JPH0660319A - Magnetic head - Google Patents

Magnetic head

Info

Publication number
JPH0660319A
JPH0660319A JP21001392A JP21001392A JPH0660319A JP H0660319 A JPH0660319 A JP H0660319A JP 21001392 A JP21001392 A JP 21001392A JP 21001392 A JP21001392 A JP 21001392A JP H0660319 A JPH0660319 A JP H0660319A
Authority
JP
Japan
Prior art keywords
films
film
glass
magnetic
magnetic head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21001392A
Other languages
Japanese (ja)
Inventor
Kazuhiro Ishibashi
和博 石橋
Toshiyuki Katsuki
俊幸 香月
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP21001392A priority Critical patent/JPH0660319A/en
Publication of JPH0660319A publication Critical patent/JPH0660319A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent the deterioration of recording and reproducing characteristics by preventing the diffusion between magnetic metallic films and glass films. CONSTITUTION:The magnetic metallic films 10, 11 are respectively formed on the gap-facing surfaces of cores 8, 9 formed of a ferrite. Alumina films 12, 13 are respectively formed at 0.002 to 0.200mum on the magnetic metallic films 10, 11. Glass films 14, 15 are respectively formed on these alumina films 12, 13. As a result, the alumina films 12, 13 prevent the diffusion between the magnetic metallic films 10, 11 and the glass films 14, 15.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は磁気記録再生装置等に用
いられる磁気ヘッドに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in a magnetic recording / reproducing apparatus or the like.

【0002】[0002]

【従来の技術】以下従来の磁気ヘッドを製造方法ととも
に説明する。
2. Description of the Related Art A conventional magnetic head will be described below together with a manufacturing method.

【0003】図9から図12は従来の磁気ヘッドの製造
方法を示す斜視図である。図9において1はフェライト
等の酸化物磁性材料によって構成されたC字型のコア、
コア1には巻線溝1aが設けられている。2はフェライ
ト等の酸化物磁性材料で構成されたI字型のコアで、コ
ア1,2それぞれのギャップ対向面にはエッチング等の
加工が施され、加工中にギャップ対向面に形成された加
工変質層を取り除いている。次に図10に示す様にコア
1,2それぞれのギャップ対向面に金属磁性膜3,4を
形成する。この金属磁性膜3,4はアルゴン雰囲気中で
スパッタリングによって成膜される。次に図11に示す
様に金属磁性膜3,4の上にそれぞれガラス膜5,6を
スパッタリングによって形成する。次に図12に示す様
にガラス膜5とガラス膜6が対向する様にコア1とコア
2を突合せ、巻線溝1a内にボンディングガラス7を配
置し、それら構成体を電気炉内に入れ、所定の温度で加
熱する事により、ボンディングガラス7をコア1,2に
またがる様に溶着させ磁気ヘッドを作製する。
9 to 12 are perspective views showing a conventional method of manufacturing a magnetic head. In FIG. 9, 1 is a C-shaped core made of an oxide magnetic material such as ferrite,
The core 1 is provided with a winding groove 1a. Reference numeral 2 is an I-shaped core made of an oxide magnetic material such as ferrite. The gap facing surface of each of the cores 1 and 2 is processed by etching or the like, and is formed on the gap facing surface during processing. The altered layer is removed. Next, as shown in FIG. 10, metal magnetic films 3 and 4 are formed on the gap facing surfaces of the cores 1 and 2, respectively. The metal magnetic films 3 and 4 are formed by sputtering in an argon atmosphere. Next, as shown in FIG. 11, glass films 5 and 6 are formed on the metal magnetic films 3 and 4 by sputtering. Next, as shown in FIG. 12, the core 1 and the core 2 are butted so that the glass film 5 and the glass film 6 face each other, the bonding glass 7 is placed in the winding groove 1a, and the components are placed in an electric furnace. By heating at a predetermined temperature, the bonding glass 7 is welded so as to straddle the cores 1 and 2, and a magnetic head is manufactured.

【0004】[0004]

【発明が解決しようとする課題】しかしながら前記従来
の構成では、例えば金属磁性膜3とガラス膜5との間に
拡散現象が生じ、金属磁性膜3の磁気特性が劣化し、磁
気ヘッドの記録再生特性が悪くなるという問題点があっ
た。
However, in the above-mentioned conventional structure, for example, a diffusion phenomenon occurs between the metal magnetic film 3 and the glass film 5, the magnetic characteristics of the metal magnetic film 3 deteriorate, and the recording / reproducing of the magnetic head is performed. There was a problem that the characteristics deteriorate.

【0005】本発明は前記従来の課題を解決するもの
で、記録再生特性が悪くなる事を防止できる磁気ヘッド
を提供する事を目的としている。
The present invention solves the above-mentioned conventional problems, and an object of the present invention is to provide a magnetic head capable of preventing deterioration of recording and reproducing characteristics.

