JPH0644094Y2 - 荷電粒子線装置に用いられるカセツト - Google Patents

荷電粒子線装置に用いられるカセツト

Info

Publication number
JPH0644094Y2
JPH0644094Y2 JP1257687U JP1257687U JPH0644094Y2 JP H0644094 Y2 JPH0644094 Y2 JP H0644094Y2 JP 1257687 U JP1257687 U JP 1257687U JP 1257687 U JP1257687 U JP 1257687U JP H0644094 Y2 JPH0644094 Y2 JP H0644094Y2
Authority
JP
Japan
Prior art keywords
wafer
lever
base
holding members
bodies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1257687U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63121433U (enExample
Inventor
貞夫 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1257687U priority Critical patent/JPH0644094Y2/ja
Publication of JPS63121433U publication Critical patent/JPS63121433U/ja
Application granted granted Critical
Publication of JPH0644094Y2 publication Critical patent/JPH0644094Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Electron Beam Exposure (AREA)
JP1257687U 1987-01-30 1987-01-30 荷電粒子線装置に用いられるカセツト Expired - Lifetime JPH0644094Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1257687U JPH0644094Y2 (ja) 1987-01-30 1987-01-30 荷電粒子線装置に用いられるカセツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1257687U JPH0644094Y2 (ja) 1987-01-30 1987-01-30 荷電粒子線装置に用いられるカセツト

Publications (2)

Publication Number Publication Date
JPS63121433U JPS63121433U (enExample) 1988-08-05
JPH0644094Y2 true JPH0644094Y2 (ja) 1994-11-14

Family

ID=30800835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1257687U Expired - Lifetime JPH0644094Y2 (ja) 1987-01-30 1987-01-30 荷電粒子線装置に用いられるカセツト

Country Status (1)

Country Link
JP (1) JPH0644094Y2 (enExample)

Also Published As

Publication number Publication date
JPS63121433U (enExample) 1988-08-05

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