JPH066904A - Unattendant power supply for unmanned vehicle in clean room - Google Patents

Abstract

PURPOSE:To provide an unattendant power supply for an unmanned vehicle in a clean room wherein installation is facilitated through compaction. CONSTITUTION:The unattendant power supply comprises a current collecting unit 50 mounted on an automatically guided vehicle(AGV) and a power supply unit 60 installed at a station. The current collecting unit 50 comprises a movable current collector 51 having a pair of AC and DC movable side contactors, a moving means 52 for the current collector 51, and an optical communication unit 53 on the AGV side. The power supply unit 60 is disposed oppositely to the current collecting unit 50 and comprises a fixed current collector 61 having a pair of fixed side contactors contacting at the moving end of the current collector 51, an optical communication unit 63 on the station side, and a power supply unit controller 64. When the AGV stops at the station, signals for starting/stopping the charging operation and moving the movable current collector 51 are communicated between the control section 40 and the controller 64 through the optical communication units 53, 63 and the current collectors 51, 61 come into contact to begin power supply. Contactors of the current collectors 51, 61 have contact surfaces crossing perpendicularly each other or inclining.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic power feeder for supplying electric power to an automatic guided vehicle for a clean room while the automatic guided vehicle is stopped at a station.

[0002]

2. Description of the Related Art Conventionally, an automatic guided vehicle for a clean room used in a semiconductor factory or the like will be described with reference to the drawings. 9 is a perspective view showing the layout in the clean room, and FIG. 10 is a plan view of the same.

The automatic guided vehicle 1 includes a traveling unit 11, a robot unit 12 mounted on the traveling unit 11, and a control unit including a microcomputer (not shown). The traveling unit 11 includes a steering traveling unit and a position detecting unit. The traveling unit 11 includes a plurality of stations 20 arranged along a traveling path to a conveyed object 21 such as a cassette case.
Has a function of transporting to another station set in advance. That is, the steering traveling means travels while detecting the guiding optical tape 31 and the like arranged on the floor surface, and the magnetic sensor mounted on the automatic guided vehicle detects the magnetic tape 30 provided on the floor surface to move the vehicle to a predetermined position. It is supposed to stop.

In the station 20, the robot section 12 has a function of receiving an object to be transported 21 from the other party or delivering it to the other party. The station 20 is a manufacturing apparatus for wafers, etc., and is installed in the clean air that blows down from the ceiling of the clean room and flows.
The fine dust adhering to 21 flows down together with the air flowing down, and is discharged below the floor from the grating 32 laid on the floor.

The electric power of the automatic guided vehicle 1 is supplied from a battery 41 incorporated therein, and the battery is appropriately charged or replaced with a charged battery. However, it takes time to replace the battery.
The battery 41 is charged while the 1 is stopped.

At the time of power feeding, the movable current collector 13 provided on the automatic guided vehicle 1 is lowered in the direction of the arrow to electrically contact the fixed current collector 23 provided on the power feeding device 22 to feed power to the robot section 12 from the power feeding device 22. At the same time, the battery 41 is charged. The power supply device 22 is provided near the station 20.

[0007]

However, the stop error of the automatic guided vehicle is always involved, and it is rare that the centers of the fixed current collector and the movable current collector coincide with each other at the stop position. For this reason, the contact area of the fixed current collector is increased in order to prevent it from being affected even if the stop position is slightly changed. Therefore, the space of the power feeding device becomes large. Further, the power supply device is usually installed by embedding the grating 32 near the station in a notched part, but when the layout of the manufacturing device is changed by changing the layout, there are the following problems.

That is, the power feeding device 22 cannot be installed until after the manufacturing equipment is installed. Further, since the power feeding device is installed, it takes a lot of time to construct the notch of the grating 32, and when it interferes with the beam 33 (see FIG. 13), it takes more time. Therefore, the construction period becomes longer,
There is a drawback that the power supply device 22 cannot be easily relocated. The present invention was devised in view of the above circumstances, and an object thereof is to provide an unmanned power feeding device for an unmanned guided vehicle for a clean room, which is compact and can be easily installed.

