space of catoptric lens 232, and photoacoustic signal can be made directly to be changed by ultrasound in water transmission
Energy device 410 is detected, and significantly improves the intensity of signal, namely need not first pass through water as the first prior art,
Again by glass, finally just received by ultrasonic transducer, but two kinds of propagation medium acoustic impedances of water and glass are different, so that first
The photoacoustic signal loss for planting prior art is very big.And, the catoptric lens 232 of the present embodiment, ultrasonic transducer 410, sweep
Imaging apparatus 310 are located at the side of sample, and the opto-acoustic microscopic imaging system of the present embodiment has wide range of applications.In addition, in the present invention
Other embodiment in, the setting of the object lens and ultrasonic transducer can also be other conventional alternative structures；The object lens
The catoptric lens with dark space is may not be, now the position of ultrasonic transducer can be adjusted according to prior art.Separately
Outward, in the present embodiment, the ultrasonic transducer 410 is piezoelectric ultrasonic transducer 410, certainly can also be the super of other routines
Sonic transducer.
In the present embodiment, the scanning means 310 is MEMS galvanometers (Micro-Electro-Mechanical
System, MEMS scanning mirror), the MEMS galvanometers are located in tank 510 and can be scanned in water high speed, institute
MEMS galvanometers are stated to export on sample the laser beam 121 of high-frequency laser beam 111 and high-energy, and, the MEMS shakes
Mirror also receives the ultrasonic signal (comprising photoacoustic signal) that sample sends, and ultrasonic signal is reflexed to ultrasonic transduction by MEMS galvanometers
On device 410.So as in the present embodiment, on the one hand compare mechanical scanning greatly improves sweep speed to the MEMS galvanometers, carries
Image taking speed has been risen, so that image taking speed is very fast, the coaxial scanning of light and photoacoustic signal has on the other hand been also achieved, noise has been lifted
Than.In addition, in other embodiments of the invention, the scanning means can be traditional mechanical scanner, can be with it
The galvanometer of his routine.
In the present embodiment, the MEMS galvanometers are preferably biaxial MEMS scanning galvanometer, namely MEMS galvanometers can drive
The laser beam 121 of high-frequency laser beam 111 and high-energy is moved towards first direction and moved towards second direction, the first party
To vertically, the first direction is, for example, X-direction, and the second direction is, for example, Y direction with second direction.Illustrate below
To illustrate, the MEMS galvanometers drive high-frequency laser beam to be radiated at (1,0) position of sample at the first moment, described
MEMS galvanometers drive the laser beam 121 of high-energy to be radiated at (1,0) position of sample at the second moment, and then, the MEMS shakes
Mirror drives high-frequency laser beam to be radiated at (2,0) position of sample at the 3rd moment, and the MEMS galvanometers drive at the 4th moment
The laser beam 121 of high-energy is radiated at (2,0) position ... of sample, and the MEMS galvanometers drive high at the 2nd (n-1)+1 moment
Frequency laser beam is radiated at (n, 0) position of sample, and the MEMS galvanometers drive the laser of high-energy at the 2nd (n-1)+2 moment
Beam 121 is radiated at (n, 0) position of sample, wherein, (1, the 0) position, (2,0) position ..., (n, 0) position is in X-axis；
Thereafter, the MEMS galvanometers drive high-frequency laser beam to be radiated at (1,1) position of sample at the 2nd (n-1)+2+1 moment, described
MEMS galvanometers drive the laser beam 121 of high-energy to be radiated at (1,1) position of sample, then, institute at the 2nd (n-1)+2+2 moment
(2,1) position that MEMS galvanometers drive high-frequency laser beam 111 to be radiated at sample at the 2nd (n-1)+2+3 moment is stated, it is described
MEMS galvanometers drive the laser beam 121 of high-energy to be radiated at (2,1) position ... of sample at the 2nd (n-1)+2+4 moment, described
MEMS galvanometers drive high-frequency laser beam to be radiated at (n, 1) position of sample at the moment of the 2nd (n-1)+2+2 (n-1)+1, described
MEMS galvanometers drive the laser beam 121 of high-energy to be radiated at (n, 1) position of sample at the moment of the 2nd (n-1)+2+2 (n-1)+2,
Wherein, described (1,1) position, (2,1) position ..., the line paralleled by X axis of (n, 1) position；…；Finally, the MEMS galvanometers exist
(2 (n-1)+2) moment of * (m-1)+1 drive high-frequency laser beam 111 be radiated at sample (1, m) position, the MEMS shakes
Mirror (2 (n-1)+2) moment of * (m-1)+2 drive high-energy laser beam 121 be radiated at sample (1, m) position, then,
The MEMS galvanometers (2 (n-1)+2) moment of * (m-1)+3 drive high-frequency laser beam 111 be radiated at sample (2, m)
