JPH0643647Y2 - 極低温冷凍装置 - Google Patents

極低温冷凍装置

Info

Publication number
JPH0643647Y2
JPH0643647Y2 JP1986169083U JP16908386U JPH0643647Y2 JP H0643647 Y2 JPH0643647 Y2 JP H0643647Y2 JP 1986169083 U JP1986169083 U JP 1986169083U JP 16908386 U JP16908386 U JP 16908386U JP H0643647 Y2 JPH0643647 Y2 JP H0643647Y2
Authority
JP
Japan
Prior art keywords
compressor
refrigerant
return line
temperature
cryogenic refrigerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986169083U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6375760U (enrdf_load_stackoverflow
Inventor
郁生 河村
孝三 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1986169083U priority Critical patent/JPH0643647Y2/ja
Publication of JPS6375760U publication Critical patent/JPS6375760U/ja
Application granted granted Critical
Publication of JPH0643647Y2 publication Critical patent/JPH0643647Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986169083U 1986-11-05 1986-11-05 極低温冷凍装置 Expired - Lifetime JPH0643647Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986169083U JPH0643647Y2 (ja) 1986-11-05 1986-11-05 極低温冷凍装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986169083U JPH0643647Y2 (ja) 1986-11-05 1986-11-05 極低温冷凍装置

Publications (2)

Publication Number Publication Date
JPS6375760U JPS6375760U (enrdf_load_stackoverflow) 1988-05-20
JPH0643647Y2 true JPH0643647Y2 (ja) 1994-11-14

Family

ID=31102565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986169083U Expired - Lifetime JPH0643647Y2 (ja) 1986-11-05 1986-11-05 極低温冷凍装置

Country Status (1)

Country Link
JP (1) JPH0643647Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3040646B1 (en) 2010-05-12 2017-11-15 Brooks Automation, Inc. Method for cryogenic cooling

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57108557A (en) * 1980-12-25 1982-07-06 Maekawa Seisakusho Kk Capacity control of compressor for liquifying refrigerating plant

Also Published As

Publication number Publication date
JPS6375760U (enrdf_load_stackoverflow) 1988-05-20

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