JPH0648707A - Ozone-generating device - Google Patents

Abstract

PURPOSE:To obtain a highly pure and highly concentrated ozonized gas and achieve the elongation of the life and the enhancement of the reliability of a discharge electrode by changing a silent discharge region into a structure never using a metal material and an organic substance. CONSTITUTION:An outer cylinder 2 and an inner cylinder 3 both comprising a quartz material or glass material are coaxially disposed on the inside of a can 1 in a state penetrated in the can, the can being formed so as to enable the circulation of cooling water 4. A flow path 5 for a raw material gas is formed between the outer cylinder 2 and the inner cylinder 3. A stainless steel spiral spring 7 is adhered to the inner peripheral surface of the inner cylinder 3 through an electroconductive material 6 to form a discharge electrode A. An electrode 8 is disposed on the outer peripheral surface of the outer cylinder 2. Since electrons are directly not collided with a metal surface in the device, the generated ozonized gas is not contaminated with foreign matters such as metal fine particles, and the highly pure and highly concentrated ozone can be generated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone generator for generating ozone by a silent discharge using air or oxygen as a raw material.

[0002]

2. Description of the Related Art Ozone has been used as an oxidant for a long time because it has a strong oxidizing power, and it is also widely used for sterilizing, deodorizing and decolorizing various kinds of water. It is also widely used for.

[0003] Conventionally, as a method for generating ozone, there are a method of irradiating oxygen with ultraviolet energy, a method of electrolyzing water, and the like. However, in order to continuously generate a large amount of ozone for industrial use, it is usually used. The method using silent discharge is often used.

Therefore, the ozone generator used for fine chemicals is required to have high purity and high concentration of ozonized oxygen. Therefore, conventional ozone generators for fine chemicals try to avoid electrons from directly colliding with the metal surface by lining a dielectric such as glass or ceramics inside a stainless steel inner cylinder forming the outer circumference of the ozone generator. However, since the coefficient of thermal expansion is different between stainless steel and the dielectric material lined on the surface, cracks occur in the dielectric material, a short circuit occurs from the cracked part, and current flows. Here, the stainless inner cylinder) is also destroyed. Therefore, the intended purpose of preventing the electrons from directly colliding with the metal surface is not achieved, and the desired high purity and high concentration of ozonized oxygen cannot be obtained at all.

Therefore, an outer cylinder and an inner cylinder made of a quartz material or a glass material, which is a dielectric, are concentrically arranged inside the circular can body formed so that the cooling water can be circulated. A discharge electrode is formed by applying a conductive resin to the inner peripheral surface of the inner cylinder to form a conductive coating between the outer cylinder and the inner cylinder, while forming a flow path for the source gas between the outer cylinder and the inner cylinder. An electrode is similarly provided on the outer peripheral surface of the device, a high-voltage AC power source is connected to the discharge electrode, and ozonized oxygen is obtained while a cooling medium such as air is passed through the inner cylinder.

The above-mentioned conductive film as the discharge electrode is usually formed by applying a conductive resin. However, it is difficult to form a uniform film with this, so that the inside and outside of the film are difficult to form. It is difficult to perform a silent discharge uniformly between the cylinders, and a high concentration of ozone cannot be obtained. Therefore, since the inner cylinder is made of a quartz material or a glass material, it is conceivable to form a conductive metal film by vacuum vapor deposition, sputtering, etc.
Due to work, it is difficult to form a uniform metal film. Therefore,
There is an increasing demand for an ozone generator having a simple and highly reliable discharge electrode.

[0007]

SUMMARY OF THE INVENTION In view of the above-mentioned conventional techniques, the present invention provides a discharge electrode which can obtain a highly pure and highly concentrated ozonized gas, has a simple structure, and can withstand long-term use. It is an object of the present invention to provide the provided ozone generator.

[0008]

The present invention has been made for the purpose of solving the above-mentioned problems, and has a structure in which a can body is formed so that cooling water can be circulated therein. Then, the outer cylinder and the inner cylinder made of quartz or glass are concentrically arranged and a flow path for the raw material gas is formed between the outer cylinder and the inner cylinder, and the inner peripheral surface of the inner cylinder is electrically conductive. A spiral spring made of stainless steel is bonded via a conductive material to provide a discharge electrode, and the electrode is provided on the outer peripheral surface of the outer cylinder.

In the above, usually, a conductive paint or a conductive adhesive is used as the conductive material and is applied to the inner surface of the inner cylinder, but the conductive material is directly applied to the inner surface of the inner cylinder. Alternatively, the inner surface may be formed into a rough surface by a blasting method such as carborundum or abrasive grains, and then the conductive material may be applied, or between the conductive material and the stainless spiral spring. The spiral spring may be pressed against the stainless foil with the stainless foil interposed.

