JPH064584Y2 - レ−ザマ−キング用ウエハ−搬送装置 - Google Patents
レ−ザマ−キング用ウエハ−搬送装置Info
- Publication number
- JPH064584Y2 JPH064584Y2 JP1987062211U JP6221187U JPH064584Y2 JP H064584 Y2 JPH064584 Y2 JP H064584Y2 JP 1987062211 U JP1987062211 U JP 1987062211U JP 6221187 U JP6221187 U JP 6221187U JP H064584 Y2 JPH064584 Y2 JP H064584Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer device
- wafer transfer
- laser marking
- transfer arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010330 laser marking Methods 0.000 title claims description 5
- 238000001514 detection method Methods 0.000 claims description 12
- 235000012431 wafers Nutrition 0.000 description 45
- 238000012423 maintenance Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000003550 marker Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987062211U JPH064584Y2 (ja) | 1987-04-23 | 1987-04-23 | レ−ザマ−キング用ウエハ−搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987062211U JPH064584Y2 (ja) | 1987-04-23 | 1987-04-23 | レ−ザマ−キング用ウエハ−搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63167737U JPS63167737U (enrdf_load_html_response) | 1988-11-01 |
| JPH064584Y2 true JPH064584Y2 (ja) | 1994-02-02 |
Family
ID=30896267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987062211U Expired - Lifetime JPH064584Y2 (ja) | 1987-04-23 | 1987-04-23 | レ−ザマ−キング用ウエハ−搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064584Y2 (enrdf_load_html_response) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI607817B (zh) * | 2015-09-02 | 2017-12-11 | E&R Eng Corp | Laser printing apparatus and method |
-
1987
- 1987-04-23 JP JP1987062211U patent/JPH064584Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63167737U (enrdf_load_html_response) | 1988-11-01 |
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