JPH0648858Y2 - ウエハ収納容器 - Google Patents

ウエハ収納容器

Info

Publication number
JPH0648858Y2
JPH0648858Y2 JP1985054634U JP5463485U JPH0648858Y2 JP H0648858 Y2 JPH0648858 Y2 JP H0648858Y2 JP 1985054634 U JP1985054634 U JP 1985054634U JP 5463485 U JP5463485 U JP 5463485U JP H0648858 Y2 JPH0648858 Y2 JP H0648858Y2
Authority
JP
Japan
Prior art keywords
wafer
stocker
dummy
storage container
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985054634U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61171252U (enrdf_load_stackoverflow
Inventor
司 野上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1985054634U priority Critical patent/JPH0648858Y2/ja
Priority to US06/819,253 priority patent/US4759681A/en
Publication of JPS61171252U publication Critical patent/JPS61171252U/ja
Application granted granted Critical
Publication of JPH0648858Y2 publication Critical patent/JPH0648858Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1985054634U 1985-01-22 1985-04-11 ウエハ収納容器 Expired - Lifetime JPH0648858Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1985054634U JPH0648858Y2 (ja) 1985-04-11 1985-04-11 ウエハ収納容器
US06/819,253 US4759681A (en) 1985-01-22 1986-01-16 End station for an ion implantation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985054634U JPH0648858Y2 (ja) 1985-04-11 1985-04-11 ウエハ収納容器

Publications (2)

Publication Number Publication Date
JPS61171252U JPS61171252U (enrdf_load_stackoverflow) 1986-10-24
JPH0648858Y2 true JPH0648858Y2 (ja) 1994-12-12

Family

ID=30576567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985054634U Expired - Lifetime JPH0648858Y2 (ja) 1985-01-22 1985-04-11 ウエハ収納容器

Country Status (1)

Country Link
JP (1) JPH0648858Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0621246Y2 (ja) * 1987-11-19 1994-06-01 川崎製鉄株式会社 ウエハ支持装置
JPH0751517Y2 (ja) * 1988-04-12 1995-11-22 ローム株式会社 リードフレーム用マガジン
JP2013089845A (ja) * 2011-10-20 2013-05-13 Disco Abrasive Syst Ltd ウエーハカセット

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60226134A (ja) * 1984-04-25 1985-11-11 Hitachi Ltd 半導体製造装置

Also Published As

Publication number Publication date
JPS61171252U (enrdf_load_stackoverflow) 1986-10-24

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