JPH064758U - Transporter for thin photosensitive materials - Google Patents
Transporter for thin photosensitive materialsInfo
- Publication number
- JPH064758U JPH064758U JP5100592U JP5100592U JPH064758U JP H064758 U JPH064758 U JP H064758U JP 5100592 U JP5100592 U JP 5100592U JP 5100592 U JP5100592 U JP 5100592U JP H064758 U JPH064758 U JP H064758U
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive material
- thin photosensitive
- thin
- carrier
- tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
Abstract
(57)【要約】
【目的】 薄物感光性材料を損傷、汚染することなく高
速で搬送でき、薄物感光性材料を利用した製品の生産性
を向上できる搬送具を提供すること。
【構成】 本考案に係る搬送具13は、所定の剛性を備
えた材料からなり、薄物感光性材料11の縁部1103
に沿って所定の長さ延出する搬送具本体13と、搬送具
本体13と薄物感光性材料11の前記縁部1103とを
脱着可能に結合する結合手段17,17とで構成されて
いる。
(57) [Abstract] [Purpose] To provide a transporting tool capable of transporting a thin photosensitive material at high speed without damaging or contaminating it and improving the productivity of products using the thin photosensitive material. [Construction] The carrying tool 13 according to the present invention is made of a material having a predetermined rigidity, and an edge portion 1103 of the thin photosensitive material 11.
The transport tool main body 13 extends along a predetermined length, and the coupling means 17, 17 that detachably couples the transport tool main body 13 and the edge portion 1103 of the thin photosensitive material 11 to each other.
Description
【0001】[0001]
本考案は薄物感光性材料を搬送する場合等に便利な搬送具に関する。 The present invention relates to a carrying tool which is convenient for carrying a thin photosensitive material.
【0002】[0002]
薄物感光性材料を搬送する場合として、例えば、PWB(Printed Wired Boar d )の製造プロセスを例にとって説明すると、自動化のために自動搬送システム が採用されている。 そして、PWB製造プロセスの中でも、特に、露光工程では、基板に感光性の DFR(Dry Film Resist )がラミネートされて薄物感光性材料となっているた め、その取り扱いの良否が製品の歩留に非常に大きな影響を及ぼす。 即ち、ラミネータから露光装置へ、また、露光装置から現像装置への基板の自 動搬送は、薄物感光性材料である基板を損傷したり汚損したりすることがないよ うに慎重に行なわなければならないが、それと同時に、生産性の向上のためには 搬送の高速化も望まれており、これらを両立させることは従来では極めて困難で あった。 As a case of conveying a thin photosensitive material, for example, a manufacturing process of PWB (Printed Wired Board) will be described as an example, an automatic conveying system is adopted for automation. In the PWB manufacturing process, especially in the exposure step, a photosensitive DFR (Dry Film Resist) is laminated on the substrate to form a thin photosensitive material. Have a huge impact. That is, the automatic transfer of the substrate from the laminator to the exposure device and from the exposure device to the development device must be performed carefully so as not to damage or stain the substrate, which is a thin photosensitive material. At the same time, however, it has been desired to increase the transport speed in order to improve productivity, and it has been extremely difficult to achieve both at the same time.
【0003】 従来の薄物感光性材料の搬送方法の具体例を図4と図5に示した。 図4は、DFRをラミネートした基板1の四隅を、不図示の搬送ユニットに設 けた四つのバキュームパッド3で吸着し、その搬送ユニットを移動させることに よって基板1を搬送するという方法である。 図5は、ラミネータや、露光装置等の処理装置で処理した基板1を一旦ベルト コンベア5のベルト7上に移し、ベルト7の駆動により搬送を行なうという方法 である。Specific examples of a conventional method for transporting a thin photosensitive material are shown in FIGS. 4 and 5. FIG. 4 shows a method in which the four corners of the DFR-laminated substrate 1 are adsorbed by four vacuum pads 3 provided in a transport unit (not shown), and the transport unit is moved to transport the substrate 1. FIG. 5 shows a method in which a substrate 1 processed by a processing device such as a laminator or an exposure device is once transferred onto a belt 7 of a belt conveyor 5 and is conveyed by driving the belt 7.
