JPH01169174A - Method for fixing cover to vessel - Google Patents

Method for fixing cover to vessel

Info

Publication number
JPH01169174A
JPH01169174A JP32482787A JP32482787A JPH01169174A JP H01169174 A JPH01169174 A JP H01169174A JP 32482787 A JP32482787 A JP 32482787A JP 32482787 A JP32482787 A JP 32482787A JP H01169174 A JPH01169174 A JP H01169174A
Authority
JP
Japan
Prior art keywords
opening
lid
cover
vacuum
closed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP32482787A
Other languages
Japanese (ja)
Other versions
JP2893588B2 (en
Inventor
Hideaki Matsuo
英明 松尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daido Steel Co Ltd
Original Assignee
Daido Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daido Steel Co Ltd filed Critical Daido Steel Co Ltd
Priority to JP62324827A priority Critical patent/JP2893588B2/en
Publication of JPH01169174A publication Critical patent/JPH01169174A/en
Application granted granted Critical
Publication of JP2893588B2 publication Critical patent/JP2893588B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To enable a cover to be promptly and easily fixed and released by constituting the cover so as to be fixed to a vessel main unit by exhausting space between the first and second packings to be vacuumized after the cover is closed. CONSTITUTION:After a vessel main unit 2 is charged in its inside with a processed object, a cover 3 is manually closed, and closing opening and closing valves 13 and 14 and opening and closing valves 11 and 12, a vacuum pump 10 is operated. Then the inside of the vessel main unit 2 and the inside of annular space 9, formed by the first and second packings 4, 5, are exhausted, and the cover 3, being sucked by a vacuum pressure, is firmly fixed to a flange part 4. After the processed object in the vacuum applies a heating process, the opening and closing valve 11 is closed, and the vessel main unit 2 is pressurized to a positive pressure by introducing inert gas into a furnace. In accordance with a reaching degree of vacuum in the annular enclosed space 9, when diameters D and (d) are left as selected, the cover 3 is surely fixed to the flange part 4. After the processed object finishes its process in a furnace pressurized condition, in-furnace pressure is reduced to the atmosphere by opening the opening and closing valve 14, when the opening and closing valve 12 is closed and 13 is opened, the cover 3 can be easily and manually opened.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は容器の蓋を容器本体に固定する方法に関する
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] This invention relates to a method for fixing a container lid to a container body.

〔従来の技術〕[Conventional technology]

たとえば真空熱処理炉のような真空炉においては、被処
理材を装入した炉内を真空引きして加熱後、不活性ガス
により被処理材を冷却する際に炉内を大気圧以上に加圧
するなど、真空引き後に加圧することがおこなわれてい
る。このような工程用の真空炉においては、操業中に炉
蓋を閉鎖状態に保つために、第3図に示すように炉体で
ある容器本体22に炉蓋であるM23をエアシリンダ2
5により押付けて固定したり、第4図に示すようにエア
シリンダ26により駆動される複数個のくさび形のクラ
ンプ金具27やボルトなどにより、蓋23と容器本体2
2の7ランジ部24を締結する方法が採用されている。
For example, in a vacuum furnace such as a vacuum heat treatment furnace, the inside of the furnace containing the material to be treated is evacuated and heated, and then the interior of the furnace is pressurized to above atmospheric pressure when the material is cooled with inert gas. In some cases, pressure is applied after evacuation. In a vacuum furnace for such a process, in order to keep the furnace lid closed during operation, the furnace lid M23 is attached to the container body 22, which is the furnace body, using an air cylinder 2, as shown in FIG.
The lid 23 and the container body 2 can be fixed together by pressing the lid 23 and the container body 2 with a plurality of wedge-shaped clamp fittings 27 or bolts driven by an air cylinder 26 as shown in FIG.
A method of fastening the 2-7 flange portions 24 is adopted.

なお28はシール用のパツキン、10は真空ポンプであ
る。
Note that 28 is a sealing gasket, and 10 is a vacuum pump.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

ところが上記従来の方法のうら、エアシリンダを用いる
ものは装置が複雑で装置の設置スペースもかさみ、また
ボルトによるものは作業に手間がかかり煩雑で自動化が
困難である。
However, among the above-mentioned conventional methods, the method using an air cylinder is complicated and requires a large installation space, and the method using bolts is labor-intensive and complicated, and difficult to automate.

