JPH05276605A - Unmanned power supply for automatically guided vehicle in clean room - Google Patents

Abstract

PURPOSE:To provide an easily movable unmanned power supply. CONSTITUTION:A power collecting unit 50 mounted on an automatically guided vehicle comprises a movable current collector 51 having movable side contactors 511, 512 for AC and DC, moving means 52 for moving the movable current collector 51 back and forth, a control section 40, and a vehicle side optical communication unit 53. A power supply unit 60 installed upstanding on the floor in a station comprises a fixed current collector 61 having a pair of fixed side contactors 611, 612 coming into electrical contact with the advanced movable current collector 51 at the end thereof, a station side communication unit 63, and a power supply unit controller 64. Upon stoppage of the automatically guided vehicle at the station, a charge start/stop signal and a moving signal for the movable current collector 51 are communicated between the control section 40 and the power supply unit controller through the communication units 53, 63 and the current collectors 51, 61 contact each other to start power supply. Casing of the power supply unit 60 is fixed, at the lower end thereof, to a grating through fixing metals and hook bolts.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an unmanned power supply device for supplying electric power to a guided vehicle for a clean room while the unmanned vehicle is stopped at a station.

[0002]

2. Description of the Related Art Conventionally, an automated guided vehicle for a clean room used in a semiconductor factory or the like will be described with reference to the drawings. FIG. 12 is a perspective view showing the layout in the clean room, and FIG. 13 is a plan view of the same.

The automated guided vehicle 1 includes a traveling unit 11, a robot unit 12 mounted on the traveling unit 11, and a control unit including a microcomputer (not shown). The traveling unit 11 includes a steering traveling unit and a position detecting unit. The traveling unit 11 includes a plurality of stations 20 arranged along a traveling path to a transported object 21 such as a cassette case.
Has a function of transporting to another preset station. That is, the steering traveling means travels while detecting the guiding optical tape 31 arranged on the floor surface, and stops at a predetermined position due to detection of the magnetic tape 30 provided on the floor surface by a magnetic sensor mounted on the automatic guided vehicle. It is supposed to do.

In the station 20, the robot section 12 has a function of receiving an object to be transferred 21 from the other party or delivering it to the other party. The station 20 is a manufacturing apparatus for wafers, etc., and is installed in the clean air that flows down from the ceiling of the clean room and flows down.
The fine dust adhering to 21 flows down together with the air that flows down, and is discharged under the floor from the grating 32 laid on the floor.

The electric power of the automatic guided vehicle 1 is supplied from a battery 41 incorporated therein, and the battery is appropriately charged or replaced with a charged battery. However, it takes time and effort to replace the battery, so the power supply device 22 should be installed near the station, and
The battery 41 is charged while the 1 is stopped.

At the time of power feeding, the movable current collector 13 provided on the automatic guided vehicle 1 is lowered in the direction of the arrow to electrically contact the fixed current collector 23 provided on the power feeding device 22 to feed power to the robot section 12 from the power feeding device 22. At the same time, the battery 41 is charged. The power supply device 22 is provided in the vicinity of the station 20 and is embedded by cutting out the grating 32.
33 is a floor beam, 34 is a duct, and 35 is wiring / piping.

[0007]

[Problems to be Solved by the Invention] In a semiconductor factory,
When the layout is changed and the manufacturing apparatus is relocated, the power feeding device accompanying the manufacturing apparatus is also relocated. However, the mounting position of the power feeding device can be determined only after the position of the manufacturing device after the relocation is determined. After the transfer position is determined, it is necessary to cut out and embed the grating 32 by the required area. When the beam 33 interferes with the cutout portion, more work is required for the cutout. Therefore, there is a drawback that the construction period required for relocating the manufacturing apparatus becomes long.

The present invention was devised in view of the above circumstances, and an object thereof is to provide an unmanned power feeding device for an unmanned guided vehicle for a clean room, which does not require a notch for grating and can be easily relocated. ..

