JPH065675A - Semiconductor test system - Google Patents

Abstract

PURPOSE:To provide a low-cost semiconductor test system that reduces the time for a wafer treatment when a pellet is tested. CONSTITUTION:When various kinds of wafers are mixedly kept in the same wafer carrier, wafer ID data recognized by a wafer characteristic check prober 2 are sent to a pellet check prober 3 through the intermediary of a host computer 1, whereby the wafers of the same kind are selected from the wafer carrier where various kinds of wafers are mixedly kept, and a pellet test can be carried out.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor inspection system, and more particularly to a semiconductor inspection system in the case where various kinds of wafers are contained in the same wafer carrier.

[0002]

2. Description of the Related Art A conventional semiconductor inspection system is a prober for checking wafer characteristics for extracting and checking pellets on a wafer after a diffusion process, and a P / P for performing a pellet test (hereinafter referred to as P / W check) on all the completed pellets. Each W check prober is connected to a host computer by a LAN (local area network). When multiple types of wafers are mixed in the same wafer carrier, the characteristic check prober recognizes the ID marked on each wafer and communicates with the host computer to host the measurement conditions necessary for that type from the wafer ID. Received from the computer and check wafer characteristics.

On the other hand, the P / W check prober, like the wafer characteristic check prober, recognizes the wafer ID for each wafer, communicates with the host computer, and receives the measurement conditions necessary for the product type from the wafer ID. , P / W check. When the product type is different, the measurement condition is received and the measurement condition is changed each time.

[0004]

In the conventional semiconductor inspection system, a wafer characteristic check prober and P / W are used.
A wafer ID recognition device is required for each check prober, a large number of expensive probers are required, and the system becomes expensive. Also, since the P / W check prober recognizes the wafer ID for each wafer, 1
It takes a long time to process one wafer, and when many kinds of products are randomly present in the carrier, it is necessary to change the measurement conditions many times, which increases the wafer processing time.

Thus, in the conventional semiconductor inspection system,
There is a problem that the system becomes expensive and it takes time to process one wafer.

[0006]

A semiconductor inspection system according to the present invention includes a means for transmitting a wafer ID information for each slot of a wafer carrier recognized by a wafer characteristic check prober to a host computer and a P / W check prober. And a means for receiving the wafer ID information recognized by the provided wafer characteristic checking prober,
The P / W check prober is provided with means for performing the P / W check by selecting the same product type from a wafer carrier in which multiple product types randomly exist according to the received wafer ID information.

[0007]

The present invention will be described below with reference to the drawings.
FIG. 1 is a block diagram of a semiconductor inspection system according to an embodiment of the present invention. As shown in FIG. 2, when many types of wafers (types 7, 8, and 9) are randomly present in the wafer carrier 6, the wafer I of the wafer characteristic check prober 2 is used.
The D recognition device 5 recognizes the wafer ID and transmits the wafer ID information to the host computer 1 using the LAN line 4 in the order of the slot numbers of the wafer carrier 6. The wafer for which the wafer characteristic check is completed is stored in the wafer carrier 6 in the same manner as before the completion.

Next, when the P / W check is performed on the wafer by the P / W check prober 3, the host computer 1 obtains the wafer ID information of the wafers mixed in the wafer carrier 6 from the P / W check prober 3. Received, and P / W check is performed for each same product type.
For example, after P / W check of all product types 7, the same product type 7a is selected and P / W check is performed, and then P / W check is similarly performed in order of product type 8 and product type 9.

[0009]

As described above, according to the present invention, since the wafer ID information recognized by the wafer characteristic check prober can be received by the P / W check prober via the host computer, the P / W check probe can be used. A wafer ID recognition device is not required for the prober, and it is possible to select the same product type from a wafer carrier in which multiple product types are mixed by this wafer ID information and perform P / W check. Can be reduced.

That is, in the P / W check prober,
Wafer ID recognition time and measurement condition change time can be reduced,
By eliminating the wafer ID recognition device, the cost of the prober can be reduced.

[Brief description of drawings]

FIG. 1 is a block diagram of a semiconductor inspection system according to an embodiment of the present invention.

FIG. 2 is a configuration diagram of a wafer carrier in which a wide variety of wafers are mixed.

[Explanation of symbols]

 1 Host computer 2 Prober for wafer characteristic check 3 Prober for pellet test 4 LAN line 5 Wafer ID recognition device 6 Wafer carrier 7, 7a, 8, 9

Claims (1)

[Claims] 1. A variety of products are provided by connecting a prober for wafer characteristic check equipped with a recognition device for recognizing an ID marked on a wafer and a prober for pellet test having a wafer rearrangement function to a host computer via a LAN. And a means for transmitting wafer ID data for each slot of the wafer carrier in which a plurality of slots are mixed to the host computer, and a means for receiving the data and performing a pellet test on a wafer in an arbitrary slot of the wafer carrier according to the data. Semiconductor inspection system.