JP2910440B2 - Electrostrictive effect element - Google Patents

Electrostrictive effect element

Info

Publication number
JP2910440B2
JP2910440B2 JP4236712A JP23671292A JP2910440B2 JP 2910440 B2 JP2910440 B2 JP 2910440B2 JP 4236712 A JP4236712 A JP 4236712A JP 23671292 A JP23671292 A JP 23671292A JP 2910440 B2 JP2910440 B2 JP 2910440B2
Authority
JP
Japan
Prior art keywords
effect element
case
electrostrictive effect
thick
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4236712A
Other languages
Japanese (ja)
Other versions
JPH0685341A (en
Inventor
隆之 猪井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP4236712A priority Critical patent/JP2910440B2/en
Publication of JPH0685341A publication Critical patent/JPH0685341A/en
Application granted granted Critical
Publication of JP2910440B2 publication Critical patent/JP2910440B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、電歪効果素子に関し、
特にケーシングおよび熱交換機構に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostrictive effect element,
In particular, it relates to a casing and a heat exchange mechanism.

【0002】[0002]

【従来の技術】従来の電歪効果素子は、低い電圧で大き
い機械エネルギーを発生できるように積層型の素子を用
い、また、耐湿性などの耐環境性を高めるために素子を
金属ケース中に気密封止している。そして、金属ケース
の内部には封入ガスが充填されている。そして金属ケー
スの肉厚は、素子の変位を抑制しないようにするために
極めて薄くなっている。
2. Description of the Related Art A conventional electrostrictive effect element uses a laminated element so that large mechanical energy can be generated at a low voltage, and the element is placed in a metal case in order to enhance environmental resistance such as moisture resistance. Hermetically sealed. The inside of the metal case is filled with a filling gas. The thickness of the metal case is extremely thin so as not to suppress the displacement of the element.

【0003】本発明者は長時間繰り返し駆動したときの
発熱を除去並に、高温中においてDC的に長時間連続駆
動したとき熱を遮断するために図2および図3の構造を
提案した。
The present inventor has proposed the structures shown in FIGS. 2 and 3 in order to eliminate the heat generated when the device is driven repeatedly for a long time and to cut off the heat when the device is driven continuously for a long time in DC at a high temperature.

【0004】図2および図3において、前述のような積
層型の電歪効果素子1は、気密端子2および金属部材7
に接着剤で固定され、素子1の駆動用リード線3a、3
bは、半田5a、5bを介して気密端子2の駆動用リー
ド4a、4bに接続されている。
[0004] In FIGS. 2 and 3, the laminated electrostrictive element 1 as described above has a hermetic terminal 2 and a metal member 7.
Are fixed with an adhesive, and the driving leads 3a, 3
b is connected to the driving leads 4a and 4b of the hermetic terminal 2 via the solders 5a and 5b.

【0005】薄肉の金属ケース6と気密端子2および金
属部材7は、それぞれの接合部で溶接され、金属部材7
に付いている注入用孔12より図2の例では冷却剤15
が注入され、図3の例では断熱剤が注入され、注入用孔
12はリベット14と封止用半田15で封止され、この
電歪効果素子の構造は全体として気密封止構造となって
いる。
[0005] The thin metal case 6, the hermetic terminal 2 and the metal member 7 are welded at their respective joints.
In the example of FIG.
In the example of FIG. 3, a heat insulating agent is injected, the injection hole 12 is sealed with a rivet 14 and a sealing solder 15, and the structure of the electrostrictive effect element is a hermetically sealed structure as a whole. I have.

【0006】[0006]

【発明が解決しようとする課題】上述した従来の電歪効
果素子および本発明者が提案した図2および図3の素子
は、素子の変位を抑制しないようにするため、気密に用
いている金属のケースの肉厚を極めて薄くしなければな
らない。その結果、素子の取扱いにおいて注意をしない
と、ケースに打痕等のキズをつけたり、これらのキズに
より気密が破られてしまう欠点がある。
The conventional electrostrictive effect element described above and the elements shown in FIGS. 2 and 3 proposed by the present inventor are made of a metal used in an airtight manner so as not to suppress the displacement of the element. The thickness of the case must be made extremely thin. As a result, if care is not taken in the handling of the element, there is a defect that the case is damaged such as a dent, and the airtightness is broken by these scratches.

【0007】また、ケースの肉厚が極めて薄いことか
ら、素子を取り付ける際側面で押さえることができず素
子の上下面からの押さえとなるため、実際の装置に組み
込む際に非常に使いにくいという欠点がある。
Further, since the thickness of the case is extremely thin, it cannot be held down by the side when the element is mounted, and is held down from the upper and lower surfaces of the element. There is.

