JPH0646056Y2 - 集束イオンビーム装置 - Google Patents

集束イオンビーム装置

Info

Publication number
JPH0646056Y2
JPH0646056Y2 JP12485888U JP12485888U JPH0646056Y2 JP H0646056 Y2 JPH0646056 Y2 JP H0646056Y2 JP 12485888 U JP12485888 U JP 12485888U JP 12485888 U JP12485888 U JP 12485888U JP H0646056 Y2 JPH0646056 Y2 JP H0646056Y2
Authority
JP
Japan
Prior art keywords
gas reservoir
lid
ion beam
gas
focused ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12485888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0246357U (OSRAM
Inventor
守一 小西
正明 滝沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP12485888U priority Critical patent/JPH0646056Y2/ja
Publication of JPH0246357U publication Critical patent/JPH0246357U/ja
Application granted granted Critical
Publication of JPH0646056Y2 publication Critical patent/JPH0646056Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP12485888U 1988-09-25 1988-09-25 集束イオンビーム装置 Expired - Lifetime JPH0646056Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12485888U JPH0646056Y2 (ja) 1988-09-25 1988-09-25 集束イオンビーム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12485888U JPH0646056Y2 (ja) 1988-09-25 1988-09-25 集束イオンビーム装置

Publications (2)

Publication Number Publication Date
JPH0246357U JPH0246357U (OSRAM) 1990-03-29
JPH0646056Y2 true JPH0646056Y2 (ja) 1994-11-24

Family

ID=31374951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12485888U Expired - Lifetime JPH0646056Y2 (ja) 1988-09-25 1988-09-25 集束イオンビーム装置

Country Status (1)

Country Link
JP (1) JPH0646056Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH0246357U (OSRAM) 1990-03-29

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