JPH067557Y2 - ２次電子検出器 - Google Patents

２次電子検出器

Info

Publication number
JPH067557Y2
JPH067557Y2 JP1986143449U JP14344986U JPH067557Y2 JP H067557 Y2 JPH067557 Y2 JP H067557Y2 JP 1986143449 U JP1986143449 U JP 1986143449U JP 14344986 U JP14344986 U JP 14344986U JP H067557 Y2 JPH067557 Y2 JP H067557Y2
Authority
JP
Japan
Prior art keywords
scintillator
secondary electron
collector electrode
electron detector
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986143449U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6350442U (US06633600-20031014-M00021.png
Inventor
昭夫 伊藤
俊弘 石塚
一幸 尾崎
和生 大窪
善朗 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1986143449U priority Critical patent/JPH067557Y2/ja
Publication of JPS6350442U publication Critical patent/JPS6350442U/ja
Application granted granted Critical
Publication of JPH067557Y2 publication Critical patent/JPH067557Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
JP1986143449U 1986-09-20 1986-09-20 ２次電子検出器 Expired - Lifetime JPH067557Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986143449U JPH067557Y2 (ja) 1986-09-20 1986-09-20 ２次電子検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986143449U JPH067557Y2 (ja) 1986-09-20 1986-09-20 ２次電子検出器

Publications (2)

Publication Number Publication Date
JPS6350442U JPS6350442U (US06633600-20031014-M00021.png) 1988-04-05
JPH067557Y2 true JPH067557Y2 (ja) 1994-02-23

Family

ID=31053141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986143449U Expired - Lifetime JPH067557Y2 (ja) 1986-09-20 1986-09-20 ２次電子検出器

Country Status (1)

Country Link
JP (1) JPH067557Y2 (US06633600-20031014-M00021.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008257914A (ja) * 2007-04-02 2008-10-23 Jeol Ltd ビーム装置
JP4958313B2 (ja) * 2008-10-17 2012-06-20 独立行政法人産業技術総合研究所 走査型電子顕微鏡およびその使用方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148867U (ja) * 1982-03-30 1983-10-06 株式会社島津製作所 ２次電子検出装置

Also Published As

Publication number Publication date
JPS6350442U (US06633600-20031014-M00021.png) 1988-04-05

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