JPH0648857Y2 - Thin plate processing basket - Google Patents

Description

[Detailed description of the device]

[0001]

BACKGROUND OF THE INVENTION The present invention stores a large number of thin plates used for semiconductor wafers, glass masks, reticles, compact discs, etc. in parallel, and performs cleaning, etching, drying, etc. on the stored thin plates. The present invention relates to a thin plate processing basket for processing.

[0002]

2. Description of the Related Art Various conventional structures have been proposed for this type of basket, and the most general structure among them has been described with reference to FIGS. Basket 1 is
It is integrally molded of plastic with excellent heat resistance and chemical resistance, such as fluororesin material. The basket 1 has a rectangular shape surrounded by side walls 2 and 3 that face each other in parallel and end walls 4 and 5 that connect both end portions of the side walls 2 and 3, respectively. On the lower side of the side walls 2 and 3, there are respectively formed bases 7 and 8 which are bent inward so as to be in a reduced diameter state so that a large number of thin plates 6 housed in parallel are not dropped. 7,8
The arcuate surface of the thin plate 6 is locked to and supported by the inclined surface of. Further, on the inner surfaces of the side walls 2 and 3 and the bases 7 and 8, a large number of continuous rib-shaped partition walls 11 are provided as spacing members for aligning and spacing a large number of thin plates 6 in parallel at predetermined intervals. 12 are projected inward in parallel, and insertion grooves 9 and 10 for accommodating the thin plate 6 are formed between the partition walls 11 and 12. Further, the side walls 2 and 3 and the pedestals 7 and 8 are respectively provided with rectangular window holes 13, 14, 15, 16 along the longitudinal direction, and the wall surfaces are formed by the window holes 13, 14, 15, 16. Notches are formed in the insertion grooves 9 and 10 to form slits 17 and 18, respectively.
19, 20 are formed. Each of these slits 17,1
Reference numerals 8, 19, 20 function as communication holes for improving the flow of the processing liquid and air to the thin plate 6 that is housed by communicating the inside and outside of the side walls 2, 3 and the bases 7, 8 with each other. Reference numeral 21 is a small-diameter projection, reference numeral 22 is a small-diameter hole, which is used when the thin plate is transferred from one basket containing the thin plate to the other empty basket. 21 and the small diameter hole 22 are fitted to each other and positioned. Reference numerals 23 and 24 are gripping notches for engaging the gripping tool when the basket containing the thin plates is immersed in or pulled up from the processing liquid. Further, reference numerals 25 and 26 are engagement notch portions with which the feeding mechanism of the conveyor is engaged when the basket is conveyed to the next process by the conveyor or the like.

[0003]

A large number of thin plates 6 housed in the basket 1 are immersed in a processing solution by a spray method or an immersion method to be subjected to etching or cleaning,
The drying process is performed in a centrifugal dryer. At that time, it is desirable that the processing liquid and the dry air are brought into uniform contact with the entire surface of the thin plate 6 and that the flow velocity passing through the thin plate 6 is uniform. However, in order to align the thin plates 6 as in the above-mentioned conventional technique, the intervals for accommodating the insertion grooves 9, 10 formed by the partition walls 11, 12 continuous from the side walls 2, 3 to the bases 7, 8. The holding structure has the following problems. That is, the partition walls 11 and 12 tend to hinder the flow of the treatment liquid or air to easily cause stagnation or bubbles, and also contact the thin plate 6 on a wide surface to deteriorate the liquid after the treatment and to perform uniform treatment. Mist-like fine particles that cannot be obtained and have uneven drying are formed on the thin plate 6.
It has a structure that easily adheres to.

