JPH0685341A - Electrostrictive effect element - Google Patents
Electrostrictive effect elementInfo
- Publication number
- JPH0685341A JPH0685341A JP4236712A JP23671292A JPH0685341A JP H0685341 A JPH0685341 A JP H0685341A JP 4236712 A JP4236712 A JP 4236712A JP 23671292 A JP23671292 A JP 23671292A JP H0685341 A JPH0685341 A JP H0685341A
- Authority
- JP
- Japan
- Prior art keywords
- case
- effect element
- electrostrictive effect
- thick
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、電歪効果素子に関し、
特にケーシングおよび熱交換機構に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostrictive effect element,
In particular, it relates to a casing and a heat exchange mechanism.
【0002】[0002]
【従来の技術】従来の電歪効果素子は、低い電圧で大き
い機械エネルギーを発生できるように積層型の素子を用
い、また、耐湿性などの耐環境性を高めるために素子を
金属ケース中に気密封止している。そして、金属ケース
の内部には封入ガスが充填されている。そして金属ケー
スの肉厚は、素子の変位を抑制しないようにするために
極めて薄くなっている。2. Description of the Related Art A conventional electrostrictive effect element uses a laminated type element so that a large mechanical energy can be generated at a low voltage, and the element is placed in a metal case to improve environmental resistance such as humidity resistance. It is hermetically sealed. The inside of the metal case is filled with a filling gas. The thickness of the metal case is extremely thin so as not to suppress the displacement of the element.
【0003】本発明者は長時間繰り返し駆動したときの
発熱を除去並に、高温中においてDC的に長時間連続駆
動したとき熱を遮断するために図2および図3の構造を
提案した。The inventors of the present invention have proposed the structures shown in FIGS. 2 and 3 in order to remove the heat generated when repeatedly driven for a long time and to cut off the heat when continuously driven for a long time in a DC manner at a high temperature.
【0004】図2および図3において、前述のような積
層型の電歪効果素子1は、気密端子2および金属部材7
に接着剤で固定され、素子1の駆動用リード線3a、3
bは、半田5a、5bを介して気密端子2の駆動用リー
ド4a、4bに接続されている。In FIGS. 2 and 3, the laminated electrostrictive effect element 1 as described above includes an airtight terminal 2 and a metal member 7.
Is fixed to the device with an adhesive and is used for driving the lead wires 3a, 3
b is connected to the drive leads 4a and 4b of the airtight terminal 2 via the solders 5a and 5b.
【0005】薄肉の金属ケース6と気密端子2および金
属部材7は、それぞれの接合部で溶接され、金属部材7
に付いている注入用孔12より図2の例では冷却剤15
が注入され、図3の例では断熱剤が注入され、注入用孔
12はリベット14と封止用半田15で封止され、この
電歪効果素子の構造は全体として気密封止構造となって
いる。The thin metal case 6, the airtight terminal 2 and the metal member 7 are welded at their respective joints to form the metal member 7.
From the injection hole 12 attached to the
3, a heat insulating agent is injected in the example of FIG. 3, the injection hole 12 is sealed with a rivet 14 and a sealing solder 15, and the structure of this electrostrictive effect element is a hermetically sealed structure as a whole. There is.
【0006】[0006]
【発明が解決しようとする課題】上述した従来の電歪効
果素子および本発明者が提案した図2および図3の素子
は、素子の変位を抑制しないようにするため、気密に用
いている金属のケースの肉厚を極めて薄くしなければな
らない。その結果、素子の取扱いにおいて注意をしない
と、ケースに打痕等のキズをつけたり、これらのキズに
より気密が破られてしまう欠点がある。The above-mentioned conventional electrostrictive effect element and the elements of FIGS. 2 and 3 proposed by the present inventor are used in a hermetically sealed metal in order not to suppress the displacement of the element. The thickness of the case must be extremely thin. As a result, if care is not taken in handling the element, there are drawbacks such as scratches such as dents on the case and airtightness broken by these scratches.
【0007】また、ケースの肉厚が極めて薄いことか
ら、素子を取り付ける際側面で押さえることができず素
子の上下面からの押さえとなるため、実際の装置に組み
込む際に非常に使いにくいという欠点がある。Further, since the thickness of the case is extremely thin, it cannot be pressed by the side surface when the element is mounted, and it is pressed from the upper and lower surfaces of the element, which makes it very difficult to use when incorporating it in an actual device. There is.
【0008】そして、素子を高速で長時間繰り返し駆動
した場合、素子が発熱しこの発熱エネルギーにより冷却
剤の温度が上昇してしまい冷却の効果が低下してしまう
という欠点がある。When the element is repeatedly driven at a high speed for a long time, the element generates heat, and the heat generation energy raises the temperature of the coolant, resulting in a decrease in the cooling effect.
【0009】また、素子を高温中においてDC的に長時
間連続駆動した場合、素子の発熱そのものはほとんど発
生しないが、長時間高温中に曝されることにより回りの
熱の影響で冷却剤が温まってしまったり、断熱剤を通し
て熱が内部に伝わってしまったりして、結果的に素子の
温度が上昇してしまい素子の寿命が低下するという欠点
がある。Further, when the element is continuously driven by DC for a long time at a high temperature, the element itself hardly generates heat, but the exposure to the high temperature for a long time causes the surrounding heat to heat the coolant. However, there is a drawback that the temperature of the element rises and the life of the element is shortened because heat is transferred to the inside through the heat insulating agent.
【0010】そして、実際の組立て作業においては、注
入用孔から冷却剤または断熱剤を注入する際注入がしに
くいという問題があり、この結果金属ケース内部に気泡
が入ってしまい、素子の冷却効果または断熱効果が低下
するという欠点がある。In the actual assembling work, there is a problem that it is difficult to inject the coolant or the heat insulating agent through the injection hole. As a result, air bubbles enter into the metal case, and the cooling effect of the element is produced. Alternatively, there is a drawback that the heat insulating effect is reduced.
【0011】さらに用いる冷却剤または断熱剤について
も素子の絶縁特性を低下させるような成分や不純物が含
まれていてはいけないことから、使用する冷却剤または
断熱剤を選択する幅も限定されるという欠点がある。Further, since the cooling agent or heat insulating agent to be used must not contain a component or an impurity that deteriorates the insulating property of the element, the range of selecting the cooling agent or heat insulating agent to be used is also limited. There are drawbacks.
【0012】本発明の目的は上記欠点に対処してなされ
たもので、第1に素子を高温で繰り返し駆動させる場合
や高温下で素子をDC的に連続駆動しても素子の温度上
昇を防ぎ長寿命化できる。第2に取扱時に打痕がついた
り、キズがついたりしてリークに至ることを防ぐことが
できる。第3に装置等への取りつけの自由度が拡大でき
る電歪効果素子を提供することにある。The object of the present invention is to solve the above-mentioned drawbacks. First, when the element is repeatedly driven at a high temperature or when the element is continuously driven in a DC manner at a high temperature, the temperature rise of the element is prevented. The life can be extended. Secondly, it is possible to prevent a leak due to a dent or a scratch during handling. Thirdly, it is to provide an electrostrictive effect element capable of expanding the degree of freedom in mounting on a device or the like.
【0013】[0013]
【課題を解決するための手段】本発明の電歪効果素子
は、電歪サラミック層と内部電極導体層とを積層した積
層体を薄肉の金属ケースと金属部材により密封してなる
電歪効果素子において、上記薄肉の金属ケースの回りに
摺動材を介して、厚肉のケースを形成し、上記厚肉の側
面上に貫通孔を少なくとも2個以上設け、上記薄肉の金
属ケースと上記厚肉のケースの境界側面上に熱交換剤を
フローすることを特徴とする。The electrostrictive effect element of the present invention is an electrostrictive effect element obtained by sealing a laminated body in which an electrostrictive salamic layer and an internal electrode conductor layer are laminated with a thin metal case and a metal member. In the above, a thick case is formed around the thin metal case via a sliding material, and at least two through holes are provided on the thick side surface, and the thin metal case and the thick wall case are provided. The heat exchange agent is flowed onto the boundary side surface of the case.
【0014】[0014]
【実施例】次に、本発明について図面を参照して説明す
る。図1は、本発明の電歪効果素子の第一の実施例の断
面図である。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIG. 1 is a sectional view of a first embodiment of the electrostrictive effect element of the present invention.
【0015】本実施例の電歪効果素子は、以下に述べる
ようにして形成される。まず素子1の駆動用リード線3
a、3bを気密端子2の駆動用リード4a、4bに半田
5a、5bを介して接続する。次に、素子1を気密端子
2、薄肉の金属ケース6および金属部材7で囲うように
して組み立てた後、真空加熱乾燥用容器に製品を入れ、
温度150℃の条件で3時間真空加熱乾燥を行う。続い
て、製品の内部を窒素ガスで置換した後、装置内を窒素
ガス雰囲気にしてある炭酸ガスレーザを用いて、気密端
子2と薄肉の金属ケース6および薄肉の金属ケース6と
金属部材7の接合部を溶接する。The electrostrictive effect element of this embodiment is formed as described below. First, the drive lead wire 3 of the element 1
a and 3b are connected to the drive leads 4a and 4b of the airtight terminal 2 via solders 5a and 5b. Next, after assembling the element 1 so as to surround the airtight terminal 2, the thin metal case 6 and the metal member 7, the product is put in a vacuum heating and drying container,
Vacuum drying is performed for 3 hours under the condition of a temperature of 150 ° C. Subsequently, after the inside of the product is replaced with nitrogen gas, the hermetic terminal 2 and the thin metal case 6 and the thin metal case 6 and the metal member 7 are joined together by using a carbon dioxide gas laser in which the inside of the apparatus is in a nitrogen gas atmosphere. Weld the parts.
