JPH066523Y2 - 横方向放電励起パルスガスレ−ザ - Google Patents

横方向放電励起パルスガスレ−ザ

Info

Publication number
JPH066523Y2
JPH066523Y2 JP3466987U JP3466987U JPH066523Y2 JP H066523 Y2 JPH066523 Y2 JP H066523Y2 JP 3466987 U JP3466987 U JP 3466987U JP 3466987 U JP3466987 U JP 3466987U JP H066523 Y2 JPH066523 Y2 JP H066523Y2
Authority
JP
Japan
Prior art keywords
side electrode
voltage side
ground
gas laser
main discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3466987U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63142864U (enExample
Inventor
基尋 新井
和明 堀田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP3466987U priority Critical patent/JPH066523Y2/ja
Publication of JPS63142864U publication Critical patent/JPS63142864U/ja
Application granted granted Critical
Publication of JPH066523Y2 publication Critical patent/JPH066523Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Lasers (AREA)
JP3466987U 1987-03-09 1987-03-09 横方向放電励起パルスガスレ−ザ Expired - Lifetime JPH066523Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3466987U JPH066523Y2 (ja) 1987-03-09 1987-03-09 横方向放電励起パルスガスレ−ザ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3466987U JPH066523Y2 (ja) 1987-03-09 1987-03-09 横方向放電励起パルスガスレ−ザ

Publications (2)

Publication Number Publication Date
JPS63142864U JPS63142864U (enExample) 1988-09-20
JPH066523Y2 true JPH066523Y2 (ja) 1994-02-16

Family

ID=30843444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3466987U Expired - Lifetime JPH066523Y2 (ja) 1987-03-09 1987-03-09 横方向放電励起パルスガスレ−ザ

Country Status (1)

Country Link
JP (1) JPH066523Y2 (enExample)

Also Published As

Publication number Publication date
JPS63142864U (enExample) 1988-09-20

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