JPH0648856Y2 - ウエハキャリア載置台 - Google Patents
ウエハキャリア載置台Info
- Publication number
- JPH0648856Y2 JPH0648856Y2 JP2797389U JP2797389U JPH0648856Y2 JP H0648856 Y2 JPH0648856 Y2 JP H0648856Y2 JP 2797389 U JP2797389 U JP 2797389U JP 2797389 U JP2797389 U JP 2797389U JP H0648856 Y2 JPH0648856 Y2 JP H0648856Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer carrier
- main body
- mounting table
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000969 carrier Substances 0.000 claims description 15
- 238000005192 partition Methods 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 description 88
- 239000010453 quartz Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 125000002066 L-histidyl group Chemical group [H]N1C([H])=NC(C([H])([H])[C@](C(=O)[*])([H])N([H])[H])=C1[H] 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2797389U JPH0648856Y2 (ja) | 1989-03-09 | 1989-03-09 | ウエハキャリア載置台 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2797389U JPH0648856Y2 (ja) | 1989-03-09 | 1989-03-09 | ウエハキャリア載置台 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02118934U JPH02118934U (cs) | 1990-09-25 |
| JPH0648856Y2 true JPH0648856Y2 (ja) | 1994-12-12 |
Family
ID=31250940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2797389U Expired - Fee Related JPH0648856Y2 (ja) | 1989-03-09 | 1989-03-09 | ウエハキャリア載置台 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648856Y2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE60123366T2 (de) * | 2000-06-15 | 2007-08-23 | Koninklijke Philips Electronics N.V. | Halter für eine substratkassette und vorrichtung ausgerüstet mit diesem halter |
-
1989
- 1989-03-09 JP JP2797389U patent/JPH0648856Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02118934U (cs) | 1990-09-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |