JPH065415A - Sheetlike coil and manufacturing method thereof - Google Patents

Abstract

PURPOSE:To enhance the productivity by a method wherein a sheetlike coil is composed of a coil conductor formed on one surface of an insulating substrate by water jet cutting step of a metallic conductor sheet bonded onto the insulating substrate and one surface of the same. CONSTITUTION:The sheetlike coil 10 is composed by forming a conductor pattern 14 on one surface of an insulating substrate 20 by forming a pattern groove 18 in a copper sheet 16 by water jet cutting the copper sheet 16 bonded onto the one surface of the insulating substrate 20. On the other hand, the copper sheet 16 has the thickness within the range to be cut by water jet cutting step while the sheet thickness is to be arbitrarily selected corresponding to the current capacity of the sheetlike coil 10. Through these procedures, the sectional area of the conductor pattern 14 can be easily adjusted by controlling the groove interval of the conductor pattern 14 thereby enabling the title coil with high precision having specific current capacity characteritic to be manufactured in high productivity.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sheet-shaped coil used in a device requiring high magnetic flux density such as a superconducting device, and a method for manufacturing the same, and more particularly to a sheet-shaped coil with improved processing accuracy and good quality. A coil and its manufacturing method.

[0002]

2. Description of the Related Art As a conventional sheet coil, for example,
There is a structure in which a metal conductor plate is adhered onto an insulating substrate made of a material that is not etched, and this is etched to form a spiral coil conductor.

According to this sheet-shaped coil, the cross-sectional area of the coil conductor is arbitrarily determined by the width of the coil conductor by using a metal conductor plate whose thickness can be arbitrarily set. Since the coil conductor is formed by etching, the cross-sectional area of the coil conductor can be easily adjusted by controlling the width of the etched portion, in other words, the groove interval of the coil conductor. Therefore, it can be used as a coil having a predetermined current capacity, and as a result, it can be applied to a superconducting device such as a linear motor or an MRI device.

[0004]

However, according to the conventional sheet coil and the manufacturing method thereof, since the coil conductor is formed by etching, the processing time is slow and the metal conductor plate is thick. Can not be
It is reducing productivity. Further, the side edges are formed in the slits, the processed cross section becomes dirty, etc., and the processing accuracy is low, so that appropriate dimensional accuracy cannot be obtained. Therefore, it is difficult to perform fine processing with a narrow slit width.

Therefore, an object of the present invention is to provide a sheet-shaped coil which can improve productivity and a method for manufacturing the same.

Another object of the present invention is to improve machining accuracy,
It is an object of the present invention to provide a sheet-shaped coil capable of improving quality and performing fine processing, and a manufacturing method thereof.

[0007]

SUMMARY OF THE INVENTION In view of the above problems, the present invention provides an insulating substrate in order to improve productivity, improve processing accuracy, improve quality, and enable fine processing. The present invention provides a sheet-shaped coil composed of a coil conductor formed on one surface of an insulating substrate by water jet cutting a metal conductor plate adhered to one surface of the insulating substrate.

The coil conductor is formed of a metal conductor plate having a predetermined thickness to provide a predetermined current capacity characteristic. The metal conductor plate is composed of a copper plate having a thickness in a range that can be cut by water jet cutting, for example, up to about 100 mm.

Further, in the sheet coil manufacturing method of the present invention to achieve the above object, a metal conductor plate having a predetermined thickness is adhered to one surface of an insulating substrate, and the metal conductor plate is subjected to water jet cutting, By forming the slit portion on the metal conductor plate, the coil conductor having a shape based on the slit portion is formed on the metal conductor plate.

[0010]

According to the sheet-shaped coil of the present invention having the above-described structure and the method for manufacturing the same, since the coil conductor is formed on the metal conductor plate by water jet cutting, the metal conductor plate is formed by the collision energy of the jet water flow. It can be cut instantly, the processing time can be shortened compared to etching, and the plate thickness is large (for example, 10
Even about 0 mm) can be easily processed. Furthermore,
Since there is no diffusion of etching liquid, processing accuracy is improved,
It is possible to provide a good processed cross section without side edges and the like, and to provide appropriate dimensional accuracy. As a result, fine processing such as forming a narrow slit width can be performed.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The sheet coil according to the present invention and the method for manufacturing the same will be described below in detail with reference to the accompanying drawings.