【0004】[0004]
しかしながら、図4のバキュームパッド方式では、パッド3が基板1に接触す る部分はDFRが損傷や汚染する虞が高いため、その部分から良好な製品を製作 することは期待できない。 However, in the vacuum pad method of FIG. 4, since there is a high possibility that the DFR is damaged or contaminated at the part where the pad 3 contacts the substrate 1, it cannot be expected to manufacture a good product from that part.
【0005】 また、図5のベルトコンベア方式では、処理装置からベルト7へ基板1を移す ために時間がかかる上、ベルトコンベアは本来的に、その走行速度を高めると塵 埃の発生量が急増するという性質があることから、高速搬送させると製品の不良 率が上昇するという問題が生じる。 本考案は前記事情に鑑み案出されたものであって、本考案の目的は、薄物感光 性材料を損傷、汚染することなく高速で搬送でき、薄物感光性材料を利用した製 品の生産性を向上できる搬送具を提供することにある。In addition, in the belt conveyor system of FIG. 5, it takes time to transfer the substrate 1 from the processing device to the belt 7, and the belt conveyor inherently increases the amount of dust generated when the traveling speed is increased. Therefore, there is a problem in that the defective rate of the product increases when it is conveyed at high speed. The present invention has been devised in view of the above circumstances, and an object of the present invention is to enable high-speed transportation without damaging or contaminating a thin photosensitive material, and to improve the productivity of products using the thin photosensitive material. It is to provide a carrier that can improve
【0006】[0006]
前記目的を達成するため本考案に係る搬送具は、所定の剛性を備えた材料から なり、薄物感光性材料の縁部に沿って所定の長さ延出する搬送具本体と、前記搬 送具本体と前記薄物感光性材料の前記縁部とを脱着可能に結合する結合手段とで 構成されていることを特徴とする。 In order to achieve the above-mentioned object, a carrier according to the present invention is made of a material having a predetermined rigidity, and a carrier main body extending a predetermined length along an edge of a thin photosensitive material; and the carrier. The main body and the edge portion of the thin photosensitive material are configured to be detachably coupled to each other.
【0007】[0007]
以下、本考案の実施例について図面を参照して説明する。 図1は搬送具が取着された薄物感光性材料及びスタッカの斜視図を示す。 11は薄物感光性材料、13は搬送具を示し、薄物感光性材料11はPWB用 の基板である。 薄物感光性材料11は二つの縦辺1101と二つの横辺1103とで長方形に 形成されている。 搬送具13は薄物感光性材料11の一方の横辺1103に取着され、搬送具1 3は横辺1103とほぼ同じ長さを有し、薄物感光性材料11の平面性が確保さ れるように、合成樹脂や軽量合金等の所定の剛性を有する部材で形成されている 。 搬送具13は平板部15と、平板部15から突設された二つの脚板部17とで 構成され、適宜治具により二つの脚板部17を開いた状態で薄物感光性材料11 の横辺1103を両脚板部17の間に挿入し、開いた状態を解除すると、弾性に より二つの脚板部17は元の状態に復帰し、薄物感光性材料11の横辺1103 を固定するように構成されている。 従って、この実施例では、平板部15が搬送具本体に相当し、脚板部17が結 合手段に相当している。 Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view of a thin photosensitive material and a stacker to which a carrier is attached. Reference numeral 11 denotes a thin photosensitive material, 13 denotes a carrier, and the thin photosensitive material 11 is a substrate for PWB. The thin photosensitive material 11 is formed in a rectangular shape with two vertical sides 1101 and two horizontal sides 1103. The carrier 13 is attached to one lateral side 1103 of the thin photosensitive material 11, and the carrier 13 has substantially the same length as the lateral side 1103, so that the flatness of the thin photosensitive material 11 is ensured. In addition, it is formed of a member having a predetermined rigidity such as a synthetic resin or a lightweight alloy. The transport tool 13 is composed of a flat plate portion 15 and two leg plate portions 17 protruding from the flat plate portion 15, and the lateral side 1103 of the thin photosensitive material 11 with the two leg plate portions 17 opened by an appropriate jig. Is inserted between both leg plate parts 17, and when the open state is released, the two leg plate parts 17 return to their original state by elasticity, and the lateral side 1103 of the thin photosensitive material 11 is fixed. ing. Therefore, in this embodiment, the flat plate portion 15 corresponds to the carrier body and the leg plate portion 17 corresponds to the connecting means.
