JPH0669313A - Purge station of portable sealed container - Google Patents

Abstract

PURPOSE:To easily purge a wafer or the like in an arbitray desired place inside a clean room. CONSTITUTION:The purge station is provided with an independent case 1 having a window 2 for carrying-in or carrying-out use, with a purge unit 3 having a container stand part 20B installed inside the case, with a container-main-body raising and lowering device 60, with pipes 4, 6 for purge use one end of which is opened inside the purge unit and with a control device 10 for purge use. A container mounted on the container stand part is a portable hermetically sealed container 30 provided with a container main body 31 and a bottom lid 40 and is used to convey a cassette 70 housing an electronic substrate W such as a semiconductor wafer, a liquid-crystal substrate or the like. A purge mechanism which makes the inside of the container on the container stand part communicate with the inside of the purge unit and shuts off the inside of the container from the inside of the purge unit is built in the purge unit 3.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a purge station for a portable closed container used in a clean room.

[0002]

2. Description of the Related Art For example, a semiconductor is manufactured in a clean room in which the internal atmosphere is cleaned. As a local clean system, dust is not attached to a semiconductor wafer during the processes in the clean room and between the apparatuses. In order to prevent this, there is a method in which a wafer cassette accommodating the semiconductor wafer is accommodated in a portable airtight container.

Further, in recent years, in order to prevent growth of an oxide film due to natural oxidation of electronic substrates such as semiconductor wafers and liquid crystals and contamination with metal ions in the atmosphere, the inside atmosphere of the sealed container is kept free from nitrogen gas or the like. It has been proposed to replace with an active gas.

[0004]

Since the gas purging for replacing the internal atmosphere of the closed container with an inert gas such as nitrogen gas has not been proposed, it is still new, for example, a device for carrying out the surface treatment of semiconductor wafers or a storage cabinet. However, in this case, there is an inconvenience that the place where the gas purging can be performed is specified.

The present invention has been made to solve this problem, and it is an object of the present invention to provide a purging station of a portable closed container which facilitates purging of wafers or the like at any desired location in a clean room. To aim.

[0006]

In order to achieve the above object, in claim 1, an independent case having a window for loading and / or unloading, a purge unit having a container base portion provided in the case, and a container body are provided. lift device,
A purging pipe with one end opening in the purging unit,
The container equipped with a purging controller and mounted on the container base is a portable closed container for carrying and storing a cassette that has a container body and a bottom lid and stores electronic substrates. It is configured to have a built-in purge mechanism that connects / disconnects the inside of the container on the container base with the inside of the purge unit.

In the present invention, the case has a mechanism for generating an air flow in the vertical direction, the front-back direction, or the left-right direction, and the air flow is an air flow that has passed through a filter, and is used for loading / unloading windows or exhaust gas. It was designed to flow out of the case through the opening.

According to a third aspect of the present invention, the case has a container storage chamber, and the container body lifting device has a function of transferring the container from the container storage chamber to the container base of the purge unit.

According to a fourth aspect of the present invention, the case has a container body temporary placing table, and the container body elevating device transfers the container body from the container table part of the purge unit to the container body temporary placing table and vice versa. It is configured to have functions.

According to a fifth aspect of the present invention, the purging is gas purging with an inert gas for the electronic device substrate in the cassette or gas purging with an inert gas after evacuation.

According to a sixth aspect of the present invention, an independent case having a window for loading / unloading, a container base portion provided in the case, a container lid opening / closing mechanism, a purge pipe having one end opened in the case, and a purge control. The container equipped with the apparatus and placed on the container base has a container body and an upper lid, and is a portable closed container for carrying and storing cassettes for storing electronic substrates.

According to a seventh aspect, in the sixth aspect, the case has a mechanism for generating an air flow in the vertical direction, the front-back direction, or the left-right direction, and the air flow is an air flow that has passed through a filter, and is carried in and / or out. It is configured to flow out of the case from a window or an opening for exhaust.

According to an eighth aspect, in the sixth and seventh aspects, the case has a container main body temporary placing table, and the container body elevating device moves from the container base part of the purge unit to the container main body temporary placing table and vice versa. It was configured to have the function of transferring the container body to.

According to a ninth aspect of the present invention, in the sixth to eighth aspects, the purge is a gas purge with an inert gas for the semiconductor substrate for electronic equipment in the cassette or a gas purge with an inert gas after vacuuming.