この発明は上記従来の問題点を解決するもので、迅速容
易に蓋の固定および固定解除をおこなうことができ、装
置も簡潔で場所をとらない容器の蓋の固定方法を提供し
ようとするものである。
This invention solves the above-mentioned conventional problems and provides a method for fixing a container lid that can quickly and easily fix and unfix the lid, has a simple device, and does not take up much space. be.

〔問題点を解決するための手段〕[Means for solving problems]

しかしてこの発明の方法は、容器本体の開口部を開閉す
る蓋をそなえた容器において、前記容器本体と前記蓋の
橙ね合せ部に、前記間ロ部シール用め第1パツキンと、
この第1パツキンより外周側に間隔をおいて配置した第
2パツキンとを設け、前記蓋の閉鎖後前記第1パツキン
と前記第2パツキンの間を真空ポンプにより排気して真
空にすることにより前記蓋を前記容器本体に固定する容
器の蓋の固定方法である。
However, in the method of the present invention, in a container provided with a lid for opening and closing an opening of the container body, a first gasket for sealing the gap is provided at the orange joint portion of the container body and the lid;
A second gasket is provided at a distance from the first gasket on the outer periphery side, and after the lid is closed, the space between the first gasket and the second gasket is evacuated by a vacuum pump to create a vacuum. This is a method of fixing a lid of a container by fixing the lid to the container body.

(作用) この発明の方法においては、蓋の閉鎖後に第1パツキン
と第2パツキンの間を排気することにより、この排気に
よる到達真空度と第1パツキンと第2パツキンにより囲
繞された面積の積に相当する吸着力により、蓋が容器本
体に固定される。容器内に大気圧以上の内圧をかけても
、この内圧により蓋を開く方向に押す開放力よりも上記
吸着力が大となるように第1パツキンおよび第2パツキ
ンのシール直径を設定しておけば、蓋は容器本体に固定
されるのである。
(Function) In the method of the present invention, by evacuating the space between the first packing and the second packing after closing the lid, the product of the vacuum level achieved by this evacuation and the area surrounded by the first packing and the second packing The lid is fixed to the container body by an adsorption force corresponding to . The seal diameters of the first and second gaskets should be set so that even if an internal pressure higher than atmospheric pressure is applied inside the container, the suction force will be greater than the opening force that pushes the lid in the direction of opening. For example, the lid is fixed to the container body.

(実施例) 以下第1図および第2図によりこの発明の一実施例を説
明する。
(Example) An example of the present invention will be described below with reference to FIGS. 1 and 2.

図中、1は真空熱処理炉で、2はその炉体である有底円
筒状の容器本体、3はこの容器本体2の開口部2aをt
tnwlする蓋で、図示しないヒンジにより容器本体2
に鉛直軸のまわりに回動自在に支持されている。蓋3の
開鎖時に蓋3と重なり合う容器本体2のフランジ部4に
は、開口部2aを包囲する第1パツキン5と、この第1
パツキン5に対してフランジ外周側に距離をおいた第2
パツキン6とが設けである。7は排気孔で、第1パツキ
ン5と第2パツキン6の間の環状フランジ面4aに開口
している。また8は蓋3の内面3aの環状フランジ面4
aに対向する位置に設けた環状の溝で、排気性向上のた
め必要に応じて設ける。9は蓋3の閉鎖時にフランジ部
4と蓋3との間に形成され第1パツキン5と第2パツキ
ン6により囲繞される環状密閉中@(前記溝8を含む)
である。
In the figure, 1 is a vacuum heat treatment furnace, 2 is a bottomed cylindrical container body which is the furnace body, and 3 is an opening 2a of this container body 2.
The container body 2 is attached to the lid by a hinge (not shown).
It is rotatably supported around a vertical axis. The flange portion 4 of the container body 2, which overlaps with the lid 3 when the lid 3 is opened, has a first packing 5 surrounding the opening 2a, and a first packing 5 that surrounds the opening 2a.
The second one is located at a distance from the packing 5 toward the outer periphery of the flange.
A gasket 6 is provided. Reference numeral 7 denotes an exhaust hole, which opens in the annular flange surface 4a between the first packing 5 and the second packing 6. 8 is an annular flange surface 4 of the inner surface 3a of the lid 3.
It is an annular groove provided at a position opposite to a, and is provided as necessary to improve exhaust performance. 9 is an annular seal formed between the flange portion 4 and the lid 3 when the lid 3 is closed and surrounded by the first packing 5 and the second packing 6 (including the groove 8).
It is.

