JPH065472Y2 - Anti-vibration base isolation damper - Google Patents

Description

[Detailed Description of the Invention] [Industrial field of application] The present invention relates to a vibration isolation base isolation damper.

[Prior Art] As a conventional seismic isolation damper that protects a device from an earthquake, for example, a structure shown in Fig. 2 is known.

In FIG. 2, 11 is a fixed floor of a building or the like, 12 is a base plate fixed to the upper surface of the fixed floor 11, 13 is a highly viscous material of tens of thousands of poise contained in a container having the base plate 12 as a bottom plate, 14 Is a sliding plate embedded in the highly viscous body 13, 15 is a seismic isolation floor provided facing the fixed floor 11, 16 is a metallic outer cylinder fixed to the seismic isolation floor 15, and 17 is It is an inner cylinder that is inserted into the outer cylinder 16 and fixes the sliding plate 14 to the lower part. Although not shown, the seismic isolation floor 15 has a device or the like for protecting it against earthquakes and is connected to the fixed floor 11 via an appropriate elastic device or the like.

[Problems to be solved by the device]

As described above, the conventional seismic isolation tamper is effective for large-amplitude vibration such as an earthquake, but the sliding between the outer cylinder 16 and the inner cylinder 17 is a metal contact, so that a slight vibration occurs. There is a problem that it is not effective against.

The present invention is intended to solve such a problem. That is, it is an object of the present invention to provide a damper capable of not only seismic isolation but also vibration isolation for a semiconductor manufacturing apparatus or the like that is sensitive to slight vibration.

[Means for Solving the Problems]

In order to achieve the above-mentioned object, a vibration isolation / biseismic damper of the present invention comprises a base plate of a container fixed to a fixed floor and containing a highly viscous material, and a sliding plate embedded in the highly viscous material. And an outer cylinder fixed to the anti-vibration and base isolation floor provided facing the fixed floor, and having an outer diameter smaller than the inner diameter of the outer cylinder and inserted into the outer cylinder in a non-contact state A non-metallic elastic shock absorber that is provided between the outer cylinder and the inner cylinder and that is loosely in contact with the outer cylinder and the inner cylinder, and further includes the sliding plate. A spherical joint that connects the inner cylinders is provided.

[Action]

According to the present invention, the inner cylinder is inserted into the outer cylinder in a non-contact state, and the non-metallic elastic cushion is loosely contacted between the outer cylinder and the inner cylinder, so that the fixed floor is slightly touched. When vibration occurs, vibration is removed at the elastic buffer and the sliding plate and inner cylinder are connected by a spherical joint, so during an earthquake, the sliding plate only moves horizontally and does not tilt. , The seismic isolation is fully done by effectively utilizing the shear resistance of the high viscosity material.

〔Example〕

 FIG. 1 shows an embodiment of the present invention.

In FIG. 1, 1 is a fixed floor such as a building, 2 is a base plate fixed on the upper surface of the fixed floor 1, 3 is a highly viscous material of tens of thousands of poise in a container having the base plate 2 as a bottom plate, 4 Is a sliding plate embedded in the highly viscous body 3, 5 is a vibration isolation base plate provided opposite the fixed floor 1, and 6 is a metal fixed to the vibration isolation base plate 5. Outer cylinder, 7 is a metal inner cylinder having an outer diameter smaller than the inner diameter of the outer cylinder 6 and inserted into the outer cylinder 6 in a non-contact state, and 8 is the outer cylinder 6 and the inner cylinder 7. A non-metallic elastic buffer such as an O-ring made of rubber or synthetic resin provided between the outer cylinder 6 and the inner cylinder 7 loosely, and 9 connects the sliding plate 4 and the inner cylinder 7. This is a known spherical joint. The vibration isolation base floor 5 is provided with a device or the like for protecting it from slight vibrations and earthquakes, and is connected to the fixed floor 1 via an appropriate elastic device or the like.

