JPH0645736Y2 - Processing device with spare container - Google Patents

Description

[Detailed Description of the Invention] [Industrial field of application] The present invention allows the loading and unloading of processed materials into and out of various processing vessels such as vacuum furnaces, heating furnaces, and low pressure plasma spraying equipment without external influence. The present invention relates to a processing apparatus equipped with a preliminary container for carrying out.

[Conventional technology]

In recent years, high value-added material development and parts processing have become prosperous, and as a part of its manufacturing process, a processing container is provided and the inside is set to the required atmosphere, pressure, temperature, etc., for example, vacuum processing, heat processing, reduced pressure plasma. Techniques for performing thermal spraying have attracted attention. In such processing, the posture and position of the processing object are often changed by an actuator in the processing container in order to improve quality. When attaching the processed material to the actuator, the processing container is mainly opened to the atmosphere every time,
That is, a method of introducing outside air into the inside and returning to atmospheric pressure once to insert the processed object inside, and a spare container 3 having an opening and a partition member 5 in the processing container 4 as shown in FIG.
With the opening of the joint 9 closed by the partition member 5, first, only the lid 2 of the spare container 3 is opened and the processed product 1 is attached to the actuator 6 waiting inside the spare container 3, and then the lid 2 of the spare container 3 is attached. After closing the inside of the processing container 4 to match the conditions inside the auxiliary container 3 (for example, to make the pressure the same), the partition material 5
There is a method of opening the container and inserting it into the processing container 4.

Especially in production facilities, eliminating the time loss from opening the processing container to the atmosphere and resetting the atmosphere for processing,
The latter is often adopted from the viewpoint of avoiding harmful effects such as mixing of atmospheric moisture into the inside of the processing container at the time of opening to the atmosphere, and conversely dust and harmful substances flowing out from the processing container to the outside. Further, in order to improve productivity, it is also practiced to arrange a spare container in one processing container and add a function of preheating to the spare container.

[Problems to be solved by the device]

When adding a preheating function to the above-mentioned preliminary container, the processing container and the preliminary container are in continuous communication while the processed product is being inserted into the processing container, so that, for example, a large amount of dust is generated in the processing container. In low-pressure plasma spraying equipment, etc., a large amount of sprayed powder enters the spare container side and adheres to the preheating heater in the spare container, the insulator, and the attached piping, causing deterioration of the heater material and characteristics, poor insulation, and valve failure. However, there are problems such as the failure of piping parts such as the above, and the accumulated powder flowing and adhering to the processed material during loading and unloading in the spare container, resulting in deterioration of quality. In addition, when it is necessary to take a long insertion stroke because the processed object is long in the insertion direction, the cantilever portion of the actuator becomes longer and the deflection increases, so it is necessary to increase the rigidity by increasing the cross section of the actuator. is there. In particular, when the processed product is rotated about the axis in the insertion direction, there is a problem that a centrifugal force is generated due to the displacement of the center of gravity of the processed product with respect to the center of the actuator axis and vibration is generated. The present invention solves these problems.

[Means for Solving the Problems]

The structure for solving the above problems and achieving the object of the present invention will be described. In the present invention, a processing container 4 provided with a spare container 3 provided with a lid 2 for putting the processed product 1 in and out is provided. , Equipped with an actuator 6 having a mechanism for attaching and detaching and holding the processed material 1 through an opening to which a partition member 5 for isolating or communicating between the containers is attached, and enabling movement of the processed material 1 between the containers In the processing apparatus having the spare container described above, the actuator 6 is fitted with a seal plate 8 which is fitted to the moving portion 7 so as to be able to slide with respect to each other and to maintain the airtightness of the sliding portion, and the spare container 3 is provided. A processing apparatus having a preparatory container, characterized in that a gas introduction valve 10 and a gas discharge valve 11 are provided in the.

[Action]

Since the present invention is configured as described above, immediately after the opening of the joint portion is opened by the partitioning member and the containers are communicated with each other, the seal plate and the actuator in the spare container are rapidly moved integrally and the joint is performed. After contacting the seal plate with the part, the pressure in the auxiliary container is increased more than in the process container to press the seal plate against the joint surface and keep the seal between the containers while retaining them while the treatment is performed by the actuator. The reciprocating movement of the processed material in the container can be carried out. Further, the pressing force applied to the seal plate causes static frictional force between the seal plate and the joint surface, so that the seal plate restrains the deflection and shake in the direction orthogonal to the reciprocating direction of the actuator, that is, supplementing the rigidity of the actuator. It also has a function.

