JPH0658846B2 - Thin film inductor - Google Patents
Thin film inductorInfo
- Publication number
- JPH0658846B2 JPH0658846B2 JP63320373A JP32037388A JPH0658846B2 JP H0658846 B2 JPH0658846 B2 JP H0658846B2 JP 63320373 A JP63320373 A JP 63320373A JP 32037388 A JP32037388 A JP 32037388A JP H0658846 B2 JPH0658846 B2 JP H0658846B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- strip
- thin film
- inductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Thin Magnetic Films (AREA)
- Coils Or Transformers For Communication (AREA)
Description
【発明の詳細な説明】 <産業上の利用分野> 本発明は高周波数で動作する高密度薄膜イクダクタの改
良に関するものである。DETAILED DESCRIPTION OF THE INVENTION <Industrial field of application> The present invention relates to improvements in high density thin film inductors operating at high frequencies.
<従来の技術> 第3図に例えば、一般に行われているインダクタの斜視
図を示す。第3図において、1は基板、6はストリップ
状磁性体、7は導体である。次にその動作について説明
する。インダクタは複数の磁性体6とそれを取り巻く絶
縁物を被覆された導電体7からなっている。この磁心と
なる磁性体6を細く、また近接させることにより漏れ磁
束を少なく、かつ反磁界を小さくでき、高いインダクタ
クス値を得る。<Prior Art> FIG. 3 shows a perspective view of a commonly used inductor, for example. In FIG. 3, 1 is a substrate, 6 is a strip-shaped magnetic body, and 7 is a conductor. Next, the operation will be described. The inductor is composed of a plurality of magnetic bodies 6 and a conductor 7 covered with an insulator surrounding the magnetic bodies 6. By making the magnetic body 6 serving as the magnetic core thin and close to each other, the leakage magnetic flux can be reduced and the demagnetizing field can be reduced, and a high inductor value can be obtained.
<発明が解決しようとする課題> しかし、従来のインダクタンスでは、ストリップ状磁性
体の間隔が大きく、インダクタの寸法を小さくしにく
い。そこで、本発明は単位面積(体積)当りの磁性体膜
を増加させることになり、単位面積当りのインダクタン
ス値を増大させるとともに、高い周波数領域で動作する
薄膜インダクタを得ることを目的とする。<Problems to be Solved by the Invention> However, in the conventional inductance, the gap between the strip-shaped magnetic bodies is large, and it is difficult to reduce the size of the inductor. Therefore, the present invention aims to increase the magnetic film per unit area (volume), increase the inductance value per unit area, and obtain a thin film inductor that operates in a high frequency region.
<課題を解決するための手段> 本発明に係る薄膜インダクタは導体膜を絶縁板上に複数
本並べ、それに直交するように薄い絶縁層を介して磁心
となる第1および第2のストリップ状磁性体膜列を高密
度に複数本並べ、更に下部の導体と電気的に接続した導
体を薄膜絶縁層を介して磁性体膜列に並べて構成したも
のである。<Means for Solving the Problems> In the thin film inductor according to the present invention, a plurality of conductor films are arranged on an insulating plate, and first and second strip-shaped magnetic layers that are magnetic cores are formed through a thin insulating layer so as to be orthogonal to the conductor films. A plurality of body film rows are arranged in high density, and a conductor electrically connected to the lower conductor is arranged in the magnetic body film row via a thin film insulating layer.
<作用> 本発明における薄膜インダクタは磁心の上下に導体膜を
配置し構成させたものであり、磁心はストリップ状磁性
体膜を極近接して配置するため、漏れ磁束の少ない磁気
回路が構成され高いイクダクタンス値が得られる。<Operation> The thin-film inductor of the present invention is configured by arranging conductor films above and below a magnetic core. Since the magnetic core has strip-shaped magnetic material films arranged in close proximity to each other, a magnetic circuit with a small leakage flux is formed. A high inductance value can be obtained.
<実施例> 以下本発明の実施例を図面を用いて説明する。第1図は
本発明による薄膜インダクタの一実施例を示す斜視図、
第2図は第1図のa−b線で切った断面図である。第1
図及び第2図で11は絶縁基板、12は複数本のストリ
ップ状導体膜、13は絶縁膜、14は導体膜12に直交
する複数本の第1のストリップ状磁性体膜列、15は磁
性体膜列14に平行に設けられた第2のストリップ状磁
性体膜列である。第1図では導体膜12と磁性体膜列1
4,15との間の絶縁膜を省略したが第2図に示すよう
に導体膜12と磁性体膜列14,15は絶縁膜13で絶
縁されている。図中に示してないが導体膜12は絶縁基
板11に適当な下地膜を施すことにより基板11との密
着性を良くしてある。第1の磁性体膜列14と第2の磁
性体膜列15はSiO2等の絶縁膜13で極近接して配
置されている。次に動作について説明する。導体膜12
の電流は、複数の磁心である磁性体膜列14,15の周
囲を流れ、その中に磁束を生じせしめる。各磁心内の磁
束はすべて同一方向に流れ、また近接する細いストリッ
プ状のため反磁界は小さくなり、高インダクタンスが得
られる。またこの効果は第1および第2のストリップ状
磁性体膜列間の絶縁膜13の間隔を狭くし、ストリップ
状磁性体膜列の数を増すことができるために高周波数領
域で効果的である。なお、上記実施例は、磁性体膜列を
一層の場合を示したが多層の積層磁性体膜の場合でも良
い。この時、磁性体膜の上に絶縁膜を施し、上記磁性体
膜の成膜を繰り返すことにより多層磁性体膜を用いてイ
ンダクタンスを構成しても良い。<Examples> Examples of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing an embodiment of a thin film inductor according to the present invention,
FIG. 2 is a sectional view taken along line ab of FIG. First
In FIG. 2 and FIG. 2, 11 is an insulating substrate, 12 is a plurality of strip-shaped conductor films, 13 is an insulating film, 14 is a plurality of first strip-shaped magnetic film rows orthogonal to the conductor film 12, and 15 is magnetic. It is a second strip-shaped magnetic material film array provided in parallel with the body film array 14. In FIG. 1, the conductor film 12 and the magnetic film array 1 are shown.
Although the insulating film between 4 and 15 is omitted, the conductor film 12 and the magnetic film arrays 14 and 15 are insulated by the insulating film 13 as shown in FIG. Although not shown in the figure, the conductor film 12 has good adhesion to the substrate 11 by applying a suitable base film to the insulating substrate 11. The first magnetic material film array 14 and the second magnetic material film array 15 are arranged in close proximity to each other with an insulating film 13 such as SiO 2 . Next, the operation will be described. Conductor film 12
Current flows around the magnetic film rows 14 and 15 which are a plurality of magnetic cores, and causes magnetic flux to be generated therein. All the magnetic fluxes in the respective magnetic cores flow in the same direction, and since they are in the form of thin strips that are close to each other, the demagnetizing field is small and high inductance can be obtained. Further, this effect is effective in the high frequency region because the distance between the insulating films 13 between the first and second strip-shaped magnetic material film rows can be narrowed and the number of strip-shaped magnetic material film rows can be increased. . In the above-mentioned embodiment, the case where the magnetic film row is a single layer is shown, but it may be a multi-layer laminated magnetic film. At this time, an insulating film may be formed on the magnetic film and the magnetic film may be repeatedly formed to form an inductance by using the multilayer magnetic film.
<発明の効果> 以上のように本発明によれば、ストリップ状磁性体膜列
を極近接してほぼ同一面に平行に配置しているため、漏
れ磁束を低減出来、また高密度に積層出来ることから、
インダクタンス値の高い高密度インダクタを得ることが
できる。<Effects of the Invention> As described above, according to the present invention, since the strip-shaped magnetic film rows are arranged in close proximity to each other and in parallel with each other on almost the same plane, the leakage magnetic flux can be reduced and the layers can be stacked at high density. From that,
It is possible to obtain a high-density inductor having a high inductance value.
第1図は本発明の一実施例で一層の近接平行磁性体膜を
有する薄膜インダクタの斜視図、第2図は第1図のa−
b線で切った断面図、第3図は一般的な薄膜インダクタ
の斜視図である。 11……絶縁基板、12……導体膜、13……絶縁膜、
14……第1の磁性体膜列、15……第2の磁性体膜
列。FIG. 1 is a perspective view of a thin film inductor having a single layer of parallel magnetic films according to an embodiment of the present invention, and FIG. 2 is a- of FIG.
A sectional view taken along line b and FIG. 3 are perspective views of a general thin film inductor. 11 ... Insulating substrate, 12 ... Conductor film, 13 ... Insulating film,
14 ... First magnetic film row, 15 ... Second magnetic film row.
Claims (2)
トリップ状磁性体膜列と、この磁性体膜列を励磁する様
に取り巻く複数本のストリップ状導体膜よりなる薄膜イ
ンダクタにおいて、第1のストリップ状磁性体膜列に平
行に第2のストリップ状磁性体膜列をほぼ同一面に極近
接して配置することを特徴とする薄膜インダクタ。1. A thin film inductor comprising a plurality of first strip-shaped magnetic material film arrays arranged on an insulating substrate and a plurality of strip-shaped conductor films surrounding the magnetic material film array so as to excite the magnetic material film array. A thin film inductor, wherein a second strip-shaped magnetic material film row is arranged in parallel with the first strip-shaped magnetic material film row and in close proximity to substantially the same plane.
したことを特徴とする請求項1記載の薄膜インダクタ。2. The thin film inductor according to claim 1, wherein the strip-shaped magnetic film row is a laminated magnetic film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63320373A JPH0658846B2 (en) | 1988-12-21 | 1988-12-21 | Thin film inductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63320373A JPH0658846B2 (en) | 1988-12-21 | 1988-12-21 | Thin film inductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02166707A JPH02166707A (en) | 1990-06-27 |
JPH0658846B2 true JPH0658846B2 (en) | 1994-08-03 |
Family
ID=18120750
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63320373A Expired - Lifetime JPH0658846B2 (en) | 1988-12-21 | 1988-12-21 | Thin film inductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0658846B2 (en) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53103147U (en) * | 1977-01-25 | 1978-08-19 | ||
JPS5943973B2 (en) * | 1979-06-23 | 1984-10-25 | ヤマハ株式会社 | Manufacturing method of lead frame material for Ag plating |
-
1988
- 1988-12-21 JP JP63320373A patent/JPH0658846B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH02166707A (en) | 1990-06-27 |
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