【0006】[0006]

【課題を解決するための手段】この目的を達成するため
に、コアの上に形成された金属磁性膜とガラス膜との間
に厚さ0.002μm〜0.200μmのアルミナ膜を
設けた。
To achieve this object, an alumina film having a thickness of 0.002 μm to 0.200 μm is provided between the metal magnetic film formed on the core and the glass film.

【0007】[0007]

【作用】この構成により、金属磁性膜と、ガラス膜との
間の拡散が防止できる。
With this structure, diffusion between the metal magnetic film and the glass film can be prevented.

【0008】[0008]

【実施例】以下本発明の一実施例における磁気ヘッドに
ついて、製造方法とともに説明する。
EXAMPLE A magnetic head in one example of the present invention will be described below along with a manufacturing method.

【0009】図1から図5は本発明の一実施例における
磁気ヘッドの製造方法を示す斜視図である。まず図1に
示す様にフェライト等の酸化物磁性材料によって構成さ
れたC字型のコア8と、コア8と同様の材料で構成され
たI字型のコア9を用意する。この時コア8には巻線溝
8aが設けられている。またコア8,9のそれぞれのギ
ャップ対向面にはエッチング等の加工が施されており、
ギャップ対向面に切削加工等によって生じた加工変質層
が取り除かれている。次に図2に示す様にコア8,9そ
れぞれのギャップ対向面に金属磁性膜10,11を形成
する。この金属磁性膜の構成材料としてはFe−Ta−
Zr等の金属磁性材料が用いられ、また金属磁性膜1
0,11はスパッタリング等の手段を用いて厚さ1.8
μm程度でギャップ対向面上に形成されている。次に図
3に示す様に金属磁性膜10,11それぞれの上にアル
ミナ(Al23)膜12,13をそれぞれ0.002μ
m〜0.200μmの厚さで形成する。このアルミナ膜
12,13はスパッタリング等の手段を用いて作製され
る。次に図4に示す様にアルミナ膜12,13それぞれ
の上にガラス膜14,15を形成する。このガラス膜1
4,15はそれぞれスパッタリング等の手段によって構
成される。スパッタリング法でガラス膜14,15を形
成する場合には例えばガラスターゲットとしてSiO2
を30wt%,PbOを50wt%,Na2Oを7wt
%,B23を4wt%,Fe23を4wt%含んだガラ
ス材料が用いられる。次に図5に示す様にコア8とコア
9をガラス膜14とガラス膜15が対向する様に突合
せ、巻線溝8a内にボンディングガラス16(SiO2
−PbO−Li2O−Na2O−K2O−Al23系ガラ
ス,転移点372℃)を挿入し、この構成体を電気炉内
に収納して温度550℃前後で加熱してコア8とコア9
を接合する。
1 to 5 are perspective views showing a method of manufacturing a magnetic head according to an embodiment of the present invention. First, as shown in FIG. 1, a C-shaped core 8 made of an oxide magnetic material such as ferrite and an I-shaped core 9 made of the same material as the core 8 are prepared. At this time, the core 8 is provided with the winding groove 8a. Further, the surfaces of the cores 8 and 9 that face the gaps are processed by etching or the like,
The work-affected layer caused by cutting or the like is removed from the surface facing the gap. Next, as shown in FIG. 2, metal magnetic films 10 and 11 are formed on the gap facing surfaces of the cores 8 and 9, respectively. The constituent material of this metal magnetic film is Fe-Ta-
A metallic magnetic material such as Zr is used, and the metallic magnetic film 1 is used.
0 and 11 have a thickness of 1.8 using means such as sputtering.
It is formed on the gap facing surface with a thickness of about μm. Next, as shown in FIG. 3, 0.002 μ of alumina (Al 2 O 3 ) films 12 and 13 are formed on the metal magnetic films 10 and 11, respectively.
It is formed with a thickness of m to 0.200 μm. The alumina films 12 and 13 are manufactured by using a method such as sputtering. Next, as shown in FIG. 4, glass films 14 and 15 are formed on the alumina films 12 and 13, respectively. This glass film 1
Reference numerals 4 and 15 are formed by means such as sputtering. When the glass films 14 and 15 are formed by the sputtering method, for example, SiO 2 is used as a glass target.
30 wt%, PbO 50 wt%, Na 2 O 7 wt
%, B 2 O 3 of 4 wt% and Fe 2 O 3 of 4 wt% are used. Next, as shown in FIG. 5, core 8 and core 9 are butted so that glass film 14 and glass film 15 face each other, and bonding glass 16 (SiO 2
-PbO-Li 2 O-Na 2 O-K 2 O-Al 2 O 3 based glass, transition point 372 ° C.) to insert the, by heating at a temperature around 550 ° C. accommodates this construct into an electric furnace Core 8 and core 9
To join.