【0016】引き続いて、気密封止した素子の上下端面
近くの側面上にシリコーン製またはテフロン製の0−リ
ング8a、8bをはめ込み、これを熱交換剤フロー用貫
通孔に10a、10bを形成した厚肉のケース9に挿入
する。Subsequently, silicone or Teflon 0-rings 8a and 8b were fitted on the side faces near the upper and lower end faces of the hermetically sealed element, and 10a and 10b were formed in the heat exchange agent flow through holes. Insert into thick case 9.
【0017】実際の使用に当たっては、厚肉のケース9
に形成された熱交換剤フロー用貫通孔10a、10bに
フロー用パイプ11a、11bを接続して熱交換剤をフ
ローさせる。In actual use, a thick case 9 is used.
The heat exchange agent is flowed by connecting the flow pipes 11a and 11b to the heat exchange agent flow through holes 10a and 10b formed in the above.
【0018】素子を高速で繰り返し駆動して使用する場
合には、素子自体が発熱し温度が上昇するため、素子の
温度を下げるためにクーラントなどの冷却性の熱交換剤
をフローすることになる。When the element is repeatedly driven at a high speed and used, the element itself generates heat and its temperature rises. Therefore, a cooling heat exchange agent such as a coolant flows in order to lower the element temperature. .
【0019】素子を高温下においてDC的に長時間連続
駆動して使用する場合には、素子自体の発熱はほとんど
ないため、素子の温度上昇を防ぐためには素子の温度が
上がるのを積極的に抑えるために素子を冷却するかまた
は素子に熱が伝わらないように回りの熱を遮断する方法
が考えられる。前者については、高速で繰り返し駆動し
て使用する場合と同様にクーラントなどの冷却性の熱交
換剤をフローさせることになり、後者については、潤滑
油などの熱容量の大きい断熱製の熱交換剤をフローさせ
ることになる。When an element is continuously driven by DC at a high temperature for a long period of time, the element itself hardly generates heat. Therefore, in order to prevent the element temperature from rising, the element temperature is positively increased. In order to suppress it, a method of cooling the element or shutting off surrounding heat so that heat is not transferred to the element can be considered. In the former case, a cooling heat exchange agent such as coolant is allowed to flow in the same way as when it is repeatedly driven at high speed, and in the latter case, an adiabatic heat exchange agent with a large heat capacity such as lubricating oil is used. It will flow.
【0020】これらにより、素子を繰り返し駆動させた
場合でも素子の発熱による温度上昇を押さえることがで
き、また、高温下においてDC的に長時間連続駆動して
も回りの熱による素子の温度上昇を抑えることができ、
熱交換剤の効果の劣化はなかった。As a result, the temperature rise due to heat generation of the element can be suppressed even when the element is repeatedly driven, and the temperature rise of the element due to the surrounding heat can be suppressed even if the element is continuously driven for a long time at a DC temperature. Can be suppressed,
There was no deterioration in the effect of the heat exchange agent.
【0021】第二の実施例としては、冷却性の熱交換剤
として熱交換装置により冷却されたフロリナートを用い
たものがある。この例のように外部に設けられた熱交換
装置を通して熱交換剤をフローすることにより、冷却効
果はさらに向上した。In the second embodiment, a fluorinate cooled by a heat exchange device is used as a cooling heat exchange agent. The cooling effect was further improved by flowing the heat exchange agent through the heat exchange device provided outside as in this example.
【0022】[0022]
【発明の効果】以上説明したように本発明は、薄肉の金
属ケースで密封してなる電歪効果素子において、薄肉の
金属ケースの回りに摺動材を介して貫通孔を2個以上設
けた厚肉のケースを形成し、この貫通孔を介して熱交換
剤をフローさせることにより、素子を高速で繰り返し駆
動させた場合、または、高温下において素子をDC的に
連続駆動した場合においても素子の温度上昇を抑えるこ
とができ、素子の寿命が向上するという効果がある。As described above, according to the present invention, in an electrostrictive effect element sealed with a thin metal case, two or more through holes are provided around the thin metal case through a sliding member. By forming a thick case and flowing a heat exchange agent through the through hole, the element is repeatedly driven at high speed, or even when the element is continuously driven in DC at high temperature. It is possible to suppress the temperature rise of the device and improve the life of the device.
