JPH03189908A - Magnetic head and its manufacture - Google Patents
Magnetic head and its manufactureInfo
- Publication number
- JPH03189908A JPH03189908A JP33075789A JP33075789A JPH03189908A JP H03189908 A JPH03189908 A JP H03189908A JP 33075789 A JP33075789 A JP 33075789A JP 33075789 A JP33075789 A JP 33075789A JP H03189908 A JPH03189908 A JP H03189908A
- Authority
- JP
- Japan
- Prior art keywords
- core
- magnetic film
- metal magnetic
- alloy
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 23
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 22
- 239000001301 oxygen Substances 0.000 claims abstract description 22
- 238000004544 sputter deposition Methods 0.000 claims abstract description 17
- 229910021364 Al-Si alloy Inorganic materials 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims description 38
- 239000000696 magnetic material Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 6
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 3
- 239000000377 silicon dioxide Substances 0.000 abstract description 3
- 230000006866 deterioration Effects 0.000 abstract description 2
- 230000015556 catabolic process Effects 0.000 abstract 1
- 238000006731 degradation reaction Methods 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 9
- 229910000859 α-Fe Inorganic materials 0.000 description 7
- 238000004804 winding Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、磁気記録媒体にデータを書き込んだり、磁気
記録媒体からデータを読みだしたりする磁気記録再生装
置に用いられる磁気ヘッド及びその製造方法に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic head used in a magnetic recording/reproducing device that writes data to a magnetic recording medium and reads data from a magnetic recording medium, and a method for manufacturing the same. It is.
従来の技術
第３図は従来の磁気ヘッドを示す斜視図である。第３図
において１は、フェライト等の酸化物磁性材料によって
構成されたＩ型のコア、２はコア１の上に形成された金
属磁性膜で、金属磁性膜２はＦｅ−Ａｌ−３ｔ合金をス
パッタリングする事によって形成されている。又金属磁
性膜２の膜厚は２００００Ａ程で形成される。３はフェ
ライト等の酸化物磁性材料によって構成されたコ字型の
コアで、コア３は金属磁性膜２に磁気ギャップとなる非
磁性物４を介して当接している。５はコア１とコア３に
わたって塗布された接合ガラス、６は巻線孔である。Prior Art FIG. 3 is a perspective view showing a conventional magnetic head. In FIG. 3, 1 is an I-type core made of an oxide magnetic material such as ferrite, 2 is a metal magnetic film formed on the core 1, and the metal magnetic film 2 is made of Fe-Al-3t alloy. It is formed by sputtering. Further, the metal magnetic film 2 is formed to have a thickness of about 20,000 Å. Reference numeral 3 denotes a U-shaped core made of an oxide magnetic material such as ferrite, and the core 3 is in contact with the metal magnetic film 2 via a nonmagnetic material 4 that forms a magnetic gap. 5 is a bonding glass applied over cores 1 and 3, and 6 is a winding hole.
以上の様に構成された磁気ヘッドの製造方法を説明する
。まずコア１の上に金属磁性膜２をＦｅ−Ａｌ−Ｓｉ合
金をスパッタリングする事によって形成する。次にコア
３の媒体対向面に二酸化けい素等をスパッタリングする
事により非磁性物４を形成する。次にコア３を金属磁性
膜２に非磁性物４を介して突き合わせる。次に巻線孔６
に棒状の接合ガラス５を配置し、６００℃の温度で接合
ガラス５を軟化させる。軟化した接合ガラス５はコア１
及びコア３にわたって付着し、コア１及びコア３を接合
させていた。A method of manufacturing the magnetic head configured as described above will be explained. First, a metal magnetic film 2 is formed on the core 1 by sputtering Fe--Al--Si alloy. Next, a nonmagnetic material 4 is formed on the medium facing surface of the core 3 by sputtering silicon dioxide or the like. Next, the core 3 is butted against the metal magnetic film 2 with the nonmagnetic material 4 interposed therebetween. Next, winding hole 6
A rod-shaped bonded glass 5 is placed in the holder, and the bonded glass 5 is softened at a temperature of 600°C. The softened bonded glass 5 is the core 1
and adhered over core 3, joining core 1 and core 3 together.
