JPH0682397A - Sample positioning mechanism - Google Patents

Abstract

PURPOSE:To enable the positioning of a sample with high accuracy without generating warpage in the sample by using the suction force due to pressure difference in the energizing of the sample. CONSTITUTION:The projection parts 6 (6a, 6b, 6c) on a substrate part 5 come into contact with the placing surface 1a of a sample 1 at the tips thereof to position the sample in the direction crossing the placing surface 1a at right angles. The projection parts 6a, 6b are provided to the positions close to a corner part 7 and the projection part 6c is provided at a position separated from the corner part 7 and the projection parts 6a, 6b are arranged so as to be symmetric with respect to the segment connecting the corner part 7 and the projection part 6c. The corner part 7 brings the outer periphery of the sample 1 whose placing surface 1a touched the projection parts 6, into contact with wall members 7a, 7b to restrict the movement of the sample 1 in the direction parallel with the placing surface 1a. A suction hole 8 is formed to the corner part 7 in a piercing state and enlarged in its diameter on the side facing to the sample 1 and the opening end 8a of the hole 8 is provided so as to have width larger than the thickness of the sample 1. The sample 1 is sucked to the ridgeline part of the corner part 7 under vacuum by an energizing means 3 through the opening end 8a of the hole 8 and the gap between the sample 1 and the substrate part 5 and brought into contact with the projection parts 6 and the members 7a, 7b to be set and fixed at the fixed position of a base stand 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample positioning mechanism for positioning a thin plate-shaped sample at a predetermined position of an apparatus for inspecting the sample.

[0002]

2. Description of the Related Art For example, a crystal unit (crystal wafer) used for a reference oscillator or the like is obtained by cutting a crystal block and cutting it into a thin plate. In that case, the cut crystal unit is cut. It is necessary that the surface (cut surface) and the crystal lattice surface have a predetermined angular relationship according to the application.

Therefore, in general, for a crystal oscillator cut out, a cut surface inspection apparatus is used to check whether or not the angle between the cut surface and the crystal lattice surface is a predetermined angle. carry out. In this cut surface inspection, X-rays having a constant wavelength are made incident on the surface (cut surface) of a crystal oscillator, which is a sample, and the incident angle at which diffraction occurs is obtained, whereby the cut surface of the sample and the crystal lattice plane are separated. Although the angle between them is obtained, in order to perform an accurate inspection, a sample positioning mechanism for accurately positioning the crystal oscillator, which is a sample, at a fixed position on the cut surface inspection device is required.

Hitherto, as a positioning mechanism used in the above-mentioned cut surface inspection apparatus, one or two actuators such as air cylinders have been used to press a sample onto a base fixed on the cut surface inspection apparatus. A form to attach is being developed. In this case, the base includes a mounting surface on which the sample is mounted, and a positioning protrusion that restricts movement of the sample in the direction along the mounting surface by abutting the outer peripheral portion of the sample on the mounting surface. It has been configured. In the case of the conventional case, the smooth surface itself whose surface is polished is used as the mounting surface,
A plurality of protrusions have been developed to provide a mounting surface.

In such a conventional positioning mechanism, when the sample is placed on the placing part of the base, the sample is moved slightly to bring the outer peripheral part of the sample into contact with the positioning protrusion, and the sample is moved. The actuator holds and biases the positioning projection and the mounting surface.

[0006]

By the way, a crystal unit for inspecting a cut surface usually has a thickness of 0.2 mm or less.
Since each side has a thin plate shape with a length of about 9 mm, there is a drawback that an external force is locally applied to the surface or when the outer peripheral portion is compressed, it is easily bent. On the other hand, the conventional positioning mechanism presses the sample on the base with an actuator such as an air cylinder.
The force acting on the sample from the actuator is local,
It becomes compressible.

