JPS638134Y2 - - Google Patents

Description

[Detailed description of the invention] The present invention relates to a jig that supports a square mask used in the manufacture of precision electronic components such as ICs when the square mask is transported. This article relates to a table-shaped support jig designed to prevent scratches or stains on the surface of the table.

Square masks are extremely disliked if they get scratched, have dust attached to them, or become dirty.

For this reason, conventionally, when a square mask is transported, the square mask is placed on two round belts stretched in parallel and at approximately the same height. According to this method, there is no risk of scratches or stains on the surface of the square mask, but since the round belt comes into contact with the back surface, there is a risk of two scratches or stains occurring on the back surface.

This idea was created in view of the above circumstances.
The purpose is to provide a transport jig that can stably support a square mask without the risk of contacting either the front or back surface of the square mask.

In order to achieve the above object, the supporting jig of the present invention is configured in the shape of a table on which the corner mask is placed. The rectangular shape is approximately parallel to each side of the square mask that is the object to be transported, and the sides parallel to the transport direction of the square mask are longer than the square mask, and the sides perpendicular to the transport direction of the square mask are corners. Make it shorter than the mask.
In addition, when the table-shaped support jig is viewed from the side in the conveyance direction, its top surface forms a shallow V-shape, and more specifically, at least the vicinity of both ends thereof includes a part of the V-shape. Configure it into a shape.
That is, the shape near the bottom of the V shape has no important meaning. Near opposite ends of the V-shaped slope,
That is, the shape of the vicinity of the upper end of the pair of slopes is an important requirement.

Next, one embodiment of the table-shaped jig for transporting a square mask according to the present invention will be described with reference to FIGS. 1 to 6.

FIG. 1 shows an example of a square mask 1 as an object to be transported. The corner mask 1 of this example is a thin planar glass having a substantially square shape.

FIG. 2 is a plan view of the square mask 1 placed on a second embodiment of the table-like jig according to the present invention, and arrow A indicates the conveyance direction. 3 is a side view seen in the direction of arrow B in FIG. 2, FIG. 4 is a front view similarly seen in the direction of arrow A, and FIG. 5 is a perspective view.

As shown in the plan view (Fig. 2), the length L ₂ of the table-shaped jig 2 in the conveyance direction is larger than the length L ₁ of the square mask 1 in the same direction, and the length L 2 of the table-shaped jig 2 in the same direction The width W ₂ perpendicular to the conveying direction is narrower than the width W ₁ of the square mask 1 in this direction. Therefore, as shown in FIG. 4 (front view), both ends of the square mask 1 protrude from both ends of the table-shaped jig 2 to the left and right.

As shown in FIG. 3, the top surface of the table-like jig 2 is formed so as to form a shallow V-shape in the side view.

As a result, the lower surface of the corner mask 1 does not come into contact with the table-shaped jig 2, and the front edge 1a and the rear edge 1b of the corner mask 1 do not touch the table-shaped jig 2 with respect to the advancing direction arrow A.
It is stabilized by coming into contact with both ends of the V-shaped slope.

In order to stably support the square mask 1 as described above, it is better that the top surface of the disk-shaped jig 2 has a gentle slope, and therefore the V-shape of the top surface needs to be shallow. In the present invention, a shallow V-shape means that the slope has an inclination of 45° or less. This is because if this inclination is 45 degrees or more, the corner mask 1 will be difficult to stabilize. Also, the fact that this surface is V-shaped means that
Regardless of the shape near the bottom, it may have a rounded shape as shown by curve C, for example.

In the present invention, including at least a portion of a V-shape means that the vicinity of the bottom of the V-shape can be arbitrarily deformed, that is, the vicinity of both ends of a pair of slopes of the V-shape is provided.

The table jig 2 of this embodiment can be stably supported as described above without coming into contact with either the front or back surfaces of the square mask 1. And the fourth
In the state shown in the figure, both left and right ends of the square mask 1 protrude from both ends of the table-shaped jig 2, so
As shown in FIG. 6, it can be stored in a shelf-shaped case 3 or carried out from the case 3. This FIG. 6 is a view of the square mask 1 placed on the table-shaped jig 2, viewed in the same direction as FIG. 4.
In this figure, the transport direction is perpendicular to the plane of the paper.

In the shelf-shaped case 3, the width W ₃ of the corner mask storage portion is larger than the width W ₁ of the corner mask 1, and
The shelf support interval W ₄ is formed to be larger than the width W ₂ of the table-like jig 2. That is, the configuration is such that W ₃ >W ₁ >W ₄ >W ₂ . As a result, the table-shaped jig 2
By placing the square mask 1 thereon and driving the square mask 1 in the direction perpendicular to the plane of the paper and in the vertical direction of the figure, the square mask 1 can be stored in the shelf-shaped case 3 and taken out.

As detailed above, the table-shaped jig for transporting a square mask of the present invention has excellent practical use in that it can stably support a square mask without the risk of contacting the front or back surface of the square mask. It has the desired effect.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing an example of a corner mask.
2 to 6 show a state in which a square mask is placed and supported on an embodiment of the table-shaped jig for transporting a square mask of the present invention, FIG. 2 is a plan view, and FIG.
Figure 4 is a view from arrow A in Figure 2, and Figure 5 is a view from arrow A in Figure 2.
The figure is a perspective view, and FIG. 6 is an explanatory view of the operation of storing and carrying out the storage in the shelf-like case. 1... Square mask, 2... Table-shaped jig, 3...
...shelf case.

Claims (1)

[Scope of utility model registration request] A jig that supports a corner mask in order to transport the corner mask, and has four sides that are approximately parallel to the corner mask that is the object to be transported, and two sides that are parallel to the transport direction of the corner mask. longer than the two sides in the transport direction,
The two sides perpendicular to the conveyance direction of the square mask are shorter than the two sides perpendicular to the conveyance direction of the square mask, and include at least a portion of a shallow V-shaped cross section taken by a vertical plane parallel to the conveyance direction. A table-shaped jig for transporting a square mask, characterized by having a slope.