JPH0679245A - Ultrasonic cleaning device and cleaning method thereby - Google Patents

Abstract

PURPOSE:To provide an ultrasonic cleaning device where the soiling sticking to the surface of workpieces is removed and simultaneously the adhering water droplets are repelled and a method thereby. CONSTITUTION:The cleaning device consists of a work set jig 1, a workpiece 1a, an ultrasonic generator 3, a mechanism for forming the surface of the liquid on the upper surface of the workpiece and a suction port 9 for sucking by vacuum the air atmosphere near the workpiece 1a. Ultrasonic waves are given to the upper surface of the workpiece through the surface of the liquid to clean and remove while the work set jig 1 is horizontally moved at a constant speed and simultaneously vacuum sucking is performed through a suction port 9 and then water droplets sticking to the surface of the workpiece 1a are repelled. The cleaning at high speed and the removal by the ultrasonic wave generator 3 and the movement of the workpiece at constant speed allows the cleaning without unevenness and further the soiling discharged to the air atmosphere is adsorbed by vacuum to avoid the danger of being soiled again and in addition, the residual water droplets are momentarily repelled.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to stains such as resists and abrasives adhered to the surfaces of works in the production process of semiconductor wafers, printed boards, lead frames, glasses, films, metals, jewelry, etc. The present invention relates to an ultrasonic cleaning device that removes water and removes unnecessary parts, and repels water droplets attached to the ultrasonic cleaning device, and a cleaning method thereof.

[0002]

2. Description of the Related Art In the conventional ultrasonic cleaning device,
To remove the dirt that adheres to the surface of the work during the production process, an ultrasonic wave generator is provided at the bottom or side wall of the container that stores the liquid, and the force of ultrasonic cavitation generated by the ultrasonic wave generator is used. However, since ultrasonic waves are generated in the liquid, it often causes recontamination when it is pulled out of the liquid after the cleaning, which is a problem for the work that requires advanced cleaning. There is unevenness in the application of ultrasonic vibration, causing uneven cleaning. In addition, hot air from a heater during the drying process,
Mainly performed by warm air or evaporation of organic solvent, it takes time in the drying process, and it is difficult to downsize the drying device. In addition, there are regulations such as environmental pollution, which causes various problems. It was a thing.

[0003]

It is an object of the present invention to solve the above-mentioned problems as a result of earnestly studying the above reasons. A horn is provided at the tip of an ultrasonic wave generator, and ultrasonic waves are transmitted through the horn. Since high energy is generated from the atmosphere to the surface of the liquid and into the liquid, dirt and unnecessary parts attached to the work are removed at high speed, and the removed dirt and unnecessary parts are removed by vacuum suction. Since it is removed from the suction port, re-contamination does not occur at all.Furthermore, horizontal movement of the work at a constant speed eliminates unevenness such as cleaning and enables cleaning of long objects. The purpose of the present invention is to reduce the size by omitting a drying device for instantaneous water repellency for directly applying ultrasonic waves.

[0004]

According to a first aspect of the present invention, there is provided a work set jig, a work, an ultrasonic wave generator having a horn provided at a tip thereof and vertically movable, and a liquid surface is formed on an upper surface of the work. Storage tank that stores the liquid to
A configuration including a moving mechanism for horizontally rotating the storage tank, a recovery tank, a circulation system connecting the recovery tank and the storage tank, and a suction port for vacuuming the atmosphere in the vicinity of the work, The configuration of Item 2 is a work set jig, a work, an ultrasonic wave generator having a horn at the tip and arranged to be movable up and down, and a liquid discharge for discharging a liquid to form a liquid surface on the upper surface of the work. And a moving mechanism that horizontally slides the work set jig, and a suction port that vacuum sucks the atmosphere in the vicinity of the work.

