JPH078069Y2 - Tray set for chip cleaning - Google Patents
Tray set for chip cleaningInfo
- Publication number
- JPH078069Y2 JPH078069Y2 JP12243790U JP12243790U JPH078069Y2 JP H078069 Y2 JPH078069 Y2 JP H078069Y2 JP 12243790 U JP12243790 U JP 12243790U JP 12243790 U JP12243790 U JP 12243790U JP H078069 Y2 JPH078069 Y2 JP H078069Y2
- Authority
- JP
- Japan
- Prior art keywords
- chip
- tray
- cleaning
- cover
- storage tray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Cleaning In General (AREA)
Description
本考案は、例えば電子材料及び光学材料のチップを洗浄
するために用いられるチップ洗浄用トレィに関するもの
である。The present invention relates to a chip cleaning tray used for cleaning chips of electronic materials and optical materials, for example.
電子材料や光学材料のチップは、傷や汚れがあるとその
特性が劣化するので取扱いには十分注意する必要があ
り、洗浄のためのトレィが特別に造られている。 第３図は従来のチップ洗浄用トレィセットの一部断面図
であるが、これは同じチップトレィ12を２枚組み合わせ
たものである。同図に示すように、チップトレィ12はチ
ップ５を収納する凹部１を有し、凹部１の下部には直径
数ミリの貫通孔２が開いている。チップトレィ12は、一
辺が5cm〜10cm程度の正方形の合成樹脂板に、チップ５
を収納する2mm□〜5mm□程度の凹部１が縦横10程度並ん
でいる。従って、収納できるチップは100個程度であ
る。 チップを洗浄するときは、チップ５を下側のチップトレ
ィ12の凹部１に収納し、もう一つのチップトレィ12を上
に重ねた後、洗浄後に入れて洗浄する。Since the characteristics of electronic and optical material chips deteriorate if they are scratched or soiled, they must be handled with care, and trays for cleaning are specially made. FIG. 3 is a partial cross-sectional view of a conventional chip cleaning tray set, which is a combination of two identical chip trays 12. As shown in the figure, the chip tray 12 has a recess 1 for accommodating the chip 5, and a through hole 2 having a diameter of several millimeters is opened in the lower part of the recess 1. The chip tray 12 is a square synthetic resin plate with a side of 5 cm to 10 cm, and the chip 5
The recesses 1 of about 2 mm □ to 5 mm □ for storing are arranged side by side in the vertical and horizontal directions. Therefore, about 100 chips can be stored. When cleaning the chip, the chip 5 is housed in the recess 1 of the lower chip tray 12, the other chip tray 12 is placed on top, and then the chip tray 12 is cleaned and then put.
【考案が解決しようとする課題】 前記のチップ洗浄用トレィセットを使用してチップを洗
浄すると、図示するようにチップトレィ12とチップ５の
接触する部分が平面なので接触部分に洗浄液が回らない
ことがよくある。また、チップ５の洗浄面がチップトレ
ィ12に接触して傷がついたり、洗浄後チップ５がチップ
トレィ12にくっつき、二枚のチップトレィ12を開けると
チップ５が飛び散ってしまう。 本考案は前記の課題を解決するためになされたもので、
洗浄器にチップが傷つかず、洗浄液がチップ全体に回
り、洗浄後チップがトレィにくっつかないチップ洗浄用
トレィを提供することを目的とする。When the chip cleaning tray set is used to clean a chip, the contacting portion between the chip tray 12 and the chip 5 is a flat surface as shown in the figure, so that the cleaning liquid may not flow to the contacting portion. Often Further, the cleaning surface of the chip 5 comes into contact with the chip tray 12 and is scratched, or the chip 5 sticks to the chip tray 12 after cleaning, and the chips 5 scatter when two chip trays 12 are opened. The present invention has been made to solve the above problems,
An object of the present invention is to provide a tray for chip cleaning in which the chip is not damaged in the cleaning device, the cleaning liquid is spread over the entire chip, and the chip does not stick to the tray after cleaning.
前記の目的を達成するための本考案のチップ洗浄用トレ
ィセットを、斜視図である第１図及び一部断面図である
第２図に従って説明する。 本考案のチップ洗浄用トレィセットは、チップ収納トレ
ィ11とチップ収納トレィ11の上に嵌め合わせるカバー10
とから成っている。チップ収納トレィ11は、チップ５を
収納する凹部１が曲面を持っており、かつ凹部１の下部
には貫通孔２がある。カバー10は、貫通孔３がありかつ
チップ収納トレィ11と接触する面に小突起４が貫通孔３
の周囲にある。小突起４はチップ収納トレィ11とカバー
10の間に隙間を形成する。A tip cleaning tray set of the present invention for achieving the above object will be described with reference to FIG. 1 which is a perspective view and FIG. 2 which is a partial sectional view. The tip cleaning tray set of the present invention is a tip storage tray 11 and a cover 10 fitted on the tip storage tray 11.
