JPH0645692A - Semiconductor laser - Google Patents

Semiconductor laser

Info

Publication number
JPH0645692A
JPH0645692A JP4199711A JP19971192A JPH0645692A JP H0645692 A JPH0645692 A JP H0645692A JP 4199711 A JP4199711 A JP 4199711A JP 19971192 A JP19971192 A JP 19971192A JP H0645692 A JPH0645692 A JP H0645692A
Authority
JP
Japan
Prior art keywords
semiconductor laser
lead
light receiving
receiving element
laser device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4199711A
Other languages
Japanese (ja)
Other versions
JP3204464B2 (en
Inventor
Yoshio Noisshiki
慶夫 野一色
Hirofumi Yoneyama
裕文 米山
Kimihide Mizuguchi
公秀 水口
Yasuyuki Bessho
靖之 別所
Keiichi Yoshitoshi
慶一 吉年
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Sanyo Electric Co Ltd
Sanyo Electric Co Ltd
Original Assignee
Tokyo Sanyo Electric Co Ltd
Tottori Sanyo Electric Co Ltd
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Sanyo Electric Co Ltd, Tottori Sanyo Electric Co Ltd, Sanyo Electric Co Ltd filed Critical Tokyo Sanyo Electric Co Ltd
Priority to JP19971192A priority Critical patent/JP3204464B2/en
Publication of JPH0645692A publication Critical patent/JPH0645692A/en
Application granted granted Critical
Publication of JP3204464B2 publication Critical patent/JP3204464B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Semiconductor Lasers (AREA)

Abstract

PURPOSE:To provide a semiconductor laser having a small irregularity in a light receiving amount of a light irradiated from a semiconductor laser element to a photoreceiving element. CONSTITUTION:An element group 14 has a lead 1 having positioning means, a photoreceiving element 9, and a semiconductor laser element 13 placed directly on the lead 1 disposed on the element 9 or in front of the element 9 or through a submount and having a forward main irradiating surface. A transparent resin 22 covering the vicinity of the rear surface of the element 13 to a photoreceiving surface 12 of the element 9 is provided. The group 14 is placed at the opposite side to a punched flash direction of the lead 1, at its front surface at the rear of a front flash part 7 of the lead, and at the rear surface front of the flash 7 of the rear of the lead 1.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は安定した光出力モニタ電
流を確保し易い半導体レーザ装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor laser device which can easily secure a stable optical output monitor current.

【0002】[0002]

【従来の技術】近年、半導体レーザ装置の改良が数多く
なされているが、その中で例えば本出願人が特願平4−
138696号にて出願した半導体レーザ装置を図4に
示す。この図に於て、リード41上に受光素子42が載
置され、その上に半導体レーザ素子43が載置されてい
る。半導体レーザ素子43の後面と受光素子42のP型
拡散領域44を透光性樹脂45が覆っている。P型拡散
領域44とオーミック接触して電極46が設けられてい
る。他のリード47がリード41と離れて設けられてい
る。
2. Description of the Related Art In recent years, many improvements have been made to semiconductor laser devices.
A semiconductor laser device filed in No. 138696 is shown in FIG. In this figure, the light receiving element 42 is mounted on the lead 41, and the semiconductor laser element 43 is mounted thereon. The transparent resin 45 covers the rear surface of the semiconductor laser element 43 and the P-type diffusion region 44 of the light receiving element 42. An electrode 46 is provided in ohmic contact with the P type diffusion region 44. The other lead 47 is provided separately from the lead 41.

【0003】[0003]

【発明が解決しようとする課題】しかして上述の半導体
レーザ装置に於ては、P型拡散領域44への受光量がば
らつくという欠点がある。本発明者がその原因を究明し
たところ、受光素子42がリード41の打ち抜きバリ方
向に載置されているため、半導体レーザ素子43の主出
射光が前方のバリ部48に干渉し、その散乱光が部分的
にP型拡散領域44に入っていることが判った。従っ
て、本発明はかかる従来の欠点に鑑みてなされたもの
で、半導体レーザ素子の前面からの出射光がP型拡散領
域に入ることを防止して、受光量のばらつきの少ない半
導体レーザ装置を提供するものである。
However, the above-mentioned semiconductor laser device has a drawback that the amount of light received by the P-type diffusion region 44 varies. The inventor of the present invention has investigated the cause, and since the light receiving element 42 is mounted in the punching burr direction of the lead 41, the main emission light of the semiconductor laser element 43 interferes with the front burr portion 48 and the scattered light Was partially contained in the P-type diffusion region 44. Therefore, the present invention has been made in view of the above conventional drawbacks, and provides a semiconductor laser device in which the light emitted from the front surface of the semiconductor laser element is prevented from entering the P-type diffusion region and the variation in the amount of received light is small. To do.