As one of the proposals for solving the above problems, there is a wafer storage jig disclosed in, for example, Japanese Patent Laid-Open No. 61-67242. In this wafer storage jig, a plurality of storage grooves are formed on the opposite surfaces of both side plates in correspondence with each other, and the peripheral edge of the wafer is inserted into each of the corresponding storage grooves of the both side plates to insert the wafer. In the accommodation, the convex portions of the side plate between the adjacent accommodation grooves and the convex portions of the side plate on both sides of the formation portion of the accommodation groove are notched. That is,
In this wafer storage jig, a part of each rib-shaped side plate convex strip that is continuous in a longitudinal direction and is projected from both side plates toward opposite surfaces is provided along the longitudinal direction in which both side plates extend. A rectangular wave-shaped notch-shaped protrusion is formed by notching with a width and alternating protrusions and notches are formed along the wafer insertion direction. The contact area with the wafer is reduced when the peripheral edge of the wafer is inserted into the accommodation groove formed between the ridges.

However, the proposed wafer storage jig still has some problems that need further improvement. The notch-shaped ridges are formed in a flat plate shape, and each of the plate-shaped notch-shaped ridges is engaged with both side surfaces of the wafer inserted into the accommodation groove in a wide-width surface-contact state. Therefore, stagnation of the processing liquid and generation of air bubbles occur at that location. Further, since the notch-shaped ridges are all formed in the same arrangement, the wafer inserted into the accommodation groove engages with the same notch-shaped ridges on the same side plate at the same location on both front and back surfaces. As a result, the treatment liquid will be constrained, and the treatment liquid will be stagnation and bubbles will be generated at that location. In addition, the notch-shaped ridges on both side plates facing each other in the same arrangement result in engaging and restraining symmetrical positions of the same height on both ends of the peripheral edge of the wafer, which reduces swinging play. As a result, the fluidity of the treatment liquid deteriorates and uniform treatment cannot be obtained. Further, the above-mentioned notch-shaped ridges can be formed by cutting after integrally molding the height and the width along the insertion direction of the wafer,
The width and pitch of the ridges (width of the storage groove) along the longitudinal direction of the side plate are constant from the inlet side of the insertion side to the bottom side for the convenience of molding. Fluidity deteriorates and uniform treatment cannot be obtained. Then, this invention aims at providing the basket for thin plate processing which solved the above-mentioned subject of the prior art and enabled uniform and favorable processing.

[0006]

According to a first aspect of the present invention, there is provided a thin plate processing basket which is a rectangular container having a plurality of thin plates and which is open vertically and which is parallel to the longitudinal direction of the container. A large number of vertically elongated slits that communicate the inside and the outside of the container are formed at predetermined intervals on both sidewalls, and the insertion of the thin plate is guided to the inner surface of each vertically elongated sidewall formed between the slits. Further, a spacing member that engages both side ends of the inserted thin plate to space the thin plates in a parallel aligned state is provided so as to project toward the other side wall facing each other so as to face each other. A table part on which a thin plate inserted between the spacing members is mounted is provided on the lower side, and the spacing members are arranged along the both sides of the slit in a spaced-apart state. It is formed by a group of rod-shaped projections made up of many rod-shaped projections. Rod-like protrusions were formed outer surface in contact with the thin plate into an arc shape.

According to a second aspect of the present invention, in the thin plate processing basket, the rod-shaped projection according to the first aspect is formed in a columnar shape having a circular cross section or a vertically elongated elliptical shape with the tip side gradually reducing in diameter.

According to a third aspect of the present invention, in the thin plate processing basket, the rod-shaped projection group according to the first or second aspect is constituted by rod-shaped projections having different heights, and is located at the inlet side of the thin plate. The bar-shaped projection was formed to have the highest height, and the height was gradually decreased as it moved to the bottom side.

According to a fourth aspect of the present invention, in the thin plate processing basket, the rod-shaped projection group according to the first to third aspects is constituted by rod-shaped projections having different diameters, and the rod-shaped projection located at the inlet side of the thin plate is The diameter on the base side was formed to be the smallest, and the diameter on the base side was gradually increased as it moved to the bottom side.

According to a fifth aspect of the present invention, there is provided a thin plate processing basket in which the rod-shaped projection group according to the first to fourth aspects is
The protruding positions of the bar-shaped projections facing each other between the opposite side walls were arranged in an alternating manner.

