JPH0451483Y2 - - Google Patents

Description

[Detailed explanation of the idea] [Industrial application field]

This invention relates to a cleaning jig, and more specifically to a cleaning jig that is convenient to handle and used for cleaning transparent substrates for photomask blanks, photomask blanks, photomasks, glass wafers, semiconductor wafers, and the like.

[Conventional technology]

Conventionally, glass wafers and plate-like objects, typically semiconductor wafers, as described above, are always cleaned with pure water or the like in order to improve the surface condition before and after various processing or treatments. For cleaning, a cleaning jig as shown in FIG. 1 or 2 has conventionally been used to accommodate plate-like objects of various sizes. The one in FIG. 1 is an integrally molded product made by injection molding using a corrosion-resistant plastic such as fluororesin.
In the figure, reference numeral 1 denotes a cylindrical main body, and an appropriate number of V-shaped grooves 2 are formed at predetermined intervals on the inner surfaces of opposing side walls. Reference numeral 3 denotes a support rod which spans the bottom of the opening and has a corrugated groove 4 formed on its upper surface corresponding to the groove 2 described above. In this example, the plate-like object 10 is inserted between the grooves 2 and supported by the support rod 3. FIG. 2 shows a cleaning jig made of corrosion-resistant metal, in which the cylindrical body 5 has horizontally elongated sliding windows 6 formed in the upper part of the opposing side walls, and vertically elongated sliding windows 6' formed at predetermined intervals in the lower part. There is. Reference numeral 7 designates three rod-shaped middle bars whose ends are fitted into each of the slide windows 6, 6', and which are removably fixed to the cylindrical body 5 with nuts 9. This middle bar 7 is a horizontally long sliding window 6
A pair are attached to the left and right sides of the window, and one is attached at the appropriate position of the vertically elongated sliding window 6' at the bottom. Note that a wave-shaped groove 8 is formed in the middle crosspiece 7 only in one direction on the side surface. The three middle beams 7 are sliding windows 6, 6', respectively.
The inside of the plate-like object 10 is slid and the both sides and bottom of the plate-like object 10 are pressed down for storage.

[Problem that the invention attempts to solve]

However, in the former case, only the plate-like objects 10 of a predetermined size can be stored, so in the process of cleaning many types of plate-like objects 10, a cleaning jig is required for each size of the plate-like objects 10. This will cause an increase in costs. In the latter case, since the wave-shaped groove 8 is formed only in one direction on the side surface of the middle crosspiece 7, the groove 8 is formed on the plate-like object 1.
0, and it takes time and effort to move and fix the middle crosspiece 7 according to the size of the plate-like object 10.

[Means to solve the problem]

Therefore, the cleaning jig of this invention includes a cylindrical body, a notch formed in each of the upper ends of a pair of opposing side walls of the cylindrical body, and a rod-shaped body that is removably attached to the notch. A pair of middle crosspieces, the pair of middle crosspieces, when storing a plate-like object,
It consists of a reference middle crosspiece that serves as a reference for the storage position, and a variable middle crosspiece whose attachment location can be changed according to the size of the plate-shaped object, and the notch is for a pair of reference middle crosspieces to which the reference middle crosspiece is attached. a notch and a plurality of pairs of variable middle crosspiece notches for attaching the variable middle crosspiece, and the notch has an opening side portion and a bottom side portion, and one pair of the notches has a plurality of pairs of variable middle crosspiece notches to which the variable middle crosspiece is attached, and the notch has an opening side portion and a bottom side portion. The opening side portions of each of the reference middle crosspiece notch and the variable middle crosspiece notch are opposed to each other from disposed on the inside in the longitudinal direction of the side wall with respect to the bottom side portion of each of the cutouts, and attaching the reference center crosspiece to the reference center crosspiece notch and attaching the reference center crosspiece to the pair of the variable center crosspiece notches; The variable middle crosspiece is attached, and a plate-like object is housed between the reference middle crosspiece and the variable middle crosspiece so as to be orthogonal to the main surface thereof, and movement of the plate-like object in the width direction is restricted. It is characterized by:

【Example】

An embodiment of the cleaning jig according to this invention will be described below with reference to the drawings. In FIGS. 3 and 4, 11 is a cylindrical body with a rectangular cross section. At the upper ends of the pair of opposing side walls 12 and 13 (in this example: length direction) of the cylindrical body 11, two middle bars 1 are provided in the length direction of the side walls 12 and 13.
A pair of notches 16, 17, 18, and 19 are respectively formed into which the notches 4 and 15 are inserted and attached. Note that the notches 16 and 17 are part of a plurality of pairs of notch groups 35 and 36 as will be described later, and are formed by plate-shaped objects of different sizes.
36, and since the variable middle crosspiece 14 is attached, it is a notch for a variable middle crosspiece. On the other hand, the notches 18 and 19 are always used for storing plate-like objects even if the sizes of the plate-like objects are different, and since the reference middle crosspiece 15 is attached, they are notches for the reference middle crosspiece. be. Therefore, the middle rungs 15 attached to the standard middle rungs 18 and 19 are standard middle rungs, while the middle rungs 14 attached to the variable middle rungs 16 and 17 are variable middle rungs. . Further, 20 and 21 are located between each pair of variable middle crosspiece notches 16 and 17 and reference middle crosspiece notches 18 and 19 of the corresponding side walls 12 and 13 of the cylindrical main body 11, and are located at the lower part thereof. A bottom middle crosspiece 22 is fitted into the pair of windows 20 and 21. Each pair of notches 16, 17, 18, 19 into which the two middle bars 14, 15 are inserted and attached have opening side portions 23, 24, 25, 26 connected to the bottom of the middle bars 14, 15, respectively. Bottom side part 2 for attaching and holding 15
7, 28, 29, 30, and the lengthwise interval between the opening side parts 23, 24 and 25, 26 is narrower than the lengthwise interval between the bottom side parts 27, 28 and 29, 30. It is set up like this. In other words, the opening side portions 2 of the standard middle crosspiece notches 18 and 19 and the variable middle crosspiece notches 16 and 17
5, 26 and 23, 24 are standard middle crosspiece notches 1
8, 19 and the bottom side portions 29, 30 and 27, 28 of the variable middle crosspiece notches 16, 17, respectively, are arranged inside the side walls 12, 13 in the longitudinal direction. Particularly in this embodiment, each pair of notches 16, 17, 18, 19 are linearly inclined inward toward the top of the side walls 12, 13 and closer to each other. On the other hand, a pair of windows 20,2
1 is a large diameter portion 31, 32 larger than the outer diameter of the middle crosspiece 22;
and small diameter portions 33 and 34 smaller than the outer diameter of the middle crosspiece 22. A pair of notches 16, 17, 18, 19 of the cylindrical main body 11 formed in this way
and middle bars 14, 15, 2 to a pair of windows 20, 21
2 is installed. Furthermore, in this embodiment, one pair of notches 16 and 17 are formed as a plurality of pairs of notches 35 and 36 formed in parallel with each other. Therefore, by changing the mounting position of the middle crosspiece 14, various plate-like objects 10 of different sizes can be stored. Moreover, the middle crosspiece 22 may be fixed without using the pair of windows 20 and 21 formed at the lower part of the side walls 12 and 13. The middle beams 14, 15, and 22 are made of rod-shaped rotating bodies, and have a plurality of circumferential grooves 37 each having a V-shaped cross section arranged in parallel in the axial direction, as shown in FIG. This middle crosspiece 14,
Guide grooves 38 and 3 are provided near the outer periphery of both ends of the guide grooves 15 and 22.
9 is drilled. When attaching the middle crosspieces 14 and 15 to the cylindrical body 11, each pair of notches 16 and 1
7, 18, 19 opening side portions 23, 24, 25,
26, guide grooves 38, 39 can be inserted into the bottom side portions 27, 28, 29, 30. Regarding the middle crosspiece 22, the middle crosspiece 22 is inserted into the large diameter parts 31, 32 of the pair of windows 20, 21.
2, and insert the middle crosspiece 22 into the small diameter parts 33 and 34.
All you have to do is drop the guide grooves 38 and 39. Since the cleaning jig of this invention is constructed as described above, the middle crosspieces 14 and 1 can be attached to the cylindrical body 11 with one touch.
5 can be installed. In addition, as shown in FIG. 7, when a plurality of plate-shaped objects 10 are inserted into the respective circumferential grooves 37 so as to be perpendicular to the main surfaces of the middle crosspieces 14, 15, and 22, the plate Both end faces in the width direction of the shaped object 10 are provided with a pair of notches 16 and 1, respectively.
7, 18, 19 bottom side portions 27, 28, 29,
The opening side portions 23, 2 of the pair of notches 16, 17, 18, 19 are held by the middle crosspieces 14, 15 attached to and across the openings 14, 15, respectively.
4, 25, 26 are bottom side parts 27, 28, 29,
30, they are closer to the other middle crosspieces 15 and 14, respectively. For this reason, even if the cleaning jig is shaken up and down when cleaning the plate-shaped object 10, the middle bars 14 and 15 will not come out from the opening side portions 23, 24, 25, and 26, that is, the notch 1
It is possible to prevent the inner crosspieces 14, 15 from coming off from the 6, 17, 18, 19, and to securely hold the plate-shaped object 10. Also, when pulling out the plate-like object 10, the middle crosspieces 14, 1
5 is attached to the plate-like object 10, and the bottom side portions 27, 28,
There is no getting out of 29 or 30. Furthermore, since the middle bars 14, 15 in the bottom side portions 27, 28, 29, 30 restrict movement in the lateral direction (width direction of the plate-like object 10), the middle bars 14, 15 are The gap between the two does not widen, and accidents such as the plate-like object 10 falling can be reliably prevented.