According to a tenth aspect of the present invention, the peripheral portion of the opening provided in the upper wall is a purge chamber which is a container base for placing a closed lid type closed container, a purge pipe having one end opened to the purge chamber, and a purge control device. A purge mechanism is provided for connecting / disconnecting the inside of the container on the container base and the purge chamber.

In the eleventh aspect of the present invention, the purge chamber is a container base portion having a carry-in window on a side wall and an opening provided on the upper wall, and a peripheral portion of the opening is a container for placing a closed container having a bottom lid. The purge pipe is partitioned by the skirt in an independent case having a shieldable skirt, one end of the purging pipe opens on the peripheral surface of the opening, and the case separates the inside of the container on the container base and the inside of the purge unit. A purging mechanism for connecting / disconnecting is built in, and the skirt forms part of this purging mechanism.

According to a twelfth aspect, in the tenth and eleventh aspects, the purge is a gas purge with an inert gas for the electronic substrate in the cassette or a gas purge with an inert gas after evacuation.

[0018]

Since the present invention is unitized as a purge station, it can be installed at a desired place in a clean room.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

1 and 2, reference numeral 1 denotes a rectangular parallelepiped case having a window 2 on a front wall 1A. 3 is a purge unit, which is a closed box 2 as shown in FIG.
A container lid opening / closing mechanism for connecting / disconnecting the inside of the closed box 20 and the inside of the portable closed container 30 is housed in 0. Reference numeral 4 denotes a gas supply pipe, one end 4A of which extends to the outside of the case 1, the other end 4B of which opens into the closed box 20, and an electromagnetic opening / closing valve 5 is interposed midway. 6 is an exhaust gas pipe, one end 6A extends outside the case 1, and the other end 6B
Has an opening in the closed box 20, and an electromagnetic opening / closing valve 7 is interposed in the middle. Reference numeral 9 is a high-performance filter, and 10 is a purge unit control device (controller). The control device 10 controls opening / closing of the electromagnetic opening / closing valves 5 and 7, and drive control of the container opening / closing mechanism and a container body lifting device described later. An opening 20A is formed on the upper wall of the closed box 20, and a peripheral portion of the opening 20A serves as a base 20B on which the container 30 is placed. 60 is the container body 3 shown in FIG.
1. A container body lifting device for lifting 1; a cylinder device is used in this embodiment. One end 4A of the gas supply pipe 4 is connected to the inert gas cylinder 100, and one end 6A of the exhaust gas pipe 6 is connected to an exhaust pipe or the like extending under the floor of the clean room. In FIG. 3, 21 is a lifting device,
22 is a rod, and 23 is a lift. The elevating table 23 has a flange 23A having a diameter larger than the opening 20A, and normally,
The flange 23A is fitted in the opening 20A until it comes into pressure contact with the peripheral portion of the lower surface of the opening 20A via the sealing material 24, and a gap is defined between the flange 23A and the peripheral surface of the opening 20A. A wafer cassette 70 accommodates an electronic substrate (semiconductor wafer, liquid crystal, etc.) W.

In FIG. 3, a portable closed container 30 is provided.
The main body 31 has an opening 33 with a flange 32. 34 is a sealing material, 35 is a sealing material (unit side),
36 is a handle, and 40 is a bottom lid of the closed container.

The bottom lid 40 of the closed container is a hollow body and has a locking mechanism as shown in FIG. 4, for example. Four
Reference numeral 4 is a cam, and 45 is a plate-like lock arm having a rolling element 45a, which is supported in a cantilever manner so as to be capable of advancing and retracting in the longitudinal direction and tilting. 46 is a fulcrum member and 47 is a spring. The cam shaft 48 extends from the center of the upper wall of the lifting table 23 into the bottom cover 40, and spline-engages with the cam 44 when the bottom cover 40 is concentrically placed on the lifting table 23. The lift 23 has a camshaft 4
8 has a built-in cam shaft drive mechanism 49 for rotating the cam shaft 8 by a predetermined angle. The cam shaft drive mechanism 49 and the cam shaft 48 are unlocked /
It constitutes the locking mechanism. A recess 33 </ b> A with which the lock arm 45 is engaged is formed on the inner peripheral surface of the opening 33 of the main body 31.