【0023】そして、薄肉の金属の回りに厚肉のケース
が設けられることにより、取り扱い時の不具合で打痕が
付いたり、ケースにキズが付いた結果リークに至るとい
う不具合がなくなり、また、装置等に取り付ける際にも
従来端面方向からしか押さえられなかったものが、ケー
スの側面でも押さえることができ、装置等への取付上も
取扱いがしやすくなったという効果を合わせて持ってい
る。Since the thick case is provided around the thin metal, there are no problems such as dents due to a trouble in handling or leakage due to scratches on the case. Even when it is attached to a device such as a device, it can only be pressed from the end face direction in the past, but it can also be pressed on the side of the case, making it easier to handle when installing it on a device.
【図1】本発明の電歪効果素子の第一の実施例の断面図
である。FIG. 1 is a sectional view of a first embodiment of an electrostrictive effect element of the present invention.
【図2】従来の電歪効果素子の断面図である。FIG. 2 is a sectional view of a conventional electrostrictive effect element.
【図3】従来の電歪効果素子の断面図である。FIG. 3 is a sectional view of a conventional electrostrictive effect element.
1 素子 2 気密端子 3a、3b 駆動用リード線 4a、4b 駆動用リード 5a、5b ハンダ 6 薄肉の金属ケース 7 金属部材 8a、8b 0−リング 9 厚肉のケース 10a、10b 貫通孔 11a、11b フロー用パイプ 12 注入用孔 13 リベット 14 封止用半田 15 冷却剤 16 断熱剤 1 element 2 airtight terminal 3a, 3b drive lead wire 4a, 4b drive lead 5a, 5b solder 6 thin metal case 7 metal member 8a, 8b 0-ring 9 thick case 10a, 10b through hole 11a, 11b flow Pipe 12 injection hole 13 rivet 14 sealing solder 15 cooling agent 16 heat insulating agent
Claims (7)
交互に積層した積層体を薄肉の金属ケースと金属部材に
より密封してなる電歪効果素子において、前記薄肉の金
属ケースの回りに摺動材を介して、厚肉のケースの側面
上に貫通孔を少なくとも2個以上設け、前記薄肉の金属
ケースと前記厚肉のケースの境界側面上に熱交換剤をフ
ローすることを特徴とする電歪効果素子。1. An electrostrictive effect element in which a laminated body in which an electrostrictive ceramic layer and an internal electrode conductor layer are alternately laminated is sealed with a thin metal case and a metal member, and is slid around the thin metal case. At least two through-holes are provided on the side surface of the thick-walled case through the moving material, and the heat exchange agent flows on the boundary side surface between the thin metal case and the thick-walled case. Electrostrictive effect element.
またはテフロンの0−リングからなることを特徴とする
請求項1記載の電歪効果素子。2. The electrostrictive effect element according to claim 1, wherein the sliding member is made of vinyl chloride, silicone, or Teflon O-ring.
上にネジ溝を形成したことを特徴とする請求項1記載の
電歪効果素子。3. The electrostrictive effect element according to claim 1, wherein a thread groove is formed on at least one side surface of the thick case.
態で少なくとも2面以上平らな部分を形成したことを特
徴とする請求項1記載の電歪効果素子。4. The electrostrictive effect element according to claim 1, wherein at least two or more flat portions are formed on the side surfaces of the thick case so as to face each other.
向に少なくとも1ヵ所以上ネジ溝を形成したことを特徴
とする請求項1記載の電歪効果素子。5. The electrostrictive effect element according to claim 1, wherein at least one screw groove is formed on a side surface of the thick case in a case thickness direction.
とを特徴とする請求項1記載の電歪効果素子。6. The electrostrictive effect element according to claim 1, wherein the heat exchange agent is made of a cooling material.
とを特徴とする請求項1記載の電歪効果素子。7. The electrostrictive effect element according to claim 1, wherein the heat exchange agent is made of a heat insulating material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4236712A JP2910440B2 (en) | 1992-09-04 | 1992-09-04 | Electrostrictive effect element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4236712A JP2910440B2 (en) | 1992-09-04 | 1992-09-04 | Electrostrictive effect element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0685341A true JPH0685341A (en) | 1994-03-25 |
JP2910440B2 JP2910440B2 (en) | 1999-06-23 |
Family
ID=17004654
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4236712A Expired - Lifetime JP2910440B2 (en) | 1992-09-04 | 1992-09-04 | Electrostrictive effect element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2910440B2 (en) |
-
1992
- 1992-09-04 JP JP4236712A patent/JP2910440B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2910440B2 (en) | 1999-06-23 |
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