【0004】[0004]

【課題を解決するための手段】本発明は上述の課題を解
決するために、位置決め手段を有するリードと、そのリ
ード上に載置された受光素子と受光素子上または受光素
子の前方に位置するリード上に直接にまたはサブマウン
トを介して載置されかつ前方に主出射面を有する半導体
レーザ素子からなる素子群を設ける。半導体レーザ素子
の後面近傍から受光素子の受光面までを覆う透光性樹脂
とを設ける。そして、素子群がリードの打ち抜きバリ方
向と反対側に載置され、かつ素子群の前面がリードの前
方のバリ部より後方にありかつ素子群の後面がリードの
後方のバリ部より前方にある様に設ける。
In order to solve the above problems, the present invention is directed to a lead having a positioning means, a light receiving element mounted on the lead, and a light receiving element located on or in front of the light receiving element. An element group including a semiconductor laser element mounted directly on a lead or via a submount and having a main emission surface in the front is provided. A transparent resin covering the vicinity of the rear surface of the semiconductor laser element to the light receiving surface of the light receiving element is provided. The element group is mounted on the side opposite to the punching burr direction of the lead, the front surface of the element group is behind the front burr portion of the lead, and the rear surface of the element group is forward of the rear burr portion of the lead. Like this.

【0005】[0005]

【作用】本発明は上述の様に、半導体レーザ素子等から
なる素子群をリードのバリ方向と反対側に載置するの
で、半導体レーザ素子の前方からの出射光がリードの前
方のバリに干渉されない。故に受光面への受光は半導体
レーザ素子の後面からの出射光のみとなり、受光量が安
定する。
As described above, according to the present invention, since the element group including the semiconductor laser element is mounted on the side opposite to the burr direction of the lead, the light emitted from the front of the semiconductor laser element interferes with the burr in the front of the lead. Not done. Therefore, the light received on the light receiving surface is only the light emitted from the rear surface of the semiconductor laser element, and the amount of light received is stable.

【0006】[0006]

【実施例】以下、本発明の実施例を図1と図2に従い説
明する。図1は本実施例に係る半導体レーザ装置の断面
図であり、図2は図1のAA断面図である。これらの図
に於て、リード1は厚みが0.2乃至1.0mmの銅等
の金属材料からなり矩形部2と切欠部3と端子部4から
できている。リード1は端面5に形成されたV字状溝の
様な位置決め手段6を有している。その他に、位置決め
手段6はU字状溝でも、断面略コ字状の凹部に形成して
も良く、またはV字状、U字状、断面略コ字状の凸部に
形成しても良い。リード1はプレス加工で打ち抜かれた
ものであり、例えば前方のバリ部7や後方のバリ部8の
様に、外形線は打ち抜きによるバリが生じる。
Embodiments of the present invention will be described below with reference to FIGS. 1 is a sectional view of a semiconductor laser device according to the present embodiment, and FIG. 2 is a sectional view taken along the line AA of FIG. In these figures, the lead 1 is made of a metal material such as copper having a thickness of 0.2 to 1.0 mm and is composed of a rectangular portion 2, a notch portion 3 and a terminal portion 4. The lead 1 has a positioning means 6 such as a V-shaped groove formed on the end face 5. In addition, the positioning means 6 may be a U-shaped groove, a concave portion having a substantially U-shaped cross section, or a convex portion having a V-shaped, U-shaped, or substantially U-shaped cross section. . The lead 1 is punched by press working, and for example, like the front burr portion 7 and the rear burr portion 8, the outer line has a burr by punching.

【0007】受光素子9は例えばP−I−N構造からな
るシリコン系結晶に表面電極10、と裏面電極11を設
けられたものである。表面電極10はP型拡散領域から
なる受光面12とオーミック接触して形成されている。
受光素子9は銀ペースト等の導電性接着剤を介してリー
ド1上に固着されている。
The light receiving element 9 is, for example, a silicon crystal having a P-I-N structure provided with a front surface electrode 10 and a back surface electrode 11. The surface electrode 10 is formed in ohmic contact with the light receiving surface 12 formed of a P type diffusion region.
The light receiving element 9 is fixed on the lead 1 via a conductive adhesive such as silver paste.

【0008】半導体レーザ素子13は例えば、活性層と
それを挟むクラッド層からなるGaAlAsの発光層か
らできている。半導体レーザ素子13の両端は劈開され
その上に反射膜が形成されている。半導体レーザ素子1
3は前方に主出射面が位置する様に、半導体レーザ素子
13の裏面電極が受光素子9上に銀ペースト又は半田を
介して固着されている。半導体レーザ素子13は後方に
モニター用の副出射が行われる様に、後面の反射膜の反
射率が前面のそれよりも高い様に形成されている。上述
の様に、受光素子9とその上に載置された半導体レーザ
素子13により素子群14が構成されている。
The semiconductor laser device 13 is made of, for example, a GaAlAs light emitting layer composed of an active layer and a clad layer sandwiching the active layer. Both ends of the semiconductor laser element 13 are cleaved and a reflective film is formed on the cleaved surface. Semiconductor laser device 1
The back surface electrode of the semiconductor laser element 13 is fixed onto the light receiving element 9 via silver paste or solder so that the main emission surface of the semiconductor laser element 3 is located forward. The semiconductor laser element 13 is formed so that the reflectance of the reflecting film on the rear surface is higher than that on the front surface so that the secondary emission for monitoring is performed rearward. As described above, the light receiving element 9 and the semiconductor laser element 13 mounted thereon constitute the element group 14.

【0009】素子群14はリード1の打ち抜きバリ方向
と反対方向に載置され、素子群14の前面15、すなわ
ち受光素子9の前面はリード1の前方のバリ部7よりも
後方に配置されている。素子群14の後面16はリード
1の後方のバリ部8よりも前方に配置されている。
The element group 14 is placed in a direction opposite to the punching burr direction of the lead 1, and the front surface 15 of the element group 14, that is, the front surface of the light receiving element 9 is arranged rearward of the front burr portion 7 of the lead 1. There is. The rear surface 16 of the element group 14 is arranged in front of the burr portion 8 behind the lead 1.

【0010】他のリード17、18は銅等の金属材料か
らなり、リード1の切欠き部3に位置し、半導体レーザ
素子13の主出射方向と逆に延びている。第1、第2の
金属細線19、20は共に金等からなり、それぞれ半導
体レーザ素子13と他のリード17との間、および受光
素子9の表面電極10と他のリード18との間を結ぶ様
に配線されている。光軸中心線21は半導体レーザ素子
13の前面と後面を結ぶ線であり、出射ビームの進行方
向を示している。第1、第2の金属細線19、20は半
導体レーザ素子13の光軸中心線21に対して、略ハ字
状に左右に振分けて配置されている。
The other leads 17 and 18 are made of a metal material such as copper, are located in the notch 3 of the lead 1, and extend in the direction opposite to the main emission direction of the semiconductor laser device 13. The first and second thin metal wires 19 and 20 are both made of gold or the like, and connect between the semiconductor laser element 13 and the other lead 17, and between the surface electrode 10 of the light receiving element 9 and the other lead 18, respectively. Is wired like. The optical axis center line 21 is a line connecting the front surface and the rear surface of the semiconductor laser device 13, and indicates the traveling direction of the emitted beam. The first and second thin metal wires 19 and 20 are arranged in a substantially V-shaped distribution to the left and right with respect to the optical axis center line 21 of the semiconductor laser device 13.

【0011】透光性樹脂22は例えばエポキシ樹脂から
なり、半導体レーザ素子13の後面近傍から受光素子9
の受光面12を一体に覆う様に形成されている。絶縁枠
23は例えば、ポリカーボネート樹脂又はエポキシ樹脂
等からなり、半導体レーザ素子13の出射面を露出する
様に平面略コ字状に、かつリード1と他のリード17と
18の各表面と裏面を挟む様にトランスファーモールド
によって形成されている。これらの部品により半導体レ
ーザ装置24は構成されている。
The translucent resin 22 is made of, for example, an epoxy resin, and the light receiving element 9 is provided in the vicinity of the rear surface of the semiconductor laser element 13.
Is formed so as to integrally cover the light receiving surface 12 of. The insulating frame 23 is made of, for example, a polycarbonate resin or an epoxy resin, and has a substantially U-shape in plan view so as to expose the emitting surface of the semiconductor laser element 13, and the front and back surfaces of the lead 1 and the other leads 17 and 18 are formed. It is formed by transfer molding so as to sandwich it. The semiconductor laser device 24 is composed of these components.

【0012】そして支持具25に形成された凸部又は凹
部とリード1の端面5に形成された位置決め手段6、す
なわち凹部又は凸部をはめ合う様に、半導体レーザ装置
24が支持具25に固定されている。回折格子やハーフ
ミラーや対物レンズ等の光学部品26が半導体レーザ素
子13の主出射方向に設けられている。
The semiconductor laser device 24 is fixed to the supporting member 25 so that the convex portion or the concave portion formed on the supporting member 25 and the positioning means 6 formed on the end face 5 of the lead 1, that is, the concave portion or the convex portion are fitted to each other. Has been done. Optical components 26 such as a diffraction grating, a half mirror, and an objective lens are provided in the main emission direction of the semiconductor laser device 13.

【0013】次に、上述の第1実施例よりも受光素子の
温度上昇の少ない第2実施例を図3に従い説明する。図
3は本実施例に係る半導体レーザ装置の断面図である。
この図に於て、受光素子27は例えばP−I−N構造か
らなるシリコン系結晶に表面電極28と裏面電極29を
設けられたものである。表面電極28はP型拡散領域か
らなる受光面30とオーミック接触して形成されてい
る。受光素子27は銀ペースト等の導電性接着剤を介し
てリード1上に固着されている。
Next, a second embodiment in which the temperature rise of the light receiving element is smaller than that in the first embodiment will be described with reference to FIG. FIG. 3 is a sectional view of the semiconductor laser device according to the present embodiment.
In this figure, the light receiving element 27 is, for example, a silicon crystal having a P-I-N structure provided with a front electrode 28 and a back electrode 29. The surface electrode 28 is formed in ohmic contact with the light receiving surface 30 formed of a P type diffusion region. The light receiving element 27 is fixed on the lead 1 via a conductive adhesive such as silver paste.

【0014】サブマウント31は例えばシリコン等から
なり表面電極32と裏面電極33を設けられたものであ
り、銀ペースト等によりリード1上に固着されている。
またサブマウント31として導電性の良い材料を選択し
ても良い。
The submount 31 is made of, for example, silicon and is provided with a front surface electrode 32 and a back surface electrode 33, and is fixed on the lead 1 by silver paste or the like.
A material having good conductivity may be selected for the submount 31.

【0015】半導体レーザ素子13は前方に主出射面が
位置する様に、サブマウント31の表面電極32と半導
体レーザ素子13の裏面電極33を合金化することによ
って固定されている。上述の様に、受光素子27とその
前方のリード1上に載置されたサブマウント31とその
上に載置された半導体レーザ素子13により素子群34
が構成されている。
The semiconductor laser element 13 is fixed by alloying the front surface electrode 32 of the submount 31 and the back surface electrode 33 of the semiconductor laser element 13 so that the main emission surface is located at the front. As described above, the light receiving element 27, the submount 31 placed on the lead 1 in front of the light receiving element 27, and the semiconductor laser element 13 placed on the submount 31 make up the element group 34.
Is configured.

【0016】素子群34はリード1の打ち抜きバリ方向
と反対方向に載置され、素子群34の前面35、すなわ
ちサブマウント31の前面はリード1の前方のバリ部7
よりも後方に配置されている。素子群34の後面36、
すなわち受光素子27の後面はリード1の後方のバリ部
8よりも前方に配置されている。
The element group 34 is mounted in the direction opposite to the punching burr direction of the lead 1, and the front surface 35 of the element group 34, that is, the front surface of the submount 31 is the burr portion 7 in front of the lead 1.
It is located behind. The rear surface 36 of the element group 34,
That is, the rear surface of the light receiving element 27 is arranged in front of the burr portion 8 behind the lead 1.