In this structure, a container 30 is carried into the case 1 from the window 2 of the case 1 and sealed by a transfer device (not shown) (for example, a transfer device mounted on a mobile robot running in a clean room). Box 2 base 2
Reprinted on OB.

(A) Now, this container 30 is empty,
Next, when the wafer cassette 70 is stored and gas purge is performed, (a) the rod 61 of the container body elevating device 60 descends, and the grip 3 of the container body 31 is held by the grip portion 62 at the tip of the rod.
5 is grasped and the container body 31 is pressed onto the base portion 20B.

(B) The locking / unlocking mechanism operates, the lock arm 45 retracts and disengages from the recess 33A, and the container body 31 and the bottom lid 40 are unlocked.

(C) When the lock between the container body 31 and the bottom lid 40 is released, the rod 61 of the container body lifting device 60 rises to lift the container body 31 to a predetermined height. (D) A wafer cassette 70 containing wafers that have been processed by another device is being transferred to the case 1 by the mobile robot, and the container body 31 is lifted to a predetermined height and then transferred by the transfer device. Then, it is carried into the case 1 through the window 2 of the case 1 and transferred onto the bottom lid 40 that remains on the elevating table 23.

(E) When this transfer is completed, the rod 61 of the container body lifting device 60 descends to move the container body 31.
Is placed on the pedestal portion 20B so as to be in pressure contact therewith, and the inside of the container body 31 and the outside of S are hermetically shut off.

(F) Next, the electromagnetic on-off valves 5 and 7 are opened. As a result, the inert gas (N ₂ gas in this embodiment) is introduced into the closed box 20 from the one end 4B of the gas supply pipe 4.
Is jetted into the closed box 20, the atmosphere in the closed box 20 is discharged to the outside of the case 1 through the exhaust gas pipe 6, the inside of the closed box 20 is filled with an inert gas, and the inert gas is continuously supplied thereafter.

(G) After elapse of a predetermined time, the elevating table 23 is slightly lowered. As a result, the shielding of the container body opening 33 by the bottom lid 40 disappears, the inside of the container body 31 communicates with the inside of the closed box 20, and the container body 31 is replaced with the inert gas.

(H) When the set time has elapsed, the lift 23
Is raised to its original height, the unlocking / locking mechanism is actuated, the lock arm 45 is engaged in the recess 33A, and the bottom lid 4
0 is airtightly locked in the opening of the container body 31, and the electromagnetic opening / closing valve 5 is closed.

(I) When this locking is completed, the rod 61 of the container body elevating device 60 rises, and the transfer device takes the container 30 out of the case 1.

(B) When the container 30 is loaded into the case 1 with the wafer cassette housed therein, the steps (a), (b), (f) to (i) are executed.

This embodiment is an independent purging station. In the case 1, the wafer cassette 70 carried from the outside of the case is stored in the container 30, and the step of gas purging with a gas inert to the wafer W is automatically performed. To run.

It has only recently been recognized that the growth of a natural oxide film on a wafer and the contamination by metal ions impede the performance and integration of the wafer. Since the equipment to be used does not have a purging function with an inert gas, adding a purging function to these requires a very high cost for remodeling the equipment and also suspends the operation of the equipment for a long period of time. Must-have.
The purge station of the present embodiment can be provided with the same function as when the apparatus is modified by simply disposing the purge station adjacent to these existing apparatuses. Since the purge station of the present embodiment can be manufactured at low cost, the cost is lower than the modification of the above apparatus, and it is not necessary to stop the operation of the apparatus for a long period of time.

FIG. 5 shows a second embodiment of the present invention, which is different in that the case 1 has a container storage chamber 1C. The container storage room 1C is provided with a plurality of shelves 1D on which the containers 30 are placed. The container 30 of this embodiment has a handle 36A on the peripheral wall of the container body 31.
The point that two containers are provided is different from the container body of FIG.
The container body lifting device 80 according to the present embodiment includes the fingers 8
0A handling robot 80A and a mechanism 80 for rotating and lifting the entire handling robot 80A.
B is provided with an automatic container supply function for transferring the container 30 from the shelf 1B of the container storage room onto the base 20B. Reference numeral 81 is a screw shaft that is rotationally driven by a driving device (not shown).