According to a sixth aspect of the present invention, there is provided a thin plate processing basket in which the rod-shaped projection groups according to the first to fifth aspects are:
The protruding positions of the bar-shaped projections facing each other between the opposite side walls were arranged in an alternating manner.

According to a seventh aspect of the present invention, in the thin plate processing basket, a guide member for guiding each thin plate to the insertion space formed by the rod-shaped projection group is provided at the insertion side inlet of the thin plate in the first to sixth aspects. This guide member is formed by bar-shaped projections or partition plates arranged between the slits at the same pitch as the bar-shaped projection group.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the embodiments shown in FIGS. Similar to the conventional example, the basket 31 is integrally formed of plastic having excellent heat resistance and chemical resistance, such as a fluororesin material, and is integrally formed with the side walls 3 facing each other.
Each of the end walls 34 and 35 connects the two end portions of the reference numeral 2 and 33 to form a rectangular shape. Square windows 36 and 37 are formed on the lower sides of the side walls 32 and 33 along the longitudinal direction of the basket 31 as communication holes for improving the flow of the processing liquid and air. A thin plate 3 to be accommodated on the lower side
In order to prevent 8 from falling off, there are formed bases 39 and 40 that are bent inward to reduce the diameter. In addition, each side wall 3
Reference numerals 2 and 33 denote a large number of vertically elongated slits 4 as communication holes for improving the flow of the processing liquid and air.
1, 42 are provided at predetermined intervals along the longitudinal direction of the basket 31, and the thin plates 38 are aligned in parallel and spaced at a constant pitch on the side wall surface between the slits 41, 42. As a space holding member, a large number of bar-shaped projections 4
3, 44 project inwardly facing each other.

A plurality of the rod-shaped projections 43 and 44 are arranged in a scattered state at intervals along the insertion direction of the thin plate 38 to form a set of rod-shaped projections, and the rod-shaped projections are in the basket 31. The insertion spaces 45, 46 of the thin plate 38 are formed in cooperation with another rod-shaped projection group adjacent to each other at a constant pitch in the longitudinal direction. The rod-shaped protrusions 43 and 44 can take various shapes and arrangements. For example, the thin plate 3 has a cylindrical shape in which the diameters of the base end portion and the tip end portion are constant, and the cross-section has an outer surface formed in an arc shape along the insertion spaces 45 and 46 that contact the surface of the thin plate 38.
The contact area is reduced so that the engagement with 8 becomes a point contact state, thereby improving the flow of the processing liquid and air. Also, in order to improve this further, the rod-shaped projection 4
It is more preferable that the cross sections of 3, 44 are circular or vertically elliptical, and are formed in a cylindrical shape with the diameter gradually decreasing on the tip side. Further, the rod-shaped projection group may be constituted by rod-shaped projections of the same shape in which the diameter on the base side is constant and the heights are equal. However, it is possible to further improve the flow of the processing liquid and air and to insert or position the thin plate. In order to improve the accuracy, the shape and arrangement of the rod-shaped projections forming the rod-shaped projection group can be set arbitrarily. For example, as shown in FIG. 5, the bar-shaped projections 43a, 44a located at the insertion side inlet of the thin plate are formed to have the highest height, and the bar-shaped projections 43b, 4a are moved toward the bottom side.
It is desirable that the heights of 3c and 43d and the rod-shaped projections 44b, 44c and 44d be sequentially lowered. As another example, as shown in FIG. 6, the rod-shaped projections 43a and 44a located at the insertion side inlet of the thin plate are formed to have the smallest diameter S1 on the base side and the highest height H1 and move to the bottom side. Accordingly, the diameter S on the base side of each rod-shaped protrusion 43b, 43c, 43d and each rod-shaped protrusion 44b, 44c, 44d
2, S3, S4 are increased successively and heights H2, H3, H
It is most desirable to form 4 gradually lower. When the rod-shaped projections having different heights H and diameters S are used as in this case, the spacing W1 on the base side of adjacent rod-shaped projections having a constant pitch P at the insertion side inlet of the thin plate is wide and the opening angle is large. Since A1 is gentle and the height H1 is high, it is easy to insert the thin plate 38, and the space W is narrowed on the bottom side and the opening angle A is steep and the height H is low, so that it is stored. Since the thin plate 38 is stably held and has a small contact area, the fluidity of the processing liquid and air is further improved, which is extremely effective. Although not shown, the diameter of the rod-shaped projection located at the inlet of the thin plate on the base side is formed to be the smallest, and the diameter of the base side is gradually increased as it moves to the bottom side. It can also be constituted by a certain rod-shaped projection.

