JPH0650540Y2 - 薄膜成長装置 - Google Patents
薄膜成長装置Info
- Publication number
- JPH0650540Y2 JPH0650540Y2 JP4822490U JP4822490U JPH0650540Y2 JP H0650540 Y2 JPH0650540 Y2 JP H0650540Y2 JP 4822490 U JP4822490 U JP 4822490U JP 4822490 U JP4822490 U JP 4822490U JP H0650540 Y2 JPH0650540 Y2 JP H0650540Y2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film growth
- substrate
- ultraviolet light
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 title claims description 17
- 239000000758 substrate Substances 0.000 claims description 23
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 1
- 239000002131 composite material Substances 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4822490U JPH0650540Y2 (ja) | 1990-05-09 | 1990-05-09 | 薄膜成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4822490U JPH0650540Y2 (ja) | 1990-05-09 | 1990-05-09 | 薄膜成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH047657U JPH047657U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-01-23 |
| JPH0650540Y2 true JPH0650540Y2 (ja) | 1994-12-21 |
Family
ID=31564842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4822490U Expired - Lifetime JPH0650540Y2 (ja) | 1990-05-09 | 1990-05-09 | 薄膜成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0650540Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51108927U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-02-25 | 1976-08-31 |
-
1990
- 1990-05-09 JP JP4822490U patent/JPH0650540Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH047657U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-01-23 |
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