【0017】図3の番号と図1、図2の番号と同じもの
は同一部品である事を示す。これらの部品により、半導
体レーザ装置37が構成されている。本半導体レーザ装
置37では、半導体レーザ素子と受光素子を離して配置
しているので、半導体レーザ素子の温度上昇による受光
素子の温度上昇が少ない。
The numbers in FIG. 3 and those in FIGS. 1 and 2 indicate the same parts. The semiconductor laser device 37 is configured by these components. In this semiconductor laser device 37, since the semiconductor laser element and the light receiving element are arranged apart from each other, the temperature rise of the light receiving element due to the temperature rise of the semiconductor laser element is small.

【0018】更に、上述の第2実施例では、半導体レー
ザ素子13をサブマウント31を介して載置している
が、その他に半導体レーザ素子13を直接にリード1上
に載置しても良い。直接に載置すれば半導体レーザ素子
13の放熱が良くなり、温度上昇が抑えられるので、寿
命が長くなる。
Further, although the semiconductor laser device 13 is mounted via the submount 31 in the above-mentioned second embodiment, the semiconductor laser device 13 may be directly mounted on the lead 1 in addition. . If the semiconductor laser element 13 is placed directly, the heat radiation of the semiconductor laser element 13 is improved and the temperature rise is suppressed, so that the life is extended.

【0019】[0019]

【発明の効果】本発明は上述の様に、半導体レーザ素子
等からなる素子群をリードのバリ方向と反対側に載置す
るので、半導体レーザ素子の前方からの出射光がリード
の前方のバリに干渉されない。故に受光面への受光は半
導体レーザ素子の後面からの出射光のみとなり、受光量
が安定する。従って、モニタ電流も安定するので、半導
体素子への出力制御が正確になる。
As described above, according to the present invention, since the element group including the semiconductor laser element and the like is mounted on the side opposite to the burr direction of the lead, the light emitted from the front side of the semiconductor laser element is formed on the front side of the lead. Is not interfered with. Therefore, the light received on the light receiving surface is only the light emitted from the rear surface of the semiconductor laser element, and the amount of light received is stable. Therefore, since the monitor current is also stable, the output control to the semiconductor element becomes accurate.

【0020】更に本発明は素子群の前面と後面をそれぞ
れリードのバリ部から遠ざけることにより、素子群をリ
ード上に隙間なく密接して載置することができる。故に
素子群の放熱性が良いので、半導体レーザ素子の温度上
昇が抑えられ、半導体レーザ素子の寿命が長くなる。ま
た受光素子の温度上昇も抑えられるので、受光素子の受
光特性(受光量に対するモニタ電流値)が安定し、モニ
タ電流がさらに安定する。
Further, according to the present invention, the element group can be placed on the lead closely without any gap by separating the front surface and the rear surface of the element group from the burrs of the leads. Therefore, since the heat dissipation of the element group is good, the temperature rise of the semiconductor laser element is suppressed and the life of the semiconductor laser element is extended. Further, since the temperature rise of the light receiving element is suppressed, the light receiving characteristic (monitor current value with respect to the amount of received light) of the light receiving element is stabilized, and the monitor current is further stabilized.

【0021】そして、本発明は半導体レーザ装置のリー
ドに設けられた位置決め手段と支持具の凸部又は凹部を
はめ合わす事により、半導体レーザ装置の位置ずれを防
止し出射ビームと光学部品の関係位置を正確に保持する
ことができる。
Further, according to the present invention, the positioning means provided on the lead of the semiconductor laser device and the convex portion or the concave portion of the supporting member are fitted to each other to prevent the semiconductor laser device from being displaced and the relative position between the emitted beam and the optical component. Can be held accurately.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1実施例に係る半導体レーザ装置の
断面図である。
FIG. 1 is a sectional view of a semiconductor laser device according to a first embodiment of the present invention.

【図2】図1のAA断面図である。FIG. 2 is a sectional view taken along line AA of FIG.

