JPH0663514U - Anti-vibration device for conveying members - Google Patents

Abstract

(57) [Summary] [Purpose] To prevent the product from shifting due to disturbance vibration. [Structure] The workbench 1 is supported on a floor F via an electromagnetic actuator 10, and a belt conveyor roller 3 is provided on the workbench 1. Further, the pallet roller is composed of the magnetic bearing 40.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a vibration isolator for a conveyor member such as a belt conveyor or a pallet.

[0002]

[Prior art]

 In a factory where products are processed while being fed by conveyor members such as belt conveyors and pallets, the positioning of the products on the conveyor members is very important, which requires vibration isolation of the conveyor members.

[0003]

[Problems to be solved by the device]

 In conventional conveying members, especially in ultra-precision machining, the product may be displaced due to disturbance vibration of the conveying member, resulting in defective products.

An object of the present invention is to provide an anti-vibration device for a conveying member, which prevents displacement of a product against disturbance vibration.

[0005]

[Means for Solving the Problems]

 According to the present invention, the workbench provided with the work machine is supported on the floor surface by the electromagnetic actuator, and the roller for the transport member is provided on the workbench.

It is preferable that a plurality of the worktables are arranged in series and are connected to each other by a flexible accordion-shaped joint.

Further, according to the present invention, the roller for the conveying member is constituted by a magnetic bearing whose shaft is supported by the fixed member.

[0008]

[Action]

 In the vibration isolator for a conveying member configured as described above, for example, a belt conveyor is supported by an electromagnetic actuator via a belt conveyor roller and a workbench, and is vibration-isolated.

Further, for example, the pallet is supported by magnetic bearings, which are pilot rollers, for vibration isolation.

[0010]

【Example】

 An embodiment of the present invention will be described below with reference to the drawings.

In FIG. 1, a plurality of work benches 1 are installed in series on a floor F via a plurality of electromagnetic actuators 10 at intervals. A fixed base 4 is installed on the floor F between the adjacent work bases 1 and 1, and the fixed base 4 and the work base 1 are connected by a joint 5 on a flexible accordion.

A work machine 2 is attached to a side surface of the workbench 1, and a plurality of belt conveyors that support a belt conveyor 6 as a conveyance member are flush with each other on the upper surfaces of the plurality of workbench 1. The roller 3 is rotatably provided.

In FIG. 2, the electromagnetic actuator 10 is provided with a rotor 11 that supports the workbench 1 and a stator 15 installed on the floor surface F. The rotor 11 has a horizontal H-shaped cross section, and is provided with a supporting flange 12, a vertical portion 13, and a floating flange 14. On the other hand, the stator 15 is provided with an inverted T-shaped groove 16 for accommodating the vertical portion 13 of the rotor 11 and the floating flange 14 with a gap. A horizontal control electromagnet 17 is provided in a portion of the gap 16 facing the upper portion of the vertical portion 13, and a levitation and vertical direction control electromagnet is provided in a portion of the gap 16 facing the upper surface of the levitation flange 14. 18 is provided. Further, a horizontal gap sensor 20 is provided near the horizontal control electromagnet 17, and a vertical gap sensor 21 is provided at the bottom of the groove 16. As shown in FIG. 3, the workbench 1 is provided with a vertical acceleration sensor 22 and a horizontal acceleration sensor 23, and the stator 15 is provided with a vertical acceleration sensor 24.

FIG. 3 shows a block diagram of a control circuit for the electromagnetic actuator 10.

The horizontal acceleration on the workbench 1 detected by the horizontal acceleration sensor 23, the vertical acceleration on the workbench 1 detected by the vertical acceleration sensors 22 and 24, and the vertical acceleration on the floor F are the controller. 35 is fed back. Further, the relative displacements of the stator 15 and the rotor 11 detected by the horizontal gap sensor 20 and the vertical gap sensor 21 are also fed back to the controller 35, and the signals of the difference between each signal obtained by the sensors 20 to 24 and the target value are It is input to the vertical control electromagnet 18 and the horizontal control electromagnet 17 via the compensating circuits 31 and 34 and the power-ups 30 and 33, respectively.