[0009]

An unmanned power feeding device for an automated guided vehicle for a clean room according to the present invention is equipped with a robot, runs between a plurality of stations installed in the clean room, and is stopped at a predetermined station. An unmanned power feeding device for an unmanned guided vehicle for a clean room, in which a robot performs a predetermined operation, comprising a current collecting unit provided in the unmanned guided vehicle and a power feeding unit provided in a station, and the current collecting unit is provided for each of direct current and alternating current. A movable current collector having a pair of movable contacts, and a moving means for moving the movable current collector,
The vehicle is provided with a control unit that outputs a signal based on the operation of the moving unit and an optical communication device on the vehicle side that exchanges information with the power feeding unit based on the output of the control unit, while the power feeding unit collects power. A fixed current collector having a fixed side contact arranged to face the unit and electrically contacting the movable side contact at the moved end of the movable current collector, and a power feeding unit for outputting based on the operation of the moving means. A station-side optical communication device for exchanging information between the controller and the power collection unit based on the output of the power supply unit controller is provided, and the movable current collector is orthogonal or inclined to the fixed current collector by the moving means. It is characterized in that they are arranged so as to come into contact with each other.

[0010]

Embodiments of the present invention will be described below with reference to the drawings. 1 is an external perspective view of an automated guided vehicle, FIG. 2 is a configuration explanatory view of an unmanned power feeding device, FIG. 3 is a plan view showing the arrangement of a fixed current collector and a movable current collector at the lower end position of the movable current collector, FIG. Is a side view of the movable current collector at the same position, FIG.
Is a cross-sectional side view of a fixed current collector and a movable current collector in a contact state, FIG. 6 is a configuration explanatory view of a moving means, FIG. 7 is a flow chart of an unmanned power feeding device, and FIG. 8 is a time chart of an optical communication device. 9 to 11 are drawings showing another embodiment, FIG. 9 is a side view of a movable current collector, and FIG. 10 is FIG.
11 is a sectional view of the fixed current collector in side view. The same parts as those in the prior art are designated by the same reference numerals.

The unmanned power feeding device of the present invention comprises a power collection unit 50 provided in an unmanned transport vehicle and a power feeding unit provided in a station.
It consists of 60. The automated guided vehicle 10 includes a traveling unit 11, a robot unit 12, a control unit 40, a battery 41, and the current collecting unit 50. The control unit 40 includes a charging voltage regulator 401, a vehicle controller 402, and a robot controller 403. 42 is a power unit of the automated guided vehicle 10 including a motor, and 43 is a power unit of a robot including a motor.

The charging voltage regulator 401 has an automatic voltage adjusting function. When the charging of the battery 41 is started, the battery voltage is output. As the charging voltage rises, the output voltage is controlled to a predetermined value and the charging is completed. When the charging voltage is lost, the automatic voltage suppression is released and the battery power is output. The vehicle controller 402 controls the operation of the automated guided vehicle 10 and includes a microcomputer (not shown).

The robot controller 403 is an automated guided vehicle 10.
The operation of the robot unit 12 is controlled in synchronism with the above operation, and the operation sequence and required time are set in advance. The battery 41 is, for example, a nickel-cadmium battery, and in this embodiment, a battery having a capacity of 24V10AH is used. The current collecting unit 50 includes a movable current collector 51, a moving unit 52 that changes a holding position when the movable current collector 51 is charged or not charged, a carrier-side optical communication device 53, and a charging contactor 54.

The movable collector 51 is for a single-phase AC power source 1
A pair of movable contacts 511A and 511B, plus and minus for DC power supply
It consists of a pair of movable contacts 512A and 512B and a cylindrical pipe 513. When collectively referring to the movable side contactor, 511,
512. The movable contacts 511 and 512 are made of phosphor bronze and formed in a flat plate shape.
It is provided so as to project in directions opposite to each other through 4.
515 is a terminal and 516 is a lead wire.

The moving means 52 is a swing motor 521 connected to the pipe 513 and a base plate 52 to which the swing motor 521 is attached.
2 and the air cylinder 52 that moves the base plate 522 up and down.
3 includes a compressor 524, a solenoid valve 525 and a pair of tension springs 526. Reference numeral 527 is a bracket for fixing the base plate 522 to the main body of the automated guided vehicle via the tension spring 526.

