JPH067883Y2 - 研磨装置 - Google Patents
研磨装置Info
- Publication number
- JPH067883Y2 JPH067883Y2 JP1986138904U JP13890486U JPH067883Y2 JP H067883 Y2 JPH067883 Y2 JP H067883Y2 JP 1986138904 U JP1986138904 U JP 1986138904U JP 13890486 U JP13890486 U JP 13890486U JP H067883 Y2 JPH067883 Y2 JP H067883Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pressure roller
- air cylinder
- shaft
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title claims description 31
- 239000013013 elastic material Substances 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 23
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986138904U JPH067883Y2 (ja) | 1986-09-09 | 1986-09-09 | 研磨装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986138904U JPH067883Y2 (ja) | 1986-09-09 | 1986-09-09 | 研磨装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6344753U JPS6344753U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-03-25 |
| JPH067883Y2 true JPH067883Y2 (ja) | 1994-03-02 |
Family
ID=31044308
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986138904U Expired - Lifetime JPH067883Y2 (ja) | 1986-09-09 | 1986-09-09 | 研磨装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH067883Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1015802A (ja) * | 1996-07-10 | 1998-01-20 | Sony Corp | 研磨装置および研磨方法 |
| JP2011224680A (ja) * | 2010-04-16 | 2011-11-10 | Ebara Corp | 研磨方法及び研磨装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5622211A (en) * | 1979-07-30 | 1981-03-02 | Hitachi Ltd | Finishing method and its device for magnetic head |
| JPS6076954A (ja) * | 1983-09-30 | 1985-05-01 | Victor Co Of Japan Ltd | 磁気デイスク研摩装置 |
-
1986
- 1986-09-09 JP JP1986138904U patent/JPH067883Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6344753U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-03-25 |