【0008】そして、素子を高速で長時間繰り返し駆動
した場合、素子が発熱しこの発熱エネルギーにより冷却
剤の温度が上昇してしまい冷却の効果が低下してしまう
という欠点がある。
When the element is repeatedly driven at a high speed for a long time, the element generates heat, and the heat generated by the element causes a rise in the temperature of the coolant, thereby deteriorating the cooling effect.

【0009】また、素子を高温中においてDC的に長時
間連続駆動した場合、素子の発熱そのものはほとんど発
生しないが、長時間高温中に曝されることにより回りの
熱の影響で冷却剤が温まってしまったり、断熱剤を通し
て熱が内部に伝わってしまったりして、結果的に素子の
温度が上昇してしまい素子の寿命が低下するという欠点
がある。
Further, when the element is driven continuously for a long time in DC at a high temperature, heat generation of the element hardly occurs, but the coolant is heated by the influence of surrounding heat due to exposure to the high temperature for a long time. Or the heat is transmitted to the inside through the heat insulating agent, resulting in a drawback that the temperature of the element increases and the life of the element decreases.

【0010】そして、実際の組立て作業においては、注
入用孔から冷却剤または断熱剤を注入する際注入がしに
くいという問題があり、この結果金属ケース内部に気泡
が入ってしまい、素子の冷却効果または断熱効果が低下
するという欠点がある。
In the actual assembling work, there is a problem that it is difficult to inject the coolant or the heat insulating agent from the injecting hole, and as a result, air bubbles enter the inside of the metal case, and the cooling effect of the element is reduced. Alternatively, there is a disadvantage that the heat insulating effect is reduced.

【0011】さらに用いる冷却剤または断熱剤について
も素子の絶縁特性を低下させるような成分や不純物が含
まれていてはいけないことから、使用する冷却剤または
断熱剤を選択する幅も限定されるという欠点がある。
Further, since a cooling agent or a heat insulating agent to be used must not contain a component or an impurity which degrades the insulating properties of the element, the range of selecting the cooling agent or the heat insulating agent to be used is also limited. There are drawbacks.

【0012】本発明の目的は上記欠点に対処してなされ
たもので、第1に素子を高温で繰り返し駆動させる場合
や高温下で素子をDC的に連続駆動しても素子の温度上
昇を防ぎ長寿命化できる。第2に取扱時に打痕がついた
り、キズがついたりしてリークに至ることを防ぐことが
できる。第3に装置等への取りつけの自由度が拡大でき
る電歪効果素子を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to address the above-mentioned drawbacks. First, when the element is repeatedly driven at a high temperature or when the element is continuously driven at a high temperature in a DC manner, the temperature of the element is prevented from rising. The service life can be extended. Secondly, it is possible to prevent a dent or a scratch from being caused at the time of handling to cause a leak. Third, it is an object of the present invention to provide an electrostrictive effect element capable of expanding the degree of freedom of attachment to a device or the like.

【0013】[0013]

【課題を解決するための手段】本発明の電歪効果素子
は、電歪サラミック層と内部電極導体層とを積層した積
層体を薄肉の金属ケースと金属部材により密封してなる
電歪効果素子において、上記薄肉の金属ケースの回りに
摺動材を介して、厚肉のケースを形成し、上記厚肉の側
面上に貫通孔を少なくとも2個以上設け、上記薄肉の金
属ケースと上記厚肉のケースの境界側面上に断熱性材料
からなる熱交換剤をフローすることを特徴とする。
An electrostrictive effect element according to the present invention is obtained by sealing a laminate of an electrostrictive salamic layer and an internal electrode conductor layer with a thin metal case and a metal member. , A thick case is formed around the thin metal case via a sliding material, at least two or more through holes are provided on the thick side surface, and the thin metal case and the thick Insulation material on the border side of the case
Characterized by flowing a heat exchanger consisting of

【0014】[0014]

【実施例】次に、本発明について図面を参照して説明す
る。図1は、本発明の電歪効果素子の第一の実施例の断
面図である。
Next, the present invention will be described with reference to the drawings. FIG. 1 is a sectional view of a first embodiment of the electrostrictive effect element of the present invention.

【0015】本実施例の電歪効果素子は、以下に述べる
ようにして形成される。まず素子1の駆動用リード線3
a、3bを気密端子2の駆動用リード4a、4bに半田
5a、5bを介して接続する。次に、素子1を気密端子
2、薄肉の金属ケース6および金属部材7で囲うように
して組み立てた後、真空加熱乾燥用容器に製品を入れ、
温度150℃の条件で3時間真空加熱乾燥を行う。続い
て、製品の内部を窒素ガスで置換した後、装置内を窒素
ガス雰囲気にしてある炭酸ガスレーザを用いて、気密端
子2と薄肉の金属ケース6および薄肉の金属ケース6と
金属部材7の接合部を溶接する。
The electrostrictive effect element of this embodiment is formed as described below. First, the driving lead wire 3 of the element 1
a, 3b are connected to the driving leads 4a, 4b of the hermetic terminal 2 via the solders 5a, 5b. Next, after assembling the element 1 so as to be surrounded by the hermetic terminal 2, the thin metal case 6, and the metal member 7, the product is placed in a vacuum heating and drying container.
Vacuum heating and drying are performed at a temperature of 150 ° C. for 3 hours. Subsequently, after the inside of the product is replaced with nitrogen gas, the airtight terminal 2 and the thin metal case 6 and the thin metal case 6 and the metal member 7 are joined using a carbon dioxide laser in which the inside of the device is a nitrogen gas atmosphere. Weld the parts.

【0016】引き続いて、気密封止した素子の上下端面
近くの側面上にシリコーン製またはテフロン製の0−リ
ング8a、8bをはめ込み、これを熱交換剤フロー用貫
通孔に10a、10bを形成した厚肉のケース9に挿入
する。
Subsequently, O-rings 8a, 8b made of silicone or Teflon were fitted on the side surfaces near the upper and lower end surfaces of the hermetically sealed element, and these were formed in the through holes for the heat exchange agent flow. Insert into thick case 9.

【0017】実際の使用に当たっては、厚肉のケース9
に形成された熱交換剤フロー用貫通孔10a、10bに
フロー用パイプ11a、11bを接続して熱交換剤をフ
ローさせる。
In actual use, a thick case 9
The flow pipes 11a and 11b are connected to the heat exchange agent flow through-holes 10a and 10b formed in the above, and the heat exchange agent flows.

【0018】素子を高速で繰り返し駆動して使用する場
合には、素子自体が発熱し温度が上昇するため、素子の
温度を下げるためにクーラントなどの冷却性の熱交換剤
をフローすることになる。
When the element is used by repeatedly driving it at a high speed, the element itself generates heat and its temperature rises, so that a cooling heat exchange agent such as a coolant flows to lower the temperature of the element. .

【0019】素子を高温下においてDC的に長時間連続
駆動して使用する場合には、素子自体の発熱はほとんど
ないため、素子の温度上昇を防ぐためには素子の温度が
上がるのを積極的に抑えるために素子を冷却するかまた
は素子に熱が伝わらないように回りの熱を遮断する方法
が考えられる。前者については、高速で繰り返し駆動し
て使用する場合と同様にクーラントなどの冷却性の熱交
換剤をフローさせることになり、後者については、潤滑
油などの熱容量の大きい断熱の熱交換剤をフローさせ
ることになる。
When the device is used by driving it continuously at a high temperature for a long time in a DC manner, since the device itself hardly generates heat, it is necessary to actively increase the temperature of the device in order to prevent the temperature of the device from rising. In order to suppress this, a method of cooling the element or shutting off the surrounding heat so that heat is not transmitted to the element can be considered. The former would be the flow of the cooling of the heat exchange medium, such as a well as a coolant in the case of using driven repeatedly at a high speed, for the latter, a large thermal insulation of the heat exchanger of the heat capacity of such lubricants It will flow.

【0020】これらにより、素子を繰り返し駆動させた
場合でも素子の発熱による温度上昇を押さえることがで
き、また、高温下においてDC的に長時間連続駆動して
も回りの熱による素子の温度上昇を抑えることができ、
熱交換剤の効果の劣化はなかった。
Thus, even when the element is repeatedly driven, the temperature rise due to the heat generation of the element can be suppressed, and the temperature rise of the element due to the surrounding heat can be suppressed even if the element is continuously driven at a high temperature for a long time in a DC manner. Can be suppressed,
There was no deterioration of the effect of the heat exchanger.

【0021】[0021]

【0022】[0022]

【発明の効果】以上説明したように本発明は、薄肉の金
属ケースで密封してなる電歪効果素子において、薄肉の
金属ケースの回りに摺動材を介して貫通孔を2個以上設
けた厚肉のケースを形成し、この貫通孔を介して熱交換
剤をフローさせることにより、素子を高速で繰り返し駆
動させた場合、または、高温下において素子をDC的に
連続駆動した場合においても素子の温度上昇を抑えるこ
とができ、素子の寿命が向上するという効果がある。
As described above, according to the present invention, in an electrostrictive effect element sealed with a thin metal case, two or more through holes are provided around the thin metal case via a sliding member. Even when the element is driven repeatedly at a high speed by forming a thick case and flowing the heat exchange agent through this through hole, or when the element is continuously driven in a DC manner at a high temperature, the element is formed. Temperature rise can be suppressed, and the life of the element can be improved.

【0023】そして、薄肉の金属の回りに厚肉のケース
が設けられることにより、取り扱い時の不具合で打痕が
付いたり、ケースにキズが付いた結果リークに至るとい
う不具合がなくなり、また、装置等に取り付ける際にも
従来端面方向からしか押さえられなかったものが、ケー
スの側面でも押さえることができ、装置等への取付上も
取扱いがしやすくなったという効果を合わせて持ってい
る。
Since the thick case is provided around the thin metal, there is no problem that a dent is formed due to a trouble at the time of handling, and a problem that the case is flawed to cause a leak is eliminated. In the past, when the device was mounted on a device or the like, the device could only be pressed from the end face direction. However, the device can also be pressed on the side surface of the case.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の電歪効果素子の第一の実施例の断面図
である。
FIG. 1 is a sectional view of a first embodiment of an electrostrictive effect element according to the present invention.

【図2】従来の電歪効果素子の断面図である。FIG. 2 is a cross-sectional view of a conventional electrostrictive effect element.

【図3】従来の電歪効果素子の断面図である。FIG. 3 is a cross-sectional view of a conventional electrostrictive effect element.

【符号の説明】[Explanation of symbols]

1 素子 2 気密端子 3a、3b 駆動用リード線 4a、4b 駆動用リード 5a、5b ハンダ 6 薄肉の金属ケース 7 金属部材 8a、8b 0−リング 9 厚肉のケース 10a、10b 貫通孔 11a、11b フロー用パイプ 12 注入用孔 13 リベット 14 封止用半田 15 冷却剤 16 断熱剤 DESCRIPTION OF SYMBOLS 1 Element 2 Airtight terminal 3a, 3b Driving lead wire 4a, 4b Driving lead 5a, 5b Solder 6 Thin metal case 7 Metal member 8a, 8b 0-ring 9 Thick case 10a, 10b Through hole 11a, 11b Flow Pipe 12 injection hole 13 rivet 14 sealing solder 15 coolant 16 heat insulator

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 電歪セラミック層と内部電極導体層とを
交互に積層した積層体を薄肉の金属ケースと金属部材に
より密封してなる電歪効果素子において、前記薄肉の金
属ケースの回りに摺動材を介して、厚肉のケースを形成
し、上記厚肉の側面上に貫通孔を少なくとも2個以上設
け、前記薄肉の金属ケースと前記厚肉のケースの境界側
面上に断熱性材料からなる熱交換剤をフローすることを
特徴とする電歪効果素子。
1. An electrostrictive effect element in which a laminate in which electrostrictive ceramic layers and internal electrode conductor layers are alternately laminated is sealed with a thin metal case and a metal member, wherein the electrostrictive effect element slides around the thin metal case. Form a thick case via moving material
At least two or more through-holes are provided on the thick side surface, and a heat exchange agent made of a heat insulating material is flown on the boundary side surface between the thin metal case and the thick case. Electrostrictive effect element.
【請求項2】 前記摺動材が、塩化ビニル、シリコーン
またはテフロンの0−リングからなる請求項1記載の電
歪効果素子。
2. The electrostrictive effect element according to claim 1, wherein the sliding member comprises a 0-ring of vinyl chloride, silicone or Teflon.
【請求項3】 前記厚肉ケースの側面上に、相対する状
態で少なくとも2面以上平らな部分を形成したものから
なる請求項1記載の電歪効果素子。
3. The electrostrictive effect element according to claim 1, wherein at least two flat surfaces are formed on the side surface of the thick case in opposition to each other.
JP4236712A 1992-09-04 1992-09-04 Electrostrictive effect element Expired - Lifetime JP2910440B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4236712A JP2910440B2 (en) 1992-09-04 1992-09-04 Electrostrictive effect element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4236712A JP2910440B2 (en) 1992-09-04 1992-09-04 Electrostrictive effect element

Publications (2)

Publication Number Publication Date
JPH0685341A JPH0685341A (en) 1994-03-25
JP2910440B2 true JP2910440B2 (en) 1999-06-23

Family

ID=17004654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4236712A Expired - Lifetime JP2910440B2 (en) 1992-09-04 1992-09-04 Electrostrictive effect element

Country Status (1)

Country Link
JP (1) JP2910440B2 (en)

Also Published As

Publication number Publication date
JPH0685341A (en) 1994-03-25

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