In this embodiment, a plurality of containers 30 can be stored in the container storage chamber 1C, and the containers 30 on the shelf 1D designated by the container body elevating device 80 are transferred onto the base 20B of the purge unit 3. Since the automatic hand can be transferred to, it is not necessary to carry the container 30 into the case 1 from the outside of the case 1 each time as in the embodiment of FIG.

FIG. 6 shows a third embodiment of the present invention, in which a chamber 1E accommodating the purge unit 20 has a temporary container placing base 1F, and the container main body elevating device 90 includes a handling robot 80A. A mechanism 80C for rotating, lifting, and horizontally driving the entire handling robot 80A.
Not only has the function of automatically supplying the container 30 from the shelf 1D of the container storage room to the table 20B but also transfers the container body 31 from the table 20B to the temporary container placing table 1F and vice versa. It also has a function. Reference numeral 82 is a slider.

(A) Now, it is assumed that the purge station is arranged adjacent to the surface treatment device in the clean room.

(A) The wafer cassette containing the processed wafers is unloaded from the surface processing apparatus and transferred onto the cassette base 2A in the window 2 of the case 1.

(B) The container body elevating device 90 moves the empty container 30 from the designated shelf 1B of the container storage room 1A.
Are transferred onto the container base 20A.

(C) The locking / unlocking mechanism is operated, the lock arm 45 retracts and disengages from the recess 33A, and the container body 31 and the bottom lid 40 are unlocked.

(D) When the container body 31 and the bottom lid 40 are unlocked, the container body elevating device 60 engages the fingers 80a with the lower surface of the handle 36A to move the container body 31 to the temporary container placing table 1F. List.

(E) The container body elevating / lowering device 90, which has completed the transfer of the container body 31, transfers the wafer cassette 70 on the cassette base 2A onto the bottom lid 40 remaining on the elevating base 23.

(F) After the transfer of the wafer cassette 70, the container main body lifting device 90 covers the container main body 31 on the temporary container placing table 1F on the bottom cover 40, and the container main body 3
1 The inside and the outside are shut off airtightly.

(G) Next, the electromagnetic on-off valves 5 and 7 are opened. As a result, the inert gas is ejected from the one end 4B of the gas supply pipe 4 into the closed box 20, and the closed box 20
The air inside is discharged to the outside of the case 1 through the exhaust gas pipe 6, and the sealed box 20 is filled with an inert gas.

(H) After a lapse of a predetermined time, the elevating table 23 is slightly lowered. As a result, the inside of the container body 31 communicates with the inside of the closed box 20, and the container body 31 is replaced with the inert gas.

(I) When the set time elapses, the lift 23
Is raised to its original height, the unlocking / locking mechanism is actuated, the lock arm 45 is engaged in the recess 33A, and the bottom lid 4
0 is airtightly locked in the opening of the container body 31 and closes the solenoid on-off valves 5 and 7.

(J) When this lock is completed, the container main body elevating device 90 removes the purged container 30 from the base 2
After being transferred to A, the container 30 can be carried out of the case 1.

In this embodiment, the transfer of the wafer cassette 70, the transfer of the container 30, the storage of the wafer cassette 70 in the container 30, and the lifting and lowering of the container body 31 are performed by one container body lifting device 90.

FIG. 7 shows another example of the purge unit.

In this purge unit, one end 4B of the supply gas pipe 4 is opened to the peripheral surface of the opening 20A of the closed box 20, and one end 6B of the exhaust gas pipe 6 is also opened to the peripheral surface of the opening 20A of the closed box 20. . The elevating table 23 is supported by one end of a support arm 25 extending in the lateral direction, the support arm 25 is screwed into a screw shaft 26 at the other end, and is lifted and lowered by the rotation of the screw shaft. Reference numeral 27 is a drive device that rotationally drives the screw shaft 26, and 28 is a guide rod. Reference numeral 29 denotes a bellows type skirt having a spring property, which is provided integrally with the lifting table 23, and when the lifting table 23 is in the opening 20A or when it is slightly lowered, the skirt peripheral portion 29.
A is airtightly pressed against the peripheral portion of the lower surface of the opening 20A to cover the opening from below.

In this embodiment, the inert gas is sprayed to the opening 20A, and the elevator 23 is slightly lowered from the opening 20A to pass through the space formed between the flange 32 of the container main body 31 and the bottom lid 40. It flows into the main body 31.