[0009]

An unmanned power feeding device for an automated guided vehicle for a clean room according to the present invention is equipped with a robot, runs between a plurality of stations installed in the clean room, and is stopped at a predetermined station. An unmanned power feeding device for an unmanned guided vehicle for a clean room, in which a robot performs a predetermined operation, comprising a current collecting unit provided in the unmanned guided vehicle and a power feeding unit provided in a station, and the current collecting unit is for DC and AC Based on the output of the control unit, a movable current collector having a pair of movable side contacts, a moving unit that horizontally moves in the front-rear direction toward the station, a control unit that outputs a signal based on the operation of the moving unit, and an output of the control unit. It is equipped with a carrier side optical communication device that exchanges information with the power supply unit, while the power supply unit is placed upright on the floor facing the current collection unit. A fixed current collector having a fixed side contact that makes electrical contact with the movable side contactor at the forward end of the movable current collector; a power supply unit controller that outputs based on the operation of the moving means; and a power supply unit controller The station-side optical communication device that exchanges information with the current collecting unit based on the output of the station. Further, the movable side contact is arranged in parallel in the longitudinal direction on the front and back tapered surfaces of the insulating rod having a substantially triangular cross section in side view, while the fixed side contact has a tapered surface having the same taper as the insulating rod. It has, and the one arranged corresponding to the movable side contactor is included.

Further, the movable contacts are embedded in the tapered surfaces of the insulating rods having a diameter reduced toward the front so as to face each other at equal pitches, and the moving means has a tip at which the movable current collector horizontally moves forward. It includes a fixed contact that is inclined and brought into contact with the fixed contact. Further, the carrier side optical communication device instructs the station side optical communication device to "charge start" and "charge stop" based on a signal from the control unit that has detected the front end of the movable current collector, and the station side optical communication device is In addition to transmitting the above command to the power supply unit controller, a command for "moving current collector backward" is also included after power supply.

[0011]

Embodiments of the present invention will be described below with reference to the drawings. 1 is a side view for explaining the arrangement of the power feeding unit, FIG. 2 is a plan view of the same, FIG. 3 is a configuration explanatory view of the unmanned power feeding device, FIG. 4 is an external perspective view of a movable current collector and a fixed current collector, and FIG.
6 is a plan view of the same, FIG. 6 is an explanatory view of the structure of the moving means, FIG. 7 is a flow chart of the unmanned power feeding device, FIG. 8 is a time chart of the optical communication device, and FIGS. 9 to 11 are drawings showing other embodiments. FIG. 9 is a side view of the movable current collector, and FIG.
11 is a side sectional view of the fixed current collector. The same parts as those in the prior art are designated by the same reference numerals.

The unmanned power feeding device of the present invention comprises a power collection unit 50 provided in the unmanned transport vehicle 10 and a power feeding unit 60 provided in the station 20. The automated guided vehicle 10 includes a traveling unit 11, a robot unit 12, a control unit 40, a battery 41, and the current collecting unit 50.
Is included. The control unit 40 includes a charging voltage regulator 401, a vehicle controller 402, and a robot controller 403. 42 is a power unit of the automated guided vehicle 10 including a motor, 43
Is a power unit of the robot including a motor.

The charging voltage regulator 401 has an automatic voltage adjusting function. When the charging of the battery 41 is started, the battery voltage is output. As the charging voltage rises, the output voltage is controlled to a predetermined value and the charging is completed. When the charging voltage is lost, the automatic voltage suppression is released and the battery power is output. The vehicle controller 402 controls the operation of the automated guided vehicle 10 and includes a microcomputer (not shown).

The robot controller 403 is an automated guided vehicle 10.
The operation of the robot unit 12 is controlled in synchronism with the above operation, and the operation sequence and required time are preset. The battery 41 is, for example, a nickel-cadmium battery, and in this embodiment, a battery having a capacity of 24V10AH is used. The current collecting unit 50 is a movable collector 51, and the movable collector 51 is a station.
Moving means 52 for horizontally moving forward and backward toward 20;
It includes a carrier-side optical communication device 53 and a charging contactor 54.