And consists of. In the chip storage tray 11, the recess 1 for housing the chip 5 has a curved surface, and the through hole 2 is provided in the lower portion of the recess 1. The cover 10 has a through hole 3 and a small protrusion 4 on the surface which contacts the chip storage tray 11.
Around. Small protrusion 4 is a chip storage tray 11 and cover
Form a gap between 10.
チップ収納トレィ11においてチップ５を収納する凹部１
が曲面なので、チップ５とチップ収納トレィ11の面接触
がなく、チップ５全体に洗浄液が回り十分な洗浄がで
き、チップ５にも傷がつかない。また、カバー10に小突
起４があるため、チップ収納トレィ11とカバー10の間に
隙間ができ、洗浄後チップ５がチップ収納トレィ11にく
っつかず、カバー10を開けたときチップ５が飛び散らな
い。Recess 1 for storing chip 5 in chip storage tray 11
Since the surface is curved, there is no surface contact between the chip 5 and the chip storage tray 11, the cleaning liquid is spread over the entire chip 5 and sufficient cleaning is possible, and the chip 5 is not damaged. Further, since the cover 10 has the small protrusions 4, a gap is formed between the chip storage tray 11 and the cover 10, and the chip 5 does not stick to the chip storage tray 11 after cleaning, and the chip 5 does not scatter when the cover 10 is opened. .
以下、本考案を適用するチップ洗浄用トレィセットの実
施例を第１図および第２図に従って説明する。 チップ洗浄用トレィセットは、チップ収納トレィ11とチ
ップ収納トレィ11の上に嵌め合わせるカバー10とから成
る。チップ収納トレィ11は、チップ５を収納する凹部１
が曲面を持ちかつ凹部１の下部に貫通孔２がある。カバ
ー10は、貫通孔３がありかつチップ収納トレィ11と接触
する面に小突起４を有している。このチップ洗浄用トレ
ィセットは、5mm□以下のチップを洗浄するのに適し、
凹部１の貫通孔２のサイズｂは、チップ５のサイズをam
m□またはammφとすると次式で表わせる。 ａ×（4/5）≧ｂ≧ａ×（2/5） なお、チップ洗浄用トレィセットの材質はアクリルニト
リル、ブタジエン、スチレン樹脂もしくはフッ素樹脂で
あり、加圧成形法もしくは射出成形により造られる。 上記のチップ洗浄用トレィセットを使用して下記実施例
１および実施例２を行なった。 実施例１ 光アイソレータ用の部材である2mm□のBi含有ガーネッ
トエピタキシャル膜チップをダイシングマシーンにて１
インチウェーハから50枚切り出した。 この2mm□のチップには、ダイシング時に付着した汚れ
がみられたため前記のチップ洗浄用トレイセットに入
れ、30倍希釈の界面活性剤溶液中で超音波洗浄を４分間
行なった。洗浄後N2ブローにより乾燥させ、微分干渉顕
微鏡（倍率50倍）で表面をみた結果、汚れはきれいに落
ちていた。またチップに傷の発生は殆ど見られなかっ
た。 実施例２ 光アイソレータ用の部材である2mm□の偏光ガラスをダ
イシングマシーンにて10mm□から16枚切り出した。 この2mm□のチップには、ダイシング時に付着した汚れ
がみられたため実施例１と同様のチップ洗浄用トレィセ
ットに入れ、30倍希釈の界面活性剤溶液中で超音波洗浄
を４分間行なった。洗浄後、微分干渉顕微鏡（倍率50
倍）で表面をみた結果、汚れはきれいに落ちていた。ま
たチップに傷の発生は殆ど見られなかった。 比較例１ 光アイソレータ用の部材である2mm□のBi含有ガーネッ
トエピタキシャル膜をダイシングマシーンにて１インチ
ウェーハから50枚切り出した。 第３図のように凹部１が平面の従来のチップ洗浄用トレ
ィに2mm□のチップを入れ、30倍希釈の界面活性剤溶液
中で超音波洗浄を４分間行なった。洗浄後N2ブローによ
り乾燥させ、微分干渉顕微鏡（倍率50倍）で表面をみ
た。結果は、汚れがチップとチップ洗浄用トレィとの接
触部分に多数見られ、またチップの傷も平均で３本発生
していた。An embodiment of a tray cleaning tray set to which the present invention is applied will be described below with reference to FIGS. The chip cleaning tray set includes a chip storage tray 11 and a cover 10 fitted on the chip storage tray 11. The chip storage tray 11 is a recess 1 for storing the chip 5.
Has a curved surface and has a through hole 2 at the bottom of the recess 1. The cover 10 has a through hole 3 and has a small protrusion 4 on the surface that comes into contact with the chip storage tray 11. This tray cleaning tray set is suitable for cleaning chips of 5 mm square or less,
The size b of the through hole 2 of the recess 1 is the same as the size of the chip 5.