【0010】この時アルミナ膜12,13は0.002
μm以上形成しなければ、ガラス膜と金属磁性膜との間
での拡散を防止できない。またガラス膜とアルミナ膜そ
れぞれの膜厚の合計が所定の磁気ギャップとなる様にし
なければならないので、あまりアルミナ膜を厚くする
と、必然的にガラス膜を薄く形成しなければならなくな
る。するとギャップ対向面間での接合強度が劣る為に、
好ましくない。従ってアルミナ膜は多くとも0.200
μm以下である事が望ましい。
At this time, the alumina films 12 and 13 have a thickness of 0.002.
If it is not formed with a thickness of not less than μm, diffusion between the glass film and the metal magnetic film cannot be prevented. Further, since the total thickness of the glass film and the alumina film must be a predetermined magnetic gap, if the alumina film is too thick, the glass film must be necessarily thin. Then, since the bonding strength between the gap facing surfaces is poor,
Not preferable. Therefore, the alumina film is at most 0.200
It is desirable that the thickness is μm or less.

【0011】図6はアルミナ膜が0.002μmの時の
拡散領域をFe,Al,Oのオージェ強度で示した時の
図である。Feはコア8,9中及び金属磁性膜10,1
1中に含まれ、Alはアルミナ膜12,13に含まれ、
Oはコア8,9及びアルミナ膜12,13及びガラス膜
14,15中に含まれる。図6から判るように本実施例
では金属磁性膜10,11中のFe成分がガラス膜1
4,15中に拡散していない事が判る。従って金属磁性
膜10,11に磁気的な劣化が生じていない。
FIG. 6 is a diagram showing the diffusion region when the alumina film is 0.002 μm in Auger intensity of Fe, Al and O. Fe is in the cores 8 and 9 and the metal magnetic films 10 and 1.
Al contained in 1 and Al contained in the alumina films 12 and 13,
O is contained in the cores 8 and 9, the alumina films 12 and 13, and the glass films 14 and 15. As can be seen from FIG. 6, in this embodiment, the Fe component in the metal magnetic films 10 and 11 is the glass film 1.
It can be seen that it has not spread in 4,15. Therefore, the metallic magnetic films 10 and 11 are not magnetically deteriorated.

【0012】図7はアルミナ膜が0.03μmの時の拡
散領域をFe,Al,Oのオージェ強度で示した時の図
である。図7から判る様に本実施例では金属磁性膜1
0,11中のFe成分がガラス膜14,15中に拡散し
ていない事が判る。従って金属磁性膜10,11に磁気
的な劣化が生じていない。
FIG. 7 is a diagram showing the diffusion region when the alumina film has a thickness of 0.03 μm by Auger intensity of Fe, Al and O. As can be seen from FIG. 7, the metal magnetic film 1 is used in this embodiment.
It can be seen that the Fe component in 0 and 11 did not diffuse into the glass films 14 and 15. Therefore, the metallic magnetic films 10 and 11 are not magnetically deteriorated.

【0013】図8は従来例(図12に示す)すなわちア
ルミナ膜が形成されていない磁気ヘッドの拡散領域をF
e,Al,Oのオージェ強度で示した時の図である。図
8から判る様に金属磁性膜3,4とガラス膜5,6との
間で拡散が生じている事が判る。
FIG. 8 shows the diffusion region of the conventional example (shown in FIG. 12), that is, the diffusion region of the magnetic head in which the alumina film is not formed.
It is a figure when it shows with the Auger intensity of e, Al, and O. As can be seen from FIG. 8, the diffusion occurs between the metal magnetic films 3 and 4 and the glass films 5 and 6.

【0014】以上の様に本実施例では、アルミナ膜1
2,13をそれぞれ金属磁性膜10,11とガラス膜1
4,15とのそれぞれの間に厚さ0.002μm〜0.
200μmで形成した事により、金属磁性膜10,11
とガラス膜14,15との間で拡散現象特に金属磁性膜
中のFe成分の拡散が抑えられるので、金属磁性膜の磁
気特性の劣化を防止でき、それに伴い磁気ヘッドの記録
再生特性の劣化を防止できる。
As described above, in this embodiment, the alumina film 1 is used.
2 and 13 are the metal magnetic films 10 and 11 and the glass film 1, respectively.
The thickness between 0.004 μm and 0.
The metal magnetic films 10 and 11 are formed by the formation of 200 μm.
Since the diffusion phenomenon, especially the diffusion of the Fe component in the metal magnetic film, is suppressed between the metal film and the glass films 14 and 15, it is possible to prevent the deterioration of the magnetic characteristics of the metal magnetic film and the deterioration of the recording / reproducing characteristics of the magnetic head. It can be prevented.