[0005]

The function of the present invention is that the ultrasonic vibration generated by the ultrasonic generator is applied to the work from the tip of the horn to the upper surface of the work while the work set jig is horizontally moved at a constant speed. It is applied by means of a vacuum to suck and vacuum at the same time as cleaning and peeling, and then the work is exposed from the liquid surface or the discharge of the liquid is stopped and the water droplets adhering to the upper surface of the work are repelled.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An ultrasonic cleaning apparatus and a cleaning method therefor according to the present invention which achieves the above object will be described with reference to the drawings of the embodiments.

FIG. 1 is a schematic explanatory view for explaining an ultrasonic cleaning apparatus of a first embodiment of the present invention, FIG. 2 is a front schematic explanatory view of the next embodiment, and FIG. 3 is a side schematic illustration thereof. It is a figure.

The present invention relates to a semiconductor wafer, a printed circuit board,
In the production process of lead frame, glass, film, metal, jewelry, etc., remove the stains such as resist and abrasives adhering to the surface of these works and remove unnecessary parts, and then attach them. The present invention relates to an ultrasonic cleaning device that repels water droplets and a cleaning method thereof.
Of the invention, a work set jig 1, a work 1a set on the work set jig 1, a horn 2 provided at the tip of the work 1a above the work 1a, and a vertically movable horn 2 having a constant wavelength in the thrust direction. Ultrasonic generator 3 for applying ultrasonic vibration
And submerge the work set jig 1 in the work 1a.
A storage tank 5 for storing a liquid to form a liquid surface Wa on the upper surface of the storage tank 5, a moving mechanism 6 for rotating the storage tank 5 in a horizontal direction at a constant speed, and a recovery for collecting overflow water of the storage tank 5. The tank 7 is provided with a circulation system 8 connecting the recovery tank 7 and the storage tank 5, and a suction port 9 for vacuuming the atmosphere in the vicinity of the work W.

According to the second aspect of the present invention, the work set jig 1, the work 1a set on the work set jig 1, and the horn 2 at the tip of the work 1a are arranged above the work 1a so as to be vertically movable. An ultrasonic generator 3 that applies ultrasonic vibration of a certain wavelength in the thrust direction, a liquid discharger 4 that discharges the liquid W to form a liquid surface Wa on the upper surface of the work 1a, and the work set jig. It is provided with a moving mechanism 6 for sliding 1 at a constant speed in the horizontal direction, and a suction port 9 for vacuuming the atmosphere in the vicinity of the work W.

Further, in the invention of claim 3, the work set jig 1, the work 1a set on the work set jig 1, and the horn 2 at the tip of the work 1a are provided above the work 1a and can be moved up and down. An ultrasonic wave generator 3 which applies ultrasonic vibration of a certain wavelength in the thrust direction, and a storage tank 5 or a liquid W for storing a liquid W to form a liquid surface Wa on the upper surface of the work 1a are discharged. Liquid discharge part 4
And an ultrasonic cleaning device including a moving mechanism 6 for rotating or sliding the work set jig 1 at a constant speed in the horizontal direction, and a suction port 9 for vacuuming the atmosphere in the vicinity of the work 1a. Then, while horizontally moving the work set jig 1, ultrasonic vibration generated by the ultrasonic wave generator 3 is applied to the work 1a from the tip of the horn 2 to the upper surface of the work 1a via the liquid surface Wa for cleaning and Simultaneously with peeling, vacuum suction is performed to the suction port 9, and then the work 1a is exposed from the liquid surface Wa or the discharge of the liquid W is stopped and the work 1a is stopped.
It repels water droplets attached to the upper surface of the.

As is well known, the ultrasonic wave used in the present invention is
In a broad sense, it means a sound wave having a frequency higher than that perceived by human senses. Further, the ultrasonic wave generator 3 for generating an ultrasonic wave is provided with a piezoelectric vibration, such as lead zirconate titanate, which generates, for example, 30 to 40 kHz. A cleaning device and a cleaning method that utilize ultrasonic vibration generated by incorporating a converter using a child and a magnetostrictive vibrator.

That is, in the ultrasonic cleaning apparatus of the first embodiment of the present invention, as shown in FIG. 1, the power source section A and the ultrasonic wave generating apparatus 3 are electrically connected by the cable B, and the ultrasonic wave generating apparatus 3 is connected. An ultrasonic converter having a constant waveform is generated in the thrust direction by a converter installed inside and is transmitted by a horn 2 connected below the ultrasonic generator 3. The nodal point of ultrasonic vibration is adjusted and the work is The height of the work 1a can be adjusted up and down depending on the distance from the work 1a, the size of the work 1a, etc., and is carried by a screw rod or the like (not shown).

Next, the work 1a to be cleaned is placed and set on the upper surface of the work set jig 1 by an appropriate means, and the lower surface of the work set jig 1a is fixed to the bottom surface of the storage tank 5. That is
City water or a liquid W such as pure water is constantly poured into the storage tank 5 until the work 1a is substantially submerged, and overflow water overflows from the outer peripheral edge of the storage tank 5, that is, the set work 1a is set. The liquid surface Wa of the liquid W is provided between the tip of the horn 2 and the tip of the horn 2.

Below the storage tank 5, the storage tank 5 is held horizontally and the work 1a
Is provided with a moving mechanism 6 that can rotate in order to move the work set jig 1 in the horizontal direction at a constant speed. The moving mechanism 6 includes a rotating shaft 6b and a motor 6c that are erected on a base 6a. It is mechanically connected by gears, belts, and the like.

Further, a recovery tank 7 is arranged to recover the overflow of the liquid W so as to enclose the lower part and the outer periphery of the storage tank 5, and the recovery tank 7 and the storage tank 5 are connected to each other. It is provided with a circulation system 8 for circulating overflow water to the storage tank 5 again and supplying water, and the circulation system 8 is connected to the connecting pipe 8a through a pump 8b and a filter 8c, and is collected. A valve V for discharging the drain of the tank 7 is also provided.

The suction port 9 is connected to a vacuum pump or the like (not shown) by a hollow tube, and the ultrasonic waves during ultrasonic cleaning cause the dirt attached to the work 1a and the liquid W to be sprayed. The dust is strongly sucked together with the surrounding atmosphere, that is, almost all the dirt once removed is vacuum sucked.

Next, in the next embodiment, as shown in FIG. 2, the power source unit A and the ultrasonic wave generator 3 are electrically connected by a cable B, and the converter 3a installed in the ultrasonic wave generator 3 moves in the thrust direction. The ultrasonic wave having a constant waveform is generated and transmitted by the horn 2 connected below the ultrasonic wave generator 3, but the nodal point of ultrasonic vibration is adjusted, and the distance from the workpiece 1a and the workpiece 1a The vertical position can be adjusted up and down according to the size and the like, and it is carried by a screw rod (not shown) or the like as in the first embodiment.

The work 1a to be cleaned is set on the work setting jig 1 by an appropriate means.
The moving mechanism 6 for sliding the work set jig 1 in the horizontal direction at a constant speed together with the work 1a is composed of, for example, a rail member and a rail receiving member. By forming them together, they can be applied to long objects and large workpieces.

The liquid discharge part 4 discharges a liquid W such as city water or pure water between the work 1a and the tip of the horn 2 to form a liquid layer which serves as a medium of ultrasonic vibration. The liquid surface Wa is formed on 1a, and the suction port 9
Is the same as in the first embodiment.

In the cleaning method for the ultrasonic cleaning apparatus of the present invention, the work 1a is moved horizontally along with the work setting jig 1 by rotating or sliding at a constant speed by the moving mechanism 6, and the work 1a is superposed on the upper surface of the work 1a. The ultrasonic vibration generated by the sound wave generator 3 is applied from the tip of the horn 2. At this time, the liquid surface Wa of the liquid W is interposed in the first embodiment, and Liquid level W of horn 2
When it is brought into close contact with a and ultrasonic vibration is applied, the air is injected into the liquid and the liquid W having the same volume as that is atomized to be expelled into the atmosphere. At that time, high energy is generated and adheres to the work 1a. The stains are removed at high speed.

In the present invention, the suction port 9 for vacuum suction
The suction port 9 is for sucking dirt, spray-like liquid, ambient air and the like discharged into the atmosphere.

Then, by exposing the upper surface of the work 1a from the liquid surface Wa and applying ultrasonic waves, the attached water droplets instantly become a mist and repel water and separate from the work 1a.

Further, in the next embodiment, the liquid W is discharged to form a liquid layer for cleaning, and when the discharge of the liquid W is stopped, the remaining water droplets repel water in an instant. The effect and action are similar to those of the first embodiment.

Further, with respect to the work 1a whose unnecessary portion cannot be removed in the manufacturing process of the work 1a, the work 1a can be peeled from the fragile portion by the same means as the cleaning. In addition, the work 1a is moved at a constant speed. Therefore, it is possible to clean and peel long objects and large workpieces beyond the concept of the conventional ultrasonic cleaning device.

[0025]

As described above, the present invention solves the problems of the conventional type, and high-speed cleaning is possible by applying the ultrasonic vibration generated by the ultrasonic generator to the liquid surface via the horn. At the same time, it enables uniform cleaning by moving the work at a constant speed. Furthermore, the liquid and dirt released into the atmosphere are vacuum-adsorbed, and there is no fear of recontamination. Since it instantly repels water by ultrasonic vibration, it is possible to achieve miniaturization without the need for a drying device, and the present invention has a markedly highly contributing effect.

[Brief description of drawings]

FIG. 1 is a schematic explanatory diagram for explaining an ultrasonic cleaning device according to a first embodiment of the present invention.

FIG. 2 is a schematic front view of the next embodiment.

FIG. 3 is a schematic side view of the same.

[Explanation of symbols]

 1 Work set jig 1a Work 2 Horn 3 Ultrasonic generator 4 Discharge part 5 Storage tank 6 Moving mechanism 6a Base 6b Rotating shaft 6c Motor 7 Recovery tank 8 Circulation system 8a Connection pipe 8b Pump 8c Filter 9 Suction port W Liquid Wa Liquid surface

Claims (3)

[Claims] 1. A work set jig, a work set on the work set jig, and an ultrasonic vibration of a constant wavelength in a thrust direction, which is provided above the work with a horn at its tip and is vertically movable. An ultrasonic generator for giving, a storage tank in which the work set jig is submerged and a liquid is stored to form a liquid surface on the upper surface of the work, and a movement for rotating the storage tank in a horizontal direction at a constant speed. A mechanism, a collection tank for collecting overflow of the storage tank, a circulation system connecting the collection tank and the storage tank, and a suction port for vacuuming the atmosphere in the vicinity of the work. Ultrasonic cleaning device. 2. A work set jig, a work set on the work set jig, and an ultrasonic vibration of a constant wavelength in a thrust direction, which is provided above the work with a horn at the tip and arranged to be movable up and down. An ultrasonic generator for giving, a liquid discharge part for discharging a liquid to form a liquid surface on the upper surface of the work, a moving mechanism for sliding the work set jig horizontally at a constant speed, and An ultrasonic cleaning device, comprising: a suction port for vacuuming a nearby atmosphere. 3. A work set jig, a work set on the work set jig, and an ultrasonic vibration of a certain wavelength in the thrust direction, which is provided above the work with a horn at its tip and is vertically movable. An ultrasonic generator for giving, a storage tank for storing a liquid to form a liquid surface on the upper surface of the work or a liquid discharging section for discharging the liquid, and the work set jig are rotated at a constant speed in the horizontal direction. Or, using an ultrasonic cleaning device equipped with a moving mechanism for sliding and a suction port for vacuuming the atmosphere in the vicinity of the work,
While horizontally moving the work set jig at a constant speed, ultrasonic vibration generated by an ultrasonic generator is applied to the work from the tip of the horn to the upper surface of the work via the liquid surface for cleaning and at the same time vacuum to the suction port. Aspirate, then
A method for cleaning an ultrasonic cleaning apparatus, which comprises exposing a work from a liquid surface or stopping the discharge of the liquid to repel water droplets adhering to the upper surface of the work.