発明が解決しようきする課題
しかしながら、前記従来の構成では接合ガラス５を軟化
させるために熱処理をすると、金属磁性膜２の中のＡＩ
がコア１を構成しているフェライトの中の酸素に引かれ
てフェライト内へ拡散する。するとＡＩがフェライトの
中の酸素と反応し、非磁性物が形成され、その結果、コ
ア１の金属磁性膜２近傍部分の磁気特性が劣化する。こ
れらの劣化した部分が疑似ギャップとして働き、再生出
力に疑似出力が出るという問題点を有していた。Problems to be Solved by the Invention However, in the conventional configuration, when heat treatment is applied to soften the bonded glass 5, the AI in the metal magnetic film 2
is attracted by the oxygen in the ferrite constituting the core 1 and diffuses into the ferrite. Then, AI reacts with oxygen in the ferrite to form a nonmagnetic substance, and as a result, the magnetic properties of the portion of the core 1 near the metal magnetic film 2 deteriorate. These deteriorated portions act as pseudo gaps, causing a problem in that pseudo outputs appear in the reproduced output.
本発明は前記従来の問題点を解決しようとするもので、
Ａ１がコアの方に拡散してコアの金属磁性膜近傍部分が
劣化するのを防止できる磁気ヘッド及びその製造方法を
提供する事を目的としている。The present invention aims to solve the above-mentioned conventional problems,
It is an object of the present invention to provide a magnetic head and a method for manufacturing the same that can prevent A1 from diffusing into the core and deteriorating the portion of the core near the metal magnetic film.
課題を解決するための手段
この目的を達成するために、コアの上に形成される金属
磁性膜の内で、コア近傍部分に酸素を含ませた。Means for Solving the Problems In order to achieve this object, oxygen was included in the metal magnetic film formed on the core in the vicinity of the core.
作 用
この構成により、金属磁性膜の中のＡＩが、金属磁性膜
の中の酸素に引き寄せられる。Function: With this configuration, AI in the metal magnetic film is attracted to oxygen in the metal magnetic film.
実施例
第１図は本発明の一実施例における磁気ヘッドを示す図
である。第１図において１はコア、３はコア、４は非磁
性物、５は接合ガラス、６は巻線孔で、これらは従来の
構成と同じである。７はコア１の上に膜厚２００００Ａ
で形成された金属磁 ３
性膜で、金属磁性膜７はＦｅ−ＡＬ−Ｓｉ合金をスパッ
タリングする事によって形成される。この時、金属磁性
膜７のコア１近傍部分すなわちコア１との界面から３０
００Ａまでの部分は酸素を含有している。Embodiment FIG. 1 is a diagram showing a magnetic head in an embodiment of the present invention. In FIG. 1, 1 is a core, 3 is a core, 4 is a non-magnetic material, 5 is a bonding glass, and 6 is a winding hole, which are the same as the conventional structure. 7 has a film thickness of 20000A on core 1
The metal magnetic film 7 is formed by sputtering a Fe-AL-Si alloy. At this time, from the part of the metal magnetic film 7 near the core 1, that is, from the interface with the core 1,
The portion up to 00A contains oxygen.
以上の様に構成された磁気ヘッドの製造方法を説明する
。A method of manufacturing the magnetic head configured as described above will be explained.
まずコアｌの上に、Ａｒが９７流量％で、酸素が３流量
％の雰囲気中でＦｅ−Ａｌ−Ｓｉ合金をスパッタリング
して金属磁性膜７の初期膜を膜圧３０００Ａで形成する
。その後に初期膜の上にＡｒのみの雰囲気中でＦｅ−Ａ
ｌ−Ｓｉ合金をスパッタリングする事によって膜厚が２
００００Ａになるまで積層し、金属磁性膜７を形成する
。次にコア３の媒体対向面に二酸化けい素等をスパッタ
リングする事により非磁性物４を形成する。次にコア３
を金属磁性膜２に非磁性物４を介して突き合わせる。次
に巻線孔６に棒状の接合ガラス５を配置し、６００℃の
温度で接合ガラス５を軟化させる。軟化した接合ガラス
５はコア１及びコア −
３にわたって付着し、コアｌ及びコア３を接合する。First, an initial film of the metal magnetic film 7 is formed on the core I by sputtering an Fe-Al-Si alloy in an atmosphere containing 97% Ar and 3% oxygen at a film thickness of 3000A. After that, Fe-A was deposited on the initial film in an atmosphere containing only Ar.