Position, the MEMS galvanometers drive the laser beam 121 of high-energy to be radiated at sample at (2 (n-1)+2) moment of * (m-1)+4
(2, m) position ..., the MEMS galvanometers drive high-frequency laser beam 111 to be radiated at sample at (2 (n-1)+2) the * m-1 moment
This (n, m) position, the MEMS galvanometers drive the laser beam 121 of high-energy to be radiated at sample at (2 (n-1)+2) the * m moment
(n, m) position, wherein, it is described (1, m) position, (2, m) position ..., the line paralleled by X axis of (n, m) position；(1,1)
Position, (2,1) position ..., the parallel Y-axis of line of (n, 1) position, (1, the 2) position, (2,2) position ..., (n, 2) position
The parallel Y-axis ... of line, it is described (1, m) position, (2, m) position ..., (n, m) position parallel Y-axis of line, the n be more than or
Integer equal to 1, the m is the integer more than or equal to 1, so that, high-energy can be realized by biaxial MEMS scanning galvanometer
More several points in sample plane of laser beam 121 and high-frequency laser beam 111 scanning, sweep speed is fast, obtains three
Dimension image temporal is short.In addition, scan mode of the drive laser beam of above-mentioned scanning means 310 in sample plane is only citing, institute
Stating scanning means 310 can also realize that drive laser beam is scanned in sample plane by other scanning sequencies.
In addition, in other embodiments of the invention, referring to Fig. 5, the MEMS galvanometers can also be swept for single shaft MEMS
Galvanometer is retouched, the MEMS galvanometers are used for drive laser beam and are moved towards first direction on sample, and the first direction is, for example, X-axis
Direction or Y direction, the opto-acoustic microscopic imaging system also include electricity driving displacement device 620,620, the electricity driving displacement device
Such as it is three-D electric displacement platform.The light path system 200 also includes reflection unit 610, and the reflection unit 610 is, for example, to reflect
Mirror, the reflection unit 610 is used for laser beam reflection towards scanning means 310, and the electricity driving displacement device 620 is used to drive
Reflection unit 610, scanning means 310, ultrasonic transducer 410 are jointly mobile, so that laser beam is moved on sample towards second direction
Dynamic, the first direction and second direction are vertical, and the second direction is, for example, Y-direction or X-direction.Herein, if light path
System includes the catoptric lens 232, then reflection unit 610 is located between spectroscope 231 and catoptric lens 232, described
Electricity driving displacement device 620 can drive reflection unit 610, catoptric lens 232, scanning means 310 and ultrasonic transducer 410 together
It is mobile.In the present embodiment, by catoptric lens, the adjustment of beam direction can be facilitated.In addition, it is of the invention other
In embodiment, equally, the MEMS galvanometers can also be single shaft MEMS scanning galvanometers, herein, the catoptric lens, scanning
Device and ultrasonic transducer are motionless, and the sample is moved along Y direction, and it is right that the single shaft MEMS scanning galvanometers can equally be realized
Sample carries out flat scanning.
In the present embodiment, the opto-acoustic microscopic imaging system also includes amplifier, data collecting card and terminal computer, institute
State amplifier to be electrically connected with the ultrasonic transducer 410, the data collecting card is electrically connected with the amplifier, the terminal electricity
Brain is electrically connected with the data collecting card.Ultrasonic signal is received via ultrasonic transducer 410 and is converted to electric signal, then by putting
Big device, data collecting card, are recorded on computer, by software to the signal analysis and processing that detects, you can draw out tested
Object.
It should be noted that each embodiment in this specification is described by the way of progressive, each embodiment weight
Point explanation is all difference with other embodiments, between each embodiment identical similar part mutually referring to.
For device embodiment, because it is substantially similar to embodiment of the method, so description is fairly simple, related part referring to
The part explanation of embodiment of the method.
By the description of above-described embodiment, the present invention has advantages below：
Because the beam transmission in the light path system is to be transmitted in air space, from without prior art
Coupling efficiency of the middle laser beam in fibre bundle problem not high, and the energy of beam transmission is larger in air space；And
And, it is easy to operate without switching i.e. achievable optical resolution imaging and realizing acoustics resolution imaging in same system；
And, optical resolution imaging harmony resolution imaging can also realize synchronization.
It is understood that the above embodiment of the present invention is not in the case where conflicting, can combine to obtain more
Many embodiments.
In the description of the invention, it is to be understood that term " " center ", " on ", D score, " vertical ", " level ",
The orientation or position relationship of the instruction such as " top ", " bottom ", " interior ", " outward ", " clockwise ", " counterclockwise " are based on side shown in the drawings
Position or position relationship, are for only for ease of the description present invention and are described with simplified, rather than the device or unit that indicate or imply meaning
Part with specific orientation, with specific azimuth configuration and operation, therefore must be not considered as limiting the invention.This
Outward, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or implying relative importance or implicit finger
The quantity of bright indicated technical characteristic.Thus, " first " is defined, the feature of " second " can be expressed or implicitly include
One or more this feature.In the description of the invention, " multiple " is meant that two or more, unless otherwise bright
It is really specific to limit.
In the present invention, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be being fixedly connected, or being detachably connected, or be integrally connected；It can be machine
Tool is connected, or electrically connected；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, can be two units
Connection inside part.For the ordinary skill in the art, can as the case may be understand above-mentioned term in this hair
Concrete meaning in bright.
Above disclosed is only present pre-ferred embodiments, can not limit the right model of the present invention with this certainly
Enclose, therefore the equivalent variations made according to the claims in the present invention, still belong to the scope that the present invention is covered.
Claims (10)
1. a kind of opto-acoustic microscopic imaging system, it is characterised in that including laser generator, light path system, ultrasonic transducer and sweep
Imaging apparatus, wherein,
The laser generator is used to export the laser beam of high-frequency laser beam and high-energy；
The light path system is used to export the laser beam of the high-frequency laser beam and the high-energy to the scanning dress
Put,
The scanning means is used to receive the laser beam of the light path system output and for laser beam to be irradiated into sample；
The ultrasonic transducer is used to receive the ultrasonic signal that sample sends；Wherein,
Beam transmission in the light path system is to be transmitted in air space.
2. opto-acoustic microscopic imaging system as claimed in claim 1, it is characterised in that the laser generator includes：
High frequency lasers generator, it is used to produce the high-frequency laser beam；
High energy laser generator, its laser beam for being used to produce the high-energy.
3. opto-acoustic microscopic imaging system as claimed in claim 2, it is characterised in that the high-frequency laser beam and the height
The laser beam of energy is orthogonal in intersection.
4. opto-acoustic microscopic imaging system as claimed in claim 2, it is characterised in that the light path system include the first lens,
Pin hole, the second lens, the 3rd lens and spectroscope, the described high-frequency laser beam that the high frequency lasers generator is produced via
First lens, the pin hole, second lens reach the spectroscope, the institute that the high energy laser generator is produced
State the laser beam of high-energy and reach the spectroscope via the 3rd lens, the spectroscope is by the high-frequency laser beam
Exported towards the scanning means with the laser beam of the high-energy.
5. opto-acoustic microscopic imaging system as claimed in claim 1, it is characterised in that the laser generator includes high frequency lasers
Generator and lowering freqyency device, the high frequency lasers generator send the first laser beam and second laser beam of same frequency, described
First laser beam is the high-frequency laser beam, and the second laser beam is via the lowering freqyency device exporting the high-energy
Laser beam.
6. opto-acoustic microscopic imaging system as claimed in claim 1, it is characterised in that the light path system is included with dark space
Catoptric lens, the ultrasonic transducer is arranged on dark space position and against the scanning means, and the catoptric lens will swash
Light beam is reflected towards the scanning means, and the ultrasonic transducer receives the ultrasonic wave reflected back via the scanning means to be believed
Number.
7. opto-acoustic microscopic imaging system as claimed in any one of claims 1 to 6, it is characterised in that the scanning means is
MEMS galvanometers, the opto-acoustic microscopic imaging system also includes tank, and the MEMS galvanometers are located in tank.
8. opto-acoustic microscopic imaging system as claimed in claim 7, it is characterised in that the MEMS galvanometers are single shaft MEMS scannings
Galvanometer, the MEMS galvanometers are used for drive laser beam and are moved towards first direction on sample, and the opto-acoustic microscopic imaging system is also
Including electricity driving displacement device, the light path system includes reflection unit, and the reflection unit is used for laser beam reflection towards institute
Scanning means is stated, the electricity driving displacement device is used to drive the reflection unit, the scanning means and the ultrasonic transducer
It is mobile so that laser beam is moved on sample towards second direction, the first direction and second direction are vertical.
9. opto-acoustic microscopic imaging system as claimed in claim 7, it is characterised in that the MEMS galvanometers are biaxial MEMS scanning
Galvanometer.
10. opto-acoustic microscopic imaging system as claimed in any one of claims 1 to 6, it is characterised in that also including amplifier, number
According to capture card and terminal computer, the amplifier is electrically connected with the ultrasonic transducer, the data collecting card and the amplification
Device is electrically connected, and the terminal computer is electrically connected with the data collecting card.
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