【図3】本発明の第2実施例に係る半導体レーザ装置の
断面図である。
FIG. 3 is a sectional view of a semiconductor laser device according to a second embodiment of the present invention.

【図4】従来の半導体レーザの断面図である。FIG. 4 is a sectional view of a conventional semiconductor laser.

【符号の説明】[Explanation of symbols]

1 リード 6 位置決め手段 7 前方のバリ部 8 後方のバリ部 9、27 受光素子 12、30 受光面 13 半導体レーザ素子 14、34 素子群 15、35 素子群の前面 16、36 素子群の後面 22 透光性樹脂 31 サブマウント DESCRIPTION OF SYMBOLS 1 Lead 6 Positioning means 7 Front burr part 8 Rear burr part 9, 27 Light receiving element 12, 30 Light receiving surface 13 Semiconductor laser element 14, 34 Element group 15, 35 Element group front surface 16, 36 Element group rear surface 22 Transparent Light-sensitive resin 31 submount

───────────────────────────────────────────────────── フロントページの続き (72)発明者 水口 公秀 大阪府守口市京阪本通2丁目18番地 三洋 電機株式会社内 (72)発明者 別所 靖之 大阪府守口市京阪本通2丁目18番地 三洋 電機株式会社内 (72)発明者 吉年 慶一 大阪府守口市京阪本通2丁目18番地 三洋 電機株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kimihide Mizuguchi 2-18 Keihan Hon-dori, Moriguchi-shi, Osaka Sanyo Electric Co., Ltd. Incorporated (72) Inventor Keiichi Yoshinari 2-18 Keihanhondori, Moriguchi-shi, Osaka Sanyo Electric Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 位置決め手段を有するリードと、そのリ
ード上に載置された受光素子とその受光素子上またはそ
の受光素子の前方に位置する前記リード上に直接にまた
はサブマウントを介して載置されかつ前方に主出射面を
有する半導体レーザ素子からなる素子群と、前記半導体
レーザ素子の後面近傍から前記受光素子の受光面までを
覆う透光性樹脂とを具備し、前記素子群が前記リードの
打ち抜きバリ方向と反対側に載置され、かつ前記素子群
の前面が前記リードの前方のバリ部より後方にあり、か
つ前記素子群の後面が前記リードの後方のバリ部より前
方にある事を特徴とする半導体レーザ装置。
1. A lead having a positioning means, a light receiving element placed on the lead, and a light receiving element placed on the light receiving element or in front of the light receiving element directly or via a submount. And a translucent resin covering from near the rear surface of the semiconductor laser element to the light receiving surface of the light receiving element, the element group including the lead Is placed on the side opposite to the punching burr direction, the front surface of the element group is behind the front burr portion of the lead, and the rear surface of the element group is forward of the rear burr portion of the lead. A semiconductor laser device.
JP19971192A 1992-07-27 1992-07-27 Semiconductor laser device Expired - Fee Related JP3204464B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19971192A JP3204464B2 (en) 1992-07-27 1992-07-27 Semiconductor laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19971192A JP3204464B2 (en) 1992-07-27 1992-07-27 Semiconductor laser device

Publications (2)

Publication Number Publication Date
JPH0645692A true JPH0645692A (en) 1994-02-18
JP3204464B2 JP3204464B2 (en) 2001-09-04

Family

ID=16412343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19971192A Expired - Fee Related JP3204464B2 (en) 1992-07-27 1992-07-27 Semiconductor laser device

Country Status (1)

Country Link
JP (1) JP3204464B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102337696A (en) * 2011-10-31 2012-02-01 陕西科技大学 Method for removing silicon in green liquid through cooperation of calcium oxide and aluminum salt
CN103498377A (en) * 2013-10-16 2014-01-08 陕西科技大学 Method for removing silica in multinuclear polymeric hydroxy-aluminum green liquor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102337696A (en) * 2011-10-31 2012-02-01 陕西科技大学 Method for removing silicon in green liquid through cooperation of calcium oxide and aluminum salt
CN103498377A (en) * 2013-10-16 2014-01-08 陕西科技大学 Method for removing silica in multinuclear polymeric hydroxy-aluminum green liquor

Also Published As

Publication number Publication date
JP3204464B2 (en) 2001-09-04

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