By sputtering l-Si alloy, the film thickness is 2
The metal magnetic film 7 is formed by laminating the metal magnetic film 7 until it reaches 0000A. Next, a nonmagnetic material 4 is formed on the medium facing surface of the core 3 by sputtering silicon dioxide or the like. Next core 3
is butted against the metal magnetic film 2 via the nonmagnetic material 4. Next, a rod-shaped bonding glass 5 is placed in the winding hole 6, and the bonding glass 5 is softened at a temperature of 600°C. The softened bonding glass 5 is deposited over core 1 and core-3, bonding core 1 and core 3 together.
第２図はスパッタリング時の雰囲気中の酸素の濃度と、
その雰囲気の中でＦｅ−Ａｌ−Ｓｉ合金をスパッタリン
グしてフェライト基板の上に形成した金属磁性膜の保磁
力を示すグラフである。横軸は雰囲気中の酸素の濃度で
、縦軸は金属磁性膜の保磁力である。第２図かられかる
ように酸素濃度が２流量％から４流量％の間では金属磁
性膜の保磁力が１．０程であり、他に比べて低い事がわ
かる。従って優れた磁気特性を得る事ができる事がわか
る。Figure 2 shows the concentration of oxygen in the atmosphere during sputtering,
It is a graph showing the coercive force of a metal magnetic film formed on a ferrite substrate by sputtering an Fe-Al-Si alloy in that atmosphere. The horizontal axis represents the concentration of oxygen in the atmosphere, and the vertical axis represents the coercive force of the metal magnetic film. As can be seen from FIG. 2, when the oxygen concentration is between 2% and 4%, the coercive force of the metal magnetic film is about 1.0, which is lower than in other cases. Therefore, it can be seen that excellent magnetic properties can be obtained.
以上の様に金属磁性膜７のコア１近傍部分に酸素を含ま
せる事によって、金属磁性膜７の中の酸素がＡ１を引つ
ける様になるので、ＡＩが金属磁性膜７のコア１近傍部
分に集まって（る事はなくしかも金属磁性膜７の中のＡ
Ｉがコア１の方に拡散しにくくなる。従ってコア１の金
属磁性膜近傍部分にＡＩと酸素が結合して形成される非
磁性物が形成されないので、疑似ギャップが発生する事
はな（、再生出力の中に疑似出力がでなくなる。As described above, by including oxygen in the part of the metal magnetic film 7 near the core 1, the oxygen in the metal magnetic film 7 attracts A1, so that AI increases in the part of the metal magnetic film 7 near the core 1. The A in the metal magnetic film 7
I becomes difficult to diffuse toward core 1. Therefore, since a non-magnetic substance formed by the combination of AI and oxygen is not formed in the vicinity of the metal magnetic film of the core 1, a pseudo gap does not occur (no pseudo output appears in the reproduced output).
またＡｒが９８〜９６流量％、酸素が２〜４流量％の雰
囲気中でＦｅ−Ａｌ−Ｓｉ合金をスパッタリングする事
によって金属磁性膜を形成すると、保磁力が小さくなり
、磁気特性が向上する。Furthermore, when a metal magnetic film is formed by sputtering a Fe-Al-Si alloy in an atmosphere containing 98 to 96 flow% Ar and 2 to 4% oxygen, the coercive force is reduced and the magnetic properties are improved.