〔Example〕

Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. In FIG. 1, a partition member 5 is provided to communicate or isolate the preliminary container 3 and the processing container 4 from each other. The partition member 5 opens the opening of the joint portion 9 and the actuator 6 reciprocally moves the processing object 1 between the preliminary container 3 and the processing container 4. Further, by retracting the actuator into the spare container 3 and closing the mouth with the partition member 5, the condition of the inside of the processing container 4 is not affected and the actuator 6 of the processing object 1 is not affected.
To and from. The actuator 6 has its moving part 7
Is provided with a seal plate 8 having a length capable of reciprocating both the preliminary container 3 and the processing container 4, keeping the airtightness with the penetrating portion of the preliminary container 3 and fitted slidably. Processed product 1
Is attached and detached at the tip of the actuator 6, and is held and moved. Loading and unloading of the processed material 1 is performed via the lid 2. The spare container 3 is provided with a pipe provided with a gas introduction valve 10 for introducing gas into the interior and increasing the pressure, and a gas discharge valve 11 for discharging gas. FIG. 2 shows a second embodiment of the seal plate 8 and the joint portion 9 between the preliminary container 3 and the processing container 4, in which the seal plate 8 and the joint portion 9 are provided with irregularities respectively, and the pressing force of the pressure is applied. In addition to the frictional force due to, the supporting function due to the reaction force from the joint portion 9 is also provided.

FIG. 3 shows a third embodiment of the seal plate 8 and the joint portion 9 between the spare container 3 and the processing container 4, and the seal plate 8
A seal component 12, for example, an O-ring, is provided at a portion of each of the actuator 6 and the joint portion 9 in contact with each other to enhance airtightness. FIG. 4 shows a fourth embodiment of the seal plate 8 and the joint portion 9 between the preparatory container 3 and the processing container 4. By making the cross section of the seal plate 8 curved, it is possible to resist the pressure. The strength is increased and the thickness of the seal plate 8 is reduced to enable the weight reduction.

[Effect of device]

As described above, the present invention provides an airtight slidable seal plate for the actuator that moves between the spare container and the processing container, and immediately after opening the joint part with the partitioning material between the containers. Since the seal plate is brought into contact with the joint to maintain the airtightness between the two containers, there is an effect that the effect of dust, gas, heat, etc. from the processing container is not exerted on the auxiliary container side. Therefore, even if dust is generated in the processing container, due to the above-mentioned action, the dust generated in the processing container side adheres to the heater, the insulator and the auxiliary pipe on the auxiliary container side, thus deteriorating the material and characteristics of the heater, It is possible to prevent problems such as poor insulation, breakdown of piping parts such as valves, and accumulated powder flowing and adhering to a processed material in the preliminary container, resulting in quality deterioration. Further, since the seal plate can be fixed to the joint portion by the pressing force due to the pressure, there is also an effect of suppressing the phenomenon related to the rigidity such as the deflection and vibration of the actuator.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a sectional view showing an embodiment of the present invention, FIGS. 2, 3 and 4 are sectional views showing an embodiment of a seal plate and a joint portion,
FIG. 5 is an explanatory view showing a conventional technique example. 1 ... Processed object, 2 ... Lid, 3 ... Spare container, 4 ... Processing container, 5 ... Partition material, 6 ... Actuator, 7 ...
… Actuator moving part, 8 …… Seal plate, 9 …… Joining part, 10 …… Gas introduction valve, 11 …… Gas discharge valve, 12 …… Seal parts.

Claims (1)

[Scope of utility model registration request] 1. A processing container provided with a spare container provided with a lid for loading and unloading the processed product to and from the outside, and an attachment and detachment and holding of the processed product through an opening equipped with a partitioning material for isolating or communicating between the containers. And a spare container equipped with an actuator for enabling the movement of the processed material between the containers, the actuator being slidable with respect to the moving part and hermetically sealing the sliding part. A processing apparatus having a preliminary container, characterized in that a sealing plate formed so as to maintain the property is attached, and a gas introduction valve and a gas discharge valve are provided in the preliminary container.