By the above control, the rotor 11 is controlled in all horizontal and vertical directions, and the vibration of the floor F is damped. Further, the vibration of the work machine 2 is prevented from propagating to the floor F.

FIG. 4 shows another embodiment of the present invention, which is an example in which the conveying member is composed of the magnetic bearing 40 in which the pallet rollers are arranged flush with the pallet P on which the products W are mounted. The shaft 41 of the bearing 40 is fixed to the floor F, and a gap is formed between the roller 42 and the shaft 41. A plurality of (eight in the illustrated example) electromagnets 43 and three gap sensors 44 are provided on the roller 42, and a vertical acceleration sensor 45 shown in FIG. 5 is provided on the floor. .

FIG. 5 shows a block diagram of a control circuit of the magnetic bearing 40.

The vertical acceleration of the floor detected by the vertical acceleration sensor 45 is fed back to the controller 46. The relative displacement between the shaft 41 and the roller 42 detected by the gap sensor 44 is also fed back to the controller 46, and the signal of the difference between the target value and each signal is input to the electromagnet 43 via the compensation circuit 47 and the power-up 48. , The flying position of the roller 42 is controlled.

[0020]

[Effect of device]

 Since the present invention is configured as described above, it is possible to improve the quality by isolating the belt conveyor and the pallet that are the conveying members and preventing the positional displacement of the product against the disturbance vibration.

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of the present invention.

FIG. 2 is a side sectional view showing the electromagnetic actuator of FIG.

FIG. 3 is a block diagram of a control circuit of an electromagnetic actuator.

FIG. 4 is a partial cross-sectional side view showing another embodiment of the present invention.

5 is a block diagram of a control circuit of the magnetic bearing shown in FIG.

[Explanation of symbols]

 F ... Floor P ... Pallet W ... Product 1 ... Working table 2 ... Working machine 3 ... Belt conveyor roller 4 ... Fixed table 5 ... Joint 6 ... Belt conveyor 10 ... Electromagnetic actuator 11 ... Rotor 12 ... Supporting flange 13 ... Vertical part 14 ... Floating flange 15 ... Stator 16 ... Groove 17 ... Horizontal direction control Electromagnet 18 ... Electromagnet for levitation and vertical control 20 ... Horizontal gap sensor 21 ... Vertical gap sensor 22 ... Vertical acceleration sensor 23 ... Horizontal acceleration sensor 24, 45 ... Vertical Directional acceleration sensor 30, 33, 48 ... Power up 31, 34, 47 ... Compensation circuit 40 ... Magnetic bearing 41 ... Shaft 42 ... Roller 43 ... Electromagnet 44. Gap sensors 35 and 46 ... controller

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Kenichi Yasuno Kenichi Yasuno 2-1-1, Tobita, Chofu-shi, Tokyo Kashima Construction Co., Ltd. Technical Research Institute (72) Takayuki Mizuno 2-1-1-19 Tobita, Chofu-shi, Tokyo No. 19 Kashima Construction Co., Ltd. Technical Research Institute (72) Inventor Ryuji Nakano No. 19-1 Tobita Syo, Chofu City, Tokyo Kashima Construction Co., Ltd. Technical Research Center (72) Inventor Ryota Katamura Two Tobita, Chofu City, Tokyo No. 19-1 Kashima Construction Co., Ltd. Technical Research Institute

Claims (2)

[Scope of utility model registration request] 1. A vibration isolator for a carrying member, comprising: a work table provided with a work machine supported on a floor by an electromagnetic actuator, and a roller for the carrying member provided on the work table. 2. A vibration isolator for a transport member, wherein the transport member roller comprises a magnetic bearing whose shaft is supported by a fixed member.