The movable current collector 51 is composed of a pair of movable contacts 511A and 511B for a single-phase AC power supply, and a positive / negative 1 for DC power supply.
It consists of a pair of movable contacts 512A and 512B and an insulating blade 513. When collectively referring to the movable side contactor, 511,
512. The movable contacts 511 and 512 are made of phosphor bronze and formed in a flat plate shape. The insulating blade 513 is a box having a substantially triangular cross-section when viewed from the side, and movable side contacts 511A, 511B and 512A, 512B are arranged side by side on the front and back tapered surfaces 513A of the box at predetermined intervals in the longitudinal direction. ing. 511B is omitted in FIGS. 4 and 5.

The insulating blade 513 is fixed to a base plate 514, and the base plate 514 is connected to a pair of air cylinder rods 522. 515 is a terminal and 516 is a lead wire. The moving means 52 includes an air cylinder 521 for horizontally moving the movable current collector 51 in the front-back direction toward the station 20, that is, a direction orthogonal to the traveling path 31, a pair of air cylinder rods 522, a compressor 523, and a solenoid valve.
Includes 524.

By operating the air cylinder 521, the base plate
It is configured to move the 514 in the front-back direction, and limit switches 525A and 525B for detecting the movement of the movable current collector 51 are provided at the forward and backward positions of the base plate 514. The carrier-side optical communication device 53 forms a pair with the station-side optical communication device 63 provided in the station 20, and sends and receives signals such as the operation of the moving means 52 and charging start and charging completion.
The charging contactor 54 is provided between the battery 41 and the movable contact 512.

Next, the power supply unit 60 will be described. The power feeding unit 60 includes a fixed current collector 61, a station side optical communication device 63, a power feeding unit controller 64, and a power source unit 65, and is housed in a case 62. The fixed current collector 61 is composed of a pair of fixed contacts 611A and 611B for a single-phase AC power supply, a pair of fixed contacts 612A and 612B for a DC power supply, and a frame 613. In addition, in FIG. 4 and FIG.
Illustration of 611A is omitted. Hereinafter, the fixed side contacts are collectively referred to as 611 and 612.

The fixed contacts 611 and 621 are made of phosphor bronze and are formed in a flat plate shape with one surface having the same tapered surface as the tapered surface 513A of the insulating blade 513. The frame 613 is a frame body having a U-shaped cross section with openings on three sides, and fixed side contactors 611A, 611B and 612A, 612B are attached to the upper wall surface and the lower wall surface with springs 614 so that their tapered surfaces face each other. Has been. 615 is a terminal and 616 is a lead wire. The movable current collector 51 moved forward by the moving means 52 electrically contacts the fixed current collector 61 at the forward position.

The station side optical communication device 63 has the same structure as the carrier vehicle side optical communication device 53. The power supply unit controller 64 commands the charger 651 to start charging and to stop and start charging based on the output of the station side optical communication device 63, and has a charging time checking function. The power supply unit 65 includes a charger 651 and a power supply contactor 652.

The case 62 is provided with openings for the movable collector 61 and the optical communication device 53 on the side of the vehicle, and has a grating at the lower end.
Fittings 621 are provided for attaching to 32. Then, by hooking the lower end to the grating 32 with a hook bolt 622 whose lower end is bent in an L shape, and fixing the fixture 621 at the upper end, the case 62 stands upright on the grating 32 with its opening facing the automated guided vehicle 10 side. Installed.

Next, the power feeding method of the present invention will be described. The automated guided vehicle 10 arrives at the station 20 and stops at a fixed position (see S1 and S2 in FIG. 7). The output of the position detection means (not shown) causes the air cylinder 521 to operate via the vehicle controller 402 to move the current collector.
51 moves forward, and the limit switch 525A detects the forward movement position (see S3 and S4).

The output of the limit switch 525A turns on the charging contactor 54 via the vehicle controller 402 (see S5). In addition, via the vehicle controller 402, from the station side optical communication device 53 to the carrier side optical communication device
The "charge start" signal is transmitted to 63 and input to the power supply unit controller 64 (see S6 and A in FIG. 8). Then, the contact state of both collectors 51, 61 is confirmed by an appropriate means. In the case of poor contact, error processing is performed separately (S
7). Charger 65 according to the output of power supply unit controller 64
1 and the power supply contactor 652 are turned on, and charging of the battery 41 is started (see S8 and S9). Also, single-phase AC power is supplied to the robot unit 12.