If m □ or ammφ, it can be expressed by the following formula. a × (4/5) ≧ b ≧ a × (2/5) The material of the chip cleaning tray set is acrylonitrile, butadiene, styrene resin or fluororesin, and is made by pressure molding method or injection molding. . The following Example 1 and Example 2 were performed using the above chip cleaning tray set. Example 1 A 2 mm □ Bi-containing garnet epitaxial film chip, which is a member for an optical isolator, was set in a dicing machine 1
50 pieces were cut from an inch wafer. Since dirt adhering to the 2 mm square chip was observed during dicing, the chip was put in the chip cleaning tray set and ultrasonically cleaned in a 30 times diluted surfactant solution for 4 minutes. After washing, it was dried by N 2 blow, and the surface was observed with a differential interference microscope (magnification: 50 times). As a result, the stains were cleanly removed. Further, almost no scratches were found on the chip. Example 2 16 pieces of 2 mm square polarizing glass, which is a member for an optical isolator, were cut out from 10 mm square with a dicing machine. Since stains adhering to the 2 mm square chips were found during dicing, the chips were placed in the same chip cleaning tray set as in Example 1, and ultrasonic cleaning was performed for 4 minutes in a 30 times diluted surfactant solution. After washing, differential interference microscope (magnification 50
As a result of observing the surface with (double), the stains were cleanly removed. Further, almost no scratches were found on the chip. Comparative Example 1 Fifty 2 mm square Bi-containing garnet epitaxial films, which are members for optical isolators, were cut from a 1-inch wafer by a dicing machine. As shown in FIG. 3, a 2 mm square chip was placed in a conventional chip cleaning tray having a flat concave portion 1 and ultrasonic cleaning was performed for 4 minutes in a 30 times diluted surfactant solution. After washing, it was dried by N 2 blow, and the surface was observed with a differential interference microscope (magnification 50 times). As a result, a large number of stains were found on the contact portion between the chip and the tray for chip cleaning, and three scratches were generated on the chip on average.
以上詳細に説明したように本考案のチップ洗浄用トレィ
セットは、チップ全体が十分洗浄され、洗浄後チップが
チップ収納トレィにくっつかない。またチップのまわり
に余裕があるので、洗浄後N2ブローにより容易に乾燥で
きチップの混合が避けられる。As described above in detail, in the chip cleaning tray set of the present invention, the entire chip is sufficiently cleaned, and the chip does not stick to the chip storage tray after cleaning. In addition, since there is enough space around the tip, it can be easily dried by N 2 blow after washing, and tip mixing can be avoided.
第１図は本発明のチップ洗浄用トレィセットを開いた斜
視図、第２図は本発明のチップ洗浄用トレィセットの一
部断面図、第３図は従来のチップ洗浄用トレィセットの
一部断面図である。 １……凹部、２、３……貫通孔 ４……小突起、５……チップ 10……カバー、11……チップ収納トレィ 12……チップトレィFIG. 1 is a perspective view showing an opened chip cleaning tray set of the present invention, FIG. 2 is a partial sectional view of the chip cleaning tray set of the present invention, and FIG. 3 is a part of a conventional chip cleaning tray set. FIG. 1 ... recessed part, 2,3 ... through hole 4 ... small protrusion, 5 ... chip 10 ... cover, 11 ... chip storage tray 12 ... chip tray
Claims (1)
め合わせるカバーとから成り、該チップ収納トレィはチ
ップを収納する凹部が曲面を持ちかつ該凹部下部の貫通
孔があり、該カバーは貫通孔がありかつ該チップ収納ト
レィと接触する面に小突起を有して該小突起がチップ収
納トレィとカバーの隙間を形成することを特徴とするチ
ップ洗浄用トレィセット。1. A chip storage tray and a cover fitted to the chip storage tray, wherein the chip storage tray has a concave portion for storing a chip and a through hole at the bottom of the concave portion, and the cover has a through hole. A tray cleaning tray set for chip cleaning, characterized in that it has a small protrusion on a surface which is in contact with the chip storing tray and the small protrusion forms a gap between the chip storing tray and the cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12243790U JPH078069Y2 (en) | 1990-11-26 | 1990-11-26 | Tray set for chip cleaning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12243790U JPH078069Y2 (en) | 1990-11-26 | 1990-11-26 | Tray set for chip cleaning |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0481686U JPH0481686U (en) | 1992-07-16 |
| JPH078069Y2 true JPH078069Y2 (en) | 1995-03-01 |
Family
ID=31870218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12243790U Expired - Lifetime JPH078069Y2 (en) | 1990-11-26 | 1990-11-26 | Tray set for chip cleaning |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH078069Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5220461B2 (en) * | 2008-03-31 | 2013-06-26 | 京セラクリスタルデバイス株式会社 | Cleaning jig |
-
1990
- 1990-11-26 JP JP12243790U patent/JPH078069Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0481686U (en) | 1992-07-16 |
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