10は容器本体2の真空引き用の真空ポンプで、開閉弁
11を介して容器本体2に接続されており、また排気孔
7も開閉弁12を介して真空ポンプ10に接続しである
。13および14は大気圧導入用のrf8M弁である。
Reference numeral 10 denotes a vacuum pump for evacuation of the container body 2, which is connected to the container body 2 via an on-off valve 11, and the exhaust hole 7 is also connected to the vacuum pump 10 via an on-off valve 12. 13 and 14 are rf8M valves for introducing atmospheric pressure.

上記各開n弁としては、手動式のものを用いてもよいが
、電磁式あるいは空圧式などの遠隔操作形式のものを用
いるのが好ましい。なお真空熱処理のための容器本体2
内へのガス供給系統や、被処理物の加熱手段等の図示!
よ省略しである。
As each of the above-mentioned open valves, a manual type may be used, but it is preferable to use a remote control type such as an electromagnetic type or a pneumatic type. In addition, the container body 2 for vacuum heat treatment
Diagrams of the gas supply system and heating means for the object to be treated!
This is an abbreviation.

上記構成の真空熱処理炉1において、蓋3の容器本体2
への固定および固定解除は次のようにしておこなう。先
ず図示しない被処理物を容器本体2内へ装入後、蓋3を
手動により閉鎖し、開閉弁13および14を閉じ、開閉
弁11および12を開いて真空ポンプ10を運転する。
In the vacuum heat treatment furnace 1 having the above configuration, the container body 2 of the lid 3 is
Fixing and unfixing are performed as follows. First, after loading an object to be processed (not shown) into the container body 2, the lid 3 is manually closed, the on-off valves 13 and 14 are closed, the on-off valves 11 and 12 are opened, and the vacuum pump 10 is operated.

これにより容器本体2内および環状密閉空間9内は排気
されて真空となり、蓋3はこの真空圧により吸着されて
フランジ部4に強固に固定される。真空中の被処理物の
加熱処理後、開閉弁11を閉じ、不活性ガスの炉内導入
により容器本体2内を圧力P(ゲージ圧)なる正圧に加
圧する。このとき炉内圧により蓋3を開く方向に押す開
放力F1は、第1図に示すように第1パツキン5のシー
ル直径をd、第2パツキン6のシール直径をDとすると
、次式で表される。
As a result, the inside of the container body 2 and the annular closed space 9 are evacuated and become a vacuum, and the lid 3 is attracted by this vacuum pressure and firmly fixed to the flange portion 4. After the object to be processed is heated in vacuum, the on-off valve 11 is closed, and the inside of the container body 2 is pressurized to a positive pressure of pressure P (gauge pressure) by introducing an inert gas into the furnace. At this time, the opening force F1 that pushes the lid 3 in the direction of opening due to the furnace internal pressure is expressed by the following equation, where d is the seal diameter of the first gasket 5 and D is the seal diameter of the second gasket 6, as shown in FIG. be done.

F+−−d2XP           ・・・(1)
一方環状密閏空間9に作用する真空圧力poTorrに
よりM3がフランジ部4に吸着される吸着力F2は次式
により表わされる。
F+--d2XP...(1)
On the other hand, the attraction force F2 by which M3 is attracted to the flange portion 4 by the vacuum pressure poTorr acting on the annular tight space 9 is expressed by the following equation.

真空ポンプ10の排気による環状密閉空間9の到達真空
度poに応じて、Fl <F2となるように上記直径り
およびd8選定しておけば、蓋3は炉内加圧時において
も確実にフランジ部4に固定されるのである。
If the diameter and d8 are selected so that Fl < F2, depending on the degree of vacuum po achieved in the annular closed space 9 due to exhaustion of the vacuum pump 10, the lid 3 will reliably maintain its flange position even when the furnace is pressurized. It is fixed to part 4.

炉内加圧状態での被処理物の処理終了後は、開閉弁14
を開いて炉内を大気圧に減圧し、開閉弁12を閉じ開閉
弁13を開【ノば環状密開空間9内にも大気圧が導入さ
れるので、蓋3は手動で開放することができる。
After the processing of the workpiece in the pressurized state in the furnace is completed, the on-off valve 14
Open the lid to reduce the pressure inside the furnace to atmospheric pressure, close the on-off valve 12, and open the on-off valve 13 [Atmospheric pressure is also introduced into the annular closed space 9, so the lid 3 can be opened manually. can.

この発明は上記実施例に限定されるものではなく、たと
えばまた蓋3や容器本体2の形状、蓋3の開閉駆動機構
等は、上記以外のものとしてもよい。また第1パツキン
5、第2パツキン6、排気孔7等は、蓋3側に設けても
よい。さらに上記実施例では容器本体2の真空引き用の
真空ポンプ10を利用して第1パツキン5と第2パツキ
ン6の間の排気をおこなうようにしたので、装置が特に
17!′!iとなるが、上記排気用に別の真空ポンプを
用いることも可能である。またこの発明は、各種真空炉
のほか、8鼎本体内の真空引きをおこなわない容器にお
1ノる蓋の固定にも適用でさるものである。
The present invention is not limited to the embodiments described above, and the shapes of the lid 3 and the container body 2, the opening/closing drive mechanism of the lid 3, etc. may be other than those described above. Further, the first gasket 5, the second gasket 6, the exhaust hole 7, etc. may be provided on the lid 3 side. Furthermore, in the above embodiment, the vacuum pump 10 for evacuation of the container body 2 is used to evacuate the space between the first packing 5 and the second packing 6, so that the device is particularly 17! ′! i, but it is also possible to use another vacuum pump for the evacuation. In addition to various vacuum furnaces, the present invention can also be applied to fixing a lid to a container that is not evacuated inside the main body.

〔発明の効果〕〔Effect of the invention〕

以上説明したようにこの発明によれば、容器本体と蓋の
重ね合せ部に設けた第1パツキンと第2パツキンの間を
排気するだけで蓋を容器本体に固定できるので、迅速容
易に蓋の固定および固定解除をおこなうことができ、固
定のための装置も簡潔で場所をとらない。
As explained above, according to the present invention, the lid can be fixed to the container body simply by exhausting the space between the first gasket and the second gasket provided at the overlapping portion of the container body and the lid, so that the lid can be quickly and easily fixed. It can be fixed and unfixed, and the fixing device is simple and takes up little space.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の方法に使用する装置の一例を示す真
空熱処理炉の機器系統図、第2図は第1図のA部詳細断
面図、第3図および第4図は従来の蓋の固定方法を示す
真空熱処理炉の別器系統図である。 1・・・真空熱処理炉、2・・・容器本体、2a・・・
開口部、3・・・蓋、4・・・フランジ部、5・・・第
1パツキン、6・・・第2パツキン、7・・・排気孔、
10・・・真空ポンプ。 第1囲 始20 第30 第40
Fig. 1 is an equipment system diagram of a vacuum heat treatment furnace showing an example of the apparatus used in the method of the present invention, Fig. 2 is a detailed sectional view of section A in Fig. 1, and Figs. 3 and 4 are a diagram of a conventional lid. It is a separate system diagram of a vacuum heat treatment furnace showing a fixing method. 1... Vacuum heat treatment furnace, 2... Container body, 2a...
Opening part, 3... Lid, 4... Flange part, 5... First packing, 6... Second packing, 7... Exhaust hole,
10...Vacuum pump. 1st section beginning 20th 30th 40th

Claims (1)