When the operation of the robot section 12 is completed, a "charge stop" signal is output from the robot controller 403 via the vehicle controller 402 (see S10). This "charge stop" signal is input to the power supply unit controller 64 via both optical communication devices 53 and 63, and the charge time is checked to be a preset time (see S11), and a "charge stop" command is issued (S12 And B of FIG. 8). This turns off the power contactor 652 and stops charging (see S13 and S14).
. The "charge stop" signal is sent as a "movable current collector retract" signal to the carrier optical communication device 53 via the station optical communication device 63 after a preset time-up (see S15) (see FIG. 8). Then, the charging contactor 54 is turned off via the vehicle controller 402 (see S16).

The output of the vehicle controller 402 causes the movable current collector 51 to retract, the limit switch 525B detects the retracted position (see S18), and then the automated guided vehicle 10 starts (see S19).

Next, another embodiment of the movable current collector and the fixed current collector will be described. The movable current collector 71 is composed of a pair of movable contacts 711A, 711B and 712A, 712B for AC and DC, an insulating rod 713 for mounting them, and a flexible joint 714. Hereinafter, the movable contacts are collectively referred to as 711 and 712. Each of the movable contacts 711, 712 is formed into a fan-shaped conical surface obtained by dividing the surface of a truncated cone into four substantially in the axial direction. The insulating rod 713 is formed in a pipe shape having a tapered surface 713A whose diameter is reduced downward, and the lower end is closed. The movable surface contacts 711 are arranged on the tapered surface 713A at an equal pitch.
, 712 are installed facing each other.

The flexible joint 714 is formed by embedding a plurality of mandrels in the axial direction in a cylindrical flexible material such as rubber, and is configured to have an elastic force in a direction orthogonal to the axial center. The washer 715 is mounted between the upper end of the insulating rod 713 and the base plate 522. 716 is a lead wire. The fixed current collector 81 includes a pair of fixed contacts 811A, 811B and 812A, 812B for AC and DC, a rod receiver 813 and a case 814. Hereinafter, the fixed contacts are collectively referred to as 811 and 812.

The rod holder 813 is made of resin and has a tapered hole 813A into which the movable current collector 71 is fitted. The side wall of the tapered hole 813A corresponds to the movable side contactors 711 and 712, and the fixed side contactors 811 and 812 (however, 811A and 811B are not shown).
Are arranged, and the two contactors 711, 712, 811 and 812 are electrically contacted at the lower end position of the movable current collector 71. The rod receiver 813 is attached to the case 814 via a spring 815, and the case 814 is embedded in the grating 32.

Even if the movable current collector 71 descended by the moving means 52 is slightly displaced from the center of the tapered hole 813A due to a stop error or the like, the displacement is absorbed by the flexible joint 714, and both current collectors are absorbed. 71 and 81 are in complete contact. According to this embodiment, it is not necessary to provide the moving means with the turning motor, and the power feeding unit 60 is compact. Therefore, when the power feeding unit 60 is installed, the notch portion of the grating 32 becomes smaller, and the time required for mounting is shortened.
Further, since the air flowing through the clean room is discharged from the tapered hole 813A except when the automatic guided vehicle 10 is stopped, there is also an advantage that no air turbulence occurs.

[0030]

As described above, the unmanned power feeding device for an unmanned guided vehicle for a clean room according to the present invention comprises a power collection unit provided in the unmanned guided vehicle and a power feeding unit provided in the station. The current collecting unit includes a movable current collector having a pair of contacts for direct current and alternating current, an elevating means for horizontally moving the current collector in the front-rear direction toward the station side, a control unit, and a carrier-side optical communication device. There is.

Further, the power feeding unit is provided with a fixed current collector arranged upright on the floor facing the current collecting unit and in contact with the movable current collector, a power feeding unit controller, and a station side optical communicator. .. The movable side and station side optical communication devices send and receive charging start and stop commands via the power supply unit controller. Further, the fixed current collector and the movable current collector are provided side by side in the longitudinal direction on the insulating blade. Both current collectors are provided at equal pitches so as to face each other on the tapered surface of the insulating rod having a reduced diameter.