1A and 1B show the structure of a sheet-shaped coil 10 according to an embodiment of the present invention. FIG. 1A shows the planar state of the sheet-shaped coil 10, (b) shows the Y-
Each cross section in the Y direction is shown.

The sheet-shaped coil 10 includes an insulating substrate 20.
The conductive pattern 14 is formed on one surface of the insulating substrate 20 by forming a pattern groove 18 on the copper plate 16 by water-jet cutting the copper plate 16 adhered to one surface thereof.

The copper plate 16 has a thickness (100 mm) within a range that can be cut by the water jet cutting described above.
(thickness up to about mm), the plate thickness can be arbitrarily selected according to the current capacity of the device used. That is, since the conductor pattern 14 described later is formed by water jet cutting, the cross-sectional area of the conductor pattern 14 can be easily controlled by controlling the width of the portion to be cut, in other words, the groove interval of the conductor pattern 14. Can be adjusted. According to the water jet cutting, the above-mentioned groove interval can be easily controlled up to about several μm, so that the conductor pattern 14 having an arbitrary cross-sectional area can be obtained, thereby providing a predetermined current capacity characteristic. be able to.

The insulating substrate 20 is made of, for example, a flexible glass epoxy resin. In addition, other materials may be used as long as they have insulation and flexibility. The insulating substrate 20 is prevented from being water jet cut by controlling the water pressure of the cutting device.

As described above, the conductor pattern 14 is formed by punching the spiral pattern groove 18 from the copper plate 16 by water jet cutting (the detailed structure of the cutting device will be described later). At this time, the interval between the pattern grooves 18 (the conductor pattern 14
Width) is coarse in the longitudinal direction and is dense in the vertical direction. When the sheet-like coil 10 is bent vertically and used in an annular shape, the magnetic flux densities in the X-axis and Y-axis directions are made different so that it can be applied to a linear motor and an MRI apparatus. is there. The conductor pattern 1
The shape of 4 is not limited to a spiral shape, but can be changed to various shapes according to the device used.

FIG. 2 shows the structure of a water jet cutting apparatus applied to the method for manufacturing a sheet-shaped coil of the present invention. This cutting device includes a high-pressure water jetting means 50 for jetting ultra-high-pressure water and an insulating substrate 20.
Copper plate 16 adhered to one side of (hereinafter referred to as copper plate 16)
A cutting unit 60 that cuts into a predetermined pattern and a control unit 70 that controls the cutting unit 60 are provided.

The high-pressure water generating means 50 is a polymer mixer 3 for mixing a polymer with the water supplied from the water supply section 30.
1, a pump 32 that pressure-feeds the polymer-mixed water to an intensifier 33, which will be described later, an intensifier 33 that converts the polymer-mixed water sent from the pump 32 into ultra-high-pressure water, and the pressure of the intensifier 33 And a nozzle 36 for injecting the ultra-high pressure water supplied from the intensifier 33 via the on / off valve 35 as a high-energy jet water flow.
It consists of

The cutting portion 60 is an XY on which the copper plate 16 is placed.
The table 38 and the XY table 38 are respectively set to the X axis,
And a drive unit 39 for moving in the Y-axis direction.

The control means 70 has an interface 40 for inputting / outputting signals and an RO storing a predetermined program.
M41, CPU42 which performs a predetermined arithmetic processing based on the program of ROM41, input data and CPU
The RAM 43 for temporarily storing the calculation result of 42 and the input section 44 for inputting various data such as the width of the conductor pattern formed on the copper plate 16, that is, the intervals of the spiral grooves to be cut, and the thickness of the copper plate 16. Have The CPU 42 outputs a predetermined drive signal to the drive unit 39 of the cutting unit 60 based on these data and the above-mentioned program, and
A predetermined pressure signal is output to the control unit 34 of the intensifier 33.

When a sheet-shaped coil is manufactured using the water jet cutting apparatus having the above structure, first, the copper plate 16 is placed on the XY table 38.

In advance, the input unit 44 via an input terminal or the like.
Input the data required for disconnection into RAM4 and store it in RAM4.
Store in 3.

Subsequently, the water supply unit 30 starts supplying water, and the control means 70 outputs a predetermined pressure signal to the control unit 34 so that only the copper plate 16 is cut and the insulating substrate 20 is not cut. Set the pressure of the tensioner 33. The water supplied from the water supply unit 30 receives the supply of the polymer from the polymer mixer 31, and is pumped to the intensifier 33 by the pump 32. The integrator 33 supplies this polymer mixed water as ultra high pressure water to the on / off valve 35 and further to the nozzle 36, and the nozzle 36 jets a jet water flow toward the copper plate 16 mounted on the XY table 38. .

On the other hand, the control means 70 outputs a predetermined drive signal to the drive section 39 and moves the XY table 38 in the X-axis and Y-axis directions so that a predetermined conductor pattern is formed on the copper plate 16. Let

The jet water flow jetted from the nozzle 36 is
It collides with the copper plate 16 placed on the XY table 38, and the collision energy cuts the copper plate 16. At this time, since the XY table 38 simultaneously moves in a predetermined direction according to the conductor pattern formed on the copper plate 16, the copper plate 1
6 is cut in a predetermined pattern, and the insulating substrate 20 is not cut by controlling the water pressure of the intensifier 33. Further, since the polymer is added to the jet water flow ejected from the nozzle 36, higher collision energy is obtained and the cutting force is further improved.

According to the sheet-shaped coil manufactured by such a water jet cutting device, since the cutting is instantaneously performed by the jet water flow, the processing time is shortened, and a thick plate can be easily processed. Productivity can be improved. Further, the processing accuracy is improved, a good processed cross section without side edges can be provided, and appropriate dimensional accuracy can be obtained.
As a result, fine processing such as forming a narrow slit width can be performed.

FIG. 3 is a perspective view showing the structure of a cylindrical sheet coil 80 according to the second embodiment of the present invention, and FIG. 4 is a side view thereof. As previously mentioned,
The sheet-shaped coil 10 of FIG. 1 having the conductor pattern 14 formed by water jet cutting the copper plate 16 adhered to one surface of the insulating substrate 20 is curved as shown in FIG.
The cylindrical sheet coil 80 is formed by joining the eight sheet coils 10 in such a state. Such a cylindrical sheet coil 80 can be applied to various devices such as a linear motor car and a medical pion irradiation device, and in particular, NMR-CT (MRI).
It is useful when applied to a special type device such as. In addition, in this embodiment, the sheet-shaped coil 10 is formed into a substantially true cylindrical shape, but the present invention is not limited to this, and it may be changed to an elliptic cylindrical shape or the like depending on the usage state.

[0028]

As described above, according to the sheet-shaped coil and the method of manufacturing the same of the present invention, the insulating substrate and the metal conductor plate adhered to one surface of the insulating substrate are water-jet cut to form the insulating substrate. Since the coil conductor is formed on one surface, productivity can be improved, processing accuracy can be improved, quality can be improved, and fine processing can be performed.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing an embodiment of the present invention.

FIG. 2 is a block diagram showing the configuration of a water jet cutting device used in the present invention.

FIG. 3 is a perspective sectional view showing a configuration of a cylindrical sheet-shaped coil according to an embodiment.

FIG. 4 is a side view showing the configuration of a cylindrical sheet coil according to the embodiment.

FIG. 5 is a side view showing the shape of the sheet-shaped coil that constitutes the cylindrical sheet-shaped coil according to the embodiment.

[Explanation of symbols]

10 Sheet-shaped coil 14
Conductor pattern 16 Copper plate 18
Pattern groove 20 Insulating substrate 30
Water supply unit 31 Polymer mixer 32
Pump 33 Intensifier 34
Control unit 35 On / off valve 36
Nozzle 38 XY table 39
Drive unit 40 Interface 41
CPU 42 ROM 43
RAM 44 Input section 50
Ultra-high pressure water generating means 60 Cutting part 70
Control means 80 Cylindrical sheet coil

Claims (3)

[Claims] 1. A coil conductor formed on one surface of the insulating substrate by subjecting the insulating substrate and a metal conductor plate adhered to one surface of the insulating substrate to ultra-high pressure water jet cutting (hereinafter referred to as water jet cutting). The sheet-shaped coil, wherein the coil conductor is formed of the metal conductor plate having a predetermined thickness to provide a predetermined current capacity characteristic. 2. The insulating substrate and the coil conductor,
A sheet-shaped coil formed into a tubular shape. 3. A metal conductor plate having a predetermined thickness is adhered to one surface of an insulating substrate, the metal conductor plate is water-jet cut, and a slit portion is formed in the metal conductor plate to form the metal. A method for manufacturing a sheet-shaped coil, comprising forming a coil conductor having a shape based on the slit portion on a conductor plate.