In this embodiment, since the whole of the closed box 20 is not filled with the inert gas, the consumption amount of the inert gas can be saved.

By the way, when the wafer cassette 70 is loaded into the case 1 from the outside and the wafer cassette 70 is stored in the container 31 in the case 1, dust floating in the atmosphere in the case 1 is transferred to the wafer cassette 70. It may adhere to the surface of the inner wafer W and contaminate the wafer.

In order to prevent this, as shown in FIG.
A fan 91 and a filter 92 are provided on the ceiling side of the case 1,
Clean air may always flow from the top to the bottom, and the air flow may flow out from the window 2 to the outside. As shown in FIG. 9, a fan 91 and a filter 92 are provided on the back side of the case 1 so that clean air always flows from the back side to the front side of the case, and the air flow flows out from the window 2 to the outside. Good. When the storage chamber 1C is provided on the back side of the case as in the embodiment of FIGS. 5 and 6, the fan 9 is provided on one side of the case.
1 and the filter 92 may be provided.

In each of the above-described embodiments, the case where the gas is purged with an inert gas such as N ₂ gas has been described. However, the gas may be purged with dry air or heated N ₂ gas, and the inside of the container 30 may be purged before the gas is purged. It may be evacuated. When this evacuation is performed, in addition to the pipe 4 connected to the inert gas source, a pipe connected to a vacuum source (not shown) is drawn into the closed box 20.

In the embodiment of FIGS. 1, 2, 5-8, the base 20B on which the container 30 is placed is housed in the case 1.
As shown in FIG. 10, the closed box 20 may be used as a substitute for the case 1. In this case, the closed box 2
A window 20E for loading / unloading the container is formed on the side wall 20C of 0, and the elevating table 23 is lowered to the position indicated by the chain line when loading / unloading the cassette. In this case, the skirt 29
Partitions the purge chamber.

Although the portable airtight container 30 described in each of the above embodiments is of the bottom lid type, the portable airtight container is an upper lid airtight container 300 as shown in FIG.
There is also. 301 is a container main body, and 302 is an upper lid.
FIG. 10 shows a purging station for the upper lid type closed container 300 in which a purge chamber 304 is partitioned in the case 1 and a lid opening / closing mechanism 305 for opening and closing the upper lid 302 is arranged in the purge chamber 304. ing. 306 is a stand on which the container 300 is placed.

Also in this case, the container storage room 1 described above
Needless to say, it may be configured to have C or the temporary container placing table 1F, and the lid opening / closing mechanism 305 has a container transfer function.

The controller 10 of the purge station
Executes the above-mentioned sequence, but when the purge station is arranged adjacent to a film forming apparatus or the like, for example, the controller such as the film forming apparatus may have the function of the control device 10, and is incorporated in the purge station. Not necessarily.

[0061]

As described above, according to the present invention, the cassette is automatically stored in the container and purged only by transferring the cassette from the outside to a predetermined position in the case, and is unitized as a purge station. However, there is an advantage that it can be arranged at a desired place in the clean room, and it is extremely suitable especially when it is desired to provide an existing device in the clean room with a purging function.

[Brief description of drawings]

FIG. 1 is a perspective view of a case showing an embodiment of the present invention.

FIG. 2 is a layout view of devices in a case of the above-described embodiment.

FIG. 3 is a view showing an example of a closed container and a purge unit in the above embodiment.

FIG. 4 is a view for explaining a locking / unlocking mechanism of the closed container.

FIG. 5 is a layout view of devices in a case according to a second embodiment of the present invention.

FIG. 6 is a layout view of devices in a case according to a third embodiment of the present invention.

FIG. 7 is a diagram showing another example of the closed container and the purging unit according to the present invention.

FIG. 8 is a diagram showing another example of the case according to the present invention.

FIG. 9 is a diagram showing still another example of the case according to the present invention.

FIG. 10 is a sectional view of a building according to a fourth embodiment of the present invention.

FIG. 11 is a layout view of devices in a case according to a fifth embodiment of the present invention.