Therefore, even if the allowable range of the stop error of the unmanned power feeding device is large, the unmanned power feeding can be surely performed. Also, it is designed so that it can be installed upright on the floor. Therefore, when the floor is made of concrete, the chipping work is not required, and when the floor is made of grating, the notch work is not required.
Therefore, installation or relocation is extremely easy, and the construction period can be significantly shortened.

[Brief description of drawings]

FIG. 1 is a side view illustrating an arrangement of a power feeding unit according to the present invention.

FIG. 2 is a view according to the present invention and is a plan view of the same.

FIG. 3 is a diagram according to the present invention and is an explanatory diagram of a configuration of an unmanned power feeding device.

FIG. 4 is a perspective view showing appearances of a movable current collector and a fixed current collector according to the present invention.

FIG. 5 is a view according to the present invention and is a plan view of the same.

FIG. 6 is a diagram according to the present invention, and is a configuration explanatory view of a moving means.

FIG. 7 is a flowchart of the unmanned power feeding apparatus according to the present invention.

FIG. 8 is a diagram according to the present invention and is a time chart of an optical communication device.

FIG. 9 is a side view of a movable current collector according to another embodiment.

FIG. 10 is a view according to another embodiment, which corresponds to X- line in FIG. 9;
It is an X-ray sectional view.

FIG. 11 is a side cross-sectional view of a fixed current collector according to another embodiment.

FIG. 12 is a perspective view showing a layout in a clean room according to a conventional technique.

FIG. 13 is a plan view of the related art.

[Explanation of symbols]

 10 Automated guided vehicle 32 Grating 40 Control unit 41 Battery 50 Current collecting unit 51 Movable current collector 511, 512 Movable side contact 52 Means of transportation 53 Carrier optical communication device 54 Charging contactor 60 Power supply unit 61 Fixed collector 611, 612 Fixed Side contactor 621 Fixture 622 Hook bolt 623 Outlet 63 Station side optical communication device 64 Power supply unit controller 65 Power supply unit 71 Movable current collector 711, 712 Movable side contactor 81 Fixed current collector 811, 812 Fixed side contactor

Claims (4)

[Claims] 1. An unmanned power supply device for an unmanned guided vehicle for a clean room, comprising a robot, traveling between a plurality of stations installed in a clean room, and performing a predetermined operation while the robot is stopped at a predetermined station. A current collecting unit provided in the automatic guided vehicle and a power feeding unit provided in the station, the current collecting unit having a movable current collector having a pair of movable side contacts for direct current and alternating current, and front and rear toward the station. A moving unit for horizontally moving in a direction, a control unit for outputting a signal based on the operation of the moving unit, and a vehicle-side optical communication device for exchanging information with the power feeding unit based on the output of the control unit. On the other hand, the power feeding unit is arranged upright on the floor so as to face the current collecting unit, and is fixed to electrically contact the movable side contactor at the forward end of the movable current collector. A stationary current collector having a constant side contactor, a power feeding unit controller that outputs based on the operation of the moving unit, and a station side optical communication device that exchanges information with the current collecting unit based on the output of the power feeding unit controller. An unattended power supply device for an automated guided vehicle for a clean room, characterized by being equipped. 2. The movable contact is arranged side by side in the longitudinal direction on the front and back tapered surfaces of an insulating blade having a substantially triangular cross section in side view, while the fixed contact has the same taper as the insulating blade. The unmanned power feeding device for an unmanned guided vehicle for a clean room according to claim 1, which has a tapered surface and is arranged corresponding to the movable contact. 3. The movable contactor is embedded in a tapered surface of an insulating rod having a diameter reduced toward the front so as to face each other at equal pitches, and the moving means horizontally moves the movable current collector forward. The unmanned power feeding device for an unmanned guided vehicle for a clean room according to claim 1, wherein the fixed contact is tilted and brought into contact with the fixed contact at the tip end position. 4. The optical communication device on the carrier vehicle side instructs the optical communication device on the station side to "charge start" and "charge stop" based on a signal from a control unit that detects the front end of the movable current collector,
2. The unmanned power feeding device for an unmanned guided vehicle for a clean room according to claim 1, wherein the station side optical communication device transmits the command to the power feeding unit controller and also commands "movable current collecting / retracting" after power feeding.