Further, the bar-shaped projections 4 of each adjacent bar-shaped projection group
It is desirable to arrange the three or rod-shaped projections 44 in a staggered manner by arranging them in a staggered position. As a result, the insertability of the thin plate 38 can be reduced even if the number of rod-shaped projections forming the rod-shaped projection group is reduced to half of that in the conventional array in which the thin plate 38 inserted in the same array is held at the same position from the front and back. Also, the consistency after insertion is not deteriorated, and the contact area with the thin plate 38 is reduced, so that the flow of the processing liquid, the liquid running out, or the flow of dry air can be improved. Further, in order to improve the insertability of the thin plate 38 and the consistency after insertion,
The arrangement of the rod-shaped projection groups on the side wall 33 side with respect to the rod-shaped projection groups on the side wall 32 side may be arranged so as to face each other in a zigzag manner at positions that are alternately displaced as shown in FIG. As a result, compared with the case of the conventional arrangement in which both ends of the thin plates 38 inserted in the same arrangement are held at the same height position, the restraint force of the spacing member on the thin plates 38 is reduced and slight swinging occurs. It becomes possible to improve the flow of the processing liquid, the liquid running out, and the circulation of dry air.

On the side walls 32 and 33 on the inlet side into which the thin plate 38 is inserted, rod-shaped protrusions 47 and 48 similar to the rod-shaped protrusions 43 and 44 are juxtaposed to form guide spaces 49 and 50, respectively. , The insertion spaces 4 in which the rod-shaped projection groups form the thin plates 38 inserted through the guide spaces 49, 50.
I am trying to guide you to 5,46. It should be noted that instead of the rod-shaped protrusions 47 and 48, short partition walls are arranged in parallel to form each guide space, or a rod-shaped protrusion group formed by the rod-shaped protrusions 43 and 44 arranged in a staggered manner as described above is used. Thin plate 3
There is also a mode in which the side walls 32, 33 into which 8 are inserted are extended and arranged to the inlet side. As mentioned above, each insertion space 4
Each of the thin plates 38 inserted in 5, 5 has the base parts 39, 4
An arcuate surface is placed on the inclined surface of 0 in a locked state, and triangular engaging projections 51, 52 are formed on the base portions 39, 40 from the inclined surface.
Is projected. The locking projections 51 and 52 are arranged in parallel along the longitudinal direction of the basket 31 at the same intervals as the rod-shaped projections 43 and 44, and the thin plates 3 are provided between the adjacent locking projections.
Insertion grooves 53 and 54 for inserting 8 are formed. The rod-shaped projections 43, 44 are replaced with the locking projections 51, 52.
There is also a mode in which rod-like projections similar to the above are projected in parallel from the inclined surfaces of the base portions 39 and 40 to form an insertion space into which each thin plate 38 is inserted. Further, if necessary, the basket 31 has a small-diameter projection 55 and a small-diameter hole 56 for positioning at the time of transferring the thin plate, and a gripping cutter with which the gripping tool is engaged, as in the case of the conventional example described above. Notches 57, 58 and engaging notches 59, 60 with which the conveyor feed mechanism is engaged are provided.

