JP3213378B2 - Semiconductor laser device - Google Patents
Semiconductor laser deviceInfo
- Publication number
- JP3213378B2 JP3213378B2 JP13251392A JP13251392A JP3213378B2 JP 3213378 B2 JP3213378 B2 JP 3213378B2 JP 13251392 A JP13251392 A JP 13251392A JP 13251392 A JP13251392 A JP 13251392A JP 3213378 B2 JP3213378 B2 JP 3213378B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor laser
- leads
- laser device
- laser element
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Semiconductor Lasers (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は出射ビームの絞り易い半
導体レーザ装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor laser device in which an exit beam can be easily focused.
【0002】[0002]
【従来の技術】近年、半導体レーザ装置の改良が数多く
なされているが、その中で例えば特開平2−12548
6号公報で開示された半導体レーザ装置を図6に示す。
この図6に於て、ステム31上に柱状体32が固着さ
れ、その上に順次、サブマウント33、半導体レーザ素
子34が固着されている。またステム31上に順次、載
置台35、受光素子36が固着されている。そしてケー
ス37の開孔部の下にガラス38が固定されている。2. Description of the Related Art In recent years, many improvements have been made to semiconductor laser devices.
FIG. 6 shows a semiconductor laser device disclosed in Japanese Unexamined Patent Publication (Kokai) No. 6-No.
In FIG. 6, a column 32 is fixed on a stem 31, and a submount 33 and a semiconductor laser element 34 are fixed on the column 32 in this order. A mounting table 35 and a light receiving element 36 are sequentially fixed on the stem 31. A glass 38 is fixed below the opening of the case 37.
【0003】[0003]
【発明が解決しようとする課題】しかして上述の半導体
レーザ装置に於て、半導体レーザ素子34が高温になる
ので、これを放熱させるために高価な材料からなるステ
ム31と柱状体32とサブマウント33を使用してい
る。そして半導体レーザ素子34からの出射光がガラス
38の表面上の凹凸により散乱するので出射ビームが絞
りにくいという欠点が有る。更に受光素子36上に大気
中の水分により結露が生じて誤動作する事を防止するた
めに、ケース37の内部に窒素39を封入しながらガラ
ス38を固定している。そのため製造時間が長くなる欠
点がある。故に本発明は上述の欠点に鑑みてなされたも
のであり、コストの安いかつ出射ビームを絞りやすいか
つ製造し易い半導体レーザ装置を提供するものである。However, in the above-described semiconductor laser device, the temperature of the semiconductor laser element 34 becomes high. Therefore, in order to dissipate the heat, the stem 31, the columnar body 32 and the submount 32 made of an expensive material are used. 33 are used. Further, since the light emitted from the semiconductor laser element 34 is scattered by irregularities on the surface of the glass 38, there is a disadvantage that the emitted beam is difficult to stop. Further, in order to prevent malfunctions due to dew condensation caused by atmospheric moisture on the light receiving element 36, the glass 38 is fixed while the nitrogen 39 is sealed in the case 37. Therefore, there is a disadvantage that the manufacturing time is long. Therefore, the present invention has been made in view of the above-mentioned disadvantages, and an object of the present invention is to provide a semiconductor laser device which is inexpensive, easy to focus an outgoing beam, and easy to manufacture.
【0004】[0004]
【課題を解決するための手段】本発明の半導体レーザ装
置は、請求項1に記載のように、複数のリードと、前記
リードの上に銀ペーストを介して直接載置された半導体
レーザ素子と、前記半導体レーザ素子の出射面を露出す
るように平面コ字状に設けられるとともに前記複数のリ
ードの表裏面を挟むように形成された樹脂製の絶縁枠と
を具備したことを特徴とする。本発明の半導体レーザ装
置は、請求項2に記載のように、複数のリードと、前記
リードの上に載置された半導体レーザ素子と受光素子
と、前記半導体レーザ素子の出射面を露出するように平
面コ字状にかつ前記複数のリードの表裏面を挟むように
形成された樹脂製の絶縁枠と、前記半導体レーザ素子の
前記出射面を露出するように半導体レーザ素子の後面か
ら前記受光素子を一体に覆うように形成した透光性樹脂
とを具備したことを特徴とする。According to a first aspect of the present invention, there is provided a semiconductor laser device comprising: a plurality of leads; and a semiconductor laser device directly mounted on the leads via a silver paste. And a resin insulating frame which is provided in a plane U-shape so as to expose the emission surface of the semiconductor laser element and is formed so as to sandwich the front and back surfaces of the plurality of leads. According to a second aspect of the present invention, there is provided a semiconductor laser device that exposes a plurality of leads, a semiconductor laser element and a light receiving element mounted on the leads, and an emission surface of the semiconductor laser element. A resin insulating frame formed in a plane U-shape and sandwiching the front and back surfaces of the plurality of leads, and the light receiving element from a rear surface of the semiconductor laser element so as to expose the emission surface of the semiconductor laser element. And a light-transmitting resin formed so as to integrally cover the
【0005】[0005]
【作用】本発明の半導体レーザ装置は、半田に比べて使
用温度が低い銀ペーストを介して半導体レーザ素子の固
定を行なうので、樹脂製の絶縁枠の変形を防止すること
ができ、半田を用いる場合に比べて作業性を高めること
ができる。また、銀ペーストは半田に比べて熱伝導性が
悪いが、半導体レーザ素子をリード上に銀ペーストを介
して直接載置するので、放熱特性を確保することができ
る。また、絶縁枠は、平面コ字状にかつ複数のリードの
表裏面を挟むように形成された樹脂製であるので、複数
のリードを強固に保持することができるとともに、リー
ド保持後に半導体レーザ素子を載置する際の配置スペー
スを確保することができる。また、構成部品を削減して
形状の小型化やコストの低減を図ることができる。ま
た、本発明の半導体レーザ装置は、半導体レーザ素子の
出射面を露出するように半導体レーザ素子の後面から受
光素子を一体に覆うように形成した透光性樹脂を具備し
ているので、結露防止のための構造を製造しやすい形態
で提供することができる。また、結露防止のための透光
性樹脂とは別に、リード挟み込み用の樹脂製の絶縁枠を
設けているので、透光性樹脂を配置する前に絶縁枠を形
成することができる。According to the semiconductor laser device of the present invention, the semiconductor laser element is fixed via the silver paste whose operating temperature is lower than that of the solder, so that the resin insulating frame can be prevented from being deformed and the solder is used. Workability can be improved as compared with the case. Further, the silver paste has a lower thermal conductivity than the solder, but since the semiconductor laser element is directly mounted on the lead via the silver paste, heat radiation characteristics can be secured. Further, since the insulating frame is made of a resin formed in a flat U-shape and sandwiching the front and back surfaces of the plurality of leads, the insulating frame can hold the plurality of leads firmly and, after holding the leads, the semiconductor laser device. Can be secured when placing the device. In addition, the number of components can be reduced, so that the size can be reduced and the cost can be reduced. In addition, the semiconductor laser device of the present invention includes a light-transmitting resin formed so as to integrally cover the light receiving element from the rear surface of the semiconductor laser element so as to expose the emission surface of the semiconductor laser element. Can be provided in a form that is easy to manufacture. In addition, since an insulating frame made of resin for sandwiching the leads is provided separately from the translucent resin for preventing dew condensation, the insulating frame can be formed before disposing the translucent resin.
【0006】[0006]
【実施例】以下、本発明の第1実施例を図1と図2に従
い説明する。図1は本実施例に係る半導体レーザ装置の
断面図であり、図2は図1のAA断面図である。これら
の図に於て、リード1は金属等の材料により厚みが0、
1乃至0、5mm程度の矩形板状に形成されている。他
のリード2、3も同様に金属等の材料より成り、共にリ
ード1と離れて対向な位置にある。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a cross-sectional view of the semiconductor laser device according to the present embodiment, and FIG. 2 is a cross-sectional view along AA in FIG. In these figures, the lead 1 has a thickness of 0,
It is formed in a rectangular plate shape of about 1 to 0 and 5 mm. Similarly, the other leads 2 and 3 are made of a material such as metal, and are located apart from and opposite to the lead 1.