On the other hand, when the ozone generator of the present invention is used for fine chemicals, pure water is often circulated as cooling water. In such a case, the electrode provided on the outer peripheral surface of the outer cylinder is a silver filler. It may be formed by applying a conductive paint using-and an epoxy resin as a binder, or may be formed by metal spraying. Alternatively, it may be formed by bonding an aluminum foil or a stainless steel foil with a conductive adhesive. Is also good.

[0011]

Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a vertical sectional front view of an ozone generator according to an example of the present invention, and FIG.
FIG. 2 is an enlarged cross-sectional view taken along the line aa of FIG. 1. The one shown in the figure is
The outer casing 2 and the inner casing 3 made of a quartz material or a glass material are concentrically arranged by penetrating the inner casing 1 into a circular can body 1, and at the same time, Flow path 4 for cooling water
And forming a conductive coating 6 on the inner peripheral surface of the inner cylinder 3 by forming a conductive gas flow path 5 between the outer cylinder 2 and the inner cylinder 3 respectively. A spiral spring 7 made of stainless steel is adhered to the conductive coating 6 to form the discharge electrode A, while a conductive coating is formed on the outer peripheral surface of the outer cylinder 2 to provide an electrode 8, and the discharge electrode A is provided with a high-voltage AC power supply. Is connected to the inner cylinder 3 while cooling air is passed through the inner cylinder 3 to obtain ozonized oxygen. In the figure, 4a is an inlet of cooling water, 4b is an outlet of the same, 5a is an inlet of raw material gas, and 5b is an outlet of generated ozone.

In the ozone generator of the present invention constructed as described above, the raw material gas is fed from the inlet 5a of the flow path 5 to let the cooling air pass through the inner cylinder 3 while the cooling water is passed through the flow path 4 in the illustrated state. When a high voltage AC power supply is connected to the discharge electrode A, the inner cylinder 3 and the outer cylinder 4 made of a quartz material or a glass material are dielectrics, so that silent discharge occurs in the flow path 5 between the two cylinders. The raw material gas that has been carried out and is sent into the flow path 5 is ozonized. At this time, since the electrons do not directly collide with the metal surface, the generated ozonized gas contains metal fine particles and the like. It is possible to generate high-purity and high-concentration ozone without mixing foreign matter.

Since the discharge electrode A is provided with a stainless steel spiral spring adhered to the inner peripheral surface of the inner cylinder 3 via a conductive material, the spiral spring has a heat dissipation effect when cooling the inner cylinder 3. In addition, since the deterioration and peeling of the electrode due to the oxidizing gas due to the creeping discharge which tends to occur near the end of the electrode can be prevented, the discharge electrode has a long life and high reliability.

[0014]

The present invention is as described above, and according to the ozone generator of the present invention, since no metallic material or organic substance is used in the silent discharge region, unlike the conventional ozone generator, Metals and other fine particles are not emitted by electrons, and the outer peripheral surface of the outer cylinder, which is the heat generating part of the ozone generator, is forcibly cooled from the outside by cooling water and the inner surface of the inner cylinder is cooled. Since it is forcibly cooled with air, the temperature of the inner circumference of the flow path of the raw material gas does not rise excessively, and the heat dissipation effect of the spiral spring is extremely effective, and high-purity and high-concentration ozone is obtained. And the discharge electrode has a long life and high reliability,
In particular, it is suitable as an ozone generator for fine chemicals.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional front view of an ozone generator according to an example of the present invention.

2 is an enlarged cross-sectional view taken along line aa of FIG.

[Explanation of symbols]

 1 can body 2 outer cylinder 3 inner cylinder 4 cooling water flow path 4a cooling water inlet 4b cooling water outlet 5 raw material gas flow path 5a raw material gas inlet 5b raw material gas outlet 6 conductive coating 7 stainless steel spiral spring A discharge electrode 8 electrodes

Claims (4)

[Claims] 1. An outer cylinder made of a quartz material or a glass material and an inner cylinder are concentrically arranged inside the can body formed so that cooling water can be circulated through the can body. A material gas flow path is formed between the outer cylinder and the inner cylinder, and a stainless steel spiral spring is bonded to the inner peripheral surface of the inner cylinder through a conductive material to provide a discharge electrode, and the outer cylinder is provided with an electrode. An ozone generator characterized by being provided. 2. The ozone generator according to claim 1, wherein a stainless steel foil is interposed between a conductive material and a stainless steel spiral spring, and the spiral spring is pressed against the stainless steel foil to form a discharge electrode. 3. The ozone generator according to claim 1, wherein the conductive material is a conductive adhesive. 4. The inner surface of the inner cylinder is formed into a rough surface by a blast method such as carborundum or abrasive grains, and a discharge electrode is provided on the inner surface. Ozone generator.