A large number of thin plates 38 are inserted into the insertion spaces 45, 46 and the insertion grooves 53, 54 through the guide spaces 49, 50 and are accommodated in the basket 31 in an aligned state in the basket 31 having the above structure. Is a space holding member formed by the rod-shaped projections 43, 44 having an arcuate surface on the side of the insertion spaces 45, 46, stably holds the thin plates 38, and performs uniform cleaning, etching, centrifugal drying, or the like. Contribute to.

[0018]

In the thin plate processing basket according to the first aspect of the present invention, the rod-shaped projections formed by the rod-shaped projections whose outer surfaces are arcuately arranged in a scattered state are in point contact on both sides of the inserted thin plate. Since the gap is maintained by being supported by the treatment liquid, the stagnation phenomenon of the treatment liquid and the generation of bubbles are reduced compared to the conventional technique in which the continuous or intermittent flat ribs are provided to keep the gap. The structure is such that the fluidity of the liquid can be improved, the liquid can be drained well after the treatment, and uniform treatment can be obtained. Further, by using a rod-shaped projection, it is possible to arbitrarily configure the shape and arrangement so as to obtain a desired insertion space that is most suitable for etching, cleaning, and drying of the stored thin plate. Compared with this, it becomes very easy, and the spacing member formed by the rod-shaped projections can be integrally formed when the basket is formed.

In the thin plate processing basket according to the second aspect of the present invention, the rod-shaped projection is formed into a cylindrical shape having a circular cross section or a vertically elongated elliptical shape, and the tip side is gradually reduced in diameter. Since the contact area with the thin plate is further reduced while ensuring a sufficient space retention function, the stagnation phenomenon of the treatment liquid and the generation of bubbles can be further reduced, and the flow of the treatment liquid can be improved, and after treatment The liquid is well drained and a uniform treatment can be obtained.

In the basket for thin plate processing according to claim 3 of the present invention, the bar-shaped projection located at the inlet side of the thin plate is formed to have the highest height and to be gradually lowered in height toward the bottom side. At the inlet of the insertion side, the thin plate can be easily inserted, and at the bottom side where the stagnation phenomenon and bubbles of the treatment liquid are likely to occur, the flow of the treatment liquid and the drainage of the treatment liquid can be further improved.

In the basket for thin plate processing according to claim 4 of the present invention, the rod-shaped projection located at the inlet side of the thin plate has the smallest diameter on the base side, and the diameter on the base side increases in sequence as it moves to the bottom side. Since it is formed in a thin plate, the contact area with the thin plate is further reduced, the fluidity of the processing liquid is improved, and a more uniform processing performance can be obtained for the thin plate.

In the basket for thin plate processing according to claim 5 of the present invention, since the rod-shaped projections are arranged such that the protruding positions of the adjacent rod-shaped projections on the same side wall side and adjacent to each other with the slit therebetween are arranged alternately, There is no such situation as in the prior art in which the flat plate-like ribs are simultaneously contacted and restrained from both front and back sides, and the restraint is relieved and the thin plate can have a swinging play, which allows the processing liquid to flow. The property is further improved, and more uniform processing performance can be obtained.

In the thin plate processing basket according to the sixth aspect of the present invention, since the rod-shaped projections are arranged such that the protruding positions of the rod-shaped projections facing each other between the opposing side walls are arranged alternately, the inserted thin plates face each other. Unlike the conventional technology in which symmetrical positions are simultaneously contacted and constrained by the flat plate-shaped ribs, the constraint is relieved and the thin plate can have a swinging play so that the fluidity of the processing liquid is increased. It becomes even better and more uniform processing performance can be obtained.

In the thin plate processing basket according to claim 7 of the present invention, a guide member having rod-shaped projections or partition plates arranged in parallel is provided at the insertion side inlet of the thin plate, and each thin plate is inserted into the insertion space formed by the rod-shaped projection group. Since the guide space for guiding is formed, the rod-shaped projections are formed so that strict restraint locking is performed at the inlet side of the thin plate and gentle restraining locking is performed at the bottom side so that the thin plate has swinging play. Since the width pitch of the group storage grooves can be set, this guide member facilitates the insertion of the thin plates and maintains the fluidity of the processing liquid while maintaining good alignment and a necessary spacing holding function. Good and more uniform processing performance can be obtained for thin plates.