【0007】半導体レーザ素子4は直線状の活性層とそ
の活性層を挟むクラッド層からなるGaAlAsの発光
層からできている。半導体レーザ素子4の両端はへき開
されその上に反射膜が形成されている。半導体レーザ素
子4の出射面5がリード1の1辺の近傍に位置する様
に、リード1上に銀ペースト等の導電性接着剤又は半田
を介して半導体レーザ素子4が固着されている。また従
来は銀ペースト等は熱伝導が悪いので使用出来なかっ
た。しかし本実施例では半導体レーザ素子4をサブマウ
ントなしにリード1上に固着しても放熱特性を確保でき
るので銀ペーストを使用できる。銀ペーストの使用温度
は約160℃と低いので、リード1上に樹脂を設ける時
に樹脂が変形しない。従って従来の様に半導体レーザ素
子とサブマウントを半田付けする作業に比べて、本実施
例の銀ペーストで固着する方が作業が容易となる。[0007] The semiconductor laser element 4 is made of a GaAlAs light emitting layer comprising a linear active layer and a cladding layer sandwiching the active layer. Both ends of the semiconductor laser element 4 are cleaved, and a reflection film is formed thereon. The semiconductor laser element 4 is fixed on the lead 1 via a conductive adhesive such as silver paste or solder so that the emission surface 5 of the semiconductor laser element 4 is located near one side of the lead 1. Conventionally, silver paste and the like cannot be used because of poor heat conduction. However, in this embodiment, even if the semiconductor laser element 4 is fixed on the lead 1 without a submount, heat radiation characteristics can be secured, so that silver paste can be used. Since the use temperature of the silver paste is as low as about 160 ° C., the resin does not deform when the resin is provided on the lead 1. Therefore, compared with the conventional operation of soldering the semiconductor laser element and the submount, the operation is more easily performed by using the silver paste according to the present embodiment.
【0008】受光素子6は例えばP−I−N構造を成し
たシリコン系結晶の表面と裏面に電極を設けたものであ
る。受光素子6は半導体レーザ素子4の後方、すなわち
出射面5と反対側のリード1上に固着されている。絶縁
枠7は例えばポリカーボネート樹脂又はエポキシ樹脂等
からなり、半導体レーザ素子4の出射面5を露出する様
に平面コ字状に、かつリード1、他のリード2、3の各
表面と裏面を挟む様にトランスファーモールドによって
形成されている。また絶縁枠7はアルミナセラミック又
は絶縁処理した金属材料で構成しても良い。The light receiving element 6 has, for example, electrodes provided on the front and back surfaces of a silicon-based crystal having a PIN structure. The light receiving element 6 is fixed behind the semiconductor laser element 4, that is, on the lead 1 on the side opposite to the emission surface 5. The insulating frame 7 is made of, for example, a polycarbonate resin or an epoxy resin, and has a U-shape in a plane so as to expose the emission surface 5 of the semiconductor laser device 4 and sandwiches the front surface and the back surface of each of the leads 1 and the other leads 2 and 3. As described above. The insulating frame 7 may be made of alumina ceramic or an insulated metal material.
【0009】金属細線8が半導体レーザ素子4の表面電
極と他のリード2を結ぶ様に配線され、金属細線9が受
光素子6の表面電極と他のリード3を結ぶ様に配線され
ている。透光性樹脂10は、例えばエポキシ樹脂又はシ
リコン樹脂からなり、半導体レーザ素子4の出射面5を
露出する様に、少なくとも半導体レーザ素子4の後面
(出射面5の反対側の端面)近傍から受光素子6を一体
に覆う様に形成されている。これらの部品により半導体
レーザ装置11が構成されている。A thin metal wire 8 is wired so as to connect the surface electrode of the semiconductor laser element 4 to another lead 2, and a thin metal wire 9 is wired so as to connect the surface electrode of the light receiving element 6 to the other lead 3. The translucent resin 10 is made of, for example, epoxy resin or silicon resin, and receives light from at least the vicinity of the rear surface (the end surface opposite to the emission surface 5) of the semiconductor laser device 4 so as to expose the emission surface 5 of the semiconductor laser device 4. It is formed so as to cover the element 6 integrally. These components constitute the semiconductor laser device 11.
【0010】次に、上述の第1実施例を改良した本発明
の第2実施例を図3に従って説明する。図3は本実施例
に係る半導体レーザ装置の断面図である。この図に於
て、絶縁枠12は半導体レーザ素子4の出射面5を露出
する様に、平面状4辺がリード1、他のリード2、3の
周辺を囲む様に形成されている。透光性樹脂13は半導
体レーザ素子4の出射面5を露出する様に、半導体レー
ザ素子4と受光素子6と金属細線8、9を覆い、絶縁枠
12の内部を埋める様に形成されている。上述の様に金
属細線8、9を透光性樹脂13で覆う事により充電部が
露出しないので、電気的短絡を防止できる。Next, a second embodiment of the present invention, which is an improvement of the first embodiment, will be described with reference to FIG. FIG. 3 is a sectional view of the semiconductor laser device according to the present embodiment. In this figure, the insulating frame 12 is formed such that four plane sides surround the periphery of the lead 1 and the other leads 2 and 3 so as to expose the emission surface 5 of the semiconductor laser element 4. The translucent resin 13 is formed so as to cover the semiconductor laser element 4, the light receiving element 6, and the fine metal wires 8 and 9 so as to expose the emission surface 5 of the semiconductor laser element 4 and fill the inside of the insulating frame 12. . By covering the fine metal wires 8 and 9 with the translucent resin 13 as described above, the charged portion is not exposed, so that an electrical short circuit can be prevented.