In the vibration isolation / biseismic dual damper constructed as shown in FIG. 1, the inner cylinder 7 is inserted into the outer cylinder 6 in a non-contact state, and there is no space between the outer cylinder 6 and the inner cylinder 7. A metal elastic cushion 8 is provided, and the elastic cushion 8 is provided on the inner peripheral surface of the outer cylinder 6 and the inner cylinder 7.
Since the outer cylinder 6 and the outer cylinder 6 are loosely contacted with each other, when a slight vibration occurs in the fixed bed 1, the outer cylinder 6 and the inner cylinder 7 do not come into contact with each other, and vibration is removed at the elastic buffer 8 to prevent the slight vibration. Protects semiconductor manufacturing equipment that you hate. Sliding plate 4
Since the inner cylinder 7 and the inner cylinder 7 are connected via the spherical joint 9, the sliding plate 4 moves only horizontally and does not tilt when the fixed floor 1 sways during an earthquake, so that the shear resistance of the highly viscous body 3 is increased. The seismic isolation is fully utilized by making effective use of.

FIG. 3 is an explanatory view of the operation when the sliding plate 4 and the inner cylinder 7 are connected by the spherical joint 9 as in the present invention, and FIG. 4 is a diagram in which the sliding plate 4 and the inner cylinder 7 are directly connected. It is an explanatory view of the action in the case of.

The mechanism of the damper of the type shown in FIG. 1 for generating a damping force during an earthquake is due to the resistance of the viscous body in the clearance between the sliding plate 4 and the base plate 2. Therefore, when the sliding plate 4 is tilted, effective viscous resistance is not generated, so the sliding plate 4 must be prevented from tilting.
However, in the case of the present invention, since the soft elastic cushioning material 8 is sandwiched between the outer cylinder 6 and the inner cylinder 7, there is a play between them. Therefore, it is possible that the sliding plate 4 part tilts during an earthquake. Therefore, the spherical joint 9 is used to prevent the tilting force from being transmitted to the lower sliding portion. That is, in FIG. 4, the sliding plate 4
Tilts but not in FIG.

The elastic cushion 8 made of a rubber O-ring or the like is used to maintain the radial distance between the outer cylinder 6 and the inner cylinder 7 at times other than during an earthquake, and the static friction force of the sliding plate 4 is maintained. It is designed to have greater resilience.

[Effect of device]

As described above, according to the present invention, the inner cylinder is inserted into the outer cylinder in a non-contact state, and the non-metallic elastic buffer is loosely contacted and spaced between the outer cylinder and the inner cylinder. Therefore, when a slight vibration from the outside is transmitted to the fixed floor, vibration is removed at the elastic buffer, and the sliding plate and the inner cylinder are connected via a spherical joint. Therefore, the sliding plate does not incline only by horizontal movement against lateral shake during an earthquake, so that the shear resistance of the highly viscous body is effectively used to provide sufficient seismic isolation.

[Brief description of drawings]

1 is a partially cutaway front view showing an embodiment of the present invention, FIG. 2 is a partially cutaway front view showing an example of a conventional technique, and FIG. 3 is a sliding plate and an inner cylinder having spherical surfaces. FIG. 4 is an explanatory view of the operation when it is connected by a joint, and FIG. 4 is an explanatory view of the operation when it is not connected by a spherical joint. 1 ... Fixed floor, 2 ... Base plate, 3 ... High viscous material, 4 ... Sliding plate, 5 ... Vibration isolation base plate, 6 ... Outer cylinder, 7 ... Inner cylinder, 8 ... Elasticity Buffer, 9
...... Spherical joint.

Claims (1)

[Scope of utility model registration request] 1. A base plate of a container fixed to a fixed bed and containing a high-viscosity material, and a sliding plate embedded in the high-viscosity material, and provided opposite to the fixed bed. An outer cylinder fixed to the vibration isolation base floor
An inner cylinder having an outer diameter smaller than the inner diameter of the outer cylinder and being inserted into the outer cylinder in a non-contact state, and further, provided between the outer cylinder and the inner cylinder. An anti-vibration vibration isolation damper, comprising: a non-metallic elastic cushion that is loosely in contact with the inner cylinder; and a spherical joint that connects the sliding plate and the inner cylinder.