【0008】 本実施例によれば、薄物感光性材料11に搬送具13を取着したので、搬送具 13を握持したり係止させる種々の構造の搬送装置により、ラミネータから露光 装置へ、また、露光装置から現像装置へDFRの損傷、汚染を防止しつつ薄物感 光性材料11の自動搬送を高速で行なうことが可能となる。According to the present embodiment, since the carrier 13 is attached to the thin photosensitive material 11, the carrier 13 having various structures for gripping and locking the carrier 13 changes from the laminator to the exposure device. In addition, it is possible to automatically convey the thin photosensitive material 11 at high speed while preventing damage and contamination of the DFR from the exposure device to the developing device.
【0009】 搬送具13を利用した搬送例について説明すると、図1において19は薄物感 光性材料用のスタッカを示し、薄物感光性材料11に搬送具13を取着すると、 このようなスタッカ19により5枚の薄物感光性材料11を一度に搬送できる。 詳細に説明すると、スタッカ19は薄物感光性材料11の縦辺1101と横辺 1103よりも大きい縦辺1901と横辺1903を備え、直方体に形成され、 スタッカ19にはその内部の仕切板により五つの遮光室が形成されている。 スタッカ19の上面で各遮光室上には、前記二つの脚板部17が挿入され且つ 平板部15が係止されるスリット1905が形成されている。An example of conveyance using the conveyance tool 13 will be described. In FIG. 1, reference numeral 19 denotes a stacker for a thin photosensitive material. When the conveyance tool 13 is attached to the thin photosensitive material 11, such a stacker 19 is used. Thus, the five thin photosensitive materials 11 can be conveyed at one time. More specifically, the stacker 19 has a vertical side 1901 and a horizontal side 1903 that are larger than the vertical side 1101 and the horizontal side 1103 of the thin photosensitive material 11, and is formed in a rectangular parallelepiped shape. Two light-shielding rooms are formed. A slit 1905 into which the two leg plate portions 17 are inserted and the flat plate portion 15 is locked is formed on each light-shielding chamber on the upper surface of the stacker 19.
【0010】 薄物感光性材料11を搬送するに際しては、まず、薄物感光性材料11をスリ ット1905から各遮光室に挿入し、二つの脚板部17をスリット1905に挿 入して平板部15をスリット1905の両側に係止させる。これにより薄物感光 性材料11は遮光された状態でスタッカ19に収納される。 そして、スタッカ19自体を適宜搬送手段で搬送することで、薄物感光性材料 11どうしが接触することなく、5枚の薄物感光性材料11が遮光された状態で 一度に搬送される。When the thin photosensitive material 11 is conveyed, first, the thin photosensitive material 11 is inserted from the slit 1905 into each light-shielding chamber, the two leg plate portions 17 are inserted into the slits 1905, and the flat plate portion 15 is inserted. Are locked on both sides of the slit 1905. As a result, the thin photosensitive material 11 is stored in the stacker 19 while being shielded from light. By appropriately transporting the stacker 19 itself by the transporting means, the five thin photosensitive materials 11 are transported at once without being in contact with each other in a light-shielded state.