【0011】次に上述の第2実施例を改良した第3実施
例を図4と図5に従って説明する。図4は本実施例に係
る半導体レーザ装置の断面図であり、図5は図4のBB
断面図である。これらの図に於て、受光素子14は例え
ばP−I−N構造を成したシリコン系結晶に表面電極1
5、16と裏面電極17を設けたものである。表面電極
16はP型拡散領域18とオーミック接触して形成され
ている。Next, a third embodiment which is an improvement of the above-described second embodiment will be described with reference to FIGS. FIG. 4 is a cross-sectional view of the semiconductor laser device according to the present embodiment, and FIG.
It is sectional drawing. In these figures, the light receiving element 14 is made of, for example, a silicon-based crystal having a PIN structure and a surface electrode 1.
5 and 16 and a back electrode 17 are provided. The surface electrode 16 is formed in ohmic contact with the P-type diffusion region 18.
【0012】半導体レーザ素子4は受光素子14の表面
電極15上に固着されている。金属細線8、9、19は
それぞれ半導体レーザ素子の表面と他のリード2との
間、表面電極16と他のリード3との間、および表面電
極15とリード1との間を結ぶ様に配線されている。透
光性樹脂20は半導体レーザ素子4の後面近傍から受光
素子14のP型拡散領域18を一体に覆う様に形成され
ている。この様に透光性樹脂20で覆うことにより、半
導体レーザ素子4の後面からの出射光が透光性樹脂20
と大気との界面で反射されP型拡散領域18に確実に入
射する。故に受光量が増えるので、受光素子14の感度
が向上する。猶、図3乃至図5で示した番号と図1と図
2で示した番号と同じものは同じ部品である事を示す。The semiconductor laser element 4 is fixed on the surface electrode 15 of the light receiving element 14. The thin metal wires 8, 9, and 19 are wired so as to connect between the surface of the semiconductor laser device and the other lead 2, between the surface electrode 16 and the other lead 3, and between the surface electrode 15 and the lead 1, respectively. Have been. The translucent resin 20 is formed so as to integrally cover the P-type diffusion region 18 of the light receiving element 14 from near the rear surface of the semiconductor laser element 4. By covering with the translucent resin 20 in this way, the light emitted from the rear surface of the semiconductor laser element 4
The light is reflected at the interface between the P-type and the atmosphere and reliably enters the P-type diffusion region 18. Therefore, the amount of received light increases, and the sensitivity of the light receiving element 14 improves. The numbers shown in FIGS. 3 to 5 and the numbers shown in FIGS. 1 and 2 indicate the same parts.
【0013】[0013]
【発明の効果】以上のように本発明によれば、半田に比
べて使用温度が低い銀ペーストを介して半導体レーザ素
子の固定を行なうので、樹脂製の絶縁枠の変形を防止す
ることができ、半田を用いる場合に比べて作業性を高め
ることができる。また、銀ペーストは半田に比べて熱伝
導性が悪いが、半導体レーザ素子をリード上に銀ペース
トを介して直接載置するので、放熱特性を確保すること
ができる。また、絶縁枠は、平面コ字状にかつ複数のリ
ードの表裏面を挟むように形成された樹脂製であるの
で、複数のリードを強固に保持することができるととも
に、リード保持後に半導体レーザ素子を載置する際の配
置スペースを確保することができる。また、構成部品を
削減して形状の小型化やコストの低減を図ることができ
る。As described above, according to the present invention, since the semiconductor laser element is fixed via the silver paste whose operating temperature is lower than that of solder, the deformation of the resin insulating frame can be prevented. In addition, workability can be improved as compared with the case where solder is used. Further, the silver paste has a lower thermal conductivity than the solder, but since the semiconductor laser element is directly mounted on the lead via the silver paste, heat radiation characteristics can be secured. Further, since the insulating frame is made of a resin formed in a flat U-shape and sandwiching the front and back surfaces of the plurality of leads, the insulating frame can hold the plurality of leads firmly and, after holding the leads, the semiconductor laser device. Can be secured when placing the device. In addition, the number of components can be reduced, so that the size can be reduced and the cost can be reduced.