発明の効果
本発明はコアの上に形成される金属磁性膜の内で、コア
近傍部分に酸素を含ませた事により、金属磁性膜の中の
ＡＩが、金属磁性膜の中の酸素に引き寄せられるので、
Ａ１がコアの中に拡散しにく（なり、コアと金属磁性膜
の界面付近の磁気特性の劣化を防止でき、疑似ギャップ
の発生を防止でき、再生出力に疑似出力が発生しない。Effects of the Invention The present invention includes oxygen in the metal magnetic film formed on the core near the core, so that the AI in the metal magnetic film is attracted to the oxygen in the metal magnetic film. Because it is possible to
A1 is difficult to diffuse into the core, which prevents deterioration of the magnetic properties near the interface between the core and the metal magnetic film, prevents the generation of pseudo gaps, and prevents pseudo output from occurring in the reproduced output.
第１図は本発明の一実施例における磁気ヘッドを示す斜
視図、第２図はスパッタリング時の雰囲気中の酸素の濃
度き、その雰囲気の中でＦｅ−Ａｌ−Ｓｉ合金をスパッ
タリングしてフェライト基板の上に形成した金属磁性膜
の保磁力を示すグラフ、第３図は従来の磁気ヘッドを示
す斜視図である。FIG. 1 is a perspective view showing a magnetic head according to an embodiment of the present invention, and FIG. 2 shows a ferrite substrate formed by sputtering Fe-Al-Si alloy in an atmosphere with a high oxygen concentration during sputtering. FIG. 3 is a graph showing the coercive force of the metal magnetic film formed on the magnetic head, and FIG. 3 is a perspective view showing a conventional magnetic head.
Claims (3)
コアの上にＦｅ−Ａｌ−Ｓｉ合金によって形成されると
ともに、前記コア近傍には酸素を含有する金属磁性膜と
、前記金属磁性膜に磁気ギャップとなる非磁性物を介し
て突き合わせた他のコアとを備えた事を特徴とする磁気
ヘッド。(1) A core made of an oxide magnetic material, a metal magnetic film formed of an Fe-Al-Si alloy on the core and containing oxygen near the core, and a metal magnetic film formed on the core and containing oxygen. A magnetic head characterized by comprising a core and another core butted together with a non-magnetic material interposed therebetween to form a magnetic gap.
酸素と不活性ガスの混合雰囲気中でＦｅ−Ａｌ−Ｓｉ合
金をスパッタリングする事によって第１の金属磁性膜を
形成し、前記第１の金属磁性膜の上に不活性ガスの雰囲
気中でＦｅ−Ａｌ−Ｓｉ合金をスパッタリングする事に
よって第２の金属磁性膜を形成し、前記第２の金属磁性
膜に他のコアを磁気ギャップとなる非磁性物を介して突
き合わせる事を特徴とする磁気ヘッドの製造方法。(2) On the core made of oxide magnetic material,
A first metal magnetic film is formed by sputtering Fe-Al-Si alloy in a mixed atmosphere of oxygen and inert gas, and Fe-Al-Si alloy is sputtered on the first metal magnetic film in an inert gas atmosphere. A magnetic head characterized in that a second metal magnetic film is formed by sputtering an Al-Si alloy, and another core is butted against the second metal magnetic film via a nonmagnetic material that forms a magnetic gap. manufacturing method.
９８〜９６流量％にした事を特徴とする請求項第２項記
載の磁気ヘッドの製造方法。(3) The method for manufacturing a magnetic head according to claim 2, wherein the mixed atmosphere contains oxygen at a flow rate of 2 to 4% and inert gas at a flow rate of 98 to 96%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33075789A JPH03189908A (en) | 1989-12-19 | 1989-12-19 | Magnetic head and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33075789A JPH03189908A (en) | 1989-12-19 | 1989-12-19 | Magnetic head and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03189908A true JPH03189908A (en) | 1991-08-19 |
Family
ID=18236209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33075789A Pending JPH03189908A (en) | 1989-12-19 | 1989-12-19 | Magnetic head and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03189908A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19980015470A (en) * | 1996-08-21 | 1998-05-25 | 김광호 | Manufacturing process of magnetic head used in hard disk drive |
-
1989
- 1989-12-19 JP JP33075789A patent/JPH03189908A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19980015470A (en) * | 1996-08-21 | 1998-05-25 | 김광호 | Manufacturing process of magnetic head used in hard disk drive |
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