JPH027433Y2 - - Google Patents

Description

[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a sealing device for a batch type furnace.

(Prior art and its problems) In a batch type furnace, there are places where opposing surfaces (sealing surfaces) must be sealed, such as the inner cover and base in a bell type furnace, or the vacuum furnace main body and opening/closing door. do.

Conventionally, the sealing surface is provided with an elastic sealing material such as a rubber sponge or a gasket on one sealing surface, and the elastic sealing material is attached to the opposite surface with a tightening means consisting of bolts and nuts or with an air cylinder. The two seal surfaces are brought into contact with each other by a clamping means and the elastic seal material is compressed, thereby sealing between the two seal surfaces.

However, in order to obtain a perfect seal with the above-mentioned means, not only many clamping means are required, but also troublesome adjustment work is required in order to equalize the tightening force of the clamping means, etc. Has a point.

SUMMARY OF THE INVENTION An object of the present invention is to provide a sealing device for a batch type furnace that can solve the above-mentioned problems with a simple configuration.

(Means to Solve the Problems) In order to achieve the above-mentioned object, the present invention provides a sealing device for a batch type furnace having annular sealing surfaces facing each other. An annular elastic sealing material is attached thereto, and a vacuum exhaust pipe is communicated with the space formed by this elastic sealing material and the other sealing surface.

(Example) Next, an example of the present invention will be described with reference to the drawings.

1 to 3 show a first embodiment in which the sealing device of the present invention is applied to sealing the opposing sealing surfaces of the base and inner cover of a bell-shaped furnace.

The bell-shaped furnace Ta is generally installed on the inner base 3 of the furnace bottom 2 via the convector 4, for example.
Processing materials W such as coils are stacked up and this processing material W
An inner cover 6 is placed on the inner cover 6, a heating cover 7 is placed on the inner cover 6, a circulation fan 5 provided on the inner base 2 is driven, and the processing material W is heated by a burner 8 provided on the heating cover 7. be. Note that 9 is an exhaust gas hole.

The space between the lower end of the inner cover 6 and the base 1 is sealed by a sealing device 10a according to the present invention, which will be described below.

As shown in FIG. 2, the sealing device 10a includes an annular water-cooled box 11 provided at the lower end of the inner cover 6, and an inner and outer portion facing the lower surface (sealing surface S ₁ ) of the water-cooled box 11. heavy annular elastic sealing materials 12, 13 and both elastic sealing materials 12,
13 and an annular water jacket 14 (the upper surface of the water jacket 14 is a sealing surface S ₂ ) and a vacuum exhaust pipe 16 that is open between 13 and communicates with a vacuum pump 15 that is a vacuum source.

Further, on the upper surface of the water cooling box 11, an annular elastic sealing material 17 having inner and outer double layers is crimped to seal the inner cover 6 and the heating cover 7 when the heating cover 7 is placed on the pedestal 26. , 18 are provided.

Because of the above structure, when the processing materials W are stacked on the inner base 3 in the same manner as before and the inner cover 6 and the heating cover 7 are respectively covered, the lower surface of the annular water cooling box 11 provided at the lower end of the inner cover 6 S ₁ is crimped to the annular elastic sealing materials 12 and 13 provided on the top surface of the annular water jacket 14, while the bottom surface of the heating cover 7 is crimped to the sealing materials 17 and 18 provided on the top surface of the water cooling box 11. become.

Next, the vacuum pump 15 is driven to evacuate the space 23 formed between the lower surface _S1 of the water-cooled box 11 and between the inner and outer annular elastic seal members 12 and 13.

That is, when the space 23 becomes a vacuum, both the sealing materials 12 and 13 are compressed uniformly, and the inside of the inner cover 6 is completely sealed from the outside air.

Thereafter, the processing material W is heated by the burner 8 through the inner cover 6 to perform a predetermined heat treatment.

When the heat treatment is completed, the heating cover 7 is removed and a cooling cycle begins, after which the three-way valve 19 is communicated with the atmosphere to restore pressure in the space 23, and the inner cover 6 is removed.

In addition, when arranging a large number of bell-shaped furnaces Ta,
As shown in FIG.
A vacuum tank 22 may be provided between the vacuum solenoid valve 21 of the main pipe 20 and the three-way valve 19 so as to communicate with the vacuum pump 15. In this case, the vacuum electromagnetic valve 21 can be closed at the time of power outage or when the vacuum pump 15 is stopped, and the degree of vacuum in the space 23 can be reliably maintained by the vacuum tank 22.

Furthermore, in the case of a type in which the inside of the inner cover 6 is vacuum-purged, as shown in FIG.
They may be communicated via piping 25 via 4.

5 and 6 show a second embodiment of the present invention, in which the batch type furnace is a vacuum furnace Tb, and the furnace body 30 is
A sealing device 10b of the present invention is provided between the door 33 and the opening/closing door 33.
is applied.

That is, in the figure, 30 is a furnace body, and the furnace body 30 includes a heater 31, a circulation fan 32, and the like. The opening/closing door 33 is capable of opening and closing the front surface of the furnace body 30 by means not shown.

A furnace flange 35 equipped with a water-cooled box 34 at the rear is provided on the outer periphery of the opening of the furnace body 30, and on the front surface of the furnace flange 35, inner and outer double annular elastic sealing materials 36 and 37 are attached to a presser metal 38. It is attached by. On the other hand, the door flange 3 is located opposite the furnace flange 35 on the outer periphery of the opening/closing door 33.
9 is provided, and when the opening/closing door 33 is closed, a space 40 formed between both flanges 35 and 39 is
With the vacuum exhaust pipe 41 provided on the furnace flange 35,
As in the first embodiment, it is connected to the vacuum pump 15.

Therefore, the opening/closing door 33 is closed to open the space 40.
By creating a vacuum using the vacuum pump 15, the sealing surfaces S ₁ and S ₂ between the furnace body 30 and the opening/closing door 33 can be sealed in the same manner as in the first embodiment. In addition, the matters described in FIGS. 3 and 4 can be directly applied to this embodiment.

In the embodiment described above, although not shown, an appropriate number of clamping means and tightening means are provided.

(Effects of the invention) As is clear from the above explanation, according to the sealing device for a batch type furnace according to the present invention, in a batch type furnace having annular seal surfaces facing each other, an internal seal is formed on one of the annular seal surfaces. , A double outer annular elastic sealing material is installed, and a vacuum exhaust pipe is connected to the space formed by this elastic sealing material and the other sealing surface, so that the space can be evacuated during furnace operation. As a result, the other sealing surface is pressed against the one sealing surface side, and the adhesion between the elastic sealing material and the sealing surface is improved, and a uniform adhesion force can be obtained, thereby ensuring high sealing performance.
In addition, the seal can be released by simply restoring the pressure in the space to atmospheric pressure, which is easy to operate.

Furthermore, there is no deterioration of the working environment due to leak gas in the furnace.

[Brief explanation of the drawing]

Fig. 1 is a schematic sectional view of a first embodiment in which the present invention is applied to a bell-type furnace, Fig. 2 is an enlarged sectional view of the main part of Fig. 1, and Figs. 3 and 4 show the relationship between the space and the vacuum pump. 5 is a schematic sectional view of a second embodiment of the present invention applied to a vacuum furnace, and FIG. 6 is an enlarged sectional view of the main part of FIG. 5. S ₁ , S ₂ ... sealing surface, Ta, Tb ... batch furnace,
12, 13, 36, 37... Annular elastic sealing material,
16,41...Piping, 23,40...Space, 15
……Vacuum pump.

Claims (1)

[Scope of utility model registration request] In a batch type furnace having annular sealing surfaces facing each other, a double inner and outer annular elastic sealing material is attached to one of the annular sealing surfaces, and a space is formed by this elastic sealing material and the other sealing surface. A sealing device for a batch-type furnace, characterized in that a vacuum exhaust pipe is connected to the vacuum exhaust pipe.