[Modified example]

FIG. 5 shows another embodiment of the cleaning jig of this invention, in which two pairs of notches 16 facing each other are formed in the length direction of the side walls 12. There is. In addition, 35 is a plurality of notch groups formed in parallel with each other, and 20 is a window provided on the left and right and in the center corresponding to each pair of notches 16. According to this example, a plurality of two rows of plate-like objects 10 can be stored within the length of the side wall 12. FIG. 6 shows yet another embodiment of the cleaning jig of this invention. In this example, the cylindrical body 11
Opening side portions 42 and 43 of notches 40 and 41 are formed perpendicularly to the upper end of the side wall 12 of the opening side portion 4.
Bend outward at a nearly right angle from below 2,43,
Bottom side portions 44, 45 that hold the middle crosspieces 14, 15
is formed. Each of the embodiments shown in FIGS. 5 and 6 also provides the same effects as the embodiments shown in FIGS. 3 and 4.

[Effect of the idea]

As explained above, according to this invention, two or more pairs of notches for attaching one of the middle bars are formed at the upper ends of the opposing side walls of the cylindrical body, facing each other from the opening side to the bottom side. Therefore, it is possible to store plate-like objects of a plurality of sizes by changing the mounting position of one of the middle crosspieces very easily. In addition, one of the middle crosspieces attached to the bottom side portions of the pair of notches holds one end surface of the plate-like object, and the opening side portions of the notches are compared with the bottom side portions. Because it is close to the other middle crosspiece side,
When shaking the cleaning jig vertically during cleaning, or when removing a plate-shaped object after cleaning, the inner crosspiece can be prevented from falling out of the notch, and as a result, the plate-shaped object can be removed easily. Not only can it be held securely, but it is also extremely easy to handle.

[Brief explanation of drawings]

1 and 2 are perspective views showing an example of a conventional cleaning jig, FIG. 3 is a perspective view showing an embodiment of the cleaning jig of this invention, and FIG. 4 is a perspective view showing an example of a conventional cleaning jig. FIG. 5 is a side view of another embodiment of the cleaning jig of this invention, FIG. 6 is a side view of yet another embodiment, and FIG. 7 is a side view of the cleaning jig of this invention. It is a cross-sectional view showing a state where an object is inserted into the middle crosspiece. 10... Plate-shaped object, 11... Cylindrical body, 12,1
3...Side wall, 14...Variable middle bar, 15...Standard middle bar, 22...Bottom middle bar, 16, 17, 41...Notch for variable middle bar, 18, 19, 40...Standard middle bar Notch, 20, 21... Window, 23, 24, 2
5, 26, 42, 43... Opening side portion, 27, 2
8, 29, 30, 44, 45...Bottom side portion.

Claims (1)

[Claims for Utility Model Registration] 1. A cylindrical body, a notch formed at the upper end of a pair of opposing side walls of the cylindrical body, and a pair of rod-shaped notches removably attached to the notch. and a bottom middle crosspiece that supports the bottom of the plate-like object in cooperation with the pair of middle crosspieces, and when the pair of middle crosspieces are storing the plate-like object,
It consists of a reference middle crosspiece that serves as a reference for the storage position, and a variable middle crosspiece whose attachment location can be changed according to the size of the plate-shaped object, and the notch is for a pair of reference middle crosspieces to which the reference middle crosspiece is attached. a notch and a plurality of pairs of variable middle crosspiece notches for attaching the variable middle crosspiece, and the notch has an opening side portion and a bottom side portion, and one pair of the notches has a plurality of pairs of variable middle crosspiece notches for attaching the variable middle crosspiece, and the one pair of the notches has an opening side portion and a bottom side portion. and the opening side portions of each of the standard middle crosspiece notch and the variable middle crosspiece notch,
The reference center crosspiece notch and the variable center crosspiece cutout are arranged inside in the longitudinal direction of the side wall with respect to the bottom side portions of each, and the reference center crosspiece is placed in the reference center crosspiece notch. At the same time, the variable middle crosspiece is attached to the pair of the variable middle crosspiece notches, and a plate-shaped object is stored between the reference middle crosspiece and the variable middle crosspiece so as to be orthogonal to the main surface thereof, A cleaning jig, characterized in that the movement of the plate-like object in the width direction is restricted. 2. The notch for the standard middle crosspiece and/or the variable middle crosspiece is
The cleaning jig according to claim 1, which is formed by slanting the opposing side walls of the cylindrical body from the opening side to the bottom side. 3 The notch for the standard middle crosspiece and/or the variable middle crosspiece is
A cleaning jig according to claim 1, wherein the opposing side walls of the cylindrical body are curved in an L-shape from the opening side to the bottom side.