【0014】また、本発明によれば、半導体レーザ素子
の出射面を露出するように半導体レーザ素子の後面から
受光素子を一体に覆うように形成した透光性樹脂を具備
しているので、結露防止のための構造を製造しやすい形
態で提供することができる。また、結露防止のための透
光性樹脂とは別に、リード挟み込み用の樹脂製の絶縁枠
を設けているので、透光性樹脂を配置する前に絶縁枠を
形成することができる。Further, according to the present invention, since the light-transmitting resin formed so as to integrally cover the light-receiving element from the rear surface of the semiconductor laser element so as to expose the emission surface of the semiconductor laser element, dew condensation can be achieved. The structure for prevention can be provided in a form that is easy to manufacture. In addition, since an insulating frame made of resin for sandwiching the leads is provided separately from the translucent resin for preventing dew condensation, the insulating frame can be formed before disposing the translucent resin.
【図1】本発明の第1実施例に係る半導体レーザ装置の
断面図である。FIG. 1 is a sectional view of a semiconductor laser device according to a first embodiment of the present invention.
【図2】図1のAA断面図である。FIG. 2 is a sectional view taken along the line AA of FIG.
【図3】本発明の第2実施例に係る半導体レーザ装置の
断面図である。FIG. 3 is a sectional view of a semiconductor laser device according to a second embodiment of the present invention.
【図4】本発明の第3実施例に係る半導体レーザ装置の
断面図である。FIG. 4 is a sectional view of a semiconductor laser device according to a third embodiment of the present invention.
【図5】図4のBB断面図である。FIG. 5 is a sectional view taken along the line BB of FIG. 4;
【図6】従来の半導体レーザ装置の断面図である。FIG. 6 is a sectional view of a conventional semiconductor laser device.
1 リード 4 半導体レーザ素子 5 出射面 6、14 受光素子 7、12 絶縁枠 10、13、20 透光性樹脂 DESCRIPTION OF SYMBOLS 1 Lead 4 Semiconductor laser element 5 Emission surface 6,14 Light receiving element 7,12 Insulating frame 10,13,20 Translucent resin
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平3−27481(JP,A) 特開 昭63−136684(JP,A) 特開 平2−86184(JP,A) 実開 平3−45676(JP,U) 実開 平2−54263(JP,U) 実開 昭62−76554(JP,U) ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-3-27481 (JP, A) JP-A-63-136684 (JP, A) JP-A-2-86184 (JP, A) 45676 (JP, U) Japanese Utility Model 254263 (JP, U) Japanese Utility Model 62-76554 (JP, U)
Claims (2)
ストを介して直接載置された半導体レーザ素子と、前記
半導体レーザ素子の出射面を露出するように平面コ字状
に設けられるとともに前記複数のリードの表裏面を挟む
ように形成された樹脂製の絶縁枠とを具備したことを特
徴とする半導体レーザ装置。[1 claim: a plurality of leads, a semiconductor laser device which is placed directly over the silver paste on the leads, the
A semiconductor laser device, comprising: a resin U-shaped frame provided so as to expose the emission surface of the semiconductor laser element in a plane U-shape and sandwiching the front and back surfaces of the plurality of leads. .
れた半導体レーザ素子と受光素子と、前記半導体レーザ
素子の出射面を露出するように平面コ字状にかつ前記複
数のリードの表裏面を挟むように形成された樹脂製の絶
縁枠と、前記半導体レーザ素子の前記出射面を露出する
ように半導体レーザ素子の後面から前記受光素子を一体
に覆うように形成した透光性樹脂とを具備したことを特
徴とする半導体レーザ装置。[2 Claim: a plurality of leads, the semiconductor laser element and the light receiving element placed on said leads, said semiconductor laser
So as to expose the resin-made insulating frame formed to the plane U-shape and sandwiching the front and back surfaces of said plurality of leads so as to expose the exit surface of the element, the pre-Symbol emitting surface of the semiconductor laser element A light-transmitting resin formed so as to integrally cover the light receiving element from the rear surface of the semiconductor laser element.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13251392A JP3213378B2 (en) | 1992-05-25 | 1992-05-25 | Semiconductor laser device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13251392A JP3213378B2 (en) | 1992-05-25 | 1992-05-25 | Semiconductor laser device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH05327118A JPH05327118A (en) | 1993-12-10 |
JP3213378B2 true JP3213378B2 (en) | 2001-10-02 |
Family
ID=15083099
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13251392A Expired - Fee Related JP3213378B2 (en) | 1992-05-25 | 1992-05-25 | Semiconductor laser device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3213378B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4668299B2 (en) | 2008-06-17 | 2011-04-13 | シャープ株式会社 | Semiconductor laser device and manufacturing method thereof |
-
1992
- 1992-05-25 JP JP13251392A patent/JP3213378B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH05327118A (en) | 1993-12-10 |
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