【0011】 次に、図2及び図3を参照して第2実施例について説明する。 図2は第2実施例に係る搬送具が取着された薄物感光性材料の斜視図を示す。 21は薄物感光性材料、23は搬送具を示し、搬送具23は薄物感光性材料2 1の一方の横辺2103に取着され、搬送具23は横辺2103とほぼ同じ長さ を有し、前記実施例と同様に、合成樹脂や軽量合金等の所定の剛性を有する部材 で形成されている。 搬送具23は側面視L字形の基板25と、この基板25にねじ等を介して脱着 可能に取着される縦板27とで構成されている。Next, a second embodiment will be described with reference to FIGS. 2 and 3. FIG. 2 is a perspective view of the thin photosensitive material to which the carrier according to the second embodiment is attached. 21 is a thin photosensitive material, and 23 is a conveying tool. The conveying tool 23 is attached to one lateral side 2103 of the thin photosensitive material 21, and the conveying tool 23 has substantially the same length as the lateral side 2103. Like the above-mentioned embodiment, it is formed of a member having a predetermined rigidity such as a synthetic resin or a lightweight alloy. The carrier 23 is composed of a substrate 25 having an L-shape in a side view, and a vertical plate 27 that is removably attached to the substrate 25 with screws or the like.
【0012】 図3に示すように、縦板27には二本の位置決めピン29が突設され、この位 置決めピン29を薄物感光性材料21の横辺2103に沿って形成された位置決 め孔2105に挿通させ、この状態で縦板27を基板25にねじ等で取着するこ とで薄物感光性材料21に搬送具23が取着される。 この第2実施例では、基板25が搬送具本体に相当し、縦板27が結合手段に 相当しており、この第2実施例によっても前記実施例と同様に、搬送具23によ りDFRの損傷、汚染を防止しつつ薄物感光性材料11の自動搬送を高速で行な うことが可能となる。As shown in FIG. 3, the vertical plate 27 is provided with two positioning pins 29, and the positioning pins 29 are positioned along the lateral side 2103 of the thin photosensitive material 21. The carrier 23 is attached to the thin photosensitive material 21 by inserting the vertical plate 27 to the substrate 25 in this state with a screw or the like. In the second embodiment, the substrate 25 corresponds to the carrier body and the vertical plate 27 corresponds to the coupling means. Also in the second embodiment, the DFR is transferred by the carrier tool 23 as in the above embodiment. It is possible to automatically convey the thin photosensitive material 11 at high speed while preventing damage and contamination of the thin photosensitive material 11.
【0013】 尚、実施例では搬送具本体の長さを薄物感光性材料の一辺と同じ長さにした場 合について説明したが、同じ長さでなくともよく、搬送具本体は、要するに、薄 物感光性材料の一辺よりも短くても長くても搬送する上で支障のない長さであれ ばよい。 また、実施例では薄物感光性材料が長方形の場合について説明したが、薄物感 光性材料が、例えば、円形の場合には、搬送具本体の形状は直線状ではなく円弧 状となり、搬送具本体の形状は、薄物感光性材料の形状により決定される。It should be noted that, in the embodiment, the case where the length of the carrier tool body is the same as one side of the thin photosensitive material has been described. However, the carrier tool body need not have the same length, and in short, the carrier tool body is thin. It may be shorter or longer than one side of the photosensitive material as long as it does not hinder the conveyance. Although the thin photosensitive material has a rectangular shape in the embodiment, when the thin photosensitive material has, for example, a circular shape, the carrier body has an arc shape instead of a straight line shape. The shape of is determined by the shape of the thin photosensitive material.
【0014】[0014]
以上の説明で明らかなように本考案によれば、所定の剛性を備えた材料からな り、薄物感光性材料の縁部に沿って所定の長さ延出する搬送具本体と、前記搬送 具本体と前記薄物感光性材料の前記縁部とを脱着可能に結合する結合手段とで搬 送具を構成したので、搬送具により薄物感光性材料を損傷、汚染することなく高 速で搬送でき、PWB等のような薄物感光性材料を利用した製品の生産性を向上 することが可能となる。 As is apparent from the above description, according to the present invention, a carrier tool body made of a material having a predetermined rigidity and extending a predetermined length along an edge of a thin photosensitive material, and the carrier tool. Since the transporting tool is composed of the main body and the connecting means for detachably coupling the edge portion of the thin photosensitive material, the transporting tool can transport the thin photosensitive material at high speed without damaging or contaminating it. It is possible to improve the productivity of products using thin photosensitive materials such as PWB.