[Explanation of symbols]

 1 Purge Station Case 1C Container Storage Room 1D Shelf 1F Container Temporary Storage Base 2 Window 2A Base Part 3 Purge Unit 4 Purge Gas Supply Pipe 6 Exhaust Gas Pipe 5, 7 Solenoid Open / Close Valve 9 Filter 10 Controller 20 Closed Box 20A Opening 20B Base part 20E Window 23 Lifting platform 29 Bellows type skirt 30 Bottom lid type closed container 40 Bottom lid of closed container 60, 80, 90 Container body lifting device 70 Wafer cassette 91 Fan 92 Filter 100 Inert as purge source Gas cylinder 300 Top lid type closed container 305 Lid opening / closing mechanism

Front page continued (72) Inventor, Hiya Morita, 100, Takegahana-cho, Ise-shi, Mie Shinko Electric Co., Ltd., Ise Works (72) Inventor, Kono, 100, Takegahana-cho, Ise-shi, Mie Shinko Electric Co., Ltd., Ise Works ( 72) Inventor Mitsuhiro Hayashi 100 Taketakehanamachi, Ise City, Mie Shinko Electric Co., Ltd. (72) Inventor Atsushi Okuno 100 Taketakehanacho, Ise City, Mie Shinko Electric Co., Ltd. (72) Inventor Akio Nakamura 100, Takegahana-cho, Ise-shi, Mie Shinko Electric Co., Ltd.

Claims (12)

[Claims] 1. An independent case having a window for loading and / or unloading, a purge unit having a container base provided in the case, a container body lifting device, and a purge having one end opened in the purge unit. A container equipped with a pipe for cleaning and a control device for purging, and the container placed on the container base is a portable closed container for carrying and storing a cassette that has a container body and a bottom lid and stores an electronic substrate, A purge station for a portable closed container, wherein the purge unit has a built-in purge mechanism for connecting / disconnecting the inside of the container on the container base and the inside of the purge unit. 2. The case has a mechanism for generating an air flow in the up-down direction, the front-rear direction, or the left-right direction. The purge station for a portable closed container according to claim 1, wherein the purge station flows out of the case. 3. The case has a container storage chamber, and the container body lifting device has a function of transferring the container from the container storage chamber to the container base of the purge unit. Or the purging station of the portable closed container described in 2. 4. The case has a container main body temporary placing base, and the container main body elevating device has a function of transferring the container main body from the container base portion of the purge unit to the container main body temporary placing base and vice versa. The purging station for a portable closed container according to claim 1, 2, or 3. 5. The purging according to claim 1, wherein the purging is a gas purging with an inert gas for the electronic device substrate in the cassette or a gas purging with an inert gas after evacuation. Purge station for portable closed containers. 6. An independent case having a carry-in / carry-out window, a container base portion provided in the case, a container lid opening / closing mechanism, a purge pipe having one end opened in the case, and a purge control device. A purging station for a portable closed container, wherein the container placed on the container base is a portable closed container for transporting a cassette that has a container body and an upper lid and stores an electronic substrate. 7. The case has a container storage chamber, and the container lid opening / closing mechanism has a function of transferring the container from the container storage chamber to the container base of the purge unit. Purge station for portable closed containers as described. 8. The case has a container main body temporary placing base, and the container main body lifting device has a function of transferring the container main body from the container base portion of the purge unit to the container main body temporary placing base and vice versa. The purging station for a portable closed container according to claim 6 or 7. 9. The portable closed container according to claim 6, wherein the purging is gas purging with an inert gas for the electronic substrate in the cassette or gas purging with an inert gas after evacuation. Purge station. 10. A purge chamber in which a peripheral portion of an opening provided in an upper wall is a container base for placing a bottom lid type closed container, a purge pipe having one end open to the purge chamber, a purge control device, and the container. A purging station for a portable sealed container, comprising a purging mechanism for connecting / disconnecting the inside of the container on the table and the purging chamber. 11. The purging chamber is a container base portion having a carry-in window and an opening provided in an upper wall, and a peripheral portion of the opening is a skirt capable of hermetically shielding the opening from the inside. Is partitioned by the skirt in an independent case including the above, and one end of the purge pipe is opened on the peripheral surface of the opening, and the case communicates / blocks the inside of the container on the container base with the inside of the purge unit. The purging station of a portable closed container according to claim 10, wherein a purging mechanism is built in, and the skirt forms a part of the purging mechanism. 12. The portable closed container according to claim 10, wherein the purging is gas purging with an inert gas for the electronic substrate in the cassette or gas purging with an inert gas after evacuation. Purge station.