Therefore, in the case of the conventional positioning mechanism, there is a possibility that the inspection accuracy may be deteriorated due to the bending of the sample caused by the external force from the actuator. In the case of the above-described conventional positioning mechanism, it seems that the degree of flexure is slightly different depending on the form of the mounting surface provided on the base. That is, in the case where the mounting surface is a smooth surface itself having a polished surface and the case where the mounting surface is provided by the tip portions of the plurality of protrusions, the former one is more distorted and hateful. However, in the former case, there is a risk that dust or the like will intervene between the mounting surface of the base and the surface of the sample, and the positioning accuracy itself by the mounting surface will be greatly impaired.

The present invention has been made in view of the above circumstances, and does not locally apply an external force to the surface of a sample, and also does not apply a compressive force to the outer peripheral portion of the sample, and It is possible to position a thin plate-shaped sample at a fixed position on the upper side, and therefore, even a thin plate-shaped sample that is likely to bend
An object of the present invention is to provide a sample positioning mechanism that can perform positioning with high accuracy without causing bending and can improve processing accuracy such as inspection of a sample after positioning.

[0009]

A sample positioning mechanism according to claim 1 positions a thin plate-shaped sample at a predetermined position of an apparatus for inspecting the sample, and a base on which the sample is placed. And biasing means for pressing the sample in a state of being in close contact with a predetermined position of the base.

Then, on the base, there are provided three projections which are brought into contact with the tip of the thin plate-shaped sample mounting surface for positioning in a direction orthogonal to the sample mounting surface, and mounted on these projections. And a corner portion for restraining the movement of the sample in the direction along the mounting surface by bringing the outer circumference of the sample against the surface into contact.

Further, the urging means has a structure in which the sample is brought into close contact with the protrusion and the corner by vacuum suction from a hole provided on a member forming the corner.

The sample positioning mechanism according to claims 2 and 3 is different from the case of claim 1 as the biasing means for biasing the sample to position the sample on the base. It was used.

The urging means in the sample positioning mechanism according to the second aspect has a structure in which the sample is brought into close contact with the protrusion and the corner by blowing an air stream toward the ridge of the corner.

According to a third aspect of the present invention, there is provided a biasing means for magnetically attracting the magnetic powder applied to the sample and the magnetic powder-applied sample to the projection group side and the ridge line side of the corner. The magnetic field is applied to bring the sample into close contact with the protrusion and the corner.

[0015]

In the sample positioning mechanism according to the present invention, the biasing force to the sample for positioning the sample at the fixed position of the base is the attraction force due to the atmospheric pressure difference or the magnetic force, not the mechanical contact force. The sample can be positioned at a fixed position on the base without applying an external force locally to the surface of the sample and without applying a compressive force to the outer peripheral portion of the sample.

Therefore, even if the sample is a thin plate that is easily bent, it can be positioned with high accuracy without bending, and the accuracy of processing such as inspection of the sample after positioning is improved. be able to.

[0017]

1 to 3 show the essential parts of an embodiment of the present invention. The sample positioning mechanism of this embodiment is equipped in a cut surface inspection apparatus for inspecting a cut surface of a thin plate-like crystalline sample by utilizing the diffraction effect of X-rays. Specifically, FIG. As shown in FIG. 3, a base 2 on which a thin plate-shaped sample 1 such as a crystal oscillator (wafer) is placed,
An urging means 3 is provided for pressing the sample 1 to a predetermined position of the base 2 so as to be in close contact with the base 2.

The base 2 is attached to a predetermined position of a cut surface inspection device (not shown). The base 2 has a rectangular flat plate-like substrate portion 5 extending in the horizontal direction, and three projecting portions 6a, 6b, 6c projectingly provided on the substrate portion 5,
The base plate 5 is provided with a pair of wall members 7a and 7b that provide a corner 7 at one corner.

As shown in the figure, the sample 1 has the flat lower surface 1a as a mounting surface, and the three protrusions 6a, 6a.
It is placed on b, 6c. That is, the three protrusions 6
The tips a, 6b, and 6c are in contact with the mounting surface 1a of the sample 1 so as to perform positioning in a direction orthogonal to the mounting surface 1a of the sample 1. Of the three protrusions 6a, 6b, 6c, two 6a, 6b are provided at a position closer to the corner 7, and the remaining one 6c is provided at a position away from the corner 7. There is. In addition, the two protrusions 6 located near the corner 7
The line segments a and 6b are arranged in line symmetry with respect to the line segment connecting the corner 7 and the protruding portion 6c.

Further, the corner portion 7 is provided with protrusions 6a, 6b,
The outer periphery of the sample 1 in which the mounting surface 1a is placed on the 6c is the wall member 7
By placing them on a and 7b, the mounting surface 1 of the sample 1
Constrain movement in the direction along a. The wall member 7a, the wall member 7b, and the substrate portion 5 are orthogonal to each other. Further, a suction hole 8 is formed through the corner portion 7. As shown in FIG. 1, the diameter of the hole 8 is increased on the side facing the sample 1, and the width dimension w of the open end 8a on the sample 1 side is larger than the thickness dimension t of the sample 1.

The biasing means 3 is connected to the opening of the hole 8 opposite to the sample 1. This biasing means 3 is
The sample 1 on the base 2 is vacuum-sucked toward the ridge of the corner 7 through the hole 8, and the suction force pulls the sample 1 onto the protrusions 6a, 6b, 6c and the wall of the one corner 7. Member 7
The sample 1 is positioned (fixed) at a fixed position on the base 2 by being brought into close contact with a and 7b. Therefore, the suction direction set by the hole 8 is preferably such that one corner of the sample 1 is pulled obliquely downward.

Incidentally, as a supplementary explanation, the hole 10 penetrating the substrate portion 5 guides the incident X-rays 11 to the sample 1, and the hole 12 penetrating the substrate portion 5 detects the diffracted X-rays 13 by a detector. It is guided to the (not shown) side.

In the above embodiment, when the urging means 3 is operated while the sample 1 is placed on the protrusions 6a, 6b, 6c, the diameter of the opening 8a of the hole 8 and the protrusion are increased. Due to the gap 14 secured between the substrate portion 5 and the mounting surface of the sample 1 by the portions 6a, 6b, 6c, a vacuum suction force for drawing the sample 1 toward the ridge of the corner 7 is provided on the sample 1. It works in a wide range of distribution. Then, the sample 1 is positioned and fixed in a state of being in close contact with the projecting portions 6a, 6b, 6c and the wall members 7a, 7b of the one corner portion 7 by this suction force.

As described above, in the sample positioning mechanism of the above-described embodiment, the force applied to the sample 1 to position the sample 1 at the fixed position of the base 2 is the vacuum suction force, and the surface of the sample 1 is locally affected. The sample 1 can be positioned at a fixed position on the base 2 without applying any external force and without applying a compressive force to the outer peripheral portion of the sample 1.

Therefore, even if the sample is a thin plate that is liable to be bent, it can be positioned with high accuracy without bending, and the processing accuracy such as inspection of the sample after positioning is improved. be able to.

In the case of the positioning mechanism according to the present invention,
The biasing means for biasing the sample 1 for positioning is the sample 1
The vacuum suction of one embodiment is not limited as long as it applies a force toward the ridge of the corner 7 and the applied force does not locally act on a part of the sample 1.

For example, the urging means for urging the sample 1 blows an air flow (weak compressed air) onto the sample toward the ridge line portion of the one corner portion 7 to cause the sample 1 to the protruding portion 6.
The structure may be such that it is in close contact with a, 6b, 6c and one corner 7. Further, the biasing means magnetically attracts the magnetic powder applied to the surface of the sample 1 and the sample 1 coated with the magnetic powder to the protrusions 6 a, 6 b, 6 c and the ridge line side of the one corner 7. With the magnetic force body, the sample 1 is attached to the protrusions 6a, 6b,
6C and one corner 7 may be closely attached.

Further, in the above-described embodiment, the number of corners for positioning the sample 1 is one, but when the sample 1 is polygonal or the like, the corners are provided at a plurality of positions according to the shape. It may be provided.

Further, in the case of one embodiment, the single suction hole in the urging means 3 is provided on the ridge line portion of the corner.
The installation position and the number of the suction holes in the biasing means 3 are not limited to those in the embodiment. The installation position can be set to any position on the wall members 7a, 7b forming the corners, and on the respective wall members 7a, 7b,
A suction hole may be provided individually.

[0030]

In the sample positioning mechanism according to the present invention, the force applied to the sample for positioning the sample at the fixed position on the base is the attraction force due to the atmospheric pressure difference or the magnetic force, and not the mechanical contact force. Since the sample is not provided, the sample can be positioned at a fixed position on the base without applying an external force locally to the surface of the sample and without applying a compressive force to the outer peripheral portion of the sample.

Therefore, even if the sample is a thin plate that is easily bent, it can be positioned with high accuracy without bending, and the accuracy of processing such as inspection of the sample after positioning is improved. be able to.

[Brief description of drawings]

FIG. 1 is a plan view of an embodiment of the present invention.

FIG. 2 is a sectional view taken along the line EE of FIG.

FIG. 3 is a cross-sectional view taken along the line of FIG.

[Explanation of symbols]

 1 sample 1a mounting surface 2 base 3 biasing means 5 substrate part 7 corner 7a wall member 7b wall member 8 hole 8a opening end 10 hole 11 incident X-ray 12 hole 13 diffraction X-ray 14 gap

Claims (3)

[Claims] 1. A sample positioning mechanism for positioning a thin plate-shaped sample at a predetermined position of an apparatus for inspecting the sample, wherein a base on which the sample is placed and a sample at a predetermined position of the base. A biasing means that presses the sample in a closely contacted state is provided, and the base has three projections that abut the tip of the sample mounting surface of the thin plate-like member and perform positioning in a direction orthogonal to the sample mounting surface. And a corner portion that restrains movement of the sample in a direction along the mounting surface by abutting the outer circumference of the sample with the mounting surface on these protrusions, and the biasing means includes the corner. A sample positioning mechanism having a structure in which a sample is brought into close contact with the projection and the corner by vacuum suction from a hole provided on a member forming the part. 2. A sample positioning mechanism for positioning a thin plate-shaped sample at a predetermined position of an apparatus for inspecting the sample, wherein a base on which the sample is placed and a sample at a predetermined position of the base. A biasing means that presses the sample in a closely contacted state is provided, and the base has three projections that abut the tip of the sample mounting surface of the thin plate-like member and perform positioning in a direction orthogonal to the sample mounting surface. And a corner portion for restraining movement of the sample in a direction along the mounting surface by abutting the outer periphery of the sample with the mounting surface on these protrusions, the biasing means A sample positioning mechanism having a structure in which a sample is brought into close contact with the protrusion and the corner by blowing an air stream toward the ridge of the corner. 3. A sample positioning mechanism for positioning a thin plate-shaped sample at a predetermined position of an apparatus for inspecting the sample, wherein a base on which the sample is placed and a sample at a predetermined position of the base. A biasing means that presses the sample in a closely contacted state is provided, and the base has three projections that abut the tip of the sample mounting surface of the thin plate-like member and perform positioning in a direction orthogonal to the sample mounting surface. And a corner for restraining the movement of the sample in the direction along the mounting surface by abutting the outer periphery of the sample on which the mounting surface is applied to these protrusion groups, the biasing means A magnetic powder applied to the sample, and a magnetic body that magnetically attracts the magnetic powder-applied sample to the projection group side and the ridge line side of the corner, and the sample is closely attached to the projection and the corner. The sample positioning mechanism characterized in that