JPH0652982U - Substrate cleaning / drying jig - Google Patents

Abstract

(57) [Summary] [Object] To provide a tank-type substrate cleaning / drying jig capable of preventing surface contamination due to residual liquid in a substrate holding groove when cleaning / drying a substrate such as a photomask substrate or a wafer. In a tank-type cleaning jig for holding a substrate in a V-shaped holding groove, a lower portion of the V-shaped holding groove is opened to a thickness less than the thickness of the object to be cleaned, and the opening is connected to a liquid escape groove. A substrate cleaning jig having a holding piece.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a glass substrate for photomasks, a substrate for liquid crystal displays, or a tank-type substrate cleaning / drying jig such as a wafer.

[0002]

[Prior art]

 Conventionally, for cleaning and drying substrates such as photomask substrates and wafers, holding pieces having continuous V-shaped grooves are provided on the lower and left and right sides, and the photomask substrate is held in these three V-shaped grooves for cleaning. -It was dry.

[0003]

[Issues to be solved by the device]

 However, in the conventional holder having the V-shaped groove, the solvent and water during cleaning tend to remain particularly in the V-groove provided at the lower part, and when the solvent or water is directly vapor-dried or dried while being pulled up from the rinse tank, it remains. The solvent or water causes stains on the substrate, which necessitates re-polishing and cleaning.

An object of the present invention is to provide a bath-type substrate cleaning / drying jig for photomask substrates, wafers, etc., in which surface contamination due to liquid remaining in the substrate holding groove is prevented.

[Means for Solving the Problems]

Therefore, as a result of intensive research to solve the above-mentioned object, the present inventor has found that in a tank-type cleaning jig for holding a substrate in a V-shaped holding groove, the lower portion of the V-shaped holding groove is to be cleaned. The present invention has been completed based on the finding that the above object can be achieved by using a structure having a holding piece having an opening less than the plate thickness and the opening being connected to the liquid escape groove.

Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 shows a front view of a part of the cleaning / drying jig of the present invention, in which a holding piece 1 is a liquid escape groove continuously provided from a lower portion of a V-shaped holding groove 2 in which an object to be cleaned 4 is held. Have three.

The lower portion of the V-shaped holding groove is connected to a liquid escape groove 3 having a triangular shape which is opened below the plate thickness of the object to be cleaned and which spreads downward.

The opening of the liquid escape groove 3 is appropriately determined according to various substrate thicknesses.

Further, the shape of the liquid escape groove 3 is preferably a triangular shape that spreads downward from the opening, and the opening degree of the triangular shape is preferably 15 degrees to 140 degrees. If it is less than 15 degrees, it is difficult for the solution to escape due to the surface tension, and if it exceeds 140 degrees, it is not preferable in terms of product processing.

FIG. 2 is a perspective view of a part of the holding piece of the present invention, in which troubles due to contact with the substrate are prevented by chamfering and smoothing the corners.

FIG. 3 shows an embodiment of the cleaning jig of the present invention, in which a holding piece 1 having a liquid escape groove is provided at the bottom of a tank-type box-like body, and V-shaped holding pieces are provided on the left and right sides. There is. Further, the respective holding pieces can be moved by the counterbore on the left and right, and the screwing position can be appropriately determined depending on the size of the substrate to be cleaned.

If the substrate is held by the holding pieces on the lower side and the left and right side surfaces and washed and dried, the liquid used for washing and drying does not flow out to the liquid escape groove and the liquid does not remain in the holding portion. It is possible to prevent stains at the bottom.

[0013]

[Effect of device]

 According to the present invention, it is possible to prevent droplets remaining on the substrate holding piece and prevent the generation of spots during conventional cleaning and drying with an inexpensive structure without using a special device.

[0014]

【Example】

 In the cleaning jig shown in FIG. 3, the shape of the lower holding piece was changed as shown in Table 1, and ten photomask substrates having a plate thickness of 0.6 mm were held, washed with pure water, and then dried. Then, the generation of stains on the lower part of the substrate was compared. As a result, as shown in Table 1, the triangular shape did not generate stains, but in the Y type of Experimental Example 5, the liquid did not escape due to the surface tension and stains occurred. Further, all the circular shapes of Experimental Example 6 also had spots.

[Table 1]

[Brief description of drawings]

FIG. 1 is a front view of a part of a cleaning / drying jig of the present invention.

FIG. 2 is a partial perspective view of a holding piece of the present invention.

FIG. 3 is a perspective view of an embodiment of a cleaning / drying jig of the present invention.

[Explanation of symbols]

 1 Holding piece 2 V type holding groove 3 Liquid escape groove 4 Cleaning target 5 Chamfer

Claims (2)

[Scope of utility model registration request] 1. A tank-type cleaning jig for holding a substrate in a V-shaped holding groove, wherein the lower portion of the V-shaped holding groove is opened to a thickness less than the thickness of the object to be cleaned, and the opening is connected to the liquid escape groove. A substrate cleaning jig having a holding piece made of 2. A tank-type cleaning jig for holding a substrate in a V-shaped holding groove, wherein the lower portion of the V-shaped holding groove is opened to a thickness less than the thickness of the object to be cleaned, and the opening is widened downward. A jig for cleaning a substrate, comprising a holding piece formed in series with the liquid escape groove formed as described above.