By operating the air cylinder 523, the base plate
The base plate 522 is provided with limit switches 528A and 528B for detecting whether the movable collector 51 is raised or lowered, which are configured to move up and down. Further, limit switches 529A and 529B for detecting 90-degree turning of the movable current collector 51 are provided at the start and end positions where the pipe 513 makes a quarter turn by driving the turning motor 521. The carrier-side optical communication device 53 is a pair with the station-side optical communication device 63 provided in the station 20, and transmits and receives signals such as the operation of the moving means 52 and charging start and charging completion.
The charging contactor 54 is provided between the battery 41 and the movable contact 512.

Next, the power supply unit 60 will be described. The power feeding unit 60 includes a fixed current collector 61, a station side optical communication device 63, a power feeding unit controller 64, a power source section 65, and a pair of resin covers 62 having a U-shaped cross section in a side view.
It consists of Fixed collector 61 is for single-phase AC power supply
It is composed of a pair of fixed contacts 611A, 611B and a pair of fixed contacts 612A, 612B for DC power supply. Hereinafter, the fixed-side contacts are collectively referred to as 611 and 612. The station side optical communication device 63 is provided as a peripheral device.

The fixed contacts 611 and 621 are made of phosphor bronze and are formed in a dish shape. The movable current collector 51 is provided on the side wall of the cover 62.
The axis of the pipe 513, that is, the axis of the pipe 513, is installed so as to face the axis of the pipe 513 while being separated by a predetermined distance. 613 is contactor 611A, 611B
Is a bolt for fixing to the cover 62, 614 is a spring inserted in the bolt 613, and 615 is an insulator. The movable current collector 51, which is turned 90 degrees at the lower end position lowered by the moving means 52, is configured to electrically contact the fixed current collector 61.

The station side optical communication device 63 has the same structure as the carrier side optical communication device 53. The power supply unit controller 64 commands the charger 651 to start charging and stop charging based on the output of the station side optical communication device 63, and has a charging time checking function. The power supply unit 65 includes a charger 651 and a power supply contactor 652.

Next, the power feeding method of the present invention will be described. The automated guided vehicle 10 arrives at the station 20 and stops at a fixed position (see S1 and S2 in FIG. 7). The output of the position detection means (not shown) causes the air cylinder 523 to operate via the vehicle controller 402 and the movable current collector.
51 descends (see S3), lower limit position is limit switch 528B
Is detected (see S4).

The output of the limit switch 528B drives the turning motor 521 via the vehicle controller 402 (see S5), and the limit switch 529B detects that the vehicle has turned 90 degrees (see S6). The output of the limit switch 529B turns on the charging contactor 54 via the vehicle controller 402 (S7
See). Further, the output of the limit switch 529B causes the "charge start" signal to be transmitted and input to the power feeding unit controller 64 via the vehicle controller 402 and both optical communication devices 53 and 63 (S8 and A in FIG. 8). Then, both collection electronic 5
In the case of a contact failure in which the contact states of 1 and 61 are confirmed by appropriate means, error processing is performed (see S9).

The output of the power supply unit controller 64 turns on the charger 651 and the power supply contactor 652 (S1
Then, the charging of the battery 41 is started (see S11).
Also, single-phase AC power is supplied to the robot unit 12. When the operation of the robot unit 12 is completed, a charge stop signal is output from the robot controller 403 via the vehicle controller 402 (see S12). This charge stop signal is input to the power supply unit controller 64 via both optical communication devices 53 and 63, and the charge time is checked to be a preset time (see S13), and a charge stop command is issued (S14 and FIG. 8). B
See). As a result, the power supply contactor 652 is turned off and charging is stopped (see S15 and S16).

After the preset time-up (see S17), the charge stop command signal is transmitted as a movable collector / collector movement signal via the station side optical communicator 63 to the carrier side optical communicator.
Sent to 53 (see C in FIG. 8) and the vehicle controller 40
The charging contactor 54 is turned off via 2 (see S18). The output of the vehicle controller 402 reverses the movable collector 51 by 90 degrees in the opposite direction by the turning motor 521 to return (see S19, S20) and raises it to the upper limit position by the air cylinder 523 (see S21, 22). , Then, the automatic guided vehicle 10 starts (see S23).

[0023]

As described above, the unmanned power feeding device for an unmanned guided vehicle for a clean room according to the present invention comprises a power collection unit provided in the unmanned guided vehicle and a power feeding unit provided in the station. The current collection unit includes a movable current collector having a pair of contacts for direct current and alternating current, an elevating means for moving the movable current collector, and a carrier-side optical communication device.

