JPH068380Y2 - 真空ポンプ用バルブ - Google Patents

真空ポンプ用バルブ

Info

Publication number
JPH068380Y2
JPH068380Y2 JP3536489U JP3536489U JPH068380Y2 JP H068380 Y2 JPH068380 Y2 JP H068380Y2 JP 3536489 U JP3536489 U JP 3536489U JP 3536489 U JP3536489 U JP 3536489U JP H068380 Y2 JPH068380 Y2 JP H068380Y2
Authority
JP
Japan
Prior art keywords
valve
valve body
sub
main
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3536489U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02125285U (US07345094-20080318-C00003.png
Inventor
克任 花木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinmaywa Industries Ltd
Original Assignee
Shinmaywa Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinmaywa Industries Ltd filed Critical Shinmaywa Industries Ltd
Priority to JP3536489U priority Critical patent/JPH068380Y2/ja
Publication of JPH02125285U publication Critical patent/JPH02125285U/ja
Application granted granted Critical
Publication of JPH068380Y2 publication Critical patent/JPH068380Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
  • Details Of Valves (AREA)
JP3536489U 1989-03-28 1989-03-28 真空ポンプ用バルブ Expired - Lifetime JPH068380Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3536489U JPH068380Y2 (ja) 1989-03-28 1989-03-28 真空ポンプ用バルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3536489U JPH068380Y2 (ja) 1989-03-28 1989-03-28 真空ポンプ用バルブ

Publications (2)

Publication Number Publication Date
JPH02125285U JPH02125285U (US07345094-20080318-C00003.png) 1990-10-16
JPH068380Y2 true JPH068380Y2 (ja) 1994-03-02

Family

ID=31540656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3536489U Expired - Lifetime JPH068380Y2 (ja) 1989-03-28 1989-03-28 真空ポンプ用バルブ

Country Status (1)

Country Link
JP (1) JPH068380Y2 (US07345094-20080318-C00003.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6718306B2 (ja) * 2016-05-20 2020-07-08 三菱日立パワーシステムズ株式会社 バルブ及び蒸気タービン設備

Also Published As

Publication number Publication date
JPH02125285U (US07345094-20080318-C00003.png) 1990-10-16

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