JPH0648833Y2 - 半導体工業での有機溶剤蒸気の検出装置 - Google Patents

半導体工業での有機溶剤蒸気の検出装置

Info

Publication number
JPH0648833Y2
JPH0648833Y2 JP3257787U JP3257787U JPH0648833Y2 JP H0648833 Y2 JPH0648833 Y2 JP H0648833Y2 JP 3257787 U JP3257787 U JP 3257787U JP 3257787 U JP3257787 U JP 3257787U JP H0648833 Y2 JPH0648833 Y2 JP H0648833Y2
Authority
JP
Japan
Prior art keywords
signal
concentration
waveform
detection
sensor output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3257787U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63140629U (enExample
Inventor
利浩 宇高
克之 田中
進 安永
秀夫 松崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuyama Corp
Original Assignee
Tokuyama Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuyama Corp filed Critical Tokuyama Corp
Priority to JP3257787U priority Critical patent/JPH0648833Y2/ja
Publication of JPS63140629U publication Critical patent/JPS63140629U/ja
Application granted granted Critical
Publication of JPH0648833Y2 publication Critical patent/JPH0648833Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3257787U 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置 Expired - Lifetime JPH0648833Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3257787U JPH0648833Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3257787U JPH0648833Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Publications (2)

Publication Number Publication Date
JPS63140629U JPS63140629U (enExample) 1988-09-16
JPH0648833Y2 true JPH0648833Y2 (ja) 1994-12-12

Family

ID=30839388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3257787U Expired - Lifetime JPH0648833Y2 (ja) 1987-03-05 1987-03-05 半導体工業での有機溶剤蒸気の検出装置

Country Status (1)

Country Link
JP (1) JPH0648833Y2 (enExample)

Also Published As

Publication number Publication date
JPS63140629U (enExample) 1988-09-16

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