Further, the power feeding unit includes a fixed current collector facing the movable current collector and in contact therewith, a power feeding unit controller,
The station side optical communication device is provided. Then, each command for starting and stopping charging is transmitted and received by the carrier side optical communication device and the station side optical communication device via the power supply unit controller.

Therefore, since the power feeding unit of the unmanned power feeding device is compact, the construction is extremely simple when it is mounted on the floor, especially on the grating. Therefore, in a semiconductor factory or the like, even when the layout is changed, it is possible to install the manufacturing apparatus on site after the manufacturing apparatus is installed, and the construction period can be shortened.

[Brief description of drawings]

FIG. 1 is a perspective view showing the appearance of an automated guided vehicle according to the present invention.

FIG. 2 is a diagram according to the present invention and is a configuration explanatory view of an unmanned power feeding device.

FIG. 3 is a plan view showing arrangements of a fixed current collector and a movable current collector at a lower end position of the movable current collector, which is a view according to the present invention.

FIG. 4 is a view according to the present invention, FIG. 4 is a side view of the movable current collector at the same position.

FIG. 5 is a side view cross-sectional view of a fixed current collector and a movable current collector in a contact state, which is a view according to the present invention.

FIG. 6 is a diagram according to the present invention, and is a configuration explanatory view of a moving means.

FIG. 7 is a flowchart of the unmanned power feeding apparatus according to the present invention.

FIG. 8 is a diagram according to the present invention and is a time chart of an optical communication device.

FIG. 9 is a perspective view showing the appearance of an automatic guided vehicle, which is a drawing related to the prior art.

FIG. 10 is a plan view of an automated guided vehicle according to the related art.

[Explanation of symbols]

 10 Automated guided vehicle 11 Traveling section 12 Robot section 20 Station 32 Grating 40 Control section 41 Battery 50 Power collection unit 51 Movable current collectors 511, 512 Movable side contactors 52 Moving means 53 Carrier side optical communication device 54 Charging contactor 60 Power supply unit 61 Fixed collector 611, 612 Fixed contact 63 Station optical communication device 64 Power supply unit controller 65 Power supply

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Office reference number FI technical display location H04Q 9/00 311 U 7170-5K

Claims (3)

[Claims] 1. An unattended power supply device for an unmanned guided vehicle for a clean room, comprising a robot, traveling between a plurality of stations installed in a clean room, and performing a predetermined operation while the robot is stopped at a predetermined station. A current collecting unit provided in the automatic guided vehicle and a power feeding unit provided in the station. The current collecting unit has a movable current collector having a pair of movable side contacts for direct current and alternating current, and a movable current collector. The moving means, the control unit that outputs a signal based on the operation of the moving unit, and the vehicle-side optical communication device that transmits and receives information to and from the power feeding unit based on the output of the control unit. The power feeding unit is disposed so as to face the current collecting unit, and has a fixed current collector having a fixed side contact that makes electrical contact with the movable side contact at the moved end of the movable current collector; The power supply unit controller that outputs based on the operation of the stage, and the station side optical communication device that exchanges information with the current collection unit based on the output of the power supply unit controller, and the movable current collector moves. An unmanned power feeding device for an unmanned guided vehicle for a clean room, characterized in that the unmanned power feeding device for a clean room is disposed so as to be in contact with the fixed current collector at right angles or at an angle. 2. The movable contactor is formed in a flat plate shape,
The fixed-side contacts are formed so as to project from the lower end of the pipe in mutually opposite directions, and the fixed-side contacts are arranged facing each other at a predetermined interval with respect to the axis of the movable current collector. The unmanned guided vehicle for a clean room according to claim 1, wherein the means moves up and down the movable current collector and turns the movable current collector 90 degrees at the lowered lower end position so that the movable side contactor comes into contact with the fixed side contactor at right angles. Unmanned power supply device. 3. The optical communication device on the carrier vehicle side instructs the optical communication device on the station side to "charge start" and "charge stop" based on a signal from a control unit that detects the end of the movable collector.
The station side optical communicator transmits the command to the power supply unit controller and after the power is supplied, "movable collector movement"
The unattended power supply device for an unmanned guided vehicle for a clean room according to claim 1, wherein: