JPH0645310A - Drying method and drying apparatus - Google Patents

Abstract

PURPOSE:To provide a drying method and a drying apparatus which enables uniform drying within a short period by effectively eliminating cleaning solution such as aqueous, alcoholic or petrochemical solvent adhered to a work. CONSTITUTION:In a drying chamber 11 of a drying apparatus 10, heated air supplied from a compressor 18 through a first air flowing path 14 is blown from a nozzle 141 to a work 1 which has been cleaned. Simultaneously, the air is drawn by a blower 20 on the side of bottom surface of a cleaning cage 21. Therefore, in the drying chamber 11, air flow is directed toward an air suction area 191 from the nozzle 141. Accordingly, a work W is set on the path of air flow for eliminating the cleaning solution adhering the work W and drying the work W.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drying method and a drying apparatus for removing a cleaning liquid from a work after cleaning.

[0002]

2. Description of the Related Art Chlorine-based solvents and fluorine-based solvents have been used for cleaning workpieces such as machine parts and circuit boards, but since their influence on the environment is regarded as a problem,
Their use is being regulated. As an alternative to this, a water-based cleaning agent, alcohol-based or petroleum-based solvent, etc. can be considered. In the drying process after cleaning with these cleaning agents and solvents, water, alcohol, petroleum-based solvents, etc. that adhere to the work in the final cleaning process are all compared to chlorine-based solvents and fluorine-based solvents. Since it is inferior in drying property, as a means for removing these liquids from the work and drying,
The method shown in FIG. 10 or FIG. 11 is known. Among them, in the method shown in FIG. 10, the compressor 101 is used for the cleaning basket 21 in which the cleaned work W is stored.
This is a method in which the air flow 103 is blown from the nozzle 102 by means of the physical force to drain the cleaning liquid from the work W and evaporate the cleaning liquid. In the method shown in FIG. 11, the hopper-shaped work holding chamber 104 whose upper end is an open end is provided with the cleaning basket 21 containing the cleaned work W and the lower side of the work holding chamber 104. Blower 1 through the air suction part 105 opening at
This is a method of sucking air at 06 to drain the work W.

[0003]

However, as shown in FIG.
In the conventional drying method shown in FIG. 3, the airflow 103 blown from above is blocked by the work W located above the cleaning basket 21, and the airflow 103 is present around the work W located on the bottom surface side. Since it does not reach, the drying speed is low,
In addition, since the liquid is not sufficiently drained, there is a problem that a dry stain is likely to remain even after drying. On the other hand, the conventional method shown in FIG. 11 is relatively effective as a liquid draining method, but as a method for completely drying a small amount of liquid remaining on a work, the air flow applied to the work is at room temperature, The evaporation rate of is low and is not suitable.

In view of the above problems, the object of the present invention is to
The purpose of the present invention is to realize a drying method and a drying device for efficiently removing and drying cleaning liquids such as water, alcohol, and petroleum-based solvents that have adhered to works. An object of the present invention is to realize a drying method and a drying device capable of uniformly drying without generating a drying stain.

[0005]

The first means taken in the drying method according to the present invention to solve the above-mentioned problems is as follows.
In the drying chamber, while blowing air from the air blowing portion, the air is forcibly discharged from the air suction portion on the downstream side of this air flow to form an air flow, and the work is held at an intermediate position in the path of this air flow. That is, a liquid removing process for removing the liquid adhering to the work is performed. In order to make such a drying method feasible, the drying apparatus according to the present invention is provided with an air flow supply connected to a first air flow path opened as an air blowing portion on one inner wall surface side of the drying chamber. Source, a first air discharge source connected to a second air flow path opening as an air suction portion on the other inner wall surface side facing the one inner wall surface side of the drying chamber, and an air blowing portion in the drying chamber. Work holding means capable of holding a work is provided between the air suction unit and the air suction unit.

[0006] Here, it is preferable to perform the vacuum drying step of performing vacuum drying on the workpiece drained in the draining step in the same drying chamber. Therefore, in comparison with the above-mentioned drying device, the first air discharge source is a suction device having a large suction force capable of discharging air from the drying chamber in which the first air flow path is closed until it becomes a vacuum state. Adopt means.

Alternatively, on the side of the air discharge source, a third air flow path that is a bypass for the second air flow path and the first air flow discharge source, and the third air flow path is inserted on the third air flow path. And a second air exhaust source are provided, and an air blowing means with a large air flow is adopted for the air exhaust source on one side, while the air exhaust source on the other side is used from the drying chamber to a vacuum state. Adopt a suction means with a large suction force that can discharge air.

Next, the second means taken in the drying method according to the present invention to solve the above-mentioned problem is to discharge air from the downstream side while blowing air from the air blowing portion in the drying chamber. And a liquid draining step of holding the work in the middle of the path of the air flow and draining the liquid adhering to the work.
The vacuum drying step of performing vacuum drying on the workpiece drained in the draining step is performed in the same drying chamber.
In order to make such a drying method feasible, the drying apparatus according to the present invention can communicate with the air suction portion side and the exhaust passage side from the first air discharge source on the downstream side of the air flow. A third air flow path connected and bypassing the second air flow path and the first air discharge source; and a second air discharge source interposed on the third air flow path,
Air flow path switching means for switching between a state in which the air suction portion side is in communication with the second air flow path and a state in which the air suction portion side is in communication with the third air flow path; and a first air flow path closed state. An air flow path opening / closing means for switching to an open state is provided, and at the same time, an air blowing means having a large air blowing amount is adopted for the air discharging source on one side, while a suction means having a large suction force is used for the air discharging source on the other side. To adopt.

Next, the third means taken in the drying method of the present invention to solve the above-mentioned problems is to suck air from the air suction portion in the drying chamber having the air suction portion and to suck the air from the air suction portion. A liquid draining process that forms an air flow toward the air suction part, holds the work in the middle of the path of this air flow and drains the liquid adhering to the work, and the liquid draining process The vacuum drying step of performing vacuum drying on the workpiece is performed in the same drying chamber. In order to make such a drying method feasible, in the drying apparatus according to the present invention, instead of the air flow supply source, the first air serving as an air suction portion opened on one inner wall surface side of the drying chamber is provided. While providing a flow path, an air flow discharge source connected to a second air flow path opening as an air suction portion on the other inner wall surface side facing the one inner wall surface side of the drying chamber is provided. For this, a suction means with a large suction force that can discharge air from the drying chamber until it becomes a vacuum state is adopted. Or, on the air exhaust source side,
A third air flow path that is a bypass for the second air flow path and the first air flow discharge source, and a second air discharge source interposed on the third air flow path are provided. , One side of the air exhaust source adopts a blowing means having a large blowing amount, while the other side of the air exhaust source has a large suction force capable of discharging air from the drying chamber until the air is in a vacuum state. To adopt.

Here, in the drying method according to the present invention, the upstream side of the drying chamber (upstream side of the air blowing section or the air suction section) and the downstream side of the drying chamber (downstream side of the air suction section) are connected. It is preferable to perform this by circulating an air flow.
Therefore, in the drying device according to the present invention, at least one of an air supply source and an air discharge source is interposed between the first air flow path and the second air flow path, It is preferable to provide a closed-loop airflow circulation path that brings them into communication.

Next, the fourth means taken in the drying method of the present invention to solve the above-mentioned problems is a liquid draining step of rotating the work and draining the work by the centrifugal force thereof, and this liquid That is, the vacuum drying step of performing vacuum drying on the workpiece drained in the cutting step is performed in the same drying chamber. In order to enable such a drying method to be carried out, the drying apparatus according to the present invention includes a centrifugal shaking-off means for applying a centrifugal force to the work in the drying chamber to shake off the liquid adhering to the work, and a drying chamber. And a suction means having a large suction force that is connected to an air flow path that opens as an air suction portion on the inner wall surface side and that is capable of discharging air from the drying chamber until it becomes a vacuum state.

Here, it is preferable that the drying method according to the present invention is performed in a state in which gas-liquid separating means for removing mist and vapor from the air flow is provided on the downstream side of the drying chamber. Therefore, in the drying device according to the present invention, on the downstream side of the drying chamber,
It is preferable to provide a gas-liquid separating means for removing mist and vapor from the air stream.

[0013]

In the drying device using the above first means,
The air flow supplied from the air flow supply source is supplied to the drying chamber through the first air flow path (air blowing unit) and is supplied to the cleaned work, while on the side opposite to the work, the drying chamber is supplied. Is forcibly discharged through the second air flow path (air suction part) by the first air discharge source such as a vacuum pump or blower, so that the air flow is always maintained around any work. Because it is kept high,
Draining and drying are performed efficiently and uniformly. Therefore, even if a large amount of works are dried at once, uneven drying is unlikely to occur. In particular, when the air flow supplied to the work is heated, the temperature of the work and the adhering liquid rises, so that the evaporation rate of the adhering liquid increases and drying can be performed in a short time.
Here, when a large amount of airflow formed by both the airflow supply source and the air exhaust source is used to remove the blast liquid, and then vacuum drying is performed, it is even more efficient and for a short time. It can be dried at. That is, when draining a large amount of cleaning liquid adhering to the workpiece, compared to a method of evaporating the liquid by using hot air or vacuum, it is better to use a large amount of air flow to perform blowing liquid draining. While the removal efficiency of the liquid is high, vacuum drying is suitable for complete drying of a work that has a small amount of cleaning liquid attached, such as after draining, so the drying method using these combinations is the most efficient and the shortest time. This is because it can be dried at. Here, vacuum drying is not suitable for removing a large amount of cleaning liquid adhering to a work. This is because the latent heat of vaporization is taken away as the liquid evaporates, but the replenishment of heat cannot follow so that the temperatures of the workpiece and the cleaning liquid are lowered and the evaporation rate is lowered. However, vacuum drying is effective for removing a small amount of cleaning liquid adhering to the work. This is because if the amount of the cleaning liquid adhering to the work is small, the drying is completed before the evaporation rate is lowered, so that the drying can be performed at a higher evaporation rate as compared with the blast drying by hot air or air.

In the drying device according to the present invention,
Since the draining and the vacuum drying are performed in the same room, the drying device is compact and space saving can be achieved.

Further, when the adhering liquid of the work is dried only by heat drying or vacuum drying, if the adhering liquid is dirty, the dirt is concentrated and remains as a dry stain, but in the present invention, it is sufficient. Since the liquid is drained and then vacuum-dried, no dry spots remain on the dried work.

Further, in the drying method and the drying apparatus according to the present invention, which adopts the second means, while ejecting the air from the air ejecting portion, the air is discharged from the downstream side to form the air flow, and this air is formed. In the drying method and the drying apparatus according to the present invention, which has taken the third means, the air is sucked from the air suction section in the drying chamber to form an air flow, Vacuum drying is performed after draining the work by this air flow, and in the drying method and the drying apparatus according to the present invention that employs the fourth means, since the workpiece is drained by the centrifugal shake-off, vacuum drying is performed. In any of the drying methods and the drying devices that take the second to fourth means, it is possible to efficiently perform the drying in a short time, and moreover, the work after the drying has the drying stain. No et al.

Further, in any of the drying method and the drying apparatus using the first to third means, the upstream side and the downstream side of the drying chamber, that is, the upstream side of the air blowing section or the air suction section and the air suction section. To communicate with the downstream side of
When the air flow is circulated in a closed loop, when heating the air to be used, the heating energy can be reduced by using the circulation, and a flammable cleaning liquid such as alcohol or petroleum solvent is used. Even in the case, the mist and steam do not go out, so it is safe,
It is possible to prevent contamination of the work environment.

Further, in any of the drying methods and the drying apparatus using the first to fourth means, if the gas-liquid separating means for removing the mist and vapor of the cleaning liquid from the air flow is provided on the downstream side of the drying chamber. Even when a flammable cleaning liquid such as alcohol-based or petroleum-based solvent is used, the safety is enhanced and the work environment can be prevented from being contaminated.

[0019]

Embodiments of the present invention will now be described with reference to the accompanying drawings.

[Embodiment 1] FIG. 1 is a schematic configuration diagram showing a configuration of a drying apparatus according to Embodiment 1 of the present invention. The drying device of the present example is a drying device capable of implementing the drying method according to the first means of the present invention, that is, in the drying chamber, while blowing air from the air blowing part, the downstream side of the air flow. Drying that can perform the liquid draining process that forcibly discharges the air from the air suction part to form an air flow and holds the work in the middle position of this air flow to remove the liquid adhering to the work Regarding the device.

In the figure, the drying chamber 11 of the drying apparatus 10 of this example has a drying chamber main body 1 whose inner diameter narrows downward.
2 and a lid 13 that covers the opening on the upper surface side, and the drying chamber body 12 and the lid 13 are connected to each other via their flange portions 121 and 131. Here, a ring-shaped rubber packing 133 is arranged between the flange portions 121 and 131 to maintain airtightness between them. Further, the lid 13 is attached to the upper surface side of the drying chamber main body 12 by the hinge mechanism 132, and the upper surface side opening of the drying chamber main body 12 can be freely opened and closed. Further, the lid 13 is connected to a first air flow path 14 that opens as a plurality of nozzles 141 (air blowing portions) on the lower surface side (inner wall surface on one side) of the lid 13, and the first air flow Route 1
4 has a solenoid valve 15 (air flow passage opening / closing means) capable of opening / closing the first air flow path 14 on the side of the lid 13 (downstream side), and a heater 16 provided with a heater on the upstream side thereof.
In addition to the filter 17 and the filter 17, the compressor 18 that supplies the air sucked from the intake port 18a as a compressed air flow toward the nozzle 141 via the first air flow path 14.
(Air flow source). On the other hand, the drying chamber 11
At a position below the drying chamber body 1 facing the inner surface of the lid 13.
A second air flow path 19 that opens as an air suction portion 191 is provided on the bottom surface 122 of the second blower 20, and a blower 20 (first air discharge source) is connected to the downstream end side of the second air flow path 19. Has been done. Here, an exhaust passage 22 is connected to the blower 20, and a mist (liquid) is removed from an air flow passing through the exhaust passage 22 at a downstream end side of the exhaust passage 22 to remove a cleaning liquid recovery tank 23. Drain 241 with valve and exhaust duct 242 for recovery
Is connected to a mist collector 24 (gas-liquid separating means). Further, inside the drying chamber 11, the drying chamber main body 12 is formed with an inclined portion 111 (work holding portion) formed so that its inner diameter is narrowed, and the cleaning basket 21 containing the work W is placed in the drying chamber. When accommodated inside 11, the bottom edge of the cleaning basket 21 and the inclined portion 111 interfere with each other, and the work W can be held between the nozzle 141 and the air suction portion 191.

The drying device 10 having such a structure is
It is used to dry a work that has been washed with an alcohol-based or petroleum-based cleaning liquid.

First, the electromagnetic valve 15 is closed,
Air is not ejected from the nozzle 141, and in this state, the lid 13 is opened, and the work W with the cleaning liquid adhered to the inside of the drying chamber main body 12 is accommodated in the cleaning basket 21. To do.

Next, after closing the lid 13, the lid 13 and the drying chamber main body 12 are fixed, and in this state, the compressor 18 is operated and the electromagnetic valve 15 is opened, and the compressor 18 and the heater 16 are opened. And the first
The heated air supplied through the air flow path 14 is ejected from the nozzle 141. At the same time, the blower 20 is also operated to send the air inside the drying chamber 11 to the mist collector 24 through the air suction portion 191, the second air flow path 19 and the exhaust passage 22. As a result, the air jetted from the nozzle 141 is blown to the work W,
On the bottom surface side of the cleaning basket 21, air is discharged by the blower 20, so that the air suction portion 19 from the nozzle 141.
The air flow is formed toward 1, and the work W is installed on the path of the air flow, and the air blowing liquid cutting and the warm air drying are performed on the work W.

As described above, in the drying device 10 of this embodiment, the heated air flow supplied from the compressor 18 is supplied to the inside of the drying chamber 11 via the first air flow path 14 (nozzle 141). While the air is forcibly discharged by the blower 20 on the opposite side of the work while being blown to the work W after cleaning, the air flow does not bounce by the work W and passes through the gap of the work W to perform cleaning. The work W on the bottom side of the basket 21 is reached. Therefore, since a large amount of airflow can always be supplied to any of the works W at a high speed, the works W are drained and dried uniformly. Therefore, even if a large amount of works W are dried at once, unevenness in drying hardly occurs. Further, since a blower (blowing means) having a large blowing amount such as the blower 20 is used as the air discharge source, the blowing amount of the air flow from the drying chamber 11 is large and a large amount of cleaning liquid adheres to the work W. Even if it is, it is unlikely that insufficient drainage or insufficient drying will occur. In addition, since the cleaning liquid itself is blown away from the work W by the air flow and no residue is left on the work W, it is suitable for a drying process for a work to which a large amount of cleaning liquid is attached. FIG. 8 shows the relationship between the elapsed drying time and the amount of adhered liquid adhering to the work W when the drying device 10 of this example is used.
In FIG. 1, which is shown by a solid line 1 and only blows air toward the work W.
The solid line 2 in FIG. 8 shows the relationship between the elapsed drying time and the amount of adhered liquid in the conventional drying method shown in FIG. 0, and the elapsed drying time and the amount of adhered liquid in the conventional drying method shown in FIG. As shown by the solid line 3 in FIG. 8, the amount of the adhered liquid at the time when the same drying time has elapsed is smaller when the drying device 10 of this example is used as compared with the conventional drying method. That is, it has been confirmed that the drying device 10 of the present example requires a shorter drying time for achieving the same level of drainage and drying.

Here, a vacuum pump can be used instead of the blower 20. In this case, the air blown from the nozzle 141 is supplied to the drying chamber 1 by the vacuum pump.
After performing the blowing liquid draining process on the work W after discharging the air from No. 1, air is continuously discharged from the drying chamber 11 by the vacuum pump with the valve 15 closed, and It is also possible to perform a vacuum drying process. Therefore, since the blowing liquid removing step and the vacuum drying step can be performed inside the same drying chamber 11 of the drying device 10, the efficiency of the drying step can be improved. That is, the vacuum drying is inferior to the blowing liquid removal in removing a large amount of the cleaning liquid adhering to the work, as indicated by the solid line 4 in FIG. 8 showing the relationship between the elapsed drying time and the amount of adhering liquid on the work W. . This is because, as shown by the solid line 5 in FIG. 9 for the relationship between the elapsed drying time and the evaporation rate in vacuum drying, when vacuum drying is performed, the evaporation latent heat is removed as the liquid evaporates, but This is because the temperature of the work and the cleaning liquid decreases and the evaporation rate decreases because the replenishment cannot be followed. For comparison, the solid line 6 in FIG. 9 shows the relationship between the drying elapsed time and the evaporation rate when the room temperature air is blown among the blowing liquids, and the drying elapsed time and the evaporation rate when the heated air is blown are shown. The solid line 7 in FIG. As can be seen from FIG. 9, when the cleaning liquid adhering to the work is small and can be dried in a short time, the vacuum drying finishes before the evaporation rate decreases,
It has a high evaporation rate and is advantageous as compared with hot air drying. From the above results, the most effective drying method can be realized by removing a large amount of the cleaning liquid adhering to the work in the blowing liquid removing step and then removing the small amount of the cleaning liquid remaining in the work in the vacuum drying step.

[Embodiment 2] FIG. 2 is a schematic configuration diagram showing a configuration of a drying apparatus according to Embodiment 2 of the present invention. The drying device of this example corresponds to an improved example of the drying device according to the first embodiment, and is characterized in that the air flow discharged from the drying chamber is circulated and returned to the drying chamber again. Here, since the drying device of this example has the same configuration as that of the drying device according to the first embodiment, the same reference numerals are given to those components and the description thereof will be omitted.

In the drying device 30 of this example shown in FIG.
The drying chamber main body 12 and the lid 13 forming the drying chamber 11 are connected via their flange portions 121 and 131, and a ring-shaped rubber packing 133 is arranged between the flange portions 121 and 131. Has been done. Also, the lid 1
The hinge mechanism 132 can open and close the upper opening of the drying chamber main body 12. Further, similar to the drying device according to the first embodiment, the lid 13 is connected to the first air flow path 14 that opens as a plurality of nozzles 141 (air blowout portions) on the lower surface (inner wall surface on one side) of the lid 13. A heater 16 and a filter 17 are provided on the upstream side of the first air flow path 14. On the other hand, the drying chamber 11
At a position below the second air flow path 1 that opens as an air suction portion 191 on the bottom surface 122 of the drying chamber body 12.
9, and on the downstream end side of the second air flow path 19,
The blower 32 (first air discharge source) is connected.
Here, an exhaust passage 22 is connected to the blower 32, and a mist (liquid) is removed from an air flow passing through the exhaust passage 22 at a downstream end side of the exhaust passage 22 to remove a cleaning liquid recovery tank 23. A mist collector 24 (a gas-liquid separating means) for collecting is connected to. On the other hand, when the cleaning basket 21 in which the work W is stored is stored in the drying chamber 12, the cleaning basket 21 interferes with the bottom side edge of the cleaning basket 21 to position it, and the nozzle 141 to the air suction unit 191 An inclined portion 111 (workpiece holding means) capable of holding the workpiece W is provided between them.

Further, the drying device 30 of the present example has an air flow circulation path 31 which connects the downstream side of the mist collector 24 (the exhaust passage 31 side) and the first air flow path 14 side, and a blower. The air discharged from the drying chamber 11 by 32 is circulated to the first air flow path 14 through the exhaust passage 22, the mist collector 24, and the air flow circulation path 31.

Here, in providing the air circulation path 31, as shown by a broken line between the air circulation path 31 and the first air flow path 14 in FIG.
8 (air flow supply source) may be arranged, but in the drying device 1 of this example, the compressor 18 is omitted and the blower 32 is connected to the drying chamber 11 via the first air flow path 14.
It is also used as an air flow supply source for supplying an air flow to the inside of the. That is, the air discharged from the drying chamber 11 by the blower 32 is supplied from the nozzle 141 toward the work W through the exhaust passage 22, the mist collector 24, the air flow circulation path 31, and the first air flow path 14. It is like this.

In the drying device 30 having such a configuration, the air flow pumped by the blower 32 is passed from the first air flow path 14 (nozzle 141) to the drying chamber 11 via the air flow circulation path 31. The air is supplied to the inside as heated air and blown toward the work W, while on the other side of the work, the air is forcibly discharged by the blower 32. Since it is possible to constantly supply a large amount of liquid at a high speed, the work W is drained and dried uniformly.

Therefore, even if a large amount of works W are dried at once, uneven drying is unlikely to occur. Also, since the air flow is circulated and used, less heating energy is required,
Further, even when a flammable cleaning liquid such as an alcohol-based or petroleum-based solvent is used, its mist and vapor do not go out, so it is safe and can prevent contamination of the working environment. Moreover, since the blower 32 is used as the air flow supply source and the air discharge source, the drying device 30 can be designed compactly. Also in the drying device 30 of this example, a vacuum pump may be used instead of the blower 32, and the vacuum drying process may be performed inside the same drying chamber 11 after the blowing liquid removing process is performed.

[Embodiment 3] FIG. 3 is a schematic configuration diagram showing a configuration of a drying apparatus according to Embodiment 3 of the present invention. In addition, the drying apparatus of the present example is a drying apparatus capable of implementing the drying method according to the second means of the present invention, that is, in the drying chamber, while blowing air from the air blowing unit, air is blown from the downstream side thereof. A liquid draining process that drains the liquid adhering to the work by holding the work in the middle of the path of this air flow while draining naturally to form an air flow, and the work drained in this liquid draining process This is a drying device capable of performing a vacuum drying step of performing vacuum drying on the same in the same drying chamber. Here, since the drying device of this example has the same components as the drying device according to the first embodiment, those components are designated by the same reference numerals and the description thereof will be omitted.

In the figure, the drying chamber 11 of the drying device 40 of this example has the same structure as the drying device 1 according to the first embodiment, and the lid 13 has a lower surface (inner wall surface on one side) with the lid 13. A first air flow path 14 that opens as a plurality of nozzles 141 (air blowout parts) is connected, and a first air flow path is provided on the lid 13 side (downstream side) of the first air flow path 14. 14 has an electromagnetic valve 15 (air flow passage opening / closing means) that can be opened and closed, and on the upstream side thereof, in addition to the heater 16 and the filter 17, the air sucked from the intake port 18a is used as a heated compressed air flow. Compressor 1 to be supplied to the nozzle 141 via the air flow path 14 of No. 1
8 (air flow source). On the other hand, the drying room 1
At a position below 1, the second air flow path 19 opening as an air suction part 191 on the bottom surface 122 of the drying chamber main body 12 facing the inner surface of the lid 13 and the second air flow path 19 are connected. Vacuum pump 43 (first air discharge source)
Have and. Here, the exhaust passage 2 from the vacuum pump 43
A mist collector 24 (gas-liquid separating means) is connected to the downstream end side of 2. On the other hand, inside the drying chamber 12,
When the cleaning basket 21 containing the work W is stored, the cleaning basket 21 interferes with the bottom side edge of the cleaning basket 21 to position it, and the work W can be held between the nozzle 141 and the air suction part 191. It has an inclined portion 111.

Further, in the drying device 40 of this example,
An intermediate position of the second air flow path 19 (the air suction portion 191
Side) and the side of the exhaust passage 22 from the vacuum pump 43, and has a second air flow path 19 and a third air flow path 41 bypassed to the vacuum pump 43. Further, an air flow path switching mechanism 42 (for switching between a state in which the side of the air suction portion 191 communicates with the second air flow path 19 and a state in which the side of the air suction portion 191 communicates with the third air flow path 41 ( As an air flow path switching means), an electromagnetic valve 421 is inserted in the second air flow path 19 and an electromagnetic valve 422 is inserted in the third air flow path 41. In addition, the vacuum pump 43 is also installed in the exhaust passage 22.
Solenoid valve 42 for preventing backflow of air flow to the
Have three.

In the drying device 40 having such a structure, for example, in the state where the cleaning basket 21 in which the work W to which the cleaning liquid such as water-based, alcohol-based or petroleum-based is attached is housed in the drying chamber 11 is housed. , Solenoid valve 1
5 and 422 are opened while electromagnetic valves 421 and 423 are opened.
Is closed, the heated air supplied from the compressor 18 via the first air flow path 14 is ejected from the nozzle 141, and after draining the work W,
It is delivered to the mist collector 24 via the third ventilation flow path 41.

In this way, after performing the blowing liquid removing step, the electromagnetic valves 15 and 422 are closed while the electromagnetic valves 421 and 423 are opened, and the air in the drying chamber 11 is moved to the second position by the vacuum pump 43. The air is sucked through the air flow path 19 and sent to the mist collector 24 through the exhaust passage 22. Here, if the electromagnetic valve 15 is opened, the heated air supplied from the compressor 18 via the first air flow path 14 is jetted from the nozzle 141, and the blowing liquid cutting is continued for the work W. Along with
The air inside the drying chamber 11 is sucked through the second air flow path 19 and is exhausted through the exhaust passage 22.
Therefore, the second blowing liquid cutting process for the work W can be performed with high efficiency.

On the other hand, when it is not necessary to perform the second blowing liquid removing step, the electromagnetic valve 15 is closed, and the vacuum pump 43 brings the inside of the drying chamber 11 into a vacuum state. Then, the vacuum drying process for the work W is performed.

As described above, in the drying device 40 of this embodiment, the air flow supplied from the compressor 18 is supplied to the drying chamber 1 via the first air flow path 14 (nozzle 141).
1 is supplied to the inside of the work 1 and blown onto the work W, while on the opposite side of the work, air is spontaneously discharged through the third air flow path 41, or air is vacuum pump 43.
By this, the air can be forcibly discharged and the work W can be uniformly blown off. In addition, since the air flow path switching mechanism 42 and the electromagnetic valve 15 can be switched to perform a vacuum drying process using the vacuum pump 43, for example, when a large amount of cleaning liquid adheres to the work W after cleaning. Performs a preliminary blowing liquid cutting process in a state where the third air flow passage 41 is used as an exhaust passage, and then performs blowing liquid cutting using the vacuum pump 43 and vacuum drying, It is possible to prevent a large amount of cleaning liquid from being sucked. When only a small amount of cleaning liquid is attached to the cleaned work W, a drying process according to the condition of the work W is performed, such as a vacuum drying process can be directly performed without performing the blowing liquid removing process. be able to.

[Embodiment 4] FIG. 4 is a schematic diagram showing the construction of a drying apparatus according to Embodiment 4 of the present invention. The drying device of this example is the drying device according to the first embodiment and the drying device according to the third embodiment.
It corresponds to an improved example of the drying device according to (1) and is characterized in that it has a blower in addition to a vacuum pump as an air discharge source for discharging an air flow from the drying chamber. Here, since the drying device of this example has the same configuration as the drying device according to the first embodiment or the drying device according to the third embodiment,
The same reference numerals are given to those constituent parts, and detailed description thereof will be omitted.

In the figure, the drying chamber 11 of the drying device 50 of this example has the same structure as the drying device according to the first or third embodiment, and the lid 13 has a lower surface (inside one side). The first air flow path 14 that opens as a plurality of nozzles 141 (air blowout parts) on the wall surface is connected, and the first air flow path 14 has a first air flow path 14 on the lid 13 side (downstream side). An electromagnetic valve 15 (air flow passage opening / closing means) capable of opening / closing the air flow path 14 is provided, and on the upstream side thereof, in addition to the heater 16 and the filter 17, compressed air obtained by heating the air sucked from the intake port 18a. It has a compressor 18 (air flow supply source) for supplying the air toward the nozzle 141 via the first air flow path 14. On the other hand, at the lower position of the drying chamber 11, the air suction unit 1 is provided on the bottom surface 122 of the drying chamber body 12 facing the inner surface of the lid 13.
The second air flow path 19 opening as 91 and the second air flow path 19
And a blower 53 (first air discharge source) connected to the air flow path 19 of FIG. Here, a mist collector 24 (gas-liquid separating means) is connected to the downstream end side of the exhaust passage 22 from the blower 53. On the other hand, in the inside of the drying chamber 12, there is an inclined portion 111 that interferes with the side edge of the bottom surface of the cleaning basket 21 to position it and hold the work W between the nozzle 141 and the air suction portion 191. Have.

Further, in the drying device 50 of this example,
An intermediate position of the second air flow path 19 (the air suction portion 191
Side) and the side of the exhaust passage 22 from the blower 53, and has a second air flow path 19 and a third air flow path 41 that is a bypass for the blower 53. Further, an air flow path switching mechanism 42 (for switching between a state in which the side of the air suction portion 191 communicates with the second air flow path 19 and a state in which the side of the air suction portion 191 communicates with the third air flow path 41 ( As an air flow path switching means), an electromagnetic valve 421 is inserted in the second air flow path 19,
An electromagnetic valve 422 is inserted in the third air flow path 41. Further, in the third air flow path 41, a vacuum pump 54 is inserted on the downstream side of the electromagnetic valve 422,
An electromagnetic valve 424 for preventing backflow of the air flow to the vacuum pump 54 is inserted on the downstream side thereof.
Further, an electromagnetic valve 423 for preventing backflow of the air flow to the blower 53 is also inserted in the exhaust passage 22.

In the drying device 50 having such a structure, the electromagnetic valves 15, 421, 42 are arranged in the drying chamber 11 after the cleaning basket 21 in which the work W is stored is stored.
3 is opened while the electromagnetic valves 422 and 424 are closed, and when the compressor 18 and the blower 53 are operated in this state, the heated air supplied from the compressor 18 via the first air flow path 14 is released. Nozzle 1
The air inside the drying chamber 11 is discharged by the blower 53 while being ejected from 41 to drain the work W.

In this way, after the uniform blowing liquid cutting process for the work W is performed, the electromagnetic valves 15, 42 are
1,423 are closed, while electromagnetic valves 422,424
Is opened, the air in the drying chamber 11 is exhausted through the third air flow path 41 by the vacuum pump 54, and the discharged air is sent to the mist collector 24. Therefore, the drying room 1
The inside of 1 is in a vacuum state, and the vacuum drying process for the work W is performed.

As described above, in the drying device 40 of the present embodiment, the air flow supplied from the compressor 18 passes through the first air flow path 14 (nozzle 141) and the drying chamber 1
1 is supplied to the inside of the work 1 and blown onto the cleaned work W, while air is blown to the blower 53 on the opposite side of the work.
The liquid can be forcibly discharged by and the uniform drainage of the work W is possible. In addition, since the vacuum drying process can be performed using the third air flow passage 41 and the vacuum pump 54, a small amount of the cleaning liquid remaining on the work W after the blowing liquid removing process can be performed in a short time in the vacuum drying process. Can be removed evenly,
Moreover, the drying process with a high degree of dryness can be performed inside one drying chamber 11.

[Embodiment 5] FIG. 5 is a schematic configuration diagram showing a configuration of a drying apparatus according to Embodiment 5 of the present invention. The drying device of the present example is a drying device capable of implementing the drying method according to the third means of the present invention, that is, sucking air from an air suction part in a drying chamber having an air suction part, A liquid draining process that forms an air flow from the suction part to the air suction part, holds the work in the middle of the path of this air flow, and drains the liquid adhering to the work The present invention relates to a drying device capable of performing a vacuum drying step of performing vacuum drying on a drained work in the same drying chamber.

In the figure, the drying chamber 61 of the drying device 60 of this example has a drying chamber main body 6 whose inner diameter narrows downward.
2 and a lid 63 that covers the opening on the upper surface side, and a ring-shaped rubber packing 633 is arranged between the drying chamber main body 62 and the lid 63 to maintain airtightness between them. There is. Further, the lid 63 is attached to the upper surface side of the drying chamber main body 62 by the hinge mechanism 632, and the opening of the upper surface side can be freely opened and closed. Further, the lid 63 is connected to a first air flow path 64 that opens as an air suction portion 641, and an electromagnetic valve 642 (air flow path opening / closing means) is attached to the upper end of the first air flow path 64. Has been. On the other hand, at the lower position of the drying chamber 61, the bottom surface 62 of the drying chamber main body 62 facing the inner surface of the lid 63 is provided.
2 has a second air flow path 69 that opens as an air suction portion 691, and a vacuum pump 66 (first air discharge source) is connected to the downstream end side of the second air flow path 69. There is. Here, the vacuum pump 66 has an exhaust passage 65.
Is connected to the downstream end side of the exhaust passage 65,
Mist (liquid) from the air flow passing through the exhaust passage 65
Is connected to a mist collector 68 (gas-liquid separation means) including a drain 681 with a valve and an exhaust duct 682 for removing the gas and collecting it in the cleaning liquid recovery tank 67. Further, inside the drying chamber 61, the drying chamber body 6
2, the inclined portion 61 is formed so that its inner diameter is narrowed.
1 (work holding portion) is formed, and the inclined portion 611 and the bottom side edge portion of the cleaning basket 21 interfere with each other to hold the work W between the air suction portion 641 and the air suction portion 691. Has become.

The drying device 60 having such a structure is
It is used to dry the work W that has been washed with an alcohol-based or petroleum-based cleaning liquid.

First, in the state where the cleaning basket 21 in which the work W with the cleaning liquid adhered is stored in the drying chamber main body 62, the electromagnetic valve 642 is opened and the second vacuum pump 66 is used. The air inside the drying chamber 61 is sucked out through the air flow path 69. As a result, air is sucked into the drying chamber 61 from the air suction portion 641 and blown onto the work W. On the other hand, the drying room 61
Since the air is forcibly discharged by the vacuum pump 66 on the bottom side of the workpiece W, the air flow can be always supplied to the workpiece W at a high speed. The amount of cleaning liquid attached to the work W can be reduced.

In this way, the vacuum pump 66 is operated via the second air flow path 69 for the work W on which the blowing liquid is cut off and only a small amount of the cleaning liquid is attached.
The electromagnetic valve 642 is closed while the air inside 1 is being sucked out.

As a result, the air in the drying chamber 61 is exhausted, the inside of the drying chamber 61 is brought into a vacuum state, and the vacuum drying process for the work W is performed.

As described above, in the drying device 60 of this embodiment, the air is supplied to the work W by forcibly discharging the air from the bottom side of the drying chamber 61 by the vacuum pump 66, and the work W is supplied to the work W. Work W with only a small amount of cleaning liquid attached after reducing the amount of cleaning liquid attached
A drying process suitable for short-time drying is performed. Therefore, reliable drying can be performed in a short time, and the blowing liquid removing step and the vacuum drying step can be performed inside one drying chamber 61.

[Sixth Embodiment] FIG. 6 is a schematic configuration diagram showing a configuration of a drying apparatus according to a sixth embodiment of the present invention. The drying device of this example is a drying device that can perform the drying method in which the third means of the present invention is implemented, and includes the drying device according to the fourth embodiment and the drying device according to the fifth embodiment. Corresponds to a combined dryer.

In the figure, the drying chamber 71 of the drying apparatus 70 of this example is a drying chamber main body 7 whose inner diameter is narrowed downward.
2 and a lid 73 that covers the opening on the upper surface side, and a ring-shaped rubber packing 733 is arranged between the drying chamber main body 72 and the lid 73 to keep airtightness between them. There is. Further, the lid 73 is attached to the upper surface side of the drying chamber main body 72 by the hinge mechanism 732, and the opening of the upper surface side can be freely opened and closed. Further, the lid 73 is connected to a first air flow path 74 that opens as an air intake portion 741, and an electromagnetic valve 742 (air flow path opening / closing means) is provided at the upper end of the first air flow path 74. It is installed. On the other hand, in the lower position of the drying chamber 71, a second opening 791 is formed as an air suction portion 791 on the bottom surface 722 of the drying chamber main body 72 facing the inner surface of the lid 73.
The air flow path 79 is provided, and the blower 76 (first air discharge source) is connected to the downstream end side of the second air flow path 79. Here, the blower 76 has an exhaust passage 75.
Is connected to the downstream end side of the exhaust passage 75,
Mist (liquid) from the air flow passing through the exhaust passage 75
Is connected to a mist collector 78 (gas-liquid separating means) including a drain 781 with a valve and an exhaust duct 782 for removing the gas and collecting it in the cleaning liquid recovery tank 77. Further, inside the drying chamber 71, the drying chamber main body 7
2, a slanted portion 71 formed so that its inner diameter is narrowed.
1 (work holding portion) is formed, and the bottom side edge portion of the cleaning basket 21 and the inclined portion 711 interfere with each other to hold the work W between the air suction portion 741 and the air suction portion 791. Has become.

Further, in the drying device 70 of this example,
An intermediate position of the second air flow path 79 (air sucking portion 791
2) and a side of the exhaust passage 75 from the blower 76, and has a second air flow passage 79 and a third air flow passage 80 bypassed to the blower 76. Further, an air flow path switching mechanism 81 (for switching between a state in which the air suction portion 791 side communicates with the second air flow path 79 and a state in which the air suction portion 791 side communicates with the third air flow path 80 ( As an air flow path switching means), an electromagnetic valve 811 is inserted in the second air flow path 79,
An electromagnetic valve 812 is inserted in the third air flow path 80. Further, in the third air flow path 80, a vacuum pump 82 is inserted on the downstream side of the electromagnetic valve 812,
An electromagnetic valve 813 for preventing backflow of the air flow to the vacuum pump 82 is inserted on the downstream side thereof.
Further, an electromagnetic valve 814 is also inserted in the exhaust passage 75.

In the drying device 70 having such a structure,
Cleaning basket 2 in which the work W is stored inside the drying chamber 71
1, the electromagnetic valves 742, 811, 814
Is opened and the electromagnetic valves 812 and 813 are closed, and when the blower 76 is operated in this state, air is sucked into the drying chamber 71 from the air suction portion 741 and blown onto the work W. On the other hand, the drying room 71
Since the air is forcibly discharged on the bottom surface side of the work, the air flow can be constantly supplied to any of the works W at a high speed. The amount of cleaning liquid attached can be reduced.

In this way, after the liquid draining process is performed, the electromagnetic valves 742, 811 and 814 are closed, while the electromagnetic valves 812 and 813 are opened, and the vacuum pump 82 is used to move the air in the drying chamber 71 to the third position. Air flow path 80
When the air is exhausted through the inside of the drying chamber 71, the inside of the drying chamber 71 is in a vacuum state, and the vacuum drying process for the work W is performed.

As described above, in the drying device 70 of this embodiment, a large amount of air flow can be blown to the work W by forcibly discharging the air from the bottom side of the drying chamber 71 by the blower 76, so It can be cut. Also, after reducing the amount of cleaning liquid adhering to the work W,
A vacuum drying process suitable for short-time drying of the work W to which only a small amount of cleaning liquid is attached is performed. Therefore, reliable drying can be performed in a short time, and the blowing liquid removing step and the vacuum drying step can be performed inside one drying chamber 71.

[Embodiment 7] FIG. 7 is a schematic configuration diagram showing a configuration of a drying apparatus according to Embodiment 7 of the present invention. In addition, the drying apparatus of the present example is a drying method in which the fourth means according to the present invention is used, that is, a draining step of rotating the workpiece and draining the workpiece by its centrifugal force, and a draining step. The present invention relates to a drying device capable of performing a vacuum drying step of performing vacuum drying on a drained work in the same drying chamber.

In the figure, the drying chamber 91 of the drying device 90 of this example is composed of a cylindrical drying chamber main body 92 and a lid 93 that covers the opening on the upper surface side, and these drying chamber main body 92 and lid 93 are provided. A ring-shaped rubber packing 933 is arranged between them to maintain airtightness between them. Further, the lid 93 is attached to the upper surface side of the drying chamber main body 92 by the hinge mechanism 932, and the opening of the upper surface side can be freely opened and closed. On the other hand, in the lower position of the drying chamber 91,
At the bottom surface 922 of the drying chamber main body 92, the air suction portion 99
The air flow path 99 opens as 1. The vacuum pump 97 (first air discharge source) is connected to the downstream end side of the air flow path 99. Here, an exhaust passage 98 is connected to the vacuum pump 97, and a mist (liquid) is removed from the air flow passing through the exhaust passage 98 at a downstream end side of the exhaust passage 98 to remove a cleaning liquid recovery tank. Drain with valve 951 and exhaust duct 9 for recovery to 94
A mist collector 95 (gas-liquid separating means) including 52 is connected. Further, a drive motor 960 is arranged outside the drying chamber 91, and a tip end side of a rotation shaft 961 thereof extends from the bottom surface 922 of the drying chamber body 92 into the drying chamber 91.

The cleaning basket 21 in which the work W is housed is held inside the rotary basket 962 connected to the tip side thereof, and the drive motor 960 and the rotary basket 9 are held therein.
A centrifugal shake-off device 96 that rotates the cleaning basket 21 by the force of 62 and shakes the cleaning liquid from the work W by the centrifugal force thereof is configured.

In the drying device 90 having such a structure, the drive motor 960 is operated while the cleaning basket 21 in which the work W is stored is held inside the rotary basket 962 inside the drying chamber 91. By this, the work W
A draining process of shaking off the cleaning liquid is performed. Note that, in consideration of safety, the liquid draining process is performed by fixing them while the upper opening of the drying chamber main body 92 is covered with the lid 93.

After the liquid draining step is performed as described above,
When the air in the drying chamber 91 is exhausted through the air flow path 99 by the vacuum pump 97, the inside of the drying chamber 91 becomes a vacuum state, and the vacuum drying process for the work W is performed.

As described above, in the drying device 90 of this example, the centrifugal shaker 96 forcibly removes the cleaning liquid from the work W. Therefore, after reducing the amount of the cleaning liquid adhering to the work W, It is possible to perform a vacuum drying process suitable for short-time drying of the work W to which only the cleaning liquid is attached. For this reason, reliable drying can be performed in a short time, and the centrifugal shake-off process and the vacuum drying process can be performed inside one drying chamber 91.

It should be noted that the size, shape, number of arrangements and the like of each part constituting the drying device according to the first to seventh embodiments are of a nature that should be set according to the application of the drying device. There is no limit. Further, in the cleaning apparatus according to the first to seventh embodiments, all the mist collectors are arranged on the downstream side of the air discharge source such as the blower and the vacuum pump, but they may be arranged on the upstream side thereof. . In this case, since the mist (liquid) of the cleaning liquid is removed before the air flow enters the blower or the vacuum pump, the blower and the vacuum pump are not contaminated and the malfunction is reduced. Further, when the cleaning liquid is flammable such as Alcohol-based or petroleum-based solvent, there is no danger of ignition and the safety is enhanced. Further, as the mist collector (gas-liquid separating means), not only a filter type but also a mist separator such as a centrifugal separator, a vane separator or a cyclone separator may be used.

[0066]

As described above, in the drying apparatus having the first means according to the present invention, the air flow supplied from the air flow supply source is blown to the cleaned work in the drying chamber while the work is blown. On the other side, the air in the drying chamber is forcibly discharged by an air discharge source such as a vacuum pump or blower, so the air flow is always kept high around any work, so draining and drying Efficient and uniform. Therefore, even if a large amount of works are dried at once, uneven drying is unlikely to occur. In particular, when the air flow supplied to the work is heated, the temperature of the work and the adhering liquid rises, so that the evaporation rate of the adhering liquid increases and drying can be performed in a short time.

Here, when the air flow having a large air volume formed by both the air flow supply source and the air discharge source is used to cut off the blast liquid, and then vacuum drying is performed, it is more efficient. Therefore, it can be dried in a short time.

In the drying device according to the present invention,
Since the draining and the vacuum drying are performed in the same room, the drying device is compact and space saving can be achieved.

Further, when the adhering liquid of the work is dried only by heat drying or vacuum drying, if the adhering liquid is dirty, the dirt is concentrated and remains as a dry stain, but in the present invention, it is sufficient. Since the liquid is drained and then vacuum-dried, no dry spots remain on the dried work.

Further, in the drying method and the drying apparatus according to the present invention which employs the second means, the air is blown from the air blowing portion while the air is discharged from the downstream side to form an air flow, and this air is discharged. In the drying method and the drying apparatus according to the present invention, which has taken the third means, the air is sucked from the air suction section in the drying chamber to form an air flow, Vacuum drying is performed after draining the work by this air flow, and in the drying method and the drying apparatus according to the present invention that employs the fourth means, since the workpiece is drained by the centrifugal shake-off, vacuum drying is performed. In any of the drying methods and the drying devices that take the second to fourth means, it is possible to efficiently perform the drying in a short time, and moreover, the work after the drying has the drying stain. No et al.

Further, in any of the drying method and the drying apparatus using the first to third means, if the upstream side and the downstream side of the drying chamber are communicated with each other and the air flow is circulated in the closed loop, When heating air to use,
Recycling saves heating energy, and even when using flammable cleaning liquids such as alcohol-based or petroleum-based solvents, the mist and vapor do not go out, so it is safe and does not pollute the working environment. Can be prevented.

Further, in any of the drying methods and apparatuses employing the first to fourth means, the gas-liquid separating means for removing the mist and vapor of the cleaning liquid from the air flow is provided on the downstream side of the drying chamber. Even when a flammable cleaning liquid such as an alcohol-based or petroleum-based solvent is used, the mist and vapor do not go out, so it is safe and can prevent pollution of the working environment.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram showing a configuration of a drying apparatus according to a first embodiment of the present invention.

FIG. 2 is a schematic configuration diagram showing a configuration of a drying device according to a second embodiment of the present invention.

FIG. 3 is a schematic configuration diagram showing a configuration of a drying device according to a third embodiment of the present invention.

FIG. 4 is a schematic configuration diagram showing a configuration of a drying device according to a fourth embodiment of the present invention.

FIG. 5 is a schematic configuration diagram showing a configuration of a drying device according to a fifth embodiment of the present invention.

FIG. 6 is a schematic configuration diagram showing a configuration of a drying device according to a sixth embodiment of the present invention.

FIG. 7 is a schematic configuration diagram showing a configuration of a drying device according to a seventh embodiment of the present invention.

FIG. 8 is a graph showing the relationship between the elapsed drying time and the amount of adhering liquid in blast drying and vacuum drying.

FIG. 9 is a graph showing a relationship between a drying elapsed time and an evaporation rate in blast drying and vacuum drying.

FIG. 10 is an explanatory diagram showing a conventional drying method.

FIG. 11 is an explanatory diagram showing another conventional drying method.

[Explanation of symbols]

10, 30, 40, 50, 60, 70, 90 ... Drying device 11, 61, 71, 91 ... Drying chamber 12, 62, 72, 92 ... Drying chamber main body 13, 63, 73, 93 ... Lid 14, 64, 74 ... First air flow path 15, 642, 742 ... Electromagnetic valve (air flow passage opening / closing means) 16 ... Heater 18 ... Compressor (air flow supply) Source) 18a ... Intake port 19, 69, 79, 99 ... Second air flow path 20, 32, 53, 76 ... Blower (first air discharge source) 21 ... Washing basket 22 , 65, 75, 98 ... Exhaust passage 24, 68, 78, 95 ... Mist collector (gas-liquid separating means) 41, 80 ... Third air flow path 42, 81 ... Air flow path Switching mechanism (air flow path switching means) 43, 66 ... Vacuum pump ( First air exhaust source) 54, 82 ... Vacuum pump (second air exhaust source) 96 ... Centrifugal shaker 99 ... Vacuum pump (air exhaust source) 111, 611, 711 ... Inclination Part (work holding part) 133, 633, 733, 933 ... Rubber packing 132, 632, 732, 932 ... Hinge mechanism 141 ... Nozzle (air blowing part) 191, 691, 791, 991 ... Air suction part 421, 422, 423, 424, 811, 812, 8
13, 814 ... Electromagnetic valve 641, 741 ... Air suction part 960 ... Drive motor 961 ... Rotation shaft 962 ... Rotation basket W ... Work

Claims (16)

[Claims] 1. In a drying chamber, while blowing air from an air blowing portion, air is forcedly discharged from an air suction portion on the downstream side of this air flow to form an air flow, and an intermediate position of the path of this air flow. A drying method comprising: a liquid draining step of holding a work and removing a liquid adhering to the work. 2. The drying method according to claim 1, wherein a vacuum drying step of performing vacuum drying on the workpiece drained in the liquid draining step is performed in the same drying chamber as the liquid draining step. 3. In the drying chamber, while blowing air from the air blowing portion, the air is discharged from the downstream side to form an air flow, and the work is held at an intermediate position in the path of this air flow to the work. A drying method, characterized in that a draining step of draining the adhering liquid and a vacuum drying step of vacuum drying the workpiece drained in this draining step are performed in the same drying chamber. 4. An air suction unit sucks air from an air suction unit in a drying chamber having an air suction unit to form an air flow from the air suction unit to the air suction unit,
A liquid-draining step of holding a work piece in the middle of this air flow path and draining the liquid adhering to the work piece, and a vacuum drying step of performing vacuum drying on the work piece drained in this liquid-draining step. And, are performed in the same drying chamber. 5. The drying method defined in any one of claims 1 to 4 is performed while circulating the air flow by connecting the upstream side and the downstream side of the air flow to the drying chamber. Characterizing drying method. 6. A drying chamber in which the work is rotated and the work is drained by the centrifugal force, and a vacuum drying process in which the work drained in this draining process is vacuum-dried is performed in the same drying chamber. The drying method is characterized in that 7. The drying method as defined in any one of claims 1 to 6, wherein a gas-liquid separating means for removing mist and vapor of a cleaning liquid from an air flow is provided on the downstream side of the drying chamber. The drying method is characterized in that 8. A drying device that can be used for carrying out the drying method as defined in claim 1, wherein the drying device is connected to a first air flow path that opens as an air blowing portion on one inner wall surface side of the drying chamber. An air flow supply source, and a first air discharge source connected to a second air flow path opening as an air suction portion on the other inner wall surface side facing the one inner wall surface side in the drying chamber, A work holding unit capable of holding a work between the air blowing unit and the air suction unit in the drying chamber. 9. A drying device that can be used for carrying out the drying method as defined in claim 2, wherein the drying device is connected to a first air flow path that opens as an air blowing portion on one inner wall surface side of the drying chamber. An air flow supply source, and a first air discharge source connected to a second air flow path opening as an air suction portion on the other inner wall surface side facing the one inner wall surface side in the drying chamber, A work holding means capable of holding a work between the air blowing part and the air suction part in the drying chamber, and the first air discharge source is the first air discharge source.
Is a suction device having a large suction force capable of discharging air from the drying chamber in which the air flow path is closed to a vacuum state. 10. A drying device that can be used to carry out the drying method as defined in claim 2, wherein the drying device is connected to a first air flow path that opens as an air blowing portion on one inner wall surface side of the drying chamber. An air flow supply source, and a first air discharge source connected to a second air flow path opening as an air suction portion on the other inner wall surface side facing the one inner wall surface side in the drying chamber, Work holding means capable of holding a work between the air blowing section and the air suction section in the drying chamber, and communication with the air suction section side and the exhaust passage side from the first air discharge source. Connected to the second
Third air flow path that is a bypass for the first air flow path and the second air flow path, the second air discharge source inserted on the third air flow path, and the air suction section. An air flow path switching means for switching between a state in which a side communicates with the second air flow path and a state in which the air suction portion side communicates with the third air flow path; and a state in which the first air flow path is closed. And an air flow path opening / closing means for switching between an open state and an open state, and one of the first air discharge source and the second air discharge source is the first air flow source. In contrast to the air blowing means with a large air blowing amount, which opens the path and sends the air supplied from the air blowing portion into the drying chamber to the exhaust passage side from there to form an air flow in the drying chamber. And the air discharge source on the other side is the first air flow path. There drying device, characterized in that from there the drying chamber which is a closed state is large suction means drainable suction force of air until the vacuum. 11. A drying device that can be used for carrying out the drying method as defined in claim 3, wherein the drying device is connected to a first air flow path that opens as an air blowing portion on one inner wall surface side of the drying chamber. An air flow supply source, and a first air discharge source connected to a second air flow path opening as an air suction portion on the other inner wall surface side facing the one inner wall surface side in the drying chamber, Work holding means capable of holding a work between the air blowing section and the air suction section in the drying chamber, and communication with the air suction section side and the exhaust passage side from the first air discharge source. Connected to the second
Of the air flow path and a third air flow path that is a bypass to the first air discharge source, a state in which the air suction part side is in communication with the second air flow path, and the air suction part side is the third air flow path. The air flow path switching means for switching to a state in which the first air flow path is opened and closed, and the air flow path opening and closing means for switching the first air flow path between a closed state and an open state.
And the first air discharge source is a suction means having a large suction force capable of discharging air from the drying chamber in which the first air flow path is closed until it becomes a vacuum state. A drying device characterized by the above. 12. A drying device that can be used for carrying out the drying method as defined in claim 4, wherein a first air flow path as the air suction section that opens on one inner wall surface side of the drying chamber is provided. An air flow path opening / closing means for switching the first air flow path between an open state and a closed state, and opening as the air suction section on the other inner wall surface side facing the one inner wall surface side in the drying chamber. An air flow discharge source connected to a second air flow path; and a work holding unit capable of holding a work between the air blowing unit and the air flow suction unit in the drying chamber, The drying apparatus is characterized in that the discharge source is suction means having a large suction force capable of discharging air from the drying chamber in which the first air flow path is closed until the drying chamber is in a vacuum state. 13. A drying device which can be used for carrying out the drying method as defined in claim 4, wherein a first air flow path as an air suction portion opened on one inner wall surface side of the drying chamber, An air flow path opening / closing means for switching the first air flow path between an open state and a closed state, and an air suction section opened on the other inner wall surface side facing the one inner wall surface side in the drying chamber A second air flow exhaust source connected to the second air flow path, and the second air connected to the air suction part side and the exhaust passage side from the first air flow exhaust source so that they can communicate with each other. A third air flow path that is a bypass for the flow path and the first air flow discharge source, a second air discharge source inserted on the third air flow path, and the air suction section side is the The state of communicating with the second air flow path and the side of the air suction unit The air flow path switching means for switching to a state of communicating with the third air flow path, and the work holding means capable of holding the work between the air suction part and the air suction part in the drying chamber. Having the first
The air exhaust source on one side of the air exhaust source and the second air exhaust source sends air to the exhaust passage side from the drying chamber in which the first air flow path is opened. While the air blowing unit that forms an air flow from the air suction unit toward the air suction unit in the drying chamber has a large air flow rate, the air discharge source on the other side has the first air flow path closed. A drying device having a large suction force capable of discharging air from the drying chamber which has been brought into a state until it becomes a vacuum state. 14. The method according to claim 8, wherein at least one of an air supply source and an air discharge source is provided between the first air flow path and the second air flow path. A drying device, characterized in that one of them is inserted and a closed-loop airflow circulation path for connecting them is provided. 15. A drying device that can be used for carrying out the drying method as defined in claim 6, wherein a centrifugal shaking-off means for giving a centrifugal force to the work in the drying chamber to shake off the liquid adhering to the work. A suction means having a large suction force, which is connected to an air flow path that opens as an air suction portion on the inner wall surface side of the drying chamber and is capable of discharging air from the drying chamber until it becomes a vacuum state. Characteristic drying device. 16. The drying method according to claim 8, further comprising a gas-liquid separating unit that removes mist and vapor of a cleaning liquid from an air flow on the downstream side of the drying chamber. apparatus.