【図1】搬送具が取着された薄物感光性材料及びスタッ
カの斜視図である。FIG. 1 is a perspective view of a thin photosensitive material and a stacker to which a carrier is attached.
【図2】第2実施例に係る搬送具が取着された薄物感光
性材料の斜視図である。FIG. 2 is a perspective view of a thin photosensitive material to which a carrier according to a second embodiment is attached.
【図3】縦板及び薄物感光性材料の斜視図である。FIG. 3 is a perspective view of a vertical plate and a thin photosensitive material.
【図4】バキュームパッドを用いて薄物感光性材料を搬
送する説明図である。FIG. 4 is an explanatory diagram of transporting a thin photosensitive material using a vacuum pad.
【図5】ベルトコンベアを用いて薄物感光性材料を搬送
する説明図である。FIG. 5 is an explanatory view of transporting a thin photosensitive material using a belt conveyor.
1,11,21 薄物感光性材料 13,23 搬送具 1101 縦辺 1103,2103 横辺 15 平板部 17 脚板部 19 スタッカ 1,11,21 Thin photosensitive material 13,23 Conveyor 1101 Vertical side 1103,2103 Horizontal side 15 Flat plate part 17 Leg plate part 19 Stacker
Claims (1)
感光性材料の縁部に沿って所定の長さ延出する搬送具本
体と、 前記搬送具本体と前記薄物感光性材料の前記縁部とを脱
着可能に結合する結合手段と、 で構成されていることを特徴とする薄物感光性材料の搬
送具。1. A carrier tool main body made of a material having a predetermined rigidity and extending a predetermined length along an edge portion of the thin photosensitive material, the carrier tool main body and the edge of the thin photosensitive material. A transporting device for a thin photosensitive material, comprising: a coupling means for removably coupling the portion and a portion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5100592U JPH064758U (en) | 1992-06-26 | 1992-06-26 | Transporter for thin photosensitive materials |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5100592U JPH064758U (en) | 1992-06-26 | 1992-06-26 | Transporter for thin photosensitive materials |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH064758U true JPH064758U (en) | 1994-01-21 |
Family
ID=12874661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5100592U Pending JPH064758U (en) | 1992-06-26 | 1992-06-26 | Transporter for thin photosensitive materials |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH064758U (en) |
-
1992
- 1992-06-26 JP JP5100592U patent/JPH064758U/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR860003495A (en) | Transfer mechanism of semiconductor wafer surface inspection device | |
JPH064758U (en) | Transporter for thin photosensitive materials | |
JP2004281475A (en) | Sheet wafer transfer system and transfer method | |
JP3767298B2 (en) | Fixing method of electronic component mounting board | |
JPS62136428A (en) | Rectangular mask substrate transfer device | |
JP2501449B2 (en) | Adsorption arm | |
JPH0325903Y2 (en) | ||
JP3695611B2 (en) | Transfer and transfer device and transfer and transfer method | |
JPH07153816A (en) | Substrate transferring method and equipment | |
JP3170692B2 (en) | Sprocket for transporting base sheet | |
JP7399552B2 (en) | Container transport device and laser processing device | |
JPH066005Y2 (en) | Transport and packaging equipment for seaweed | |
JPH07114230B2 (en) | Belt conveyor tray | |
JP2529214Y2 (en) | Transfer system | |
JPS6243339B2 (en) | ||
JPH025597Y2 (en) | ||
JPS6357451A (en) | Plate-like material conveying device | |
JPH04225257A (en) | Wafer cassette | |
JP3434014B2 (en) | Stacker robot | |
JPH05254688A (en) | Carrier device | |
JP2872281B2 (en) | Container for printed circuit board substrate and method of transporting printed circuit board substrate | |
JPH08316289A (en) | Automatic conveyor | |
JPH0274055A (en) | Ic package | |
JPS638134Y2 (en) | ||
JPH0479253A (en) | Carrier |