JPH068109Y2 - ウエハー搬送用ベルト - Google Patents
ウエハー搬送用ベルトInfo
- Publication number
- JPH068109Y2 JPH068109Y2 JP1988043093U JP4309388U JPH068109Y2 JP H068109 Y2 JPH068109 Y2 JP H068109Y2 JP 1988043093 U JP1988043093 U JP 1988043093U JP 4309388 U JP4309388 U JP 4309388U JP H068109 Y2 JPH068109 Y2 JP H068109Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- belt
- fluororesin
- contact portion
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229920001971 elastomer Polymers 0.000 claims description 20
- -1 polyethylene Polymers 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 13
- 229920003002 synthetic resin Polymers 0.000 claims description 9
- 239000000057 synthetic resin Substances 0.000 claims description 9
- 239000004698 Polyethylene Substances 0.000 claims description 8
- 239000004743 Polypropylene Substances 0.000 claims description 7
- 229920000573 polyethylene Polymers 0.000 claims description 7
- 229920001155 polypropylene Polymers 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 36
- 239000000126 substance Substances 0.000 description 9
- 239000000428 dust Substances 0.000 description 7
- 239000002904 solvent Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229920006311 Urethane elastomer Polymers 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 229920001973 fluoroelastomer Polymers 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 3
- 229920002943 EPDM rubber Polymers 0.000 description 2
- 229920000459 Nitrile rubber Polymers 0.000 description 2
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Structure Of Belt Conveyors (AREA)
- Belt Conveyors (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988043093U JPH068109Y2 (ja) | 1988-03-31 | 1988-03-31 | ウエハー搬送用ベルト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988043093U JPH068109Y2 (ja) | 1988-03-31 | 1988-03-31 | ウエハー搬送用ベルト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01147340U JPH01147340U (enrdf_load_stackoverflow) | 1989-10-12 |
| JPH068109Y2 true JPH068109Y2 (ja) | 1994-03-02 |
Family
ID=31269494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988043093U Expired - Lifetime JPH068109Y2 (ja) | 1988-03-31 | 1988-03-31 | ウエハー搬送用ベルト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH068109Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT201700111949A1 (it) * | 2017-10-05 | 2019-04-05 | Morello Forni Di Morello Marco & C S A S | Metodo di formatura della pasta da pizza e macchina per la sua attuazione |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6132888Y2 (enrdf_load_stackoverflow) * | 1981-05-22 | 1986-09-25 |
-
1988
- 1988-03-31 JP JP1988043093U patent/JPH068109Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01147340U (enrdf_load_stackoverflow) | 1989-10-12 |
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