【特許請求の範囲】 1 容器本体の開口部を開閉する蓋をそなえた容器にお
いて、前記容器本体と前記蓋の重ね合せ部に、前記開口
部シール用の第1パッキンと、この第1パッキンより外
周側に間隔をおいて配置した第2パッキンとを設け、前
記蓋の閉鎖後前記第1パッキンと前記第2パッキンの間
を真空ポンプにより排気して真空にすることにより前記
蓋を前記容器本体に固定する容器の蓋の固定方法。 2 容器が、真空引き後大気圧以上に加圧される容器で
あつて、前記真空引き用の真空ポンプを用いて第1パッ
キンと第2パッキンの間の排気をおこなうようにした特
許請求の範囲第1項記載の容器の蓋の固定方法。
[Scope of Claims] 1. In a container provided with a lid for opening and closing an opening of a container body, a first packing for sealing the opening is provided at an overlapping portion of the container body and the lid, and a first packing is provided from the first packing. A second packing is provided at an interval on the outer circumference side, and after the lid is closed, a vacuum pump is used to evacuate the space between the first packing and the second packing to create a vacuum, so that the lid is closed to the container body. How to fix the lid of a container. 2. Claims in which the container is pressurized to atmospheric pressure or higher after being evacuated, and the space between the first packing and the second packing is evacuated using the vacuum pump for evacuation. A method for fixing a lid of a container according to item 1.
JP62324827A 1987-12-22 1987-12-22 How to fix the vacuum furnace lid Expired - Fee Related JP2893588B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62324827A JP2893588B2 (en) 1987-12-22 1987-12-22 How to fix the vacuum furnace lid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62324827A JP2893588B2 (en) 1987-12-22 1987-12-22 How to fix the vacuum furnace lid

Publications (2)

Publication Number Publication Date
JPH01169174A true JPH01169174A (en) 1989-07-04
JP2893588B2 JP2893588B2 (en) 1999-05-24

Family

ID=18170122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62324827A Expired - Fee Related JP2893588B2 (en) 1987-12-22 1987-12-22 How to fix the vacuum furnace lid

Country Status (1)

Country Link
JP (1) JP2893588B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03249936A (en) * 1990-02-26 1991-11-07 Tokyo Electron Ltd Sealing device
JP2002267029A (en) * 2001-03-13 2002-09-18 Ishikawajima Harima Heavy Ind Co Ltd Vacuum seal mechanism
JP2005325973A (en) * 2004-05-17 2005-11-24 Sigma Meltec Ltd Sealing structure for processing chamber device
WO2023021739A1 (en) * 2021-08-20 2023-02-23 株式会社島津製作所 Heating furnace for degreasing

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015007437A (en) * 2013-06-24 2015-01-15 国立大学法人秋田大学 Fluid coupling

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5119162U (en) * 1975-06-26 1976-02-12
JPS5962775A (en) * 1982-07-22 1984-04-10 アメリカン ステリライザ− コムパニ− Device for sealing opening section of chamber
JPS6287256U (en) * 1985-11-21 1987-06-03
JPS63132167U (en) * 1987-02-23 1988-08-30
JPS6413499U (en) * 1987-07-10 1989-01-24

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5119162U (en) * 1975-06-26 1976-02-12
JPS5962775A (en) * 1982-07-22 1984-04-10 アメリカン ステリライザ− コムパニ− Device for sealing opening section of chamber
JPS6287256U (en) * 1985-11-21 1987-06-03
JPS63132167U (en) * 1987-02-23 1988-08-30
JPS6413499U (en) * 1987-07-10 1989-01-24

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03249936A (en) * 1990-02-26 1991-11-07 Tokyo Electron Ltd Sealing device
JP2002267029A (en) * 2001-03-13 2002-09-18 Ishikawajima Harima Heavy Ind Co Ltd Vacuum seal mechanism
JP2005325973A (en) * 2004-05-17 2005-11-24 Sigma Meltec Ltd Sealing structure for processing chamber device
WO2023021739A1 (en) * 2021-08-20 2023-02-23 株式会社島津製作所 Heating furnace for degreasing

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