JPH0246357U - - Google Patents
Info
- Publication number
- JPH0246357U JPH0246357U JP12485888U JP12485888U JPH0246357U JP H0246357 U JPH0246357 U JP H0246357U JP 12485888 U JP12485888 U JP 12485888U JP 12485888 U JP12485888 U JP 12485888U JP H0246357 U JPH0246357 U JP H0246357U
- Authority
- JP
- Japan
- Prior art keywords
- gas reservoir
- lid
- gas
- attached
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 5
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 1
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12485888U JPH0646056Y2 (ja) | 1988-09-25 | 1988-09-25 | 集束イオンビーム装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12485888U JPH0646056Y2 (ja) | 1988-09-25 | 1988-09-25 | 集束イオンビーム装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0246357U true JPH0246357U (OSRAM) | 1990-03-29 |
| JPH0646056Y2 JPH0646056Y2 (ja) | 1994-11-24 |
Family
ID=31374951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12485888U Expired - Lifetime JPH0646056Y2 (ja) | 1988-09-25 | 1988-09-25 | 集束イオンビーム装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0646056Y2 (OSRAM) |
-
1988
- 1988-09-25 JP JP12485888U patent/JPH0646056Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0646056Y2 (ja) | 1994-11-24 |