[Brief description of drawings]

FIG. 1 is an overall perspective view of a thin plate processing basket according to an embodiment of the present invention.

2 is a II of FIG. 1 showing a part of the basket omitted;
-A longitudinal sectional view taken along the line II.

FIG. 3 is a vertical cross-sectional view of the basket taken along the line III-III in FIG. 1.

FIG. 4 is a partial cross-sectional view of the basket.

FIG. 5 is a vertical sectional view of a basket according to another embodiment.

FIG. 6 is a partial cross-sectional view of FIG. 5 in which the rod-shaped projection of the basket is further improved.

FIG. 7 is an overall perspective view of a thin plate processing basket according to a conventional example.

FIG. 8 is a VI of FIG. 7 in which a part of the basket is omitted.
FIG. 11 is a vertical cross-sectional view taken along the line II-VIII.

9 is a longitudinal sectional view of the basket taken along line IX-IX in FIG. 7.

FIG. 10 is a partial cross-sectional view of the basket.

[Explanation of symbols]

 31 basket 32,33 side wall 34,35 end wall 36,37 window hole 38 thin plate 39,40 stand 41,42 slit 43,44,47,48 rod-shaped projection 45,46 insertion space 49,50 guide space 51,52 Stop projection piece 53, 54 Insertion groove

Claims (7)

[Scope of utility model registration request] 1. A rectangular container which accommodates a large number of thin plates and which is opened vertically and has a plurality of vertically elongated slits for communicating the inside and outside of the container with both side walls parallel to each other along the longitudinal direction of the container. Are provided at predetermined intervals, and the inner surface of each of the vertically long side walls formed between the slits guides the insertion of the thin plate and engages both end portions of the inserted thin plate to form the thin plate. A space holding member for spacing in parallel alignment is provided so as to project toward the other side wall facing each other, and a thin plate inserted between the space holding members is mounted under the both side walls. The base member is provided, and the spacing member is formed by a group of rod-shaped projections composed of a large number of rod-shaped projections arranged in a scattered state along both sides of the slit. The outer surface that contacts the thin plate is formed in an arc shape Sheet metal processing for Basuketsuto. 2. The basket for thin plate processing according to claim 1, wherein the rod-shaped projection is formed in a columnar shape having a circular cross section or a vertically elongated elliptical shape, and the diameter of the tip side gradually decreases. 3. The bar-shaped projection group is composed of bar-shaped projections having different heights, and the bar-shaped projection located at the inlet side of the thin plate is formed to have the highest height, and the bar-shaped projections are sequentially moved to the bottom side. The basket for thin plate processing according to claim (1) or (2), which is formed to have a low height. 4. The rod-shaped projection group is composed of rod-shaped projections having different diameters, and the rod-shaped projection located at the inlet side of the thin plate is formed to have the smallest diameter on the base side and moves toward the bottom side. The basket for thin plate processing according to any one of claims (1) to (3), wherein the basket is formed so that the diameter on the base side is increased in order. 5. The rod-shaped projection group according to claim 1, wherein the protruding positions of adjacent rod-shaped projections that are adjacent to each other on the same side wall with the slit therebetween are arranged alternately. A basket for thin plate processing. 6. The thin plate processing according to claim 1, wherein in the rod-shaped projection group, the protruding positions of the rod-shaped projections facing each other between the opposite side walls are arranged alternately. Basket. 7. A guide member for guiding each thin plate to an insertion space formed by the rod-shaped projection group is provided at an inlet side of the thin plate, and the guide member has the same pitch between the slits as the rod-shaped projection group. The thin plate processing basket according to any one of claims (1) to (6), which is formed by rod-shaped projections or partition plates arranged in parallel.