【0015】[0015]

【発明の効果】本発明はコアの上に形成された金属磁性
膜とガラス膜との間に厚さ0.002μm〜0.200
μmのアルミナ膜を設けた事により、金属磁性膜と、ガ
ラス膜との間の拡散が防止できるので、記録再生特性が
悪くなる事を防止できる。
According to the present invention, a thickness of 0.002 μm to 0.200 is provided between the metallic magnetic film formed on the core and the glass film.
By providing the alumina film of μm, it is possible to prevent the diffusion between the metal magnetic film and the glass film, so that it is possible to prevent the recording and reproducing characteristics from being deteriorated.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例における磁気ヘッドの製造方
法を示す斜視図
FIG. 1 is a perspective view showing a method of manufacturing a magnetic head according to an embodiment of the present invention.

【図2】本発明の一実施例における磁気ヘッドの製造方
法を示す斜視図
FIG. 2 is a perspective view showing a method of manufacturing a magnetic head according to an embodiment of the present invention.

【図3】本発明の一実施例における磁気ヘッドの製造方
法を示す斜視図
FIG. 3 is a perspective view showing a method of manufacturing a magnetic head in one embodiment of the present invention.

【図4】本発明の一実施例における磁気ヘッドの製造方
法を示す斜視図
FIG. 4 is a perspective view showing a method of manufacturing a magnetic head according to an embodiment of the present invention.

【図5】本発明の一実施例における磁気ヘッドの製造方
法を示す斜視図
FIG. 5 is a perspective view showing a method of manufacturing a magnetic head according to an embodiment of the present invention.

【図6】本発明の一実施例における磁気ヘッドの拡散領
域をFe,Al,Oのオージェ強度で示した時の図
FIG. 6 is a diagram showing the diffusion region of the magnetic head in one embodiment of the present invention by Auger intensities of Fe, Al, and O.

【図7】本発明の一実施例における磁気ヘッドの拡散領
域をFe,Al,Oのオージェ強度で示した時の図
FIG. 7 is a diagram showing the diffusion region of the magnetic head in one embodiment of the present invention by Auger intensities of Fe, Al, and O.

【図8】従来の磁気ヘッドの拡散領域をFe,Al,O
のオージェ強度で示した時の図
FIG. 8 shows Fe, Al, O in the diffusion region of the conventional magnetic head.
Figure showing the Auger intensity

【図9】従来の磁気ヘッドの製造方法を示す斜視図FIG. 9 is a perspective view showing a conventional method of manufacturing a magnetic head.

【図10】従来の磁気ヘッドの製造方法を示す斜視図FIG. 10 is a perspective view showing a method of manufacturing a conventional magnetic head.

【図11】従来の磁気ヘッドの製造方法を示す斜視図FIG. 11 is a perspective view showing a method of manufacturing a conventional magnetic head.

【図12】従来の磁気ヘッドの製造方法を示す斜視図FIG. 12 is a perspective view showing a method of manufacturing a conventional magnetic head.

【符号の説明】[Explanation of symbols]

8 コア 9 コア 10 金属磁性膜 11 金属磁性膜 12 アルミナ膜 13 アルミナ膜 14 ガラス膜 15 ガラス膜 8 core 9 core 10 metal magnetic film 11 metal magnetic film 12 alumina film 13 alumina film 14 glass film 15 glass film

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】ギャップ対向面に金属磁性膜を形成したコ
アと、前記金属磁性膜上に0.002μm〜0.200
μmの厚さで設けられたアルミナ膜と、前記アルミナ膜
の上に設けられ、磁気ギャップとなるガラス膜と、前記
コアに前記ガラス膜を介して突き合わされた他のコアを
備えた事を特徴とする磁気ヘッド。
1. A core having a metal magnetic film formed on the surface facing the gap, and 0.002 μm to 0.200 on the metal magnetic film.
An alumina film having a thickness of μm, a glass film provided on the alumina film to serve as a magnetic gap, and another core abutted on the core via the glass film are characterized. And a magnetic head.
JP21001392A 1992-08-06 1992-08-06 Magnetic head Pending JPH0660319A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21001392A JPH0660319A (en) 1992-08-06 1992-08-06 Magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21001392A JPH0660319A (en) 1992-08-06 1992-08-06 Magnetic head

Publications (1)

Publication Number Publication Date
JPH0660319A true JPH0660319A (en) 1994-03-04

Family

ID=16582385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21001392A Pending JPH0660319A (en) 1992-08-06 1992-08-06 Magnetic head

Country Status (